Electron Beam Maneuvering of a Single Polymer Layer for Reversible 3D Self-Assembly

Direct growth of three-dimensional nanoflower-like structures from flat metal surfaces

Here we report on a facile top-down approach for the direct growth of Co₃O₄ hierarchical nanoflowers from a bulk Co surface via chemical etching and thermal annealing. The effect of the annealing temperature was investigated, showing that amorphous Co₃O₄ was formed at 250 °C, while crystalline Co₃O₄ with notable oxygen vacancies was created at 550 °C. The formed 3D nanostructures exhibited excellent oxygen evolution reaction (OER) activities with a low overpotential of 0.34 V at 10 mA cm^-2 and high durability. The proposed novel approach was further demonstrated by the direct growth of 3D NiO and CuO nanostructures on Ni and Cu substrates.

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Transformation of conventional 2D platforms into unusual 3D configurations provides exciting opportunities for sensors, electronics, optical devices, and biological systems. Engineering material properties or controlling and modulating stresses in thin films to pop-up 3D structures out of standard planar surfaces has been a highly active research topic over the last decade. Implementation of 3D micro and nanoarchitectures enables unprecedented functionalities including multiplexed, monolithic mechanical sensors, vertical integration of electronics components, and recording of neuron activities in 3D organoids. This paper provides an overview on stress engineering approaches to developing 3D functional microsystems. The paper systematically presents the origin of stresses generated in thin films and methods to transform a 2D design into an out-of-plane configuration. Different types of 3D micro and nanostructures, along with their applications in several areas are discussed. The paper concludes with current technical challenges and potential approaches and applications of this fast-growing research direction.