1
|
You C, Li X, Hu Y, Huang N, Wang Y, Wu B, Jiang G, Huang J, Zhang Z, Chen B, Wu Y, Liu J, Chen X, Song E, Cui J, Zhou P, Di Z, An Z, Huang G, Mei Y. CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry-Perot resonators. Proc Natl Acad Sci U S A 2024; 121:e2403950121. [PMID: 39116137 PMCID: PMC11331063 DOI: 10.1073/pnas.2403950121] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/25/2024] [Accepted: 07/03/2024] [Indexed: 08/10/2024] Open
Abstract
Miniaturized reconstructive spectrometers play a pivotal role in on-chip and portable devices, offering high-resolution spectral measurement through precalibrated spectral responses and AI-driven reconstruction. However, two key challenges persist for practical applications: artificial intervention in algorithm parameters and compatibility with complementary metal-oxide-semiconductor (CMOS) manufacturing. We present a cutting-edge miniaturized reconstructive spectrometer that incorporates a self-adaptive algorithm referenced with Fabry-Perot resonators, delivering precise spectral tests across the visible range. The spectrometers are fabricated with CMOS technology at the wafer scale, achieving a resolution of ~2.5 nm, an average wavelength deviation of ~0.27 nm, and a resolution-to-bandwidth ratio of ~0.46%. Our approach provides a path toward versatile and robust reconstructive miniaturized spectrometers and facilitates their commercialization.
Collapse
Affiliation(s)
- Chunyu You
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Xing Li
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Yuhang Hu
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Ningge Huang
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Yang Wang
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Binmin Wu
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Guobang Jiang
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Jiayuan Huang
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Ziyu Zhang
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Bingxin Chen
- State Key Laboratory of Surface Physics & Institute for Nanoelectronic Devices and Quantum Computing, Department of Physics, Fudan University, Shanghai200438, People’s Republic of China
| | - Yue Wu
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Junhan Liu
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Xiangzhong Chen
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai200438, People’s Republic of China
| | - Enming Song
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai200438, People’s Republic of China
| | - Jizhai Cui
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Peng Zhou
- State Key Laboratory of Application-specific Integrated Circuit and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai200438, People’s Republic of China
| | - Zengfeng Di
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai200050, People’s Republic of China
| | - Zhenghua An
- State Key Laboratory of Surface Physics & Institute for Nanoelectronic Devices and Quantum Computing, Department of Physics, Fudan University, Shanghai200438, People’s Republic of China
| | - Gaoshan Huang
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
| | - Yongfeng Mei
- Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai200438, People’s Republic of China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai200438, People’s Republic of China
| |
Collapse
|