Abe H, Takeuchi M, Takeuchi G, Ito H, Yokokawa T, Kondo K, Furukado Y, Baba T. Two-dimensional beam-steering device using a doubly periodic Si photonic-crystal waveguide.
OPTICS EXPRESS 2018;
26:9389-9397. [PMID:
29715891 DOI:
10.1364/oe.26.009389]
[Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/16/2018] [Accepted: 03/26/2018] [Indexed: 06/08/2023]
Abstract
We demonstrate a nonmechanical, on-chip optical beam-steering device using a photonic-crystal waveguide with a doubly periodic structure that repeats the increase and decrease of the hole diameter. We fabricated the device using a complementary metal-oxide-semiconductor process. We obtained a beam-deflection angle of 24° in the longitudinal direction, while maintaining a divergence angle of 0.3°. Four such waveguides were integrated, and one was selected by a Mach-Zehnder optical switch. We obtained lateral beam steering by placing a cylindrical lens above these waveguides. By combining the lateral and longitudinal beam steering, we were able to scan the collimated beam in two dimensions, with 80 × 4 resolution points.
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