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Jeong JS, Shin S, Park BK, Son SU, Chung TM, Ryu JY. High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition. ACS OMEGA 2024; 9:31871-31877. [PMID: 39072115 PMCID: PMC11270563 DOI: 10.1021/acsomega.4c03482] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/11/2024] [Revised: 07/02/2024] [Accepted: 07/05/2024] [Indexed: 07/30/2024]
Abstract
We report the synthesis and characterization of novel antimony(III) complexes: Sb(mpa)3 (1), Sb(mmpa)3 (2), Sb(mdpa)3 (3), Sb(epa)3 (4), Sb(empa)3 (5), and Sb(edpa)3 (6) (mpa = N-methoxypropanamide, mmpa = N-methoxy-2-methyl-propanamide, mdpa = N-methoxy-2,2-dimethylpropanamide, epa = N-ethoxypropanamide, empa = N-ethoxy-2-methylpropanamide, and edpa = N-ethoxy-2,2-dimethylpropanamide, via a salt-elimination reaction with SbCl3 and sodium-substituted carboxamide. The molecular structure of 6 revealed the formation of a homoleptic conformer with a highly distorted pentagonal bipyramidal geometry, as determined by X-ray crystallography. Thermogravimetric analysis showed excellent volatility at elevated temperatures, with complex 4 displaying the lowest residual mass of 0.16% at 500 °C. For complexes 4, 5, and 6, the temperature at a vapor pressure of 1 Torr and the enthalpy of vaporization were estimated to be 58, 64, and 45 °C and 83.31, 103.58, and 99.93 kJ/mol, respectively.
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Affiliation(s)
- Ji-Seoung Jeong
- Thin
Film Materials Research Center, Korea Research
Institute of Chemical Technology, Daejeon 34114, Republic of Korea
- Department
of Chemistry, Sungkyunkwan University (SKKU), 2066 Seobu-ro, Jangan-gu, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Sunyoung Shin
- Thin
Film Materials Research Center, Korea Research
Institute of Chemical Technology, Daejeon 34114, Republic of Korea
| | - Bo Keun Park
- Thin
Film Materials Research Center, Korea Research
Institute of Chemical Technology, Daejeon 34114, Republic of Korea
- Advanced
Materials and Chemical Engineering, KRICT School, University of Science and Technology (UST), Daejeon 34114, Republic of Korea
| | - Seung Uk Son
- Department
of Chemistry, Sungkyunkwan University (SKKU), 2066 Seobu-ro, Jangan-gu, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Taek-Mo Chung
- Thin
Film Materials Research Center, Korea Research
Institute of Chemical Technology, Daejeon 34114, Republic of Korea
- Advanced
Materials and Chemical Engineering, KRICT School, University of Science and Technology (UST), Daejeon 34114, Republic of Korea
| | - Ji Yeon Ryu
- Thin
Film Materials Research Center, Korea Research
Institute of Chemical Technology, Daejeon 34114, Republic of Korea
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Yoon H, Lee Y, Lee GY, Seo S, Park BK, Chung TM, Oh IK, Kim H. Role of a cyclopentadienyl ligand in a heteroleptic alkoxide precursor in atomic layer deposition. J Chem Phys 2024; 160:024302. [PMID: 38189606 DOI: 10.1063/5.0182690] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/20/2023] [Accepted: 12/12/2023] [Indexed: 01/09/2024] Open
Abstract
Alkoxide precursors have been highlighted for depositing carbon-free films, but their use in Atomic Layer Deposition (ALD) often exhibits a non-saturated growth. This indicates no self-limiting growth due to the chain reaction of hydrolysis or ligand decomposition caused by β-hydride elimination. In the previous study, we demonstrated that self-limiting growth of ALD can be achieved using our newly developed precursor, hafnium cyclopentadienyl tris(N-ethoxy-2,2-dimethyl propanamido) [HfCp(edpa)3]. To elucidate the growth mechanism and the role of cyclopentadienyl (Cp) ligand in a heteroleptic alkoxide precursor, herein, we compare homoleptic and heteroleptic Hf precursors consisting of N-ethoxy-2,2-dimethyl propanamido (edpa) ligands with and without cyclopentadienyl ligand-hafnium tetrakis(N-ethoxy-2,2-dimethyl propanamido) [Hf(edpa)4] and HfCp(edpa)3. We also investigate the role of a Cp ligand in growth characteristics. By substituting an alkoxide ligand with a Cp ligand, we could modify the surface reaction during ALD, preventing undesired reactions. The last remaining edpa after Hf(edpa)4 adsorption can undergo a hydride elimination reaction, resulting in surface O-H generation. In contrast, Cp remains after the HfCp(edpa)3 adsorption. Accordingly, we observe proper ALD growth with self-limiting properties. Thus, a comparative study of different ligands of the precursors can provide critical clues to the design of alkoxide precursors for obtaining typical ALD growth with a saturation behavior.
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Affiliation(s)
- Hwi Yoon
- School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-Ro, Seodaemun-Gu, Seoul 03722, South Korea
| | - Yujin Lee
- School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-Ro, Seodaemun-Gu, Seoul 03722, South Korea
- Department of Chemical Engineering, Stanford University, Stanford, California 94305, USA
| | - Ga Yeon Lee
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-Ro, Yuseong-gu, Daejeon 34114, South Korea
| | - Seunggi Seo
- School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-Ro, Seodaemun-Gu, Seoul 03722, South Korea
- Department of Chemical Engineering, Stanford University, Stanford, California 94305, USA
| | - Bo Keun Park
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-Ro, Yuseong-gu, Daejeon 34114, South Korea
| | - Taek-Mo Chung
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-Ro, Yuseong-gu, Daejeon 34114, South Korea
| | - Il-Kwon Oh
- Department of Electrical and Computer Engineering, Ajou University, 206 Worldcup-Ro, Yeongtong-Gu 16499, Suwon, South Korea
- Department of Intelligence Semiconductor Engineering, Ajou University, 206 Worldcup-Ro, Yeongtong-Gu 16499, Suwon, South Korea
| | - Hyungjun Kim
- School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-Ro, Seodaemun-Gu, Seoul 03722, South Korea
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Lee GY, Lee SH, Jo IH, Cho CM, Shostak S, Ryu JY, Park BK, Son SU, Choi CH, Eom T, Kim JH, Chung TM. Amidoxime-Containing Zr and Hf Atomic Layer Deposition Precursors for Metal Oxide Thin Films. Inorg Chem 2024; 63:537-547. [PMID: 38108625 DOI: 10.1021/acs.inorgchem.3c03455] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/19/2023]
Abstract
In this article, we discuss the synthesis of eight novel zirconium and hafnium complexes containing amidoxime ligands as potential precursors for atomic layer deposition (ALD). Two amidoximes, viz., (E)-N'-hydroxy-N,N-dimethylacetimidamide (mdaoH) and (Z)-N'-hydroxy-N,N-dimethylpivalimidamide (tdaoH), along with their Zr and Hf homoleptic complexes, Zr(mdao)4 (1), Hf(mdao)4 (2), Zr(tdao)4 (3), and Hf(tdao)4 (4) were prepared. We further synthesized heteroleptic compounds with different physical properties by introducing cyclopentadienyl (Cp) ligand, namely, CpZr(mdao)3 (5), CpHf(mdao)3 (6), CpZr(tdao)3 (7), and CpHf(tdao)3 (8). Thermogravimetric analysis was used for the assessment of the evaporation characteristics of complexes 1, 2, 5, and 6, and it revealed multistep weight losses with high residues. On the other hand, the thermogravimetric analysis curves of complexes 3, 4, 7, and 8 comprising tdao ligands revealed single-step weight losses with moderate residues. Single-crystal X-ray diffraction studies of complexes 1, 3, and 7 showed that all of the complexes have monomeric molecular structures. Complex 7 exhibited a low melting point (75 °C), good volatility, and high thermal stability compared with other complexes. Therefore, an atomic layer deposition process for the growth of ZrO2 was developed by using ZrCp(tdao)3 (7) as a novel precursor.
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Affiliation(s)
- Ga Yeon Lee
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea
| | - Seung-Hun Lee
- Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Republic of Korea
| | - In Ho Jo
- Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Republic of Korea
| | - Chan-Mi Cho
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea
| | - Svetlana Shostak
- Department of Chemistry, Kyungpook National University, Daegu 41566, South Korea
| | - Ji Yeon Ryu
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea
| | - Bo Keun Park
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea
- Department of Chemical Convergence Materials, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
| | - Seung Uk Son
- Department of Chemistry, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Cheol Ho Choi
- Department of Chemistry, Kyungpook National University, Daegu 41566, South Korea
| | - Taeyong Eom
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea
| | - Jeong Hwan Kim
- Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Republic of Korea
| | - Taek-Mo Chung
- Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea
- Department of Chemical Convergence Materials, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
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