A review of recent advances in the single- and multi-degree-of-freedom ultrasonic piezoelectric motors

Development of a Plate Linear Ultrasonic Motor Using the Power Flow Method

Linear ultrasonic motors can output large thrust stably in a narrow space. In this paper, a plate linear ultrasonic motor is studied. Firstly, the configuration and operating principle of the Π-type linear ultrasonic motor is illustrated. Then, two slotting schemes are put forward for the stator to enlarge the amplitude of the driving foot and improve the output performance of motor. After that, a novel optimization method based on the power flow method is suggested to describe the energy flow of stator, so as to estimate the slotting schemes. Finally, the prototypes are manufactured and tested. The experimental results show that the output performance of both new motors are excellent. The maximum output thrust of the arc slotted motor is 76 N/94 N, and the corresponding maximum no-load speed is 283 mm/s/213 mm/s, while the maximum output thrust of V-slotted motor reaches 90 N/120 N, and the maximum no-load speed reaches 223 mm/s/368 mm/s.

Low Profile Triangle-Shaped Piezoelectric Rotary Motor

In this paper, we present research on a novel low-profile piezoelectric rotary motor with a triangle-shaped stator. The stator of the motor comprises three interconnected piezoelectric bimorph plates forming an equilateral triangle. Bimorph plates consist of a passive layer fabricated from stainless steel and four piezo ceramic plates glued to the upper and lower surfaces. Furthermore, spherical contacts are positioned on each bimorph plate at an offset from the plate's center. Vibrations from the stator are induced by a single sawtooth-type electric signal while the frequency of the excitation signal is close to the resonant frequency of the second out-of-plane bending mode of the bimorph plate. The offset of the spherical contacts allows for a half-elliptical motion trajectory. By contrast, the forward and backward motion velocities of the contacts differ due to the asymmetrical excitation signal. The inertial principle of the motor and the angular motion of the rotor were obtained. Numerical and experimental investigations showed that the motor operates at a frequency of 21.18 kHz and achieves a maximum angular speed of 118 RPM at a voltage of 200 Vp-p. Additionally, an output torque of 18.3 mN·mm was obtained under the same voltage. The ratio between motor torque and weight is 36 mN·mm/g, while the ratio of angular speed and weight is 28.09 RPM/g.

Simulation and experimental study on rope driven artificial hand and driven motor

BACKGROUND

Prosthetic hands have the potential to replace human hands. Using prosthetic hands can help patients with hand loss to complete the necessary daily living actions.

OBJECTIVE

This paper studies the design of a bionic, compact, low-cost, and lightweight 3D printing humanoid hand. The five fingers are underactuated, with a total of 9 degrees of freedom.

METHODS

In the design of an underactuated hand, it is a basic element composed of an actuator, spring, rope, and guide system. A single actuator is providing power for five fingers. And the dynamic simulation is carried out to calculate the motion trajectory effect.

RESULTS

In this paper, the driving structure of the ultrasonic motor was designed, and the structural size of the ultrasonic motor vibrator was determined by modal and transient simulation analysis, which replace the traditional brake, realize the lightweight design of prosthetic hand, improve the motion accuracy and optimize the driving performance of prosthetic hand.

CONCLUSIONS

By replacing traditional actuators with new types of actuators, lightweight design of prosthetic hands can be achieved, improving motion accuracy and optimizing the driving performance of prosthetic hands.

Simulation Analysis of a Sandwich Cantilever Ultrasonic Motor for a Dexterous Prosthetic Hand

Currently, the driving motor used in a dexterous prosthetic hand is limited by the driving principle, and it has the characteristics of a complex structure, slow response, low positioning accuracy, and excessive volume. There are special requirements in terms of quality and quality, and traditional motor drives have greatly affected the progress of prosthetic robots. A motor (ultrasonic motor) has been developed over more than 30 years. It has the advantages of a small size, small mass, simple structure, accurate positioning, high power density, and fast response time, which is enough to improve the driving mechanism performance of the prosthetic hand with a connecting rod. In this paper, the structural characteristics of the prosthetic hand will be analyzed, and the modal analysis, harmonic response analysis, and transient analysis simulation of the longitudinal vibration linear motor stator used in the prosthetic hand with a connecting rod will be carried out in order to provide preliminary preparation for the feasible design and manufacture of the size of the ultrasonic driver structure used for the prosthetic hand with a connecting rod.

Optical flow-based closed-loop control of a multi-degree-of-freedom clamping-type ultrasonic motor

Rotor speed and position detection are integral parts of the closed-loop control system for multi-degree-of-freedom (multi-DOF) ultrasonic motors. The non-contact speed detection method is important for the high-precision control of the spherical rotor. This paper proposes a closed-loop control method based on an optical flow sensor for the velocity-position control of a multi-DOF clamping-type ultrasonic motor. The optical flow information is analyzed using the conical L-K optical flow algorithm to obtain the rotor speed and position. An incremental PID control method is used to perform dual closed-loop positioning control of the motor regarding speed and position. An experimental platform for the optical flow sensor is designed, and the method's feasibility is verified experimentally.

Editorial for the Special Issue on Piezoelectric Transducers: Materials, Devices and Applications, Volume III

This is the third volume of a Special Issue focused on piezoelectric transducers, covering a wide range of topics, including the design, fabrication, characterization, packaging and system integration or final applications of mili/micro/nano-electro-mechanical system-based transducers featuring piezoelectric materials and devices [...].

A novel spherical ultrasonic motor with wire stators and measuring torque and preload via a new method

The present study introduces a multi-degree-of-freedom (MDOF) ultrasonic motor, which is capable of driving a spherical rotor using spiral wire stators and a piezoelectric stack actuator. Wire stators and piezoelectric stack actuators enable the proposed motor to be smaller and simpler, lower in power consumption, and have different modes at different frequencies. In this motor, two wire stators are used to drive the spherical rotor and rotate it in different directions. The eigenfrequency and frequency domain analyses were carried out using the finite element method (FEM) to evaluate the MDOF capability of the motor in different vibration modes. It has been demonstrated that the piezoelectric stack actuator can provide MDOF motions through its vibration modes. The resonant frequency obtained by the frequency domain approach agreed with the impedance analyzer test. Rotational speed, torque, and preload force were experimentally investigated. Using shear stress caused by viscous fluid in contact with the spherical rotor, a new torque calculation method was developed. Based on the buoyancy force exerted on the immersed rotor, the preload force was measured. The experimental results indicated that the maximum rotational speed of the spherical rotor was 306 rpm, and the maximum torque was 4.7 μN m.

Design and dynamic analysis of a novel compound bending hollow piezoelectric beam miniature rotary actuator

In this paper, a miniature hollow piezoelectric beam rotary actuator is proposed and designed based on the compound bending vibration modes. The structure body is designed as an elastic hollow square beam with symmetrical piezoelectric patches attached at both ends, which directly eliminates the step of the frequency tuning. A conical rotor is driven by the hollow piezoelectric beam through the elliptical motions of the points on its inner surface. Based on the Timoshenko beam theory and Lagrange equation, the numerical continuum model is established to analyze the working mechanism. A prototype of the miniature rotary actuator with a size of 50 × 6 × 6 mm (2 mm through-hole) is manufactured and its performance under various excitation parameters is characterized in rotor speed experiments. The experimental results show that the maximum speed of the conical rotor is 913 rpm at the excitation voltage of 400 V. With a maximum load of 70.31 mN, the spherical rotor can achieve a speed of 450 rpm. The numerical results are in great agreement with the experimental results, so the output characteristics of the rotary actuator can be estimated. The simulation and test results demonstrate that the proposed rotary actuator has outstanding output performance and controllability. In addition, the simple structure design is easy to realize the frequency tuning and miniaturization.

Design and performance evaluation of a miniature I-shaped linear ultrasonic motor with two vibrators

In this study, a novel miniature I-shaped linear ultrasonic motor is proposed. The motor is constructed by two rectangular piezoelectric vibrators which are mounted in parallel with the slider to make the structure look like the letter "I". The symmetric and antisymmetric modes of the motor based on the first-order flexural vibrations of the two vibrators are chosen as the working modes. The finite element method is adopted to optimize the structure and study the vibration behavior of the motor. A prototype of the proposed linear ultrasonic motor is fabricated and its mechanical characteristics are tested. The dimension of the stator is 39.8 × 17.6 × 6 mm³ and the weight of the prototype is only 18.2 g. The typical outputs of the prototype are maximum speed of 364 mm/s, maximum thrust of 500 g and thrust-weight ratio of 24.47. The experimental results confirm that the developed linear ultrasonic motor has the advantages of structural design and miniaturization.

Experimental research on the evolution characteristics of a bending hybrid ultrasonic motor during long-time operation

The characteristics evolution rules of an ultrasonic motor (USM) based on the hybrid of bending modes during long-time operation are tested and analyzed in this work. The alumina and nitride silicon ceramics are used as the driving feet and rotor respectively. The variations of mechanical performances including the speed, torque, and efficiency with time are tested and evaluated in the whole life period of the USM. Meanwhile, the vibration characteristics of the stator such as the resonance frequencies, amplitudes, and quality factors are also tested and analyzed every-four hours. Moreover, the real-time test for performances is conducted to assess the effect of temperature on mechanical performances. Furthermore, the effect of wear and friction behavior of the friction pair on the mechanical performances is analyzed. The torque and efficiency have apparent decreasing trends and fluctuated widely before about 40 h, and then gradually stabilize for 32 h, and finally fall rapidly. By contrast, the resonance frequencies and amplitudes of the stator only decrease by less than 90 Hz and 2.29 μm at first, and then keep fluctuant. During the continuous operation of the USM, the amplitudes will decrease as the increase of surface temperature, and followed by long-time wear and friction of the contact surface, the decrease of contact force is incapable to support the operation of the USM at last. This work is helpful to understand the evolution characteristics of the USM and provides the guidelines for the design, optimization, and practical application of the USM.

A novel thin single-phase drive linear ultrasonic motor

A novel thin single-phase drive linear ultrasonic motor is proposed and tested in this paper. The proposed motor exhibits bidirectional driving via switching between the right-driving vibration mode (RD mode) and the left-driving vibration mode (LD mode). The structure and working principle of the motor are analyzed. Next, the finite element model of the motor is established and the dynamic performance is analyzed. A prototype motor is then fabricated, and its vibration characteristics are established via impedance testing. Finally, an experimental platform is built and the mechanical characteristics of the motor are experimentally investigated. The maximum no-load speed of the motor is ∼159.7 mm/s. With 8 N preload and 200 V voltage, the maximum thrust force of the motor in the RD and LD modes are ∼2.5 and 2.1 N, respectively. The motor possesses the advantages of being light in weight and thin structure and exhibiting an excellent performance. This work presents a new concept for the construction of ultrasonic actuators with bidirectional driving capacity.

Hollow cylindrical linear stator vibrator using a traveling wave of longitudinal axisymmetric vibration mode

Ultrasonic motors (USMs) are expected to be used in special environments: high magnetic field environments and space environments, which require lightweight and multiple degrees of freedom. However, when used as linear ultrasonic motors (LUSMs), a linear guide and a preload mechanism are required, complicating the structure. In the present paper, a hollow cylindrical linear stator without an extra linear guide has been considered. The stator consists of a metal pipe and two piezoelectric (PZT) tubes installed at both ends of the metal pipe. Their connected parts are tapered for the first longitudinal axisymmetric vibration mode of the cylinder, namely L(0,1) mode excitation, and the metal pipe is subjected to radial strain. The vibration of the stator is assumed to be one-dimensional and is modeled by an electromechanical equivalent circuit. The principle that the traveling wave is formed on the metal pipe by dual-PZT-tube phase difference excitation was clarified. Finite element analysis and some measurements were conducted to confirm that the theory was consistent. The analyses and measurements were in good agreement. Therefore, the operating principle was confirmed. The results of the transport experiment showed that the average speed of the 8.5-g slider was 7.9 mm/s.

Piezoelectric atomization of liquids with dynamic viscosities up to 175 cP at room temperature

Piezoelectric atomization has been applied in the field of respiratory medicine delivery and chemistry. However, the wider application of this technique is limited by the viscosity of the liquid. High-viscosity liquid atomization has great potential for applications in aerospace, medicine, solid-state batteries and engines, but the actual development of atomization is behind expectations. In this study, instead of the traditional model of single-dimensional vibration as a power supply, we propose a novel atomization mechanism that uses two coupled vibrations to induce micro-amplitude elliptical motion of the particles on the surface of the liquid carrier, which produces a similar effect as localized traveling waves to push the liquid forward and induce cavitation to achieve atomization. To achieve this, a flow tube internal cavitation atomizer (FTICA) consisting of a vibration source, a connecting block and a liquid carrier is designed. The prototype can atomize liquids with dynamic viscosities up to 175 cP at room temperature with a driving frequency of 507 kHz and a voltage of 85 V. The maximum atomization rate in the experiment is 56.35 mg/min, and the average atomized particle diameter is 10 µm. Vibration models for the three parts of the proposed FTICA are established, and the vibration characteristics and atomization mechanism of the prototype were verified using the vibration displacement measurement experiment and the spectroscopic experiment. This study offers new possibilities for transpulmonary inhalation therapy, engine fuel supply, solid-state battery processing and other areas where high-viscosity microparticle atomization is needed.

Design and Experiment of a Clamping-Drive Alternating Operation Piezoelectric Actuator

In recent years, piezoelectric actuators, represented by inertial and inchworm actuators, have been widely applied because of their high accuracy and excellent responsiveness. Despite the development of various piezoelectric actuators, there remain some flaws in this technology. The sticking point is that the piezoelectric actuators based on the friction driving principle are prone to unwanted backward motion when outputting stepping motion. It is thus urgent to explore solutions from the perspectives of principle and structure. In this paper, a clamping-drive alternating operation piezoelectric actuator is proposed, the two feet of which are driven by two piezoelectric stacks, respectively. Due to double-foot alternate drive guide movement, backward movement is prevented in theory. By adopting the double-layer stator structure, integrated processing and assembly are facilitated. Meanwhile, a double flexible hinge mechanism is installed in the stator to prevent the drive foot from being overturned due to ineffectiveness and premature wear. In addition, the stator is equipped with the corresponding preload mechanism and clamping device. After the cycle action mechanism of one cycle and four steps is expounded, a model is established in this study to further demonstrate the principle. With the prototype produced, a series of experiments are performed. In addition, the amplitude of actuation of the stator is tested through amplitude experiment. The performance of the stator is evaluated by conducting experiments in the alternating step and single step actuation modes. Finally, the test results are analyzed to conclude that the actuator operating in either of these two modes can meet the practical needs of macro and micro actuation.

Structural Design and Experimental Studies of Resonant Fiber Optic Scanner Driven by Co-Fired Multilayer Piezoelectric Ceramics

Piezo-driven resonant fiber optic scanners are gaining more and more attention due to their simple structure, weak electromagnetic radiation, and non-friction loss. Conventional piezo-driven resonant fiber optic scanners typically use quadrature piezoelectric tubes (piezo tubes) operating in 31-mode with high drive voltage and low excitation efficiency. In order to solve the abovementioned problem, a resonant fiber scanner driven by co-fired multilayer piezoelectric ceramics (CMPCs) is proposed in which four CMPCs drive a cantilevered fiber optic in the first-order bending mode to achieve efficient and fast space-filling scanning. In this paper, the cantilever beam vibration model with base displacement excitation was derived to provide a theoretical basis for the design of the fiber optic scanner. The finite element method was used to guide the dynamic design of the scanner. Finally, the dynamics characteristics and scanning trajectory of the prepared scanner prototype were tested and compared with the theoretical and simulation calculation results. Experimental results showed that the scanner can achieve three types of space-filling scanning: spiral, Lissajous, and propeller. Compared with the structure using piezo tubes, the designed scanner achieved the same scanning range with smaller axial dimensions, lower drive voltage, and higher efficiency. The scanner can achieve a free end displacement of 10 mm in both horizontal and vertical directions under a sinusoidal excitation signal of 50 V_p-p and 200 Hz. The theoretical, simulation and experimental results validate the feasibility of the proposed scanner structure and provide new ideas for the design of resonant fiber optic scanners.

Development of a three-degree-of-freedom piezoelectric actuator

Multi-degree of freedom piezoelectric actuators are strongly needed for industrial applications, especially when manipulating a large and heavy mirror or lens in an optical system. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. The structure and working principle of the proposed actuator are illustrated and its kinematic characteristic is analyzed. The stiffness of the spatial compliant mechanisms is modeled, and the dynamic characteristics are analyzed, Finite Element method is utilized to validate the correctness of the stiffness modeling and the free vibration analysis of the proposed actuator. A prototype actuator is fabricated and its output performances have been tested. Working space of X ranging from -7.1 to 5.6 μm, Y ranging from -6.2 to 8.2 μm and Z ranging from -2.3 to 2.1 μm, displacement resolutions of 15/16/21 nm along X-/Y-/Z-axis and average velocities of 52.3, 82.8 and 29.5 µm/s along X-axis, Y-axis, and Z-axis with carrying load up to 2 kg and driving frequency of 500 Hz have been achieved by the prototype actuator. The method of waveform generating for the proposed actuator has been developed with the inverse hysteresis compensation, and test results indicate that the positioning accuracy of the prototype actuator in the open loop has been improved from 0.94 to 0.23 μm for a circular trajectory tracking, from 0.48 to 0.29 μmm for an elliptical trajectory tracking, and from 0.61 to 0.32 μm for a rectangular trajectory tracking with the compensated waveform of driving voltage.

Tiny Piezoelectric Multi-Layered Actuators with Application in a Compact Camera Module-Design, Fabrication, Assembling and Testing Issues

Piezoelectric actuators with multi-layer structures have largely gained attention from academic and industry experts. This is due to its distinctive advantages of fast response time, huge generative force and the inherent good planar electromechanical coupling factor, as well as other mechanical qualities. Typically, lead zirconate titanate (PZT) is one of the most represented piezoelectric ceramic materials that have been used for multi-layer piezoelectric actuators. Piezoelectric multi-layered actuators (PMLAs) were developed vigorously in the past decades due to the emergence of portable devices, such as smartphones with a highly compact camera module (CCM) and an image stabilizer (IS). This study reviewed the progress made in the field of PMLA applications, with a particular focus on the miniaturized dimensions and associated generated output force, speed and maximum output power requirement for various loads. Several commercial attempts, such as Helimorph, Lobster and the two-degrees-of-freedom ultrasonic motor (USM), were investigated. The proposed simple bimorph and multi-layer bimorph USMs experimentally showed thrust as high as 3.08 N and 2.57 N with good free speed and structural thicknesses of 0.7 and 0.6 mm, respectively. When compared with the other 14 reported linear USMs, they ranked as the top 1 and 2 in terms of the thrust-to-volume ratio. The proposed design shows great potential for cellphone camera module application, especially in moving sensor image stabilization. This study also provided outlooks for future developments for piezoelectric materials, configurations, fabrication and applications.

Ring-Shaped Piezoelectric 5-DOF Robot for Angular-Planar Motion

This paper provides numerical and experimental investigations of a ring-shaped piezoelectric 5-DOF robot that performs planar and angular motions of spherical payload. The robot consists of a piezoelectric ring glued on a special stainless-steel ring with three spikes oriented in the radial direction of the ring. The spherical payload is placed on top of the piezoelectric ring and is moved or rotated when a particular excitation regime is used. An alumina oxide ball is glued at the end of each spike of the steel ring and is used as contacting element. The spikes are used to transfer vibrations of the piezoelectric ring to contacting elements and to induce the planar motion of the payload. Additionally, three alumina oxide balls are glued on the top surface of the piezoelectric ring and are used to generate rotational motion of the spherical payload by impacting it. Finally, the top electrode of the piezoceramic ring is divided into six equal sections and is used to control the direction of angular and planar motion of the payload. Numerical modeling of the robot showed that vibration modes suitable for angular and planar motions are obtained at a frequency of 28.25 kHz and 41.86 kHz, respectively. Experimental investigation showed that the maximum angular velocity of the payload is 30.12 RPM while the maximum linear motion of the robot is 29.34 mm/s when an excitation voltage of 200 V_p-p was applied and a payload of 25.1 g was used.

Position control method for ultrasonic motors based on beat traveling wave theory

Focusing on the application demand of ultrasonic motors in the field of space laser communication, a position control method is proposed in this study. Unlike other existing localization methods, this method is based on beat traveling wave theory, which possesses a particular performance in ultrasonic motors. In order to make the speed predictably drop to zero, the frequency difference of the two-phase drive signals is changed during normal operation. This motor deceleration stage is used to establish the positioning scheme. According to this scheme, the finite element analysis with commercial software ADINA is utilized to study the positioning characteristics and support the feasibility, adding details to the scheme. An experimental setup that depends on a DDS signal generator is built to validate this method. The data proves that it can achieve effective average results of about 15 arc-sec under open-loop control at low speed and fluctuate within 0.5 mrad, which can meet the requirement for engineering. Compared to conventional position control methods, it has attractive features of short positioning time, noiseless operation and simple control. This method provides selectivity for engineering applications of ultrasonic motors.

Dahl Friction Model for Driving Characteristics of V-Shape Linear Ultrasonic Motors

The contact process of stator and slider described by the Coulomb friction model is basically in a pure sliding friction state, and a mechanical model based on the Dahl friction theory was proposed to describe the contact process between stator and slider of V-shape linear ultrasonic motor. With consideration for the tangential compliance of stator and slider, the dynamic contact and friction processes of stator and slider were addressed in stages. The simulation results show that the ratio of the friction positive work decreases with the increase of the preload, and the vibration amplitude of the stator increases the proportion of positive work of the friction force. Improving the contact stiffness of the stator and slider is conducive to improving the output performance of the ultrasonic motor. The asymmetry of the left and right performance of the V-shaped vibrator will cause a difference in the left and right running speeds of the ultrasonic motor. The improved Dahl friction-driving model makes up for the discontinuity of tangential contact force calculated by the Coulomb friction model. This study demonstrates that the friction-driving model based on the Dahl theory is reliable and reasonable for linear ultrasonic motors according to the experimental results.

Dynamic modeling and analysis of bundled linear ultrasonic motors with non-ideal driving

To achieve larger thrust and higher power in applications, multiple linear ultrasonic motors are usually combined. However, in previous researches, the motion mechanism of bundled linear ultrasonic motors is not explained clearly. Most researchers focus upon the description of experiments and the interpretation of experimental results, therefore until now, the dynamic model of the bundled linear ultrasonic motors has not been well established. In order to obtain deeper physical insight into the motion principle and provide a theoretical basis for better control of the bundled linear ultrasonic motors, a dynamic model for bundled linear ultrasonic motors is established in this paper. In this model, the contact interface is simplified to be a single point contact model and the impact of the clamping part on the performance of motor is considered. Using this model, the output characteristics of the bundled linear ultrasonic motors are investigated by discussing the influence of some important factors including preload, exciting voltage and exciting frequency. Test results show the proposed dynamic model is able to predict the output performance of the bundled motors. Moreover, the proposed model is not only suitable for the researched motor, but also can be extended to other bundled linear ultrasonic motors.

A Low-Voltage Cylindrical Traveling Wave Ultrasonic Motor Incorporating Multilayered Piezoelectric Ceramics

In-plane bending traveling wave ultrasonic motors (USM), which are compact in structure and flexible in design, have been widely applied in biological engineering, optical engineering, and aerospace engineering. However, the high driving voltage and complicated driving circuit of this kind of USM restrict their further miniaturization and electromechanical integration in these applications and bring some potential safety hazards. To solve this problem, a low-voltage-driving traveling wave USM incorporating cofired multilayer piezoelectric ceramics was proposed in this work. Four cofired piezoelectric ceramics were strategically designed to excite two orthogonal third-order in-plane bending modes with the same frequency of the USM. The principles of traveling wave synthesis and low-voltage-driving of the USM were deduced, and the stator dynamic design and transient dynamic simulation were carried out by finite-element method. The microproperties of cofired piezoelectric multilayer ceramics, the vibration characteristics of the stator, and the mechanical output performance of the USM were tested by experiments. The results indicated that the motor can work as low as 5 [Formula: see text]. A long stroke with a maximum forward and reverse rotational speeds of 187.7 and 176.6 r/min were obtained, respectively, and a maximum stalling torque of 4.8 mN · m at 47.3 kHz under 15 [Formula: see text] was achieved. The results showed that the proposed USM is small, low in driving voltage, and high in torque output, which has promising applications in aerospace, biomedicine, and other fields that require a lightweight and integration of driving devices.

Structural, Morphologic, and Ferroelectric Properties of PZT Films Deposited through Layer-by-Layer Reactive DC Magnetron Sputtering

Lead zirconate titanate (PZT) is a widely used material with applications ranging from piezoelectric sensors to developing non-volatile memory devices. Pb(ZrxTi1−x)O3 films were deposited by DC reactive magnetron sputtering at a temperature range of (500–600) °C. X-ray diffraction (XRD) indicated the perovskite phase formation in samples synthesized at 550 °C, which agrees with Raman data analysis. Scanning electron microscopy (SEM) measurements supplemented XRD data and showed the formation of dense PZT microstructures. Further X-ray photoelectron spectroscopy (XPS) analysis confirmed that the Zr/Ti ratio corresponds to the Pb(Zr0.58Ti0.42)O3 content. Dielectric measurement of the same sample indicated dielectric permittivity to be around 150 at room temperature, possibly due to the defects in the structure. P-E measurements show ferroelectric behavior at a temperature range of (50–180) °C. It was found that the remnant polarization increased with temperature, and at the same time, coercive field values decreased. Such behavior can be attributed to energetically deep defects.

Design and Dynamic Simulation of a Novel Traveling Wave Linear Ultrasonic Motor

To overcome the problem of frequency consistency and simplify the design process of linear ultrasonic motor, a novel traveling wave linear ultrasonic motor with a ring-type stator is proposed in this paper. The combination of two orthogonal bending vibration modes with the same order is selected as the operating mode of the motor. A traveling wave along the side of the stator is utilized to drive the slider to move linearly. The stator adopts a ring symmetrical structure, which can effectively ensure that the resonance frequencies of the two vibration modes are consistent. Thus, we do not need to tune the frequencies of the two vibrations by constantly adjusting the shape of the stator or designing complex clamping parts to fix the stator without making any influence on the vibrations. Meanwhile, a three-dimensional finite element model of the motor is built. Using the model, we obtain the elliptical motion trajectories of the stator driving surface, the output performance of the motor, the sticking-slipping-separation contact characteristic between the stator and the slider and fabricate and measure a prototype of the proposed motor.

Improvement mechanism of energy conversion efficiency in ultrasonic motor with flexible rotor

Flexible rotors are widely used in traveling wave rotary ultrasonic motors (TRUMs) because of their higher energy conversion efficiency; however, there have been few reports on how flexible rotors improve the energy conversion efficiency of ultrasonic motors. In this study, we investigate the improvement mechanism of energy conversion efficiency in TRUMs with flexible rotors. A 3D finite element (FE) model with full coupling among a piezoelectric coupled stator, rotor, friction layer, and the rigid-elastic contact interface of the stator and friction layer is established. To analyze the mechanism by which the efficiency of the TRUM is improved, the contact interface and rotor vibration information are extracted. Taking TRUM-60 as an example, the transient solution method and modal analysis method are used to solve the model. It is found that when the stator mode is B₀₉, the flexible rotor mode is B₁₉. The energy conversion efficiency of the TRUM is obtained from the ratio of output power to the electrical input power of the model solution. The results are validated using 3D vibration measurements and energy conversion efficiency experiments. The simulation result shows that the motor with flexible rotor improves the energy conversion efficiency compared with the motor with rigid rotor, which can be attributed to two reasons: first, the axial amplitude ratio of the flexible rotor to the stator is reduced; second, the flexible rotor reduces the radial friction. This study reveals the influence of flexible rotor on the output efficiency and can thus provide guidance for rotor design.

Triangular-Shaped 5-DOF Piezoelectric Robot for Optical Lens Positioning

The paper represents numerical and experimental investigations on a 5-DOF piezoelectric robot that can provide rotary and planar motions of the payload. The design of the robot is based on a single piezoelectric ring and a triangular-shaped passive layer made from stainless steel. Six semispherical contacts of alumina oxide were used as contact points for rotary and planar motions. Finally, the top electrode of the piezo ceramic ring was divided into six equal segments to control the 3-DOF angular and 2-DOF planar motions of the payload. Two harmonic signals of different frequencies are used to drive the piezoelectric robot. The robot operation is based on the excitation of the third radial vibration mode of the ring and the first bending mode of the trapezoidal-shaped cantilever. Motion control is performed by switching electric signals between the particular segments of the piezoelectric ring. A numerical investigation was performed to validate the operation principle of the robot and to analyze electrical and mechanical characteristics. Numerical investigations showed that the first bending mode of trapezoidal cantilevers and the third radial mode of the piezo ceramic ring were obtained at a frequency of 13.79 kHz and 95.75 kHz, respectively. Moreover, it was revealed that the coupling ratio between vibration amplitudes of passive and active segments is more than 4 times. The prototype of the piezoelectric robot was made and an experimental study was performed to validate the operating principle of the robot, as well as to investigate the dynamic characteristics. The investigation showed that the highest velocity of the planar motion is 22.3 mm/s while the maximum angular motion speed is 29.3 RPM when an excitation voltage of 200 Vp-p and payload of 25.1 g was applied.

A multi-degree-of-freedom clamping type traveling-wave ultrasonic motor

This paper proposes a multi-degree-of-freedom (multi-DOF) ultrasonic motor with four stators clamping a spherical rotor. The stator surface teeth are inclined at a certain angle, using the inclined surface to contact the rotor and transfer energy. The motor frame is exquisitely designed in which substrates hold four identical stators to drive the rotor to achieve a multi-DOF rotation. COMSOL Multiphysics performs the stator's modal analysis and harmonic response analysis to illustrate the vibration mode and frequency response. A prototype is fabricated to verify the operating principle and conduct the performance tests. The experimental results indicate that the motor can reach a no-load speed of 100r/min, and the stalling torque is 150mNm under a preload of 113 N. The results also denote the motor has a high load-carrying capacity with a maximum load torque of 143mNm and accurate operation with a maximum error of 0.15 mm.