Fedala Y, Munteanu S, Kanoufi F, Tessier G, Roger JP, Wu C, Amiot F. Calibration procedures for quantitative multiple wavelengths reflectance microscopy.
THE REVIEW OF SCIENTIFIC INSTRUMENTS 2016;
87:013702. [PMID:
26827323 DOI:
10.1063/1.4939253]
[Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
In order to characterize surface chemo-mechanical phenomena driving micro-electro-mechanical systems (MEMSs) behavior, it has been previously proposed to use reflected intensity fields obtained from a standard microscope for different illumination wavelengths. Wavelength-dependent and -independent reflectivity fields are obtained from these images, provided the relative reflectance sensitivities ratio can be identified. This contribution focuses on the necessary calibration procedures and mathematical methods allowing for a quantitative conversion from a mechanically induced reflectivity field to a surface rotation field, therefore paving the way for a quantitative mechanical analysis of MEMS under chemical loading.
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