Highly Stretchable and Sensitive Pressure Sensor Array Based on Icicle-Shaped Liquid Metal Film Electrodes

Capacitive Pressure Sensor Combining Dual Dielectric Layers with Integrated Composite Electrode for Wearable Healthcare Monitoring

Foot activity can reflect numerous physiological abnormalities in the human body, making gait a valuable metric in health monitoring. Research on flexible sensors for gait monitoring has focused on high sensitivity, wide working range, fast response, and low detection limit, but challenges remain in areas such as elasticity, antibacterial activity, user-friendliness, and long-term stability. In this study, we have developed a novel capacitive pressure sensor that offers an ultralow detection limit of 1 Pa, wide detection ranges from 1 Pa to 2 MPa, a high sensitivity of 0.091 kPa-1, a fast response time of 71 ms, and exceptional stability over 6000 cycles. This sensor not only has the ability of accurately discriminating mechanical stimuli but also meets the requirements of elasticity, antibacterial activity, wearable comfort, and long-term stability for gait monitoring. The fabrication method of a dual dielectric layer and integrated composite electrode is simple, cost-effective, stable, and amenable to mass production. Thereinto, the introduction of a dual dielectric layer, based on an optimized electrospinning network and micropillar array, has significantly improved the sensitivity, detection range, elasticity, and antibacterial performance of the sensor. The integrated flexible electrodes are made by template method using composite materials of carbon nanotubes (CNTs), two-dimensional titanium carbide Ti3C2Tx (MXene), and polydimethylsiloxane (PDMS), offering synergistic advantages in terms of conductivity, stability, sensitivity, and practicality. Additionally, we designed a smart insole that integrates the as-prepared sensors with a miniature instrument as a wearable platform for gait monitoring and disease warning. The developed sensor and wearable platform offer a cutting-edge solution for monitoring human activity and detecting diseases in a noninvasive manner, paving the way for future wearable devices and personalized healthcare technologies.

Soft Sensors and Actuators for Wearable Human-Machine Interfaces

Haptic human-machine interfaces (HHMIs) combine tactile sensation and haptic feedback to allow humans to interact closely with machines and robots, providing immersive experiences and convenient lifestyles. Significant progress has been made in developing wearable sensors that accurately detect physical and electrophysiological stimuli with improved softness, functionality, reliability, and selectivity. In addition, soft actuating systems have been developed to provide high-quality haptic feedback by precisely controlling force, displacement, frequency, and spatial resolution. In this Review, we discuss the latest technological advances of soft sensors and actuators for the demonstration of wearable HHMIs. We particularly focus on highlighting material and structural approaches that enable desired sensing and feedback properties necessary for effective wearable HHMIs. Furthermore, promising practical applications of current HHMI technology in various areas such as the metaverse, robotics, and user-interactive devices are discussed in detail. Finally, this Review further concludes by discussing the outlook for next-generation HHMI technology.

Microstructured Polyfluoroacrylate Elastomeric Dielectric Layer for Highly Stretchable Wide-Range Capacitive Pressure Sensors

Capacitive pressure sensors capable of replicating human tactile senses have garnered tremendous attention. Introducing microstructures into the dielectric layer is an effective approach to improve the sensitivity of the sensors. However, most reported processes to fabricate microstructured dielectric layers are complicated and time-consuming and usually have adverse effects on the mechanical properties. Herein, we report a mechanically strong and highly stretchable dielectric layer fabricated from a microstructured fluorinated elastomer with a high dielectric constant (5.8 at 1000 Hz) via a simple and low-cost thermal decomposition process. Capacitive pressure sensors based on this microstructured fluorinated elastomer dielectric layer and soft ionotronic electrodes illustrate an impressing stretchability (>300%), a high pressure sensitivity (17 MPa-1), a wide detection range (70 Pa-800 kPa), and a fast response time (below 300 ms). Moreover, the multipixel capacitive pressure sensors sensing array maintains the unique spatial tactile sensing performance even under significant tensile deformation. It is believed that our microstructured fluorinated elastomer dielectric layer might find wide applications in stretchable ionotronic devices.

Bioinspired Engineering of Fillable Gradient Structure into Flexible Capacitive Pressure Sensor Toward Ultra-High Sensitivity and Wide Working Range

Tactile sensing is required for electronic skin and intelligent robots to function properly. However, the dielectric layer's poor structural compressibility in conventional pressure sensors results in a limited pressure sensing range and low sensitivity. To solve this issue, a flexible pressure sensor with a crocodile-inspired fillable gradient structure is provided. The fillable gradient structure and grooves in the pressure sensor accommodate the deformed microstructure that permits the enhancement of the media layer compressibility via COMSOL finite element simulation and optimization. The pressure sensor exhibits a high sensitivity of up to 0.97 k Pa-1 (0-4 kPa), a wide pressure detection range (7 Pa-380 kPa), and outstanding repeatability. The sensor can detect Morse code, robotic grabbing, and human motion monitoring. As a result, flexible sensors with a bionic fillable gradient structure pave the way for wearable devices and offer a novel method for achieving highly precise tactile perception.

Flexible and Stretchable Pressure Sensors: From Basic Principles to State-of-the-Art Applications

Flexible and stretchable electronics have emerged as highly promising technologies for the next generation of electronic devices. These advancements offer numerous advantages, such as flexibility, biocompatibility, bio-integrated circuits, and light weight, enabling new possibilities in diverse applications, including e-textiles, smart lenses, healthcare technologies, smart manufacturing, consumer electronics, and smart wearable devices. In recent years, significant attention has been devoted to flexible and stretchable pressure sensors due to their potential integration with medical and healthcare devices for monitoring human activity and biological signals, such as heartbeat, respiratory rate, blood pressure, blood oxygen saturation, and muscle activity. This review comprehensively covers all aspects of recent developments in flexible and stretchable pressure sensors. It encompasses fundamental principles, force/pressure-sensitive materials, fabrication techniques for low-cost and high-performance pressure sensors, investigations of sensing mechanisms (piezoresistivity, capacitance, piezoelectricity), and state-of-the-art applications.

A Review of Epidermal Flexible Pressure Sensing Arrays

In recent years, flexible pressure sensing arrays applied in medical monitoring, human-machine interaction, and the Internet of Things have received a lot of attention for their excellent performance. Epidermal sensing arrays can enable the sensing of physiological information, pressure, and other information such as haptics, providing new avenues for the development of wearable devices. This paper reviews the recent research progress on epidermal flexible pressure sensing arrays. Firstly, the fantastic performance materials currently used to prepare flexible pressure sensing arrays are outlined in terms of substrate layer, electrode layer, and sensitive layer. In addition, the general fabrication processes of the materials are summarized, including three-dimensional (3D) printing, screen printing, and laser engraving. Subsequently, the electrode layer structures and sensitive layer microstructures used to further improve the performance design of sensing arrays are discussed based on the limitations of the materials. Furthermore, we present recent advances in the application of fantastic-performance epidermal flexible pressure sensing arrays and their integration with back-end circuits. Finally, the potential challenges and development prospects of flexible pressure sensing arrays are discussed in a comprehensive manner.

Flexible and Wearable Biosensors for Monitoring Health Conditions

Flexible and wearable biosensors have received tremendous attention over the past decade owing to their great potential applications in the field of health and medicine. Wearable biosensors serve as an ideal platform for real-time and continuous health monitoring, which exhibit unique properties such as self-powered, lightweight, low cost, high flexibility, detection convenience, and great conformability. This review introduces the recent research progress in wearable biosensors. First of all, the biological fluids often detected by wearable biosensors are proposed. Then, the existing micro-nanofabrication technologies and basic characteristics of wearable biosensors are summarized. Then, their application manners and information processing are also highlighted in the paper. Massive cutting-edge research examples are introduced such as wearable physiological pressure sensors, wearable sweat sensors, and wearable self-powered biosensors. As a significant content, the detection mechanism of these sensors was detailed with examples to help readers understand this area. Finally, the current challenges and future perspectives are proposed to push this research area forward and expand practical applications in the future.

Shaping a Soft Future: Patterning Liquid Metals

This review highlights the unique techniques for patterning liquid metals containing gallium (e.g., eutectic gallium indium, EGaIn). These techniques are enabled by two unique attributes of these liquids relative to solid metals: 1) The fluidity of the metal allows it to be injected, sprayed, and generally dispensed. 2) The solid native oxide shell allows the metal to adhere to surfaces and be shaped in ways that would normally be prohibited due to surface tension. The ability to shape liquid metals into non-spherical structures such as wires, antennas, and electrodes can enable fluidic metallic conductors for stretchable electronics, soft robotics, e-skins, and wearables. The key properties of these metals with a focus on methods to pattern liquid metals into soft or stretchable devices are summari.

Stretchable and Self-Powered Temperature-Pressure Dual Sensing Ionic Skins Based on Thermogalvanic Hydrogels

Tactile sensors with both temperature- and pressure-responsive capabilities are critical to enabling future smart artificial intelligence. These sensors can mimic haptic functions of human skin and inevitably suffer from tensile deformation during operation. However, almost all actual multifunctional tactile sensors are either nonstretchable or the sensing signals interfere with each other when stretched. Herein, we propose a stretchable and self-powered temperature-pressure dual functional sensor based on thermogalvanic hydrogels. The sensor operates properly under stretching, which relies on the thermogalvanic effect and constant elastic modulus of hydrogels. The thermogalvanic hydrogel elastomer exhibits an equivalent Seebeck coefficient of -1.21 mV K^-1 and a pressure sensitivity of 0.056 kPa^-1. Combined with unit array integration, the multifunctional sensor can be used for accurately recording tactile information on human skin and spatial perception. This work provides a conceptual framework and systematic design for stretchable artificial skin, interactive wearables, and smart robots.

Femtosecond Laser-Induced Supermetalphobicity for Design and Fabrication of Flexible Tactile Electronic Skin Sensor

Pursuing flexible tactile electronic skin sensors with superior comprehensive performances is highly desired in practical applications. However, current flexible tactile electronic skin sensors suffer insufficient flexibility and sensitivity, as well as high-cost and low-efficiency in fabrication, and are susceptible to contamination in sensing performances. Here, a highly sensitive all-flexible tactile sensor (AFTS) is presented with capacitive sensing that combines a double-side micropyramids dielectric layer and a liquid metal (LM) electrode. The design and fabrication of LM-based AFTS are based on supermetalphobicity induced by femtosecond laser. The supermetalphobic micropyramids lead to a high sensitivity up to 2.78 kPa^-1, an ultralow limit of detection of ∼3 Pa, a fast response time of 80 ms, and an excellent durability of cyclic load over 10 000 times. The used femtosecond laser enables programmable, high-efficiency, low-cost, and large-scale fabrication of supermetalphobic double-side micropyramids, which is difficult to implement using conventional techniques. Furthermore, the outer substrates are treated by a femtosecond laser, endowing the AFTS with excellent antifouling performance and stable sensing signals in the highly humid environment. Successful monitoring of human physiological and motion signals demonstrates the potential of our developed AFTS for wearable biomonitoring applications.

Mechanically Active Materials and Devices for Bio-Interfaced Pressure Sensors-A Review

Pressures generated by external forces or by internal body processes represent parameters of critical importance in diagnosing physiological health and in anticipating injuries. Examples span intracranial hypertension from traumatic brain injuries, high blood pressure from poor diet, pressure-induced skin ulcers from immobility, and edema from congestive heart failure. Pressures measured on the soft surfaces of vital organs or within internal cavities of the body can provide essential insights into patient status and progression. Challenges lie in the development of high-performance pressure sensors that can softly interface with biological tissues to enable safe monitoring for extended periods of time. This review focuses on recent advances in mechanically active materials and structural designs for classes of soft pressure sensors that have proven uses in these contexts. The discussions include applications of such sensors as implantable and wearable systems, with various unique capabilities in wireless continuous monitoring, minimally invasive deployment, natural degradation in biofluids, and/or multiplexed spatiotemporal mapping. A concluding section summarizes challenges and future opportunities for this growing field of materials and biomedical research.

Crosstalk-Free, High-Resolution Pressure Sensor Arrays Enabled by High-Throughput Laser Manufacturing

Simultaneously achieving high spatial resolution and low crosstalk interference has been a fundamental challenge for flexible pressure sensor arrays. Here the authors present a high-resolution flexible pressure sensor array fabricated through a two-step laser manufacturing process, where individual sensing pixels and their interconnects are sequentially defined by laser-induced graphenization and ablation to minimize crosstalk interferences. The geometry of the interconnects is optimized through theoretical modeling and experimental validation. Characterization results show that the new device design induces a remarkable reduction of the crosstalk coefficient, from -8.21 to -43.63 dB, of the 0.7 mm-resolution sensor arrays, and the crosstalk suppression is particularly beneficial for application scenarios involving pressure sensing on soft surfaces (e.g., human skin and organs). Applications of the sensor array in tactile pattern recognition and minimally-invasive cancer surgery are demonstrated.

Liquid Metal Based Nano-Composites for Printable Stretchable Electronics

Liquid metal (LM) has attracted prominent attention for stretchable and elastic electronics applications due to its exceptional fluidity and conductivity at room temperature. Despite progress in this field, a great disparity remains between material fabrication and practical applications on account of the high surface tension and unavoidable oxidation of LM. Here, the composition and nanolization of liquid metal can be envisioned as effective solutions to the processibility-performance dilemma caused by high surface tension. This review aims to summarize the strategies for the fabrication, processing, and application of LM-based nano-composites. The intrinsic mechanism and superiority of the composition method will further extend the capabilities of printable ink. Recent applications of LM-based nano-composites in printing are also provided to guide the large-scale production of stretchable electronics.

Soft Capacitive Pressure Sensors: Trends, Challenges, and Perspectives

Soft pressure sensors are critical components of e-skins, which are playing an increasingly significant role in two burgeoning fields: soft robotics and bioelectronics. Capacitive pressure sensors (CPS) are popular given their mechanical flexibility, high sensitivity, and signal stability. After two decades of rapid development, e-skins based on soft CPS are able to achieve human-skin-like softness and sensitivity. However, there remain two major roadblocks in the way for practical application of soft CPS: the decay of sensitivity with increased pressure and the coupled response between in-plane stretch and out-of-plane pressure. In addition to existing strategies of building porous and/or high dielectric constant soft dielectrics, are there any other promising methods to overcome those bottlenecks? Are there any further considerations for the widespread deployment of e-skins? This perspective aims to shed some light on those topics.

Emerging Role of Liquid Metals in Sensing

Low melting point metals and alloys are the group of materials that combine metallic and liquid properties, simultaneously. The fascinating characteristics of liquid metals (LMs) including softness and high electrical and thermal conductivity, as well as their unique interfacial chemistry, have started to dominate various research disciplines. Utilization of LMs as responsive interfaces, enabling sensing in a flexible and versatile manner, is one of the most promising traits demonstrated for LMs. In the context of LMs-enabled sensors, gallium (Ga) and its alloys have emerged as multipurpose functional materials with many compelling physical and chemical properties. Responsiveness to different stimuli and easy-to-functionalize interfaces of Ga-based LMs make them ideal candidates for a variety of sensing applications. However, despite the vast capabilities of Ga-based LMs in sensing, applications of these materials for developing different sensors have not been fully explored. In the present review, we provide a comprehensive overview regarding the applications of Ga-based LMs in a wide range of sensing approaches that cover different physical and chemical sensors. The unique features of Ga-based LMs, which make them promising materials for sensing, are discussed in subsections followed by relevant case studies. Finally, challenges as well as the prospected future and developing motifs are highlighted for each type of LM-based sensors.

A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor

The development of flexible capacitive pressure sensors has wide application prospects in the fields of electronic skin and intelligent wearable electronic devices, but it is still a great challenge to fabricate capacitive sensors with high sensitivity. Few reports have considered the use of interdigital electrode structures to improve the sensitivity of capacitive pressure sensors. In this work, a new strategy for the fabrication of a high-performance capacitive flexible pressure sensor based on MXene/polyvinylpyrrolidone (PVP) by an interdigital electrode is reported. By increasing the number of interdigital electrodes and selecting the appropriate dielectric layer, the sensitivity of the capacitive sensor can be improved. The capacitive sensor based on MXene/PVP here has a high sensitivity (~1.25 kPa^-1), low detection limit (~0.6 Pa), wide sensing range (up to 294 kPa), fast response and recovery times (~30/15 ms) and mechanical stability of 10000 cycles. The presented sensor here can be used for various pressure detection applications, such as finger pressing, wrist pulse measuring, breathing, swallowing and speech recognition. This work provides a new method of using interdigital electrodes to fabricate a highly sensitive capacitive sensor with very promising application prospects in flexible sensors and wearable electronics.

A stretchable and strain-unperturbed pressure sensor for motion interference-free tactile monitoring on skins

A stretchable pressure sensor is a necessary tool for perceiving physical interactions that take place on soft/deformable skins present in human bodies, prosthetic limbs, or soft robots. However, all existing types of stretchable pressure sensors have an inherent limitation, which is the interference of stretching with pressure sensing accuracy. Here, we present a design for a highly stretchable and highly sensitive pressure sensor that can provide unaltered sensing performance under stretching, which is realized through the synergistic creations of an ionic capacitive sensing mechanism and a mechanically hierarchical microstructure. Via this optimized structure, our sensor exhibits 98% strain insensitivity up to 50% strain and a low pressure detection limit of 0.2 Pa. With the capability to provide all the desired characteristics for quantitative pressure sensing on a deformable surface, this sensor has been used to realize the accurate sensation of physical interactions on human or soft robotic skin.

Large-Scale, Cuttable, Full Tissue-Based Capacitive Pressure Sensor for the Detection of Human Physiological Signals and Pressure Distribution

The increasing demand for flexible and wearable electronics has promoted the rapid development of the pressure sensors capable of monitoring diverse human movements and physiological signals. However, more and more research requires the pressure sensor to possess high sensing performance and desires the fabrication to exhibit the characteristics of low cost, large-scale production, high reproduction, even disposability. Here, we propose a full tissue-based capacitive pressure sensor with a sandwiched structure consisting of two MXene-coated tissue electrodes and a blank tissue dielectric layer. The tight contact and adequate adsorption of the MXene sheets with the cellulose fibers endow the electrode with uniform conductivity and high stability over a large area. In addition, the flexible sensor could be conveniently cut into any shape and size to meet the diverse application requirements. Thereby, the pressure sensor exhibits a sensitivity of 0.051 kPa^-1 (<7 kPa), a wide detection range of 0.02-160 kPa, a fast response (∼100 ms), and good repeatability. The flexible device has been demonstrated to monitor a variety of human activities and physical stimuli. The assembled sensor array can accurately and reliably detect the pressure distribution.

Human Motion State Recognition Based on Flexible, Wearable Capacitive Pressure Sensors

Human motion state recognition technology based on flexible, wearable sensor devices has been widely applied in the fields of human–computer interaction and health monitoring. In this study, a new type of flexible capacitive pressure sensor is designed and applied to the recognition of human motion state. The electrode layers use multi-walled carbon nanotubes (MWCNTs) as conductive materials, and polydimethylsiloxane (PDMS) with microstructures is embedded in the surface as a flexible substrate. A composite film of barium titanate (BaTiO₃) with a high dielectric constant and low dielectric loss and PDMS is used as the intermediate dielectric layer. The sensor has the advantages of high sensitivity (2.39 kPa⁻¹), wide pressure range (0–120 kPa), low pressure resolution (6.8 Pa), fast response time (16 ms), fast recovery time (8 ms), lower hysteresis, and stability. The human body motion state recognition system is designed based on a multi-layer back propagation neural network, which can collect, process, and recognize the sensor signals of different motion states (sitting, standing, walking, and running). The results indicate that the overall recognition rate of the system for the human motion state reaches 94%. This proves the feasibility of the human motion state recognition system based on the flexible wearable sensor. Furthermore, the system has high application potential in the field of wearable motion detection.

Materials, Electrical Performance, Mechanisms, Applications, and Manufacturing Approaches for Flexible Strain Sensors

With the recent great progress made in flexible and wearable electronic materials, the upcoming next generation of skin-mountable and implantable smart devices holds extensive potential applications for the lifestyle modifying, including personalized health monitoring, human-machine interfaces, soft robots, and implantable biomedical devices. As a core member within the wearable electronics family, flexible strain sensors play an essential role in the structure design and functional optimization. To further enhance the stretchability, flexibility, sensitivity, and electricity performances of the flexible strain sensors, enormous efforts have been done covering the materials design, manufacturing approaches and various applications. Thus, this review summarizes the latest advances in flexible strain sensors over recent years from the material, application, and manufacturing strategies. Firstly, the critical parameters measuring the performances of flexible strain sensors and materials development contains different flexible substrates, new nano- and hybrid- materials are introduced. Then, the developed working mechanisms, theoretical analysis, and computational simulation are presented. Next, based on different material design, diverse applications including human motion detection and health monitoring, soft robotics and human-machine interface, implantable devices, and biomedical applications are highlighted. Finally, synthesis consideration of the massive production industry of flexible strain sensors in the future; different fabrication approaches that are fully expected are classified and discussed.

Highly Sensitive Pressure and Strain Sensors Based on Stretchable and Recoverable Ion-Conductive Physically Cross-Linked Double-Network Hydrogels

Ion-conductive hydrogel sensors have attracted great research interests for applications in wearable devices, electronic skins, and implantable sensors, but most such sensors are fragile, with low conductivity and sensitivity. This study reports on novel ion-conductive double network hydrogels with a cross-linked helical structure, hydrophobic association, and metal-ion coordination. The helical κ-carrageenan first network and the second network cross-linked by Pluronic F127 diacrylate micelles and tridentate Fe³⁺-COO^- coordination work synergistically to show the tensile strength of 2.7 MPa, fracture strain of 1400%, and tensile toughness of 9.82 MJ m^-3 and fatigue resistance against cyclic loadings with high strains. The hydrogels show an ion conductivity of 1.15 S m^-1, a strain sensitivity of up to 2.8, and a pressure sensitivity of 0.33 kPa^-1. Sensor arrays fabricated from the conductive hydrogels provide an in-plane detection of pressures less than 200 Pa. Such hydrogel sensors have potential applications to electron skins and implantable sensors.