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Pinheiro T, Morais M, Silvestre S, Carlos E, Coelho J, Almeida HV, Barquinha P, Fortunato E, Martins R. Direct Laser Writing: From Materials Synthesis and Conversion to Electronic Device Processing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2402014. [PMID: 38551106 DOI: 10.1002/adma.202402014] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/06/2024] [Revised: 03/18/2024] [Indexed: 04/25/2024]
Abstract
Direct Laser Writing (DLW) has been increasingly selected as a microfabrication route for efficient, cost-effective, high-resolution material synthesis and conversion. Concurrently, lasers participate in the patterning and assembly of functional geometries in several fields of application, of which electronics stand out. In this review, recent advances and strategies based on DLW for electronics microfabrication are surveyed and outlined, based on laser material growth strategies. First, the main DLW parameters influencing material synthesis and transformation mechanisms are summarized, aimed at selective, tailored writing of conductive and semiconducting materials. Additive and transformative DLW processing mechanisms are discussed, to open space to explore several categories of materials directly synthesized or transformed for electronics microfabrication. These include metallic conductors, metal oxides, transition metal chalcogenides and carbides, laser-induced graphene, and their mixtures. By accessing a wide range of material types, DLW-based electronic applications are explored, including processing components, energy harvesting and storage, sensing, and bioelectronics. The expanded capability of lasers to participate in multiple fabrication steps at different implementation levels, from material engineering to device processing, indicates their future applicability to next-generation electronics, where more accessible, green microfabrication approaches integrate lasers as comprehensive tools.
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Affiliation(s)
- Tomás Pinheiro
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Maria Morais
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Sara Silvestre
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Emanuel Carlos
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - João Coelho
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Henrique V Almeida
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Pedro Barquinha
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Elvira Fortunato
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Rodrigo Martins
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
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Cheng L, Yeung CS, Huang L, Ye G, Yan J, Li W, Yiu C, Chen FR, Shen H, Tang BZ, Ren Y, Yu X, Ye R. Flash healing of laser-induced graphene. Nat Commun 2024; 15:2925. [PMID: 38575649 PMCID: PMC10995154 DOI: 10.1038/s41467-024-47341-1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/17/2023] [Accepted: 03/28/2024] [Indexed: 04/06/2024] Open
Abstract
The advancement of laser-induced graphene (LIG) technology has streamlined the fabrications of flexible graphene devices. However, the ultrafast kinetics triggered by laser irradiation generates intrinsic amorphous characteristics, leading to high resistivity and compromised performance in electronic devices. Healing graphene defects in specific patterns is technologically challenging by conventional methods. Herein, we report the rapid rectification of LIG's topological defects by flash Joule heating in milliseconds (referred to as F-LIG), whilst preserving its overall structure and porosity. The F-LIG exhibits a decreased ID/IG ratio from 0.84 - 0.33 and increased crystalline domain from Raman analysis, coupled with a 5-fold surge in conductivity. Pair distribution function and atomic-resolution imaging delineate a broader-range order of F-LIG with a shorter C-C bond of 1.425 Å. The improved crystallinity and conductivity of F-LIG with excellent flexibility enables its utilization in high-performance soft electronics and low-voltage disinfections. Notably, our F-LIG/polydimethylsiloxane strain sensor exhibits a gauge factor of 129.3 within 10% strain, which outperforms pristine LIG by 800%, showcasing significant potential for human-machine interfaces.
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Affiliation(s)
- Le Cheng
- Department of Chemistry, State Key Laboratory of Marine Pollution, City University of Hong Kong, Hong Kong, 999077, P. R. China
- City University of Hong Kong Research Institute, Shenzhen, Guangdong, 518057, P. R. China
| | - Chi Shun Yeung
- Department of Chemistry, State Key Laboratory of Marine Pollution, City University of Hong Kong, Hong Kong, 999077, P. R. China
- City University of Hong Kong Research Institute, Shenzhen, Guangdong, 518057, P. R. China
| | - Libei Huang
- Department of Chemistry, State Key Laboratory of Marine Pollution, City University of Hong Kong, Hong Kong, 999077, P. R. China
- Division of Science, Engineering and Health Study, School of Professional Education and Executive Development (PolyU SPEED), The Hong Kong Polytechnic University, Hong Kong, 999077, P. R. China
| | - Ge Ye
- Department of Chemistry, State Key Laboratory of Marine Pollution, City University of Hong Kong, Hong Kong, 999077, P. R. China
| | - Jie Yan
- Department of Materials Science and Engineering, Time-resolved Aberration Corrected Environmental Electron Microscope Unit, City University of Hong Kong, Hong Kong, 999077, P. R. China
| | - Wanpeng Li
- Department of Materials Science and Engineering, Time-resolved Aberration Corrected Environmental Electron Microscope Unit, City University of Hong Kong, Hong Kong, 999077, P. R. China
| | - Chunki Yiu
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong, 999077, P. R. China
| | - Fu-Rong Chen
- Department of Materials Science and Engineering, Time-resolved Aberration Corrected Environmental Electron Microscope Unit, City University of Hong Kong, Hong Kong, 999077, P. R. China
| | - Hanchen Shen
- School of Science and Engineering, Shenzhen Institute of Aggregate Science and Technology, The Chinese University of Hong Kong, Shenzhen (CUHK-Shenzhen), Guangdong, 518172, P. R. China
| | - Ben Zhong Tang
- School of Science and Engineering, Shenzhen Institute of Aggregate Science and Technology, The Chinese University of Hong Kong, Shenzhen (CUHK-Shenzhen), Guangdong, 518172, P. R. China
- Department of Chemistry, Hong Kong Branch of Chinese National Engineering Research Center for Tissue Restoration and Reconstruction, State Key Laboratory of Molecular Neuroscience, The Hong Kong University of Science and Technology, Hong Kong, 999077, P. R. China
| | - Yang Ren
- Department of Physics, City University of Hong Kong, Hong Kong, 999077, P. R. China
- Centre for Neutron Scattering, City University of Hong Kong, Kowloon, Hong Kong, 999077, P. R. China
| | - Xinge Yu
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong, 999077, P. R. China.
| | - Ruquan Ye
- Department of Chemistry, State Key Laboratory of Marine Pollution, City University of Hong Kong, Hong Kong, 999077, P. R. China.
- City University of Hong Kong Research Institute, Shenzhen, Guangdong, 518057, P. R. China.
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Song H, Nie B, Zhu Y, Qi G, Zhang Y, Peng W, Li X, Shao J, Wei R. Flexible Grid Graphene Electrothermal Films for Real-Time Monitoring Applications. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2024; 40:6940-6948. [PMID: 38507744 DOI: 10.1021/acs.langmuir.3c03975] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/22/2024]
Abstract
Flexible electrothermal films are crucial for protecting equipment and systems in cold weather, such as ice blockages in natural gas pipelines and icing on aircraft wings. Therefore, a flexible electric heater is one of the essential devices in industrial operations. One of the main challenges is to develop flexible electrothermal films with low operating voltage, high steady-state temperature, and good mechanical stability. In this study, a flexible electrothermal film based on graphene-patterned structures was manufactured by combining the laser induction method and the transfer printing process. The grid structure design provides accurate real-time monitoring for the application of electrothermal films and shows potential in solving problems related to deicing and clearing ice blockages in pipelines. The flexible electrothermal film can reach a high heating temperature of 165 °C at 15 V and exhibits sufficient heating stability. By employing a simple and efficient method to create a flexible, high-performance electrothermal film, we provide a reliable solution for deicing and monitoring applications.
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Affiliation(s)
- Huiqian Song
- School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou 450001, China
| | - Bangbang Nie
- School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou 450001, China
- Engineering Technology Research Center of Henan Province for MEMS Manufacturing and Application, Zhengzhou University, Zhengzhou 450001, China
| | - Yihong Zhu
- School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou 450001, China
| | - Guochen Qi
- School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou 450001, China
- Engineering Technology Research Center of Henan Province for MEMS Manufacturing and Application, Zhengzhou University, Zhengzhou 450001, China
| | - Yudong Zhang
- School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou 450001, China
- Engineering Technology Research Center of Henan Province for MEMS Manufacturing and Application, Zhengzhou University, Zhengzhou 450001, China
| | - Wei Peng
- School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou 450001, China
- Engineering Technology Research Center of Henan Province for MEMS Manufacturing and Application, Zhengzhou University, Zhengzhou 450001, China
| | - Xiangming Li
- Micro- and Nano-Technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Jinyou Shao
- Micro- and Nano-Technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Ronghan Wei
- School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou 450001, China
- Engineering Technology Research Center of Henan Province for MEMS Manufacturing and Application, Zhengzhou University, Zhengzhou 450001, China
- Industrial Technology Research Institute, Zhengzhou University, Zhengzhou 450001, China
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Park H, Park JJ, Bui PD, Yoon H, Grigoropoulos CP, Lee D, Ko SH. Laser-Based Selective Material Processing for Next-Generation Additive Manufacturing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023:e2307586. [PMID: 37740699 DOI: 10.1002/adma.202307586] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/29/2023] [Revised: 09/14/2023] [Indexed: 09/25/2023]
Abstract
The connection between laser-based material processing and additive manufacturing is quite deeply rooted. In fact, the spark that started the field of additive manufacturing is the idea that two intersecting laser beams can selectively solidify a vat of resin. Ever since, laser has been accompanying the field of additive manufacturing, with its repertoire expanded from processing only photopolymer resin to virtually any material, allowing liberating customizability. As a result, additive manufacturing is expected to take an even more prominent role in the global supply chain in years to come. Herein, an overview of laser-based selective material processing is presented from various aspects: the physics of laser-material interactions, the materials currently used in additive manufacturing processes, the system configurations that enable laser-based additive manufacturing, and various functional applications of next-generation additive manufacturing. Additionally, current challenges and prospects of laser-based additive manufacturing are discussed.
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Affiliation(s)
- Huijae Park
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
| | - Jung Jae Park
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
| | - Phuong-Danh Bui
- Laser and Thermal Engineering Lab, Department of Mechanical Engineering, Gachon University, 1342 Seongnamdaero, Sujeong-gu, Seongnam, 13120, South Korea
| | - Hyeokjun Yoon
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
| | - Costas P Grigoropoulos
- Laser Thermal Lab, Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA, 94720, USA
| | - Daeho Lee
- Laser and Thermal Engineering Lab, Department of Mechanical Engineering, Gachon University, 1342 Seongnamdaero, Sujeong-gu, Seongnam, 13120, South Korea
| | - Seung Hwan Ko
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
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Velasco A, Ryu YK, Hamada A, de Andrés A, Calle F, Martinez J. Laser-Induced Graphene Microsupercapacitors: Structure, Quality, and Performance. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:nano13050788. [PMID: 36903673 PMCID: PMC10005378 DOI: 10.3390/nano13050788] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/20/2023] [Revised: 02/14/2023] [Accepted: 02/17/2023] [Indexed: 05/14/2023]
Abstract
Laser-induced graphene (LIG) is a graphenic material synthesized from a polymeric substrate through point-by-point laser pyrolysis. It is a fast and cost-effective technique, and it is ideal for flexible electronics and energy storage devices, such as supercapacitors. However, the miniaturization of the thicknesses of the devices, which is important for these applications, has still not been fully explored. Therefore, this work presents an optimized set of laser conditions to fabricate high-quality LIG microsupercapacitors (MSC) from 60 µm thick polyimide substrates. This is achieved by correlating their structural morphology, material quality, and electrochemical performance. The fabricated devices show a high capacitance of 22.2 mF/cm2 at 0.05 mA/cm2, as well as energy and power densities comparable to those of similar devices that are hybridized with pseudocapacitive elements. The performed structural characterization confirms that the LIG material is composed of high-quality multilayer graphene nanoflakes with good structural continuity and an optimal porosity.
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Affiliation(s)
- Andres Velasco
- Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Av. Complutense 30, 28040 Madrid, Spain
- Departamento de Ingeniería Electrónica, Escuela Técnica Superior de Ingenieros de Telecomunicación, Universidad Politécnica de Madrid, Av. Complutense 30, 28040 Madrid, Spain
| | - Yu Kyoung Ryu
- Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Av. Complutense 30, 28040 Madrid, Spain
- Correspondence: (Y.K.R.); (J.M.)
| | - Assia Hamada
- Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Av. Complutense 30, 28040 Madrid, Spain
| | - Alicia de Andrés
- Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas, C/Sor Juana Inés de la Cruz 3, Cantoblanco, 28049 Madrid, Spain
| | - Fernando Calle
- Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Av. Complutense 30, 28040 Madrid, Spain
- Departamento de Ingeniería Electrónica, Escuela Técnica Superior de Ingenieros de Telecomunicación, Universidad Politécnica de Madrid, Av. Complutense 30, 28040 Madrid, Spain
| | - Javier Martinez
- Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Av. Complutense 30, 28040 Madrid, Spain
- Departamento de Ciencia de Materiales, Escuela Técnica Superior de Ingenieros de Caminos, Canales y Puertos, Universidad Politécnica de Madrid, C/Profesor Aranguren s/n, 28040 Madrid, Spain
- Correspondence: (Y.K.R.); (J.M.)
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