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Ragisha CM, Habeeb NM, Grace VL, Varanakkottu SN. Moving Meniscus-Assisted Template-Free Optothermofluidic Nanoparticle Patterning and Its Application in Optothermoconvective Particle Trapping. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2024; 40:12276-12287. [PMID: 38828930 DOI: 10.1021/acs.langmuir.4c01442] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2024]
Abstract
Moving meniscus-assisted vertical lifting is a commonly employed particle assembly technique to realize large-area particle patterning for the easy fabrication of colloidal photonic crystals and sensors. Though great success has been achieved for large-area patterning, inscribing desired patterns over the target substrate with precise control over the morphology remains a challenge. The target substrates need to be functionalized (physically or chemically) to realize desired patterns, which increases the complexity and limits their applicability to specific particle-liquid combinations. We demonstrate a new approach for the precise patterning of gold nanoparticles (Au NPs, diameter ∼60 nm) over solid substrates by the synergy of light-induced Marangoni flow and vertical lifting process (moving meniscus), without the requirement of photomasks or templates. The core idea relies on the particle accumulation due to light-induced Marangoni flow near the liquid meniscus in contact with a solid surface (due to plasmonic absorption of the particles) and the controlled lifting of the substrate. We present both the simulation and experimental results of the developed patterning technique. Various patterns such as continuous lines, intermittent lines with varying lengths, patterns with continuously varying widths, cross patterns, etc. are successfully inscribed. Dynamic control over the three-dimensional morphology of the deposited patterns is achieved by varying the lifting velocity, laser irradiation time, and lifting direction during the inscription process. Finally, we show the applicability of the developed plasmonically active surface for the large-area parallel manipulation of nonabsorbing microparticles based on optothermoconvective flow. The major advantage of the developed method compared to the existing light-controlled patterning techniques is its ability to inscribe patterns over large distances (up to several centimeters). We expect that the results presented in this paper will benefit different applications requiring precise particle patterning, such as optical elements, sensors, plasmonic substrates, microfluidic master templates, and electronic circuits.
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Affiliation(s)
- Chetteente Meethal Ragisha
- Optofluidics and Interface Science Laboratory, Department of Physics, National Institute of Technology Calicut, Kozhikode, Kerala 673601, India
| | - Nihal Muhammed Habeeb
- Optofluidics and Interface Science Laboratory, Department of Physics, National Institute of Technology Calicut, Kozhikode, Kerala 673601, India
| | - Vijayan Lija Grace
- Optofluidics and Interface Science Laboratory, Department of Physics, National Institute of Technology Calicut, Kozhikode, Kerala 673601, India
| | - Subramanyan Namboodiri Varanakkottu
- Optofluidics and Interface Science Laboratory, Department of Physics, National Institute of Technology Calicut, Kozhikode, Kerala 673601, India
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Pinheiro T, Morais M, Silvestre S, Carlos E, Coelho J, Almeida HV, Barquinha P, Fortunato E, Martins R. Direct Laser Writing: From Materials Synthesis and Conversion to Electronic Device Processing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2402014. [PMID: 38551106 DOI: 10.1002/adma.202402014] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/06/2024] [Revised: 03/18/2024] [Indexed: 04/25/2024]
Abstract
Direct Laser Writing (DLW) has been increasingly selected as a microfabrication route for efficient, cost-effective, high-resolution material synthesis and conversion. Concurrently, lasers participate in the patterning and assembly of functional geometries in several fields of application, of which electronics stand out. In this review, recent advances and strategies based on DLW for electronics microfabrication are surveyed and outlined, based on laser material growth strategies. First, the main DLW parameters influencing material synthesis and transformation mechanisms are summarized, aimed at selective, tailored writing of conductive and semiconducting materials. Additive and transformative DLW processing mechanisms are discussed, to open space to explore several categories of materials directly synthesized or transformed for electronics microfabrication. These include metallic conductors, metal oxides, transition metal chalcogenides and carbides, laser-induced graphene, and their mixtures. By accessing a wide range of material types, DLW-based electronic applications are explored, including processing components, energy harvesting and storage, sensing, and bioelectronics. The expanded capability of lasers to participate in multiple fabrication steps at different implementation levels, from material engineering to device processing, indicates their future applicability to next-generation electronics, where more accessible, green microfabrication approaches integrate lasers as comprehensive tools.
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Affiliation(s)
- Tomás Pinheiro
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Maria Morais
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Sara Silvestre
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Emanuel Carlos
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - João Coelho
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Henrique V Almeida
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Pedro Barquinha
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Elvira Fortunato
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Rodrigo Martins
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
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Wu M, Jiang L, Li X, Xiang Z, Yi P, Liu Y, Zhang L, Li X, Wang Z, Zhang X. Microheater-Integrated Microlens Array for Robust Rapid Fog Removal. ACS APPLIED MATERIALS & INTERFACES 2023; 15:41092-41100. [PMID: 37599436 DOI: 10.1021/acsami.3c07262] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/22/2023]
Abstract
In extreme environments, fog formation on a microlens array (MLA) surface results in a device failure. One reliable solution for fog removal is to heat the surface using a microheater. However, due to the surface interference, the combination of these two microdevices remains elusive. In this study, we introduce lift-off and electroless plating into femtosecond laser processing to fabricate a microheater integrated MLA (μH-MLA) on the same substrate with high light transmittance, durability, and fog removal efficiency. Laser-induced micro-nano grooves enable the microheater to be tightly coupled with the MLA and have high heating performance, thus maintaining a stable performance for over 24 h during continuous operation as well as under long time ultrasonic vibration and mechanical friction. With a rapid response time (τ0.5) of 17 s and a high working temperature of 188 °C, the μH-MLA removed fog that covers the entire face within 14 s. Finally, we prove the use of this fabrication method in large areas and curved surface environments. This study provides a flexible, stable, and economical method to integrate micro-optical and microelectrical devices.
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Affiliation(s)
- Mengnan Wu
- School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Lan Jiang
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Xiaowei Li
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Zhikun Xiang
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Peng Yi
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Yang Liu
- Institute of Micro-Nano Optoelectronics and Terahertz Technology, School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, P. R. China
| | - Leyi Zhang
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Xibiao Li
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Zhi Wang
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
| | - Xiangyu Zhang
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
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Ekeoma BC, Ekeoma LN, Yusuf M, Haruna A, Ikeogu CK, Merican ZMA, Kamyab H, Pham CQ, Vo DVN, Chelliapan S. Recent Advances in the Biocatalytic Mitigation of Emerging Pollutants: A Comprehensive Review. J Biotechnol 2023; 369:14-34. [PMID: 37172936 DOI: 10.1016/j.jbiotec.2023.05.003] [Citation(s) in RCA: 6] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/15/2023] [Revised: 04/25/2023] [Accepted: 05/09/2023] [Indexed: 05/15/2023]
Abstract
The issue of environmental pollution has been worsened by the emergence of new contaminants whose morphology is yet to be fully understood. Several techniques have been adopted to mitigate the pollution effects of these emerging contaminants, and bioremediation involving plants, microbes, or enzymes has stood out as a cost-effective and eco-friendly approach. Enzyme-mediated bioremediation is a very promising technology as it exhibits better pollutant degradation activity and generates less waste. However, this technology is subject to challenges like temperature, pH, and storage stability, in addition to recycling difficulty as it is arduous to isolate them from the reaction media. To address these challenges, the immobilization of enzymes has been successfully applied to ameliorate the activity, stability, and reusability of enzymes. Although this has significantly increased the uses of enzymes over a wide range of environmental conditions and facilitated the use of smaller bioreactors thereby saving cost, it still comes with additional costs for carriers and immobilization. Additionally, the existing immobilization methods have their individual limitations. This review provides state-of-the-art information to readers focusing on bioremediation using enzymes. Different parameters such as: the sustainability of biocatalysts, the ecotoxicological evaluation of transformation contaminants, and enzyme groups used were reviewed. The efficacy of free and immobilized enzymes, materials and methods for immobilization, bioreactors used, challenges to large-scale implementation, and future research needs were thoroughly discussed.
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Affiliation(s)
- Bernard Chukwuemeka Ekeoma
- Department of Chemical and Biological Engineering, The University of Alabama, Tuscaloosa, Alabama, 35487, USA
| | - Leonard Nnamdi Ekeoma
- Department of Pharmacy, Nnamdi Azikiwe University, Agulu Campus, Anambra State, Nigeria
| | - Mohammad Yusuf
- Institute of Hydrocarbon Recovery, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak 32610, Malaysia.
| | - Abdurrashid Haruna
- Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak, 32610, Malaysia; Department of Chemistry, Ahmadu Bello University Zaria-Nigeria
| | | | - Zulkifli Merican Aljunid Merican
- Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak, 32610, Malaysia; Institute of Contaminant Management, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak, 32610, Malaysia
| | - Hesam Kamyab
- Faculty of Architecture and Urbanism, UTE University, Calle Rumipamba S/N and Bourgeois, Quito, Ecuador; Department of Biomaterials, Saveetha Dental College and Hospital, Saveetha Institute of Medical and Technical Sciences, Chennai, 600 077, India; Process Systems Engineering Centre (PROSPECT), Faculty of Chemical and Energy Engineering, Faculty of Engineering, Universiti Teknologi Malaysia, Skudai, Johor, Malaysia.
| | - Cham Q Pham
- Institute of Applied Technology and Sustainable Development, Nguyen Tat Thanh University, Ho Chi Minh City 755414, Vietnam
| | - Dai-Viet N Vo
- Centre of Excellence for Green Energy and Environmental Nanomaterials (CE@GrEEN), Nguyen Tat Thanh University, Ho Chi Minh City, 755414, Viet Nam.
| | - Shreeshivadasan Chelliapan
- Engineering Department, Razak Faculty of Technology & Informatics, Universiti Teknologi Malaysia, Jalan Sultan Yahya Petra, 54100 Kuala Lumpur, Malaysia
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Herber M, Lengle D, Valandro SR, Wehrmeister M, Hill EH. Bubble Printing of Ti 3C 2T X MXene for Patterning Conductive and Plasmonic Nanostructures. NANO LETTERS 2023. [PMID: 37074355 DOI: 10.1021/acs.nanolett.3c00617] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
MXenes represent a novel class of 2D materials with unique properties and have great potential for diverse applications in sensing and electronics; however, their directed assembly at interfaces has not yet been achieved. Herein, the plasmonic heating of MXenes was exploited to achieve the controlled deposition of MXene assemblies via a laser-directed microbubble. The influence of various factors such as solvent composition, substrate surface chemistry, MXene concentration, and laser fluence was investigated, establishing the optimal conditions for rapid patterning with good fidelity. Printed MXene assemblies showed good electrical conductivity and plasmonic sensing capabilities and were able to meet or exceed the state of the art without additional postprocessing steps. This represents the first study of a directed approach for microfabrication using MXenes and lays the foundation for future work in optically directed assembly of MXenes and MXene-based nanocomposites at interfaces toward sensors and devices.
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Affiliation(s)
- Marcel Herber
- Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
- The Hamburg Center for Ultrafast Imaging (CUI), Luruper Chausee 149, 22761 Hamburg, Germany
| | - Daniel Lengle
- Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
- The Hamburg Center for Ultrafast Imaging (CUI), Luruper Chausee 149, 22761 Hamburg, Germany
| | - Silvano R Valandro
- Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
- The Hamburg Center for Ultrafast Imaging (CUI), Luruper Chausee 149, 22761 Hamburg, Germany
| | - Moritz Wehrmeister
- Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
| | - Eric H Hill
- Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
- The Hamburg Center for Ultrafast Imaging (CUI), Luruper Chausee 149, 22761 Hamburg, Germany
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Antioxidant, Protoscolicidal, Hemocompatibility, and Antibacterial Activity of Nickel Oxide Nanoparticles Synthesized by Ziziphus spina-christi. BIONANOSCIENCE 2022. [DOI: 10.1007/s12668-022-01028-3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
Abstract
Abstract
Over the past several years, the greener fabrication of metal oxide nanoparticles has attracted significant attention due to their simplicity, eco-friendliness, availability, and nontoxicity. This paper focused on the fabrication of nickel oxide nanoparticles (NiO-NPs) using the leaf extract of Ziziphus spina-christi L. and evaluating its potential biological activities. The characterization of synthesized NiO-NPs was confirmed using ultraviolet–visible spectroscopy, field emission-scanning electron microscope, energy-dispersive X-ray spectroscopy, and X-ray diffraction. Furthermore, protoscolicidal, antibacterial, and antioxidant activities and hemocompatibility of NiO-NPs were investigated. The findings revealed that the NiO-NPs were crystalline on nanoscale between 50- and 90-nm particle sizes. The NiO-NPs showed high scolicidal activity against Echinococcus granulosus. The viability of the treated protoscoleces exponentially decreased with an increase in the concentration of NiO-NPs. The NiO-NPs exhibited effective antibacterial activity against Escherichia coli and Staphylococcus aureus. NiO-NPs also possess a H2O2 scavenging activity in a dose-dependent manner. This study revealed that the Z. spina-christi L. leaf extract is an effective reducing and capping agent for the production of NiO-NPs; it showed critical biological properties. Moreover, NiO-NPs have a potent antioxidant activity and low toxicity on the erythrocytes and appear hemocompatible.
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Hwang E, Hong J, Yoon J, Hong S. Direct Writing of Functional Layer by Selective Laser Sintering of Nanoparticles for Emerging Applications: A Review. MATERIALS (BASEL, SWITZERLAND) 2022; 15:6006. [PMID: 36079386 PMCID: PMC9457495 DOI: 10.3390/ma15176006] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/10/2022] [Revised: 08/24/2022] [Accepted: 08/28/2022] [Indexed: 06/15/2023]
Abstract
Selective laser sintering of nanoparticles enables the direct and rapid formation of a functional layer even on heat-sensitive flexible and stretchable substrates, and is rising as a pioneering fabrication technology for future-oriented applications. To date, laser sintering has been successfully applied to various target nanomaterials including a wide range of metal and metal-oxide nanoparticles, and extensive investigation of relevant experimental schemes have not only reduced the minimum feature size but also have further expanded the scalability of the process. In the beginning, the selective laser sintering process was regarded as an alternative method to conventional manufacturing processes, but recent studies have shown that the unique characteristics of the laser-sintered layer may improve device performance or even enable novel functionalities which were not achievable using conventional fabrication techniques. In this regard, we summarize the current developmental status of the selective laser sintering technique for nanoparticles, affording special attention to recent emerging applications that adopt the laser sintering scheme.
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Saber MM, Monir N, Awad AS, Elsherbiny ME, Zaki HF. TLR9: A friend or a foe. Life Sci 2022; 307:120874. [PMID: 35963302 DOI: 10.1016/j.lfs.2022.120874] [Citation(s) in RCA: 9] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/01/2022] [Revised: 08/05/2022] [Accepted: 08/06/2022] [Indexed: 10/15/2022]
Abstract
The innate immune system is a primary protective line in our body. It confers its protection through different pattern recognition receptors (PRRs), especially toll like receptors (TLRs). Toll like receptor 9 (TLR9) is an intracellular TLR, expressed in different immunological and non-immunological cells. Release of cellular components, such as proteins, nucleotides, and DNA confers a beneficial inflammatory response and maintains homeostasis for removing cellular debris during normal physiological conditions. However, during pathological cellular damage and stress signals, engagement between mtDNA and TLR9 acts as an alarm for starting inflammatory and autoimmune disorders. The controversial role of TLR9 in different diseases baffled scientists if it has a protective or deleterious effect after activation during insults. Targeting the immune system, especially the TLR9 needs further investigation to provide a therapeutic strategy to control inflammation and autoimmune disorders.
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Affiliation(s)
- Mona M Saber
- Department of Pharmacology and Toxicology, Faculty of Pharmacy, Cairo University, Giza, Egypt.
| | - Nada Monir
- Department of Pharmacology and Toxicology, Faculty of Pharmacy, Ahram Canadian University, Giza, Egypt
| | - Azza S Awad
- Department of Pharmacology and Toxicology, Faculty of Pharmacy, Ahram Canadian University, Giza, Egypt
| | - Marwa E Elsherbiny
- Department of Pharmacology and Toxicology, Faculty of Pharmacy, Ahram Canadian University, Giza, Egypt
| | - Hala F Zaki
- Department of Pharmacology and Toxicology, Faculty of Pharmacy, Cairo University, Giza, Egypt
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Zhang D, Liu Y, Liu R, Guan X, Xing S, Dou X, He Z, Zhang X. Characterization of Corrosion Behavior of TA2 Titanium Alloy Welded Joints in Seawater Environment. Front Chem 2022; 10:950768. [PMID: 35936087 PMCID: PMC9354461 DOI: 10.3389/fchem.2022.950768] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/23/2022] [Accepted: 06/23/2022] [Indexed: 11/18/2022] Open
Abstract
Titanium alloy has been widely used in Marine pipeline system because of its excellent corrosion resistance. However, there are differences in microstructure and electrochemical properties because of the heterogeneous structure of the welded joint, the corrosion behavior is often different. In this paper, the corrosion behavior of TA2 titanium alloy welded joint in seawater at different temperatures was studied by traditional macro electrochemical test analysis combined with microelectrode array test and surface morphology analysis. Conventional macroscopic electrochemical analysis results show that the corrosion resistance of heat-affected zone is always the best, followed by the base metal and the weld. And the higher the temperature, the easier the formation of passivation film. The results of microelectrode array test show that the heat-affected zone is always the cathode region of the whole welded joint, and part of the cathode near the base metal region has the largest current density, which acts as the main cathode to slow down corrosion. At slightly higher temperatures, the polarity deflection will occur in the base metal zone and weld zone due to the different formation speeds of passivation film in early corrosion stage. With the prolongation of corrosion time, the base metal eventually becomes the cathode zone and the weld zone eventually becomes the anode zone.
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Affiliation(s)
- Dalei Zhang
- School of Materials Science and Engineering, China University of Petroleum (East China), Qingdao, China
- *Correspondence: Dalei Zhang, ; Shaohua Xing,
| | - Yingshuang Liu
- School of Materials Science and Engineering, China University of Petroleum (East China), Qingdao, China
| | - Ran Liu
- School of Materials Science and Engineering, China University of Petroleum (East China), Qingdao, China
| | - Xiaorui Guan
- SINOPEC Research Institute of Safety Engineering Co Ltd, Qingdao, China
| | - Shaohua Xing
- State Key for Marine Corrosion and Protection, Luoyang Ship Material Research Institute, Qingdao, China
- *Correspondence: Dalei Zhang, ; Shaohua Xing,
| | - Xiaohui Dou
- School of Materials Science and Engineering, China University of Petroleum (East China), Qingdao, China
| | - Zonghao He
- School of Materials Science and Engineering, China University of Petroleum (East China), Qingdao, China
| | - Xinwei Zhang
- School of Materials Science and Engineering, China University of Petroleum (East China), Qingdao, China
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Improvement of Yttrium Oxyfluoride Coating with Modified Precursor Solution for Laser-Induced Hydrothermal Synthesis. COATINGS 2022. [DOI: 10.3390/coatings12060740] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/10/2022]
Abstract
In the semiconductor manufacturing process, the inner walls of the equipment are coated with yttrium-based oxides for etch resistance against plasma exposure. Yttrium oxyfluoride (YOF) particle synthesis and coating methods have been actively studied owing to their high erosion resistance compared to Y2O3 and Al2O3. Owing to the formation of a rough and porous coating layer by thermal spray-coating, the coating layer disintegrates, as the etching process has been conducted for a long time. Laser-induced synthesis and coating technology offer several advantages, including simplified process steps, ease of handling, and formation of a dense coating layer on the target material. In this study, YOF was coated on an aluminum substrate using a modified precursor solution. The NaF and HMTA were added to the precursor solution, resulting in enhanced synthetic reactivity and stabilizing the oxides. The material coated on the surface was analyzed based on the characteristics of composition, chemical bonding, and phase identification. We found that the coating properties can be improved by using an appropriate combination of modified precursor solutions and laser parameters. Therefore, the findings in this study are expected to be utilized in the field of coating technology.
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