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Philip A, Mai L, Ghiyasi R, Devi A, Karppinen M. Low-temperature ALD/MLD growth of alucone and zincone thin films from non-pyrophoric precursors. Dalton Trans 2022; 51:14508-14516. [DOI: 10.1039/d2dt02279f] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
The combined atomic/molecular layer deposition (ALD/MLD) technique is emerging as a state-of-the-art synthesis route for new metal-organic thin-film materials with a multitude of properties by combining those of the inorganic...
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