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Gao Y, Chen W, Li F, Zhuang M, Yan Y, Wang J, Wang X, Dong Z, Ma W, Zhu J. Meta-Attention Deep Learning for Smart Development of Metasurface Sensors. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024:e2405750. [PMID: 39246128 DOI: 10.1002/advs.202405750] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/26/2024] [Revised: 08/09/2024] [Indexed: 09/10/2024]
Abstract
Optical metasurfaces with pronounced spectral characteristics are promising for sensor applications. Currently, deep learning (DL) offers a rapid manner to design various metasurfaces. However, conventional DL models are usually assumed as black boxes, which is difficult to explain how a DL model learns physical features, and they usually predict optical responses of metasurfaces in a fuzzy way. This makes them incapable of capturing critical spectral features precisely, such as high quality (Q) resonances, and hinders their use in designing metasurface sensors. Here, a transformer-based explainable DL model named Metaformer for the high-intelligence design, which adopts a spectrum-splitting scheme to elevate 99% prediction accuracy through reducing 99% training parameters, is established. Based on the Metaformer, all-dielectric metasurfaces based on quasi-bound states in the continuum (Q-BIC) for high-performance metasensing are designed, and fabrication experiments are guided potently. The explainable learning relies on spectral position encoding and multi-head attention of meta-optics features, which overwhelms traditional black-box models dramatically. The meta-attention mechanism provides deep physics insights on metasurface sensors, and will inspire more powerful DL design applications on other optical devices.
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Affiliation(s)
- Yuan Gao
- Institute of Electromagnetics and Acoustics and Key Laboratory of Electromagnetic Wave Science and Detection Technology, Xiamen University, Xiamen, Fujian, 361005, China
| | - Wei Chen
- Institute of Electromagnetics and Acoustics and Key Laboratory of Electromagnetic Wave Science and Detection Technology, Xiamen University, Xiamen, Fujian, 361005, China
| | - Fajun Li
- Institute of Electromagnetics and Acoustics and Key Laboratory of Electromagnetic Wave Science and Detection Technology, Xiamen University, Xiamen, Fujian, 361005, China
| | - Mingyong Zhuang
- Institute of Electromagnetics and Acoustics and Key Laboratory of Electromagnetic Wave Science and Detection Technology, Xiamen University, Xiamen, Fujian, 361005, China
| | - Yiming Yan
- Institute of Electromagnetics and Acoustics and Key Laboratory of Electromagnetic Wave Science and Detection Technology, Xiamen University, Xiamen, Fujian, 361005, China
| | - Jun Wang
- State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| | - Xiang Wang
- State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| | - Zhaogang Dong
- Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis # 08-03, Singapore, 138634, Republic of Singapore
- Department of Materials Science and Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore, 117575, Singapore
| | - Wei Ma
- College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China
| | - Jinfeng Zhu
- Institute of Electromagnetics and Acoustics and Key Laboratory of Electromagnetic Wave Science and Detection Technology, Xiamen University, Xiamen, Fujian, 361005, China
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Wang SY, Wang Q, Luo H, Kuang HZ, Ge H, Li X, Jia BW. Dynamically tunable multi-band quasi-permittivity-asymmetric BIC in the GST225 metasurface. OPTICS LETTERS 2024; 49:4767-4770. [PMID: 39207959 DOI: 10.1364/ol.531446] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/30/2024] [Accepted: 08/04/2024] [Indexed: 09/04/2024]
Abstract
Bound states in the continuum (BICs) on metasurfaces have garnered significant interest for their ultrahigh Q-factor potential in sensing applications. Reconfigurability and multi-band resonance are highly desirable for sensing systems. In this work, we introduce a metasurface comprising four nanocubes with different permittivity asymmetries, which can be dynamically adjusted using Ge2Sb2Te5 (GST225), a phase-change material, in the near-infrared (NIR) region. Additionally, a simulation for a liquid molecule sensor based on the metasurface shows a sensitivity of 1017 nm/RIU. This research introduces a novel, to the best of our knowledge, approach for designing multi-band, dynamically tunable quasi-BIC metasurfaces, which are good candidates for tunable, high-sensitivity biochemical sensing and nonlinear optics applications.
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Wang SY, Li WY, Kang HF, Zhao WK, Jing YH, Li X, Ge H, Wang Q, Jia BW, Xu N. Giant strong coupling in a Q-BICs' tetramer metasurface. OPTICS LETTERS 2024; 49:4154-4157. [PMID: 39090882 DOI: 10.1364/ol.533463] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/24/2024] [Accepted: 07/04/2024] [Indexed: 08/04/2024]
Abstract
Due to their ultrahigh Q-factor and small mode volume, bound states in the continuum (BICs) are intriguing for the fundamental study of the strong coupling regime. However, the strong coupling generated by BICs in one metasurface is not always strong enough, which highly limits its efficiency in applications. In this work, we realize a giant strong coupling of at most 60 meV in a quasi-BICs' (Q-BICs) tetramer metasurface composed of four Si cylinders with two different sets of diagonal lengths. The Q-BICs are induced from two types of electric quadrupole (EQ), for which detuning can be flexibly controlled by manipulating the C4v symmetry breaking Δd. The giant Rabi splitting in our proposed metasurface performs more than 15 times of the previous works, which provides more possibilities for important nonlinear and quantum applications, such as nanolaser and quantum optics.
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Biswas SK, Adi W, Beisenova A, Rosas S, Arvelo ER, Yesilkoy F. From weak to strong coupling: quasi-BIC metasurfaces for mid-infrared light-matter interactions. NANOPHOTONICS 2024; 13:2937-2949. [PMID: 39006137 PMCID: PMC11245121 DOI: 10.1515/nanoph-2024-0043] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/22/2024] [Accepted: 03/24/2024] [Indexed: 07/16/2024]
Abstract
Thanks to their giant, yet tunable, Q-factor resonances, all-dielectric metasurfaces supporting the quasi-bound states in the continuum (q-BIC) resonances are well-suited to provide a promising platform for quantum-coherent light-matter interactions. Yet, the strong coupling regime, characterized by the hybrid light-matter states - polaritons, has not yet been fully explored in the mid-infrared regime. This paper investigates the parameter space of vibrational strong coupling (VSC) between material and metasurface cavities supporting q-BIC resonances in the mid-infrared spectral range. We outline the effects of transition dipole strength, damping rate, and the number of molecules coupled to a single cavity, as well as the cavity damping rates, to understand their respective impacts on VSC. By tuning the Q-factor of the metasurface and material parameters, a new transition light-matter coupling zone is introduced, bridging the gap between weak and strong coupling, where polaritons form but their linewidths prohibit their spectral identification. The study further identifies the effects of cavity linewidth on polariton peak separability in strongly coupled systems, highlighting that the cavities with smaller nonradiative losses and narrower linewidths facilitate better polariton separability. Moreover, we found that matching cavity and material loss, satisfying the critical strong coupling condition, enhances the coupling strength between cavity and material. Overall, these findings can guide the design of photonic cavities suited for VSC experiments, contributing to the burgeoning fields of polaritonic chemistry, light-mediated modulation of chemical reactivity, and highly sensitive molecular spectroscopy.
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Affiliation(s)
- Shovasis Kumar Biswas
- Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA
| | - Wihan Adi
- Department of Biomedical Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA
| | - Aidana Beisenova
- Department of Biomedical Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA
| | - Samir Rosas
- Department of Biomedical Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA
| | - Eduardo Romero Arvelo
- Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA
| | - Filiz Yesilkoy
- Department of Biomedical Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA
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Yuan L, Zhao Y, Toma A, Aglieri V, Gerislioglu B, Yuan Y, Lou M, Ogundare A, Alabastri A, Nordlander P, Halas NJ. A Quasi-Bound States in the Continuum Dielectric Metasurface-Based Antenna-Reactor Photocatalyst. NANO LETTERS 2024; 24:172-179. [PMID: 38156648 DOI: 10.1021/acs.nanolett.3c03585] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/03/2024]
Abstract
Metasurfaces are a class of two-dimensional artificial resonators, creating new opportunities for strong light-matter interactions. One type of nonradiative optical metasurface that enables substantial light concentration is based on quasi-Bound States in the Continuum (quasi-BIC). Here we report the design and fabrication of a quasi-BIC dielectric metasurface that serves as an optical frequency antenna for photocatalysis. By depositing Ni nanoparticle reactors onto the metasurface, we create an antenna-reactor photocatalyst, where the virtually lossless metasurface funnels light to drive a chemical reaction. This quasi-BIC-Ni antenna-reactor drives H2 dissociation under resonant illumination, showing strong polarization, wavelength, and optical power dependencies. Both E-field-induced electronic and photothermal heating effects drive the reaction, supported by load-dependent reactivity studies and our theoretical model. This study unlocks new opportunities for photocatalysis that employ dielectric metasurfaces for light harvesting in an antenna-reactor format.
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Affiliation(s)
- Lin Yuan
- Department of Chemistry, Rice University, Houston, Texas 77005, United States
- Department of Electrical and Computer Engineering, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Yage Zhao
- Department of Physics&Astronomy, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Andrea Toma
- Istituto Italiano di Tecnologia, 16163 Genova, Italy
| | | | - Burak Gerislioglu
- Department of Physics&Astronomy, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Yigao Yuan
- Department of Chemistry, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Minghe Lou
- Department of Chemistry, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Adebola Ogundare
- Department of Chemistry, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Alessandro Alabastri
- Department of Electrical and Computer Engineering, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Peter Nordlander
- Department of Electrical and Computer Engineering, Rice University, Houston, Texas 77005, United States
- Department of Materials Science and Nanoengineering, Rice University, Houston, Texas 77005, United States
- Department of Physics&Astronomy, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
| | - Naomi J Halas
- Department of Chemistry, Rice University, Houston, Texas 77005, United States
- Department of Electrical and Computer Engineering, Rice University, Houston, Texas 77005, United States
- Department of Physics&Astronomy, Rice University, Houston, Texas 77005, United States
- Laboratory for Nanophotonics, Rice University, Houston, Texas 77005, United States
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Li X, Nie L, Wu H, Zhang L, Yan D. Enhancing THz fingerprint detection by the stretchable substrate with a dielectric metagrating. APPLIED OPTICS 2023; 62:9028-9035. [PMID: 38108738 DOI: 10.1364/ao.501933] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/31/2023] [Accepted: 11/01/2023] [Indexed: 12/19/2023]
Abstract
The terahertz (THz) wave contains abundant spectrum resources and is still in the early stages of development. It has great application potential in biomedical engineering and public security. However, in these areas there are difficulties to overcome like measuring the wide band absorption of a trace mount sample. In this paper, a THz absorption enhancing method is suggested by a multiplexing strategy. By gradually expanding the stretchable substrate of the dielectric metagrating with an oblique THz wave incidence, the resonance peak frequencies can cover the frequency range of 0.48-0.58 THz. Also, the corresponding envelope built by the peaks of the metagrating absorption spectrum with the 0.2 µm α-lactose film can demonstrate 71.55 times boosting compared to the original absorption amplitude of the film. The investigation witnesses possibilities for the detection of biomacromolecular materials.
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Liu Z, Guo T, Tan Q, Hu Z, Sun Y, Fan H, Zhang Z, Jin Y, He S. Phase Interrogation Sensor Based on All-Dielectric BIC Metasurface. NANO LETTERS 2023; 23:10441-10448. [PMID: 37818981 DOI: 10.1021/acs.nanolett.3c03089] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/13/2023]
Abstract
The low performance of sensors based on an all-dielectric metasurface limits their application compared to metallic counterparts. Here, for the first time, an all-dielectric BIC (bound states in the continuum) metasurface is employed for highly sensitive phase interrogation refractive index sensing. The proposed sensor is well analyzed, fabricated, and characterized. Experimentally, a high-performance BIC-based microfluidic sensing chip with a Q factor of 1200 is achieved by introducing symmetry breaking. A refractive index sensor with high figure of merit of 418 RIU-1 is demonstrated, which is beneficial to the phase interrogation. Notably, we measure a record phase interrogation sensitivity of 2.7 × 104 deg/RIU to the refractive index, thus enabling the all-dielectric BIC to rival the refractive index detection capabilities of metal-based sensors such as surface plasmon resonance. This scheme establishes a pivotal role of the all-dielectric metasurface in the field of ultrahigh sensitivity sensors and opens possibilities for trace detection in biochemical analysis and environment monitoring.
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Affiliation(s)
- Zhenchao Liu
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
- Taizhou Hospital, Zhejiang University, Taizhou 317000, People's Republic of China
| | - Tingbiao Guo
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
| | - Qin Tan
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
| | - Zhipeng Hu
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
| | - Yuwei Sun
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
| | - Houxin Fan
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
| | - Zhi Zhang
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
| | - Yi Jin
- Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, People's Republic of China
| | - Sailing He
- Taizhou Hospital, Zhejiang University, Taizhou 317000, People's Republic of China
- National Engineering Research Center for Optical Instruments, Zhejiang University, Hangzhou, 310058, People's Republic of China
- Department of Electromagnetic Engineering, School of Electrical Engineering, KTH Royal Institute of Technology, Stockholm SE-100 44, Sweden
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Liu N, Wang S, Lv J, Zhang J. Achiral nanoparticle trapping and chiral nanoparticle separating with quasi-BIC metasurface. OPTICS EXPRESS 2023; 31:28912-28928. [PMID: 37710700 DOI: 10.1364/oe.497432] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/08/2023] [Accepted: 07/18/2023] [Indexed: 09/16/2023]
Abstract
Dielectric metasurfaces based on quasi-bound states in the continuum (quasi-BICs) are a promising approach for manipulating light-matter interactions. In this study, we numerically demonstrate the potential of silicon elliptical tetramer dielectric metasurfaces for achirality nanoparticle trapping and chiral nanoparticle separation. We first analyze a symmetric tetramer metasurface, which exhibits dual resonances (P1 and P2) with high electromagnetic field intensity enhancement and a high-quality factor (Q-factor). This metasurface can trap achiral nanoparticles with a maximum optical trapping force of 35 pN for 20 nm particles at an input intensity of 100 mW. We then investigate an asymmetric tetramer metasurface, which can identify and separate enantiomers under the excitation of left-handed circularly polarized (LCP) light. Results show that the chiral optical force can push one enantiomer towards regions of the quasi-BIC system while removing the other. In addition, the proposed asymmetric tetramer metasurface can provide multiple Fano resonances (ranging from R1 to R5) and high trap potential wells of up to 33 kBT. Our results demonstrate that the proposed all-dielectric metasurface has high performance in nanoparticle detection, with potential applications in biology, life science, and applied physics.
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Yang S, Ndukaife JC. Optofluidic transport and assembly of nanoparticles using an all-dielectric quasi-BIC metasurface. LIGHT, SCIENCE & APPLICATIONS 2023; 12:188. [PMID: 37507389 PMCID: PMC10382587 DOI: 10.1038/s41377-023-01212-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/23/2023] [Revised: 06/13/2023] [Accepted: 06/17/2023] [Indexed: 07/30/2023]
Abstract
Manipulating fluids by light at the micro/nanoscale has been a long-sought-after goal for lab-on-a-chip applications. Plasmonic heating has been demonstrated to control microfluidic dynamics due to the enhanced and confined light absorption from the intrinsic losses of metals. Dielectrics, the counterpart of metals, has been used to avoid undesired thermal effects due to its negligible light absorption. Here, we report an innovative optofluidic system that leverages a quasi-BIC-driven all-dielectric metasurface to achieve subwavelength scale control of temperature and fluid motion. Our experiments show that suspended particles down to 200 nanometers can be rapidly aggregated to the center of the illuminated metasurface with a velocity of tens of micrometers per second, and up to millimeter-scale particle transport is demonstrated. The strong electromagnetic field enhancement of the quasi-BIC resonance increases the flow velocity up to three times compared with the off-resonant situation by tuning the wavelength within several nanometers range. We also experimentally investigate the dynamics of particle aggregation with respect to laser wavelength and power. A physical model is presented and simulated to elucidate the phenomena and surfactants are added to the nanoparticle colloid to validate the model. Our study demonstrates the application of the recently emerged all-dielectric thermonanophotonics in dealing with functional liquids and opens new frontiers in harnessing non-plasmonic nanophotonics to manipulate microfluidic dynamics. Moreover, the synergistic effects of optofluidics and high-Q all-dielectric nanostructures hold enormous potential in high-sensitivity biosensing applications.
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Affiliation(s)
- Sen Yang
- Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, TN, USA
- Interdisciplinary Materials Science, Vanderbilt University, Nashville, TN, USA
| | - Justus C Ndukaife
- Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, TN, USA.
- Interdisciplinary Materials Science, Vanderbilt University, Nashville, TN, USA.
- Department of Mechanical Engineering, Vanderbilt University, Nashville, TN, USA.
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Chen R, Zheng Y, Huang X, Lin Q, Ye C, Xiong M, Wubs M, Ma Y, Pu M, Xiao S. Observation of multiple bulk bound states in the continuum modes in a photonic crystal cavity. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2023; 14:544-551. [PMID: 37152473 PMCID: PMC10155626 DOI: 10.3762/bjnano.14.45] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/25/2022] [Accepted: 04/18/2023] [Indexed: 05/09/2023]
Abstract
Obtaining bound states in the continuum (BICs) in photonic crystals gives rise to the realization of resonances with high quality factors for lasing and nonlinear applications. For BIC cavities in finite-size photonic crystals, the bulk resonance band turns into discrete modes with different mode profiles and radiation patterns. Here, photonic-crystal BIC cavities encircled by the photonic bandgap of lateral heterostructures are designed. The mirror-like photonic bandgap exhibits strong side leakage suppression to confine the mode profile in the designed cavity. Multiple bulk quantized modes are observed both in simulation and experiment. After exciting the BIC cavity at different positions, different resonance peaks are observed. The physical origin of the dependence between the resonance peak and the illuminating position is explained by analyzing the mode profile distribution and further verified by numerical simulations. Our findings have potential applications regarding the mode selectivity in BIC devices to manipulate the lasing mode in photonic-crystal surface-emitting lasers or the radiation pattern in nonlinear optics.
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Affiliation(s)
- Rui Chen
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
- State Key Lab of Modern Optical Instrumentation, Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Hangzhou 310058, China
| | - Yi Zheng
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
| | - Xingyu Huang
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
| | - Qiaoling Lin
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
- NanoPhoton – Center for Nanophotonics, Technical University of Denmark, Kgs. Lyngby, Denmark
| | - Chaochao Ye
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
| | - Meng Xiong
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
- NanoPhoton – Center for Nanophotonics, Technical University of Denmark, Kgs. Lyngby, Denmark
| | - Martijn Wubs
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
- NanoPhoton – Center for Nanophotonics, Technical University of Denmark, Kgs. Lyngby, Denmark
| | - Yungui Ma
- State Key Lab of Modern Optical Instrumentation, Centre for Optical and Electromagnetic Research, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Hangzhou 310058, China
| | - Minhao Pu
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
| | - Sanshui Xiao
- Department of Electrical and Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark
- NanoPhoton – Center for Nanophotonics, Technical University of Denmark, Kgs. Lyngby, Denmark
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