Enhanced quantification for 3D energy dispersive spectrometry: going beyond the limitation of large volume of X-ray emission

Inverse modeling for quantitative X-ray microanalysis applied to 2D heterogeneous materials

Current quantitative X-ray microanalysis methods are only available for homogeneous materials. This paper presents a newly developed inverse modeling algorithm to determine both the structure and composition of two-dimensional (2D) heterogeneous materials from a series of X-ray intensity measurements under different beam energies and beam positions. It utilizes an iterative process of forward modeling to determine the optimal specimen to minimize the relative differences between the simulated and experimental characteristic X-ray intensities. The Monte Carlo method is used for the forward modeling to predict the X-ray radiation for a given specimen and experimental setup. Several examples of applications are presented for different types of samples with one-dimensional (1D) and 2D structures, in which the simulated X-ray intensities from phantom samples are used as input. Most of the results obtained from our algorithm agree well with the phantom samples. Some discrepancies are found for the voxels located at deeper depths of the 2D samples. And the discrepancies may be attributed to errors from the Monte Carlo simulations and from the variation of the X-ray range with beam energy. As a proof-of-concept work, this paper confirms the feasibility of our inverse modeling algorithm applied to 2D heterogeneous materials.

Electron Probe Microanalysis: A Review of the Past, Present, and Future

The 50th anniversary of the application of electron probe microanalysis (EPMA) to the Earth Sciences provides an opportunity for an assessment of the state-of-the-art of the technique. Stemming from the introduction of the first automated instruments, the latest developments of EPMA and some typical applications are reviewed with an eye to the future. The most noticeable recent technical achievements such as the field-emission electron gun, the latest generation of energy and wavelength dispersive spectrometers, and the development of analytical methods based on new sets of first principle data obtained by the use of sophisticated computer codes, allow for the extension of the method to the analysis of trace elements, ultra-light elements (down to Li), small particles, and thin films, with a high degree of accuracy and precision and within a considerably reduced volume of interaction. A number of working examples and a thorough list of references provide the reader with a working knowledge of the capabilities and limitations of EPMA today.

Enhanced quantification for 3D SEM-EDS: using the full set of available X-ray lines

An enhanced method to quantify energy dispersive spectra recorded in 3D with a scanning electron microscope (3D SEM–EDS) has been previously demonstrated. This paper presents an extension of this method using all the available X-ray lines generated by the beam. The extended method benefits from using high energy lines, that are more accurately quantified, and from using soft X-rays that are highly absorbed and thus more surface sensitive. The data used to assess the method are acquired with a dual beam FIB/SEM investigating a multi-element Ni-based superalloy. A high accelerating voltage, needed to excite the highest energy X-ray line, results in two available X-ray lines for several elements. The method shows an improved compositional quantification as well as an improved spatial resolution.

•

3D SEM–EDS mapping of structures smaller than the X-ray generation volume is considered.

•

The influence of neighbouring voxels is corrected by a recursive quantification method.

•

The method is improved using all available X-ray lines.

•

The method is applied to simulated spectra and experimental dual beam FIB/SEM data.

•

The method is shown to improve both compositional accuracy and spatial resolution.