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Tanaka K, Zaid H, Aoki T, Deshpande A, Hojo K, Ciobanu CV, Kodambaka S. Growth of Highly Oriented (VNbMoTaW)S 2 Layers. NANO LETTERS 2024; 24:493-500. [PMID: 38148179 DOI: 10.1021/acs.nanolett.3c04521] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/28/2023]
Abstract
Compositional tunability, an indispensable parameter for modifying the properties of materials, can open up new applications for van der Waals (vdW) layered materials such as transition-metal dichalcogenides (TMDCs). To date, multielement alloy TMDC layers are obtained via exfoliation from bulk polycrystalline powders. Here, we demonstrate direct deposition of high-entropy alloy disulfide, (VNbMoTaW)S2, layers with controllable thicknesses on free-standing graphene membranes and on bare and hBN-covered Al2O3(0001) substrates via ultra-high-vacuum reactive dc magnetron sputtering of the VNbMoTaW target in Kr and H2S gas mixtures. Using a combination of density functional theory calculations, Raman spectroscopy, X-ray diffraction, scanning transmission electron microscopy coupled with energy dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy, we determine that the as-deposited layers are single-phase, 2H-structured, and 0001-oriented (V0.10Nb0.16Mo0.19Ta0.28W0.27)S2.44. Our synthesis route is general and applicable for heteroepitaxial growth of a wide variety of TMDC alloys and potentially other multielement alloy vdW compounds with the desired compositions.
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Affiliation(s)
- Koichi Tanaka
- Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, California 90095, United States
| | - Hicham Zaid
- Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, California 90095, United States
| | - Toshihiro Aoki
- Irvine Materials Research Institute (IMRI), University of California, Irvine, 644 Engineering Tower, Irvine, California 92697, United States
| | - Aditya Deshpande
- Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, California 90095, United States
| | - Koki Hojo
- Graduate Department of Micro-Nano Mechanical Science and Engineering, Nagoya University, Furo-cho, Nagoya 464-8601, Japan
| | - Cristian V Ciobanu
- Department of Mechanical Engineering and Materials Science Program, Colorado School of Mines, Golden, Colorado 80401, United States
| | - Suneel Kodambaka
- Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, California 90095, United States
- Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061, United States
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