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Murataj I, Angelini A, Cara E, Porro S, Beckhoff B, Kayser Y, Hönicke P, Ciesielski R, Gollwitzer C, Soltwisch V, Perez-Murano F, Fernandez-Regulez M, Carignano S, Boarino L, Castellino M, Ferrarese Lupi F. Hybrid Metrology for Nanostructured Optical Metasurfaces. ACS APPLIED MATERIALS & INTERFACES 2023; 15:57992-58002. [PMID: 37991460 PMCID: PMC10739581 DOI: 10.1021/acsami.3c13923] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/18/2023] [Revised: 10/23/2023] [Accepted: 11/07/2023] [Indexed: 11/23/2023]
Abstract
Metasurfaces have garnered increasing research interest in recent years due to their remarkable advantages, such as efficient miniaturization and novel functionalities compared to traditional optical elements such as lenses and filters. These advantages have facilitated their rapid commercial deployment. Recent advancements in nanofabrication have enabled the reduction of optical metasurface dimensions to the nanometer scale, expanding their capabilities to cover visible wavelengths. However, the pursuit of large-scale manufacturing of metasurfaces with customizable functions presents challenges in controlling the dimensions and composition of the constituent dielectric materials. To address these challenges, the combination of block copolymer (BCP) self-assembly and sequential infiltration synthesis (SIS), offers an alternative for fabrication of high-resolution dielectric nanostructures with tailored composition and optical functionalities. However, the absence of metrological techniques capable of providing precise and reliable characterization of the refractive index of dielectric nanostructures persists. This study introduces a hybrid metrology strategy that integrates complementary synchrotron-based traceable X-ray techniques to achieve comprehensive material characterization for the determination of the refractive index on the nanoscale. To establish correlations between material functionality and their underlying chemical, compositional and dimensional properties, TiO2 nanostructures model systems were fabricated by SIS of BCPs. The results from synchrotron-based analyses were integrated into physical models, serving as a validation scheme for laboratory-scale measurements to determine effective refractive indices of the nanoscale dielectric materials.
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Affiliation(s)
- Irdi Murataj
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy
| | - Angelo Angelini
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
| | - Eleonora Cara
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
| | - Samuele Porro
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy
| | - Burkhard Beckhoff
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Yves Kayser
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Philipp Hönicke
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Richard Ciesielski
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Christian Gollwitzer
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Victor Soltwisch
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | | | | | - Stefano Carignano
- ICCUB, Universitat de Barcelona, Carrer Martí i Franquès,
1, 08028, Barcelona, Spain
| | - Luca Boarino
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
| | - Micaela Castellino
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy
| | - Federico Ferrarese Lupi
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
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Cara E, Hönicke P, Kayser Y, Lindner JK, Castellino M, Murataj I, Porro S, Angelini A, De Leo N, Pirri CF, Beckhoff B, Boarino L, Ferrarese Lupi F. Developing Quantitative Nondestructive Characterization of Nanomaterials: A Case Study on Sequential Infiltration Synthesis of Block Copolymers. ACS APPLIED POLYMER MATERIALS 2023; 5:2079-2087. [PMID: 37427013 PMCID: PMC10324101 DOI: 10.1021/acsapm.2c02094] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/05/2022] [Accepted: 01/31/2023] [Indexed: 07/11/2023]
Abstract
The sequential infiltration synthesis (SIS) of inorganic materials in nanostructured block copolymer templates has rapidly progressed in the last few years to develop functional nanomaterials with controllable properties. To assist this rapid evolution, expanding the capabilities of nondestructive methods for quantitative characterization of the materials properties is required. In this paper, we characterize the SIS process on three model polymers with different infiltration profiles through ex situ quantification by reference-free grazing incidence X-ray fluorescence. More qualitative depth distribution results were validated by means of X-ray photoelectron spectroscopy and scanning transmission electron microscopy combined with energy-dispersive X-ray spectroscopy.
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Affiliation(s)
- Eleonora Cara
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135 Torino, Italy
| | - Philipp Hönicke
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany
| | - Yves Kayser
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany
| | - Jörg K.
N. Lindner
- AG Nanostrukturierung,
Nanoanalyse und Photonische Materialien, Paderborn University, Warburger Str. 100, 33098 Paderborn, Germany
| | - Micaela Castellino
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129 Torino, Italy
| | - Irdi Murataj
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135 Torino, Italy
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany
- AG Nanostrukturierung,
Nanoanalyse und Photonische Materialien, Paderborn University, Warburger Str. 100, 33098 Paderborn, Germany
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129 Torino, Italy
| | - Samuele Porro
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129 Torino, Italy
| | - Angelo Angelini
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135 Torino, Italy
| | - Natascia De Leo
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135 Torino, Italy
| | - Candido Fabrizio Pirri
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129 Torino, Italy
| | - Burkhard Beckhoff
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany
| | - Luca Boarino
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135 Torino, Italy
| | - Federico Ferrarese Lupi
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135 Torino, Italy
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Liquid Phase Infiltration of Block Copolymers. Polymers (Basel) 2022; 14:polym14204317. [PMID: 36297895 PMCID: PMC9612101 DOI: 10.3390/polym14204317] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/23/2022] [Revised: 10/10/2022] [Accepted: 10/11/2022] [Indexed: 11/11/2022] Open
Abstract
Novel materials with defined composition and structures at the nanoscale are increasingly desired in several research fields spanning a wide range of applications. The development of new approaches of synthesis that provide such control is therefore required in order to relate the material properties to its functionalities. Self-assembling materials such as block copolymers (BCPs), in combination with liquid phase infiltration (LPI) processes, represent an ideal strategy for the synthesis of inorganic materials into even more complex and functional features. This review provides an overview of the mechanism involved in the LPI, outlining the role of the different polymer infiltration parameters on the resulting material properties. We report newly developed methodologies that extend the LPI to the realisation of multicomponent and 3D inorganic nanostructures. Finally, the recently reported implementation of LPI into different applications such as photonics, plasmonics and electronics are highlighted.
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Chiarcos R, Antonioli D, Ospina V, Laus M, Perego M, Gianotti V. Quantification of molecular weight discrimination in grafting to reactions from ultrathin polymer films by matrix-assisted laser desorption/ionization time-of-flight mass spectrometry. Analyst 2021; 146:6145-6155. [PMID: 34487131 DOI: 10.1039/d1an01329g] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/16/2023]
Abstract
In the present study, a reliable and robust method was developed to quantify the molecular weight discrimination that can occur in grafting to reactions via indirect MALDI-TOF quantification of the molecular weights of grafted chains by comparing the characteristics of the polymeric material before the grafting reaction with those of the unreacted material recovered after grafting. Two polystyrene samples with different molecular weights and narrow molecular weight distributions were employed to prepare model blends that were grafted to silicon wafers and an analytical method was developed and validated to assess and quantify the modification of the molecular weight distribution that takes place during the grafting to process. Particular attention was paid to the standardization of the sample treatment and to find the best data collection and calibration methodologies in order to have statistically significant data even in the presence of a very scarce amount of the sample. Furthermore, to evaluate the accuracy of the analytical procedure, the lack of suitable standard and certified materials required a further experiment to be carried out by comparing the new optimized MALDI-TOF method and direct measurements using TGA-GC-MS on a model blend containing deuterated and hydrogenated polystyrene samples with appropriate molecular weights and distributions. The optimized method was applied on samples obtained by a thermally induced grafting to reaction from ultrathin polymer films and, for the first time, to our knowledge, an enrichment effect occurring in the ultrathin grafted layer obtained from a melt was evidenced.
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Affiliation(s)
- Riccardo Chiarcos
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Universitá del Piemonte Orientale "A. Avogadro", Viale T. Michel 11, 15121 Alessandria, Italy.
| | - Diego Antonioli
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Universitá del Piemonte Orientale "A. Avogadro", Viale T. Michel 11, 15121 Alessandria, Italy.
| | - Viviana Ospina
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Universitá del Piemonte Orientale "A. Avogadro", Viale T. Michel 11, 15121 Alessandria, Italy.
| | - Michele Laus
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Universitá del Piemonte Orientale "A. Avogadro", Viale T. Michel 11, 15121 Alessandria, Italy.
| | - Michele Perego
- Laboratorio MDM, IMM-CNR, Via C. Olivetti 2, 20864 Agrate Brianza, Italy
| | - Valentina Gianotti
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Universitá del Piemonte Orientale "A. Avogadro", Viale T. Michel 11, 15121 Alessandria, Italy.
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