GaPO4 Sensors for Gravimetric Monitoring during Atomic Layer Deposition at High Temperatures

Quartz Crystal Microbalance Electronic Interfacing Systems: A Review

Quartz Crystal Microbalance (QCM) sensors are actively being implemented in various fields due to their compatibility with different operating conditions in gaseous/liquid mediums for a wide range of measurements. This trend has been matched by the parallel advancement in tailored electronic interfacing systems for QCM sensors. That is, selecting the appropriate electronic circuit is vital for accurate sensor measurements. Many techniques were developed over time to cover the expanding measurement requirements (e.g., accommodating highly-damping environments). This paper presents a comprehensive review of the various existing QCM electronic interfacing systems. Namely, impedance-based analysis, oscillators (conventional and lock-in based techniques), exponential decay methods and the emerging phase-mass based characterization. The aforementioned methods are discussed in detail and qualitatively compared in terms of their performance for various applications. In addition, some theoretical improvements and recommendations are introduced for adequate systems implementation. Finally, specific design considerations of high-temperature microbalance systems (e.g., GaPO₄ crystals (GCM) and Langasite crystals (LCM)) are introduced, while assessing their overall system performance, stability and quality compared to conventional low-temperature applications.

Vapor-phase atomic-controllable growth of amorphous Li2S for high-performance lithium-sulfur batteries

Lithium-sulfur (Li-S) batteries hold great promise to meet the formidable energy storage requirements of future electrical vehicles but are prohibited from practical implementation by their severe capacity fading and the risks imposed by Li metal anodes. Nanoscale Li(2)S offers the possibility to overcome these challenges, but no synthetic technique exists for fine-tailoring Li(2)S at the nanoscale. Herein we report a vapor-phase atomic layer deposition (ALD) method for the atomic-scale-controllable synthesis of Li(2)S. Besides a comprehensive investigation of the ALD Li(2)S growth mechanism, we further describe the high performance of the resulting amorphous Li(2)S nanofilms as cathodes in Li-S batteries, achieving a stable capacity of ∼ 800 mA · h/g, nearly 100% Coulombic efficiency, and excellent rate capability. Nanoscale Li(2)S holds great potential for both bulk-type and thin-film high-energy Li-S batteries.

An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies

An atomic layer deposition reactor has been constructed with quantitative, precision dose control for studying precursor adsorption characteristics and to relate dose quantity and exposure dynamics to fluid flow in both the viscous and molecular flow regimes. A fixed volume of gas, held at a controlled temperature and measured pressure, is dosed into the reaction chamber by computer-controlled pneumatic valves. Dual in situ quartz crystal microbalances provide parallel mass measurement onto two differently coated substrates, which allows adsorption coverage and relative sticking coefficients to be determined. Gas composition in the reaction chamber was analyzed in situ by a quadrupole mass spectrometer. Absolute reactant exposure is unambiguously calculated from the impingement flux, and is related to dose, surface area, and growth rates. A range of control over the dose amount is demonstrated and consequences for film growth control are demonstrated and proposed.

Design and implementation of an integral wall-mounted quartz crystal microbalance for atomic layer deposition

Quartz crystal microbalance (QCM) measurements have played a vital role in understanding and expediting new atomic layer deposition (ALD) processes; however, significant barriers remain to their routine use and accurate execution. In order to turn this exclusively in situ technique into a routine characterization method, an integral QCM fixture was developed. This new design is easily implemented on a variety of chemical vapor deposition (CVD) tools, allows rapid sample exchange, prevents backside deposition, and minimizes both the footprint and flow disturbance. Unlike previous QCM designs, the fast thermal equilibration enables tasks such as temperature-dependent studies and ex situ sample exchange, further highlighting the utility of this QCM design for day-to-day use. Finally, the in situ mapping of thin film growth rates across the ALD reactor was demonstrated in a popular commercial tool operating in both continuous and quasi-static ALD modes.