|
1
|
Yang W, Sha H, Cui J, Mao L, Yu R. Local-orbital ptychography for ultrahigh-resolution imaging. NATURE NANOTECHNOLOGY 2024; 19:612-617. [PMID: 38286877 DOI: 10.1038/s41565-023-01595-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/15/2023] [Accepted: 12/20/2023] [Indexed: 01/31/2024]
Abstract
Technical advances paired with developments in methodology have enabled electron microscopy to reach atomic resolution. Further improving the information limit in microscopic imaging requires further improvements in methodology. Here we report a ptychographic method that describes the object as the sum of discrete atomic-orbital-like functions (for example, Gaussian functions) and the probe in terms of aberration functions. Using this method, we realize an improved information limit of microscopic imaging, reaching down to 14 pm. High-quality probes and objects contribute to superior signal-to-noise ratios at low electron doses, allowing for relaxation of the sample thickness restriction to 50 nm for dense materials. Additionally, our method has the capability to decompose the total phase into element components, revealing that the information limit is element dependent. With enhanced spatial resolution, signal-to-noise ratio and thickness threshold compared with conventional ptychography methods, our local-orbital ptychography may find applications in atomic-resolution imaging of metals, ceramics, electronic devices or beam-sensitive material.
Collapse
Affiliation(s)
- Wenfeng Yang
- School of Materials Science and Engineering, Tsinghua University, Beijing, China
- MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing, China
- State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing, China
| | - Haozhi Sha
- School of Materials Science and Engineering, Tsinghua University, Beijing, China
- MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing, China
- State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing, China
| | - Jizhe Cui
- School of Materials Science and Engineering, Tsinghua University, Beijing, China
- MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing, China
- State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing, China
| | - Liangze Mao
- School of Materials Science and Engineering, Tsinghua University, Beijing, China
- MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing, China
- State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing, China
| | - Rong Yu
- School of Materials Science and Engineering, Tsinghua University, Beijing, China.
- MOE Key Laboratory of Advanced Materials, Tsinghua University, Beijing, China.
- State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University, Beijing, China.
| |
Collapse
|
|
2
|
Kamal S, Hailstone RK. Need for Wavefront Sensing in Scanning Electron Microscopy. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:491-492. [PMID: 37613224 DOI: 10.1093/micmic/ozad067.233] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Affiliation(s)
- Surya Kamal
- Rochester Institute of Technology, Rochester, NY, United States
| | | |
Collapse
|
|
3
|
Landers D, Clancy I, Dunin-Borkowski R, Weber D, Stewart AA. TEMGYM Advanced – NanoMi Lens Characterisation. Micron 2023; 169:103450. [PMID: 37030084 DOI: 10.1016/j.micron.2023.103450] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/20/2023] [Revised: 03/25/2023] [Accepted: 03/25/2023] [Indexed: 03/29/2023]
Abstract
A complete analysis including finite element method (FEM) calculation, focal length properties, and thirdorder geometric aberrations of the open-source electrostatic lens from the NanoMi project is presented. The analysis is carried out by the software TEMGYM Advanced, a free package developed to carry out ray-tracing and lens characterisation in Python. Previously TEMGYM Advanced has shown how to analyse the aberrations of analytical lens fields; this paper expands upon this work to demonstrate how to apply a suitable fitting method to discrete lens fields obtained via FEM methods so that the aberrations of real lens designs can be calculated. Each software platform used in this paper is freely available in the community and creates a free and viable alternative to commercial lens design packages.
Collapse
|