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Chen X, Luo Y, Chen Y, Li S, Deng S, Wang B, Zhang Q, Li X, Li X, Wang C, He J, Tian H, Shao J. Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2408082. [PMID: 39319637 DOI: 10.1002/advs.202408082] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/15/2024] [Revised: 08/28/2024] [Indexed: 09/26/2024]
Abstract
Flexible sensor arrays have attracted extensive attention in human-computer interaction. However, realizing high-performance sensor units with programmable properties, and expanding them to multi-pixel flexible arrays to maintain high sensing consistency is still struggling. Inspired by the contact behavior of octopus antenna, this paper proposes a programmable multistage dome structure-based flexible sensing array with robust sensing stability and high array consistency. The biomimetic multistage dome structure is pressurized to gradually contact the electrode to achieve high sensitivity and a large pressure range. By adjusting the arrangement of the multistage dome structure, the pressure range and sensitivity can be customized. More importantly, this biomimetic structure can be expanded to a multi-pixel sensor array at the wafer level with high consistency through scalable and high-precision imprinting technologies. In the imprinting process, the conductive layer is conformally embedded into the multistage dome structure to improve the stability (maintain stability over 22 000 cycles). In addition, the braced isolation structure is designed to effectively improve the anti-crosstalk performance of the sensor array (crosstalk coefficient: 26.62 dB). Benefitting from the programmable structural design and high-precision manufacturing process, the sensor array can be customized and is demonstrated to detect human musculation in medical rehabilitation applications.
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Affiliation(s)
- Xiaoliang Chen
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Frontier Institute of Science and Technology (FIST), Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Interdisciplinary Research Center of Frontier science and technology, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Yizhuo Luo
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Frontier Institute of Science and Technology (FIST), Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Yun Chen
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Sheng Li
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Shizheng Deng
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Bin Wang
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Qi Zhang
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Xiangmeng Li
- Shanxi Provincial Key Laboratory for Advanced Manufacturing Technology, North University of China, Taiyuan, Shanxi, 030051, China
| | - Xiangming Li
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Frontier Institute of Science and Technology (FIST), Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Interdisciplinary Research Center of Frontier science and technology, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Chunhui Wang
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Interdisciplinary Research Center of Frontier science and technology, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Juan He
- Department of Rehabilitation Medicine, First Affiliated Hospital of Xi'an Jiaotong University, Xi'an, Shaanxi, 710061, China
| | - Hongmiao Tian
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Interdisciplinary Research Center of Frontier science and technology, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
| | - Jinyou Shao
- Micro- and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Frontier Institute of Science and Technology (FIST), Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Interdisciplinary Research Center of Frontier science and technology, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
- Department of Rehabilitation Medicine, First Affiliated Hospital of Xi'an Jiaotong University, Xi'an, Shaanxi, 710061, China
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Wang S, Wang Y, Wang Y, Liu J, Liu F, Dai F, Li J, Li Z. Pollen-Modified Flat Silk Cocoon Pressure Sensors for Wearable Applications. SENSORS (BASEL, SWITZERLAND) 2024; 24:4698. [PMID: 39066095 PMCID: PMC11280503 DOI: 10.3390/s24144698] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/28/2024] [Revised: 07/17/2024] [Accepted: 07/18/2024] [Indexed: 07/28/2024]
Abstract
Microstructures have been proved as crucial factors for the sensing performance of flexible pressure sensors. In this study, polypyrrole (PPy)/sunflower pollen (SFP) (P/SFP) was prepared via the in situ growth of PPy on the surface of degreased SFP with a sea urchin-like microstructure; then, these P/SFP microspheres were sprayed onto a flat silk cocoon (FSC) to prepare a sensing layer P/SFP-FSC. PPy-FSC (P-FSC) was prepared as an electrode layer through the in situ polymerization of PPy on the FSC surface. The sensing layer P/SFP-FSC was placed between two P-FSC electrode layers to assemble a P/SFP-FSC pressure sensor together with a fork finger electrode. With 6 mg/cm2 of optimized sprayed P/SFP microspheres, the prepared flexible pressure sensor has a sensitivity of up to 0.128 KPa-1 in the range of 0-13.18 KPa and up to 0.13 KPa-1 in the range of 13.18-30.65 KPa, a fast response/recovery time (90 ms/80 ms), and a minimum detection limit as low as 40 Pa. This fabricated flexible P/SFP-FSC sensor can monitor human motion and can also be used for the encrypted transmission of important information via Morse code. In conclusion, the developed flexible P/SFP-FSC pressure sensor based on microstructure modification in this study shows good application prospects in the field of human-computer interaction and wearable electronic devices.
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Affiliation(s)
- Shengnan Wang
- State Key Laboratory of Resource Insects, Southwest University, Chongqing 400715, China
- Chongqing Engineering Research Center of Biomaterial Fiber and Modern Textile, College of Sericulture, Textile and Biomass Science, Southwest University, Chongqing 400715, China
| | - Yujia Wang
- State Key Laboratory of Resource Insects, Southwest University, Chongqing 400715, China
- Chongqing Engineering Research Center of Biomaterial Fiber and Modern Textile, College of Sericulture, Textile and Biomass Science, Southwest University, Chongqing 400715, China
| | - Yi Wang
- State Key Laboratory of Resource Insects, Southwest University, Chongqing 400715, China
- Chongqing Engineering Research Center of Biomaterial Fiber and Modern Textile, College of Sericulture, Textile and Biomass Science, Southwest University, Chongqing 400715, China
| | - Jiaqi Liu
- State Key Laboratory of Resource Insects, Southwest University, Chongqing 400715, China
- Chongqing Engineering Research Center of Biomaterial Fiber and Modern Textile, College of Sericulture, Textile and Biomass Science, Southwest University, Chongqing 400715, China
| | - Fan Liu
- Chongqing Engineering Research Center of Biomaterial Fiber and Modern Textile, College of Sericulture, Textile and Biomass Science, Southwest University, Chongqing 400715, China
| | - Fangyin Dai
- State Key Laboratory of Resource Insects, Southwest University, Chongqing 400715, China
- Chongqing Engineering Research Center of Biomaterial Fiber and Modern Textile, College of Sericulture, Textile and Biomass Science, Southwest University, Chongqing 400715, China
- Key Laboratory of Sericultural Biology and Genetic Breeding, Ministry of Agriculture and Rural Affairs, Southwest University, Chongqing 400715, China
| | - Jiashen Li
- Department of Materials, The University of Manchester, Manchester M13 9PL, UK
| | - Zhi Li
- State Key Laboratory of Resource Insects, Southwest University, Chongqing 400715, China
- Chongqing Engineering Research Center of Biomaterial Fiber and Modern Textile, College of Sericulture, Textile and Biomass Science, Southwest University, Chongqing 400715, China
- Key Laboratory of Sericultural Biology and Genetic Breeding, Ministry of Agriculture and Rural Affairs, Southwest University, Chongqing 400715, China
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Li Y, Lei X, Guo D, Zhao Y, Zeng Z, Yi L, Li P, Liu F, Ren TL. Laser-Induced Skin-like Flexible Pressure Sensor for Artificial Intelligence Speech Recognition. ACS APPLIED MATERIALS & INTERFACES 2024; 16:10380-10388. [PMID: 38356188 DOI: 10.1021/acsami.3c15844] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/16/2024]
Abstract
Skin-like flexible pressure sensors with good sensing performance have great application potential, but their development is limited owing to the need for multistep, high-cost, and low-efficiency preparation processes. Herein, a simple, low-cost, and efficient laser-induced forming process is proposed for the first time to prepare a skin-like flexible piezoresistive sensor. In the laser-induced forming process, based on the photothermal effect of graphene and the foaming effect of glucose, a skin-like polydimethylsiloxanes (PDMS) film with porous structures and surface protrusions is obtained by using infrared laser irradiation of the glucose/graphene/PDMS prepolymer film. Further, based on the skin-like PDMS film with a graphene conductive layer, a new skin-like flexible piezoresistive sensor is obtained. Due to the stress concentration caused by the surface protrusions and the low stiffness caused by the porous structures, the flexible piezoresistive sensor realizes an ultrahigh sensitivity of 1348 kPa-1 at 0-2 kPa, a wide range of 200 kPa, a fast response/recovery time of 52 ms/35 ms, and good stability over 5000 cycles. The application of the sensor to the detection of human pulses and robot clamping force indicates its potential for health monitoring and soft robots. Furthermore, in combination with the neural network (CNN) algorithm in artificial intelligence technology, the sensor achieves 95% accuracy in speech recognition, which demonstrates its great potential for intelligent wearable electronics. Especially, the laser-induced forming process is expected to facilitate the efficient, large-scale preparation of flexible devices with multilevel structures.
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Affiliation(s)
- Yunfan Li
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Xiao Lei
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Dingyi Guo
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Yilin Zhao
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Ziran Zeng
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Longju Yi
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Peilong Li
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Feng Liu
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei 430072, China
| | - Tian-Ling Ren
- Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
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Su FC, Huang HX. Flexible Switching Pressure Sensors with Fast Response and Less Bending-Sensitive Performance Applied to Pain-Perception-Mimetic Gloves. ACS APPLIED MATERIALS & INTERFACES 2023; 15:56328-56336. [PMID: 37990467 DOI: 10.1021/acsami.3c13930] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/23/2023]
Abstract
A strategy is proposed herein for preparing a flexible switching piezoresistive pressure sensor, which has a bridge-like structure and inverted micropyramids (IMPs) on its lower conductive substrate. The sensor substrates were prepared by injection compression molding (an industrial manufacturing process) using thermoplastic polyurethane (TPU; an industrial grade polymer). The designed bridge-like structure enables the sensor to obtain a pressure threshold. The flexibility of upper and lower TPU substrates allows them to contact quickly when pressed, and so the sensor exhibits a fast response (as short as 2 ms) and can respond to both static force and dynamic force (up to 50 Hz frequency), which are prominent for the sensor made from TPU. The sensor exhibits less bending-sensitive performance, which is attributed to the conformality of the upper and lower substrates and lower strain on the lower substrate with the IMP under bending. The sensor can amplify signal response at the monitoring limit (the relative resistance change is up to 46%). It can achieve a higher sensitivity in different low-pressure ranges by changing the gap of the bridge-like structure. Moreover, the sensor can obviously and steadily respond to an additional very low pressure under preloading and exhibits good durability performance. As the sensor has a pressure threshold similar to the human pain perception process, a pain-perception-mimetic glove that can identify the external mechanical stimuli but reduces the interference of finger bending is prepared, displaying potential applications of the flexible switching sensor in intelligent wearable protectors.
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Affiliation(s)
- Feng-Chun Su
- Lab for Micro Molding and Polymer Rheology, The Key Laboratory of Polymer Processing Engineering of Ministry of Education, South China University of Technology, Guangzhou 510640, China
| | - Han-Xiong Huang
- Lab for Micro Molding and Polymer Rheology, The Key Laboratory of Polymer Processing Engineering of Ministry of Education, South China University of Technology, Guangzhou 510640, China
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