1
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Weisbord I, Segal-Peretz T. Revealing the 3D Structure of Block Copolymers with Electron Microscopy: Current Status and Future Directions. ACS APPLIED MATERIALS & INTERFACES 2023; 15:58003-58022. [PMID: 37338172 DOI: 10.1021/acsami.3c02956] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/21/2023]
Abstract
Block copolymers (BCPs) are considered model systems for understanding and utilizing self-assembly in soft matter. Their tunable nanometric structure and composition enable comprehensive studies of self-assembly processes as well as make them relevant materials in diverse applications. A key step in developing and controlling BCP nanostructures is a full understanding of their three-dimensional (3D) structure and how this structure is affected by the BCP chemistry, confinement, boundary conditions, and the self-assembly evolution and dynamics. Electron microscopy (EM) is a leading method in BCP 3D characterization owing to its high resolution in imaging nanosized structures. Here we discuss the two main 3D EM methods: namely, transmission EM tomography and slice and view scanning EM tomography. We present each method's principles, examine their strengths and weaknesses, and discuss ways researchers have devised to overcome some of the challenges in BCP 3D characterization with EM- from specimen preparation to imaging radiation-sensitive materials. Importantly, we review current and new cutting-edge EM methods such as direct electron detectors, energy dispersive X-ray spectroscopy of soft matter, high temporal rate imaging, and single-particle analysis that have great potential for expanding the BCP understanding through EM in the future.
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Affiliation(s)
- Inbal Weisbord
- Chemical Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel
| | - Tamar Segal-Peretz
- Chemical Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel
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2
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Chang B, Loo WS, Yu B, Dhuey S, Wan L, Nealey PF, Ruiz R. Sequential Brush Grafting for Chemically and Dimensionally Tolerant Directed Self-Assembly of Block Copolymers. ACS APPLIED MATERIALS & INTERFACES 2023; 15:2020-2029. [PMID: 36534025 PMCID: PMC9837782 DOI: 10.1021/acsami.2c16508] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/13/2022] [Accepted: 12/05/2022] [Indexed: 06/17/2023]
Abstract
We report a method for the directed self-assembly (DSA) of block copolymers (BCPs) in which a first BCP film deploys homopolymer brushes, or "inks", that sequentially graft onto the substrate's surface via the interpenetration of polymer molecules during the thermal annealing of the polymer film on top of existing polymer brushes. By selecting polymer "inks" with the desired chemistry and appropriate relative molecular weights, it is possible to use brush interpenetration as a powerful technique to generate self-registered chemical contrast patterns at the same frequency as that of the domains of the BCP. The result is a process with a higher tolerance to dimensional and chemical imperfections in the guiding patterns, which we showcase by implementing DSA using homopolymer brushes for the guiding features as opposed to more robust cross-linkable mats. We find that the use of "inks" does not compromise the line width roughness, and the quality of the DSA as a lithographic mask is verified by implementing a robust "dry lift-off" pattern transfer.
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Affiliation(s)
- Boyce
S. Chang
- Molecular
Foundry, Lawrence Berkeley National Lab, Berkeley, California 94720, United States
| | - Whitney S. Loo
- Pritzker
School of Molecular Engineering, University
of Chicago, Chicago, Illinois 60637, United States
| | - Beihang Yu
- Molecular
Foundry, Lawrence Berkeley National Lab, Berkeley, California 94720, United States
| | - Scott Dhuey
- Molecular
Foundry, Lawrence Berkeley National Lab, Berkeley, California 94720, United States
| | - Lei Wan
- Western
Digital, San Jose, California 95119, United States
| | - Paul F. Nealey
- Pritzker
School of Molecular Engineering, University
of Chicago, Chicago, Illinois 60637, United States
- Materials
Sciences Division, Argonne National Lab, Lemont, Illinois 60439, United States
| | - Ricardo Ruiz
- Molecular
Foundry, Lawrence Berkeley National Lab, Berkeley, California 94720, United States
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3
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Grundy LS, Fu S, Galluzzo MD, Balsara NP. The Effect of Annealing on the Grain Structure and Ionic Conductivity of Block Copolymer Electrolytes. Macromolecules 2022. [DOI: 10.1021/acs.macromol.2c01837] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/07/2022]
Affiliation(s)
- Lorena S. Grundy
- Department of Chemical and Biomolecular Engineering, University of California, Berkeley, California94720, United States
- Joint Center for Energy Storage Research (JCESR), Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
| | - Sean Fu
- Department of Chemical and Biomolecular Engineering, University of California, Berkeley, California94720, United States
| | - Michael D. Galluzzo
- Department of Chemical and Biomolecular Engineering, University of California, Berkeley, California94720, United States
- Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
| | - Nitash P. Balsara
- Department of Chemical and Biomolecular Engineering, University of California, Berkeley, California94720, United States
- Joint Center for Energy Storage Research (JCESR), Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
- Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
- Energy Storage and Distributed Resources Division, Lawrence Berkeley National Laboratory, Berkeley, California94720, United States
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4
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Ho K, Kim KS, de Beer S, Walker GC. Chemical Composition and Strain at Interfaces between Different Morphologies in Block Copolymer Thin Films. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2021; 37:12723-12731. [PMID: 34693716 DOI: 10.1021/acs.langmuir.1c02169] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Transitional composition between two thin-film morphologies of the block copolymer, polystyrene-block-poly(tert-butyl acrylate) (PS-b-PtBuA), was investigated using near-field infrared spectroscopy and atomic force microscopy mechanical measurements. These techniques allowed block identification with nanoscale spatial resolution and elucidated the material's sub-surface composition. PS was found to form coronae around the PtBuA block in spherical valleys on flat areas of the film, and coronae of PtBuA surrounding the PS lamellae were observed at the edge of the polymer film, where parallel lamellae are formed. Furthermore, we found that the peak position and width varied by location, which may be a result of block composition, chain tension, or substrate interaction.
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Affiliation(s)
- Kevin Ho
- Department of Chemistry, University of Toronto, Toronto, Ontario M5S 3H6, Canada
| | - Kris S Kim
- Department of Chemistry, University of Toronto, Toronto, Ontario M5S 3H6, Canada
| | - Sissi de Beer
- Sustainable Polymer Chemistry, Department of Molecules & Materials, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, Enschede 7500 AE, The Netherlands
| | - Gilbert C Walker
- Department of Chemistry, University of Toronto, Toronto, Ontario M5S 3H6, Canada
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5
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Krishtab M, Armini S, Meersschaut J, De Gendt S, Ameloot R. Cyclic Plasma Halogenation of Amorphous Carbon for Defect-Free Area-Selective Atomic Layer Deposition of Titanium Oxide. ACS APPLIED MATERIALS & INTERFACES 2021; 13:32381-32392. [PMID: 34160190 DOI: 10.1021/acsami.1c04405] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
As critical dimensions in integrated circuits continue to shrink, the lithography-based alignment of adjacent patterned layers becomes more challenging. Area-selective atomic layer deposition (ALD) allows circumventing the alignment issue by exploiting the chemical contrast of the exposed surfaces. In this work, we investigate the selective deposition of TiO2 by plasma halogenation of amorphous carbon (a-C:H) acting as a growth-inhibiting layer. On a-C:H, a CF4 or Cl2 plasma forms a thin halogenated layer that suppresses the growth of TiO2, while nucleation remains unaffected on plasma-treated SiO2. The same halogenating plasmas preferentially etch TiO2 nuclei over films and thus enable the restoration of the halogenated surface of amorphous carbon. By embedding the intermediate plasma treatments in the ALD TiO2 sequence, an 8 nm TiO2 layer could be deposited with a selectivity of 0.998. The application of the cyclic process on a 60 nm half-pitch line pattern resulted in the defect-free deposition of TiO2 at the bottom of the trenches. Cyclic fluorination demonstrated better growth inhibition compared to chlorination due to more efficient defect removal and retention of the favorable surface composition during plasma exposure. While exploring the TiO2 nucleation defects at the limit of detection for conventional elemental analysis techniques (<1 × 1014 at/cm2), we additionally highlight the value of imaging techniques such as atomic force microscopy for understanding defect formation mechanisms and accurately assessing growth selectivity.
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Affiliation(s)
- Mikhail Krishtab
- cMACS, KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
- imec, Kapeldreef 75, 3001 Leuven, Belgium
| | | | | | - Stefan De Gendt
- imec, Kapeldreef 75, 3001 Leuven, Belgium
- Department of Chemistry, KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
| | - Rob Ameloot
- cMACS, KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
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6
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Ginige G, Song Y, Olsen BC, Luber EJ, Yavuz CT, Buriak JM. Solvent Vapor Annealing, Defect Analysis, and Optimization of Self-Assembly of Block Copolymers Using Machine Learning Approaches. ACS APPLIED MATERIALS & INTERFACES 2021; 13:28639-28649. [PMID: 34100583 DOI: 10.1021/acsami.1c05056] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Self-assembly of block copolymers (BCPs) is an alternative patterning technique that promises high resolution and density multiplication with lower costs. The defectivity of the resulting nanopatterns remains too high for many applications in microelectronics and is exacerbated by small variations of processing parameters, such as film thickness, and fluctuations of solvent vapor pressure and temperature, among others. In this work, a solvent vapor annealing (SVA) flow-controlled system is combined with design of experiments (DOE) and machine learning (ML) approaches. The SVA flow-controlled system enables precise optimization of the conditions of self-assembly of the high Flory-Huggins interaction parameter (χ) hexagonal dot-array forming BCP, poly(styrene-b-dimethylsiloxane) (PS-b-PDMS). The defects within the resulting patterns at various length scales are then characterized and quantified. The results show that the defectivity of the resulting nanopatterned surfaces is highly dependent upon very small variations of the initial film thicknesses of the BCP, as well as the degree of swelling under the SVA conditions. These parameters also significantly contribute to the quality of the resulting pattern with respect to grain coarsening, as well as the formation of different macroscale phases (single and double layers and wetting layers). The results of qualitative and quantitative defect analyses are then compiled into a single figure of merit (FOM) and are mapped across the experimental parameter space using ML approaches, which enable the identification of the narrow region of optimum conditions for SVA for a given BCP. The result of these analyses is a faster and less resource intensive route toward the production of low-defectivity BCP dot arrays via rational determination of the ideal combination of processing factors. The DOE and machine learning-enabled approach is generalizable to the scale-up of self-assembly-based nanopatterning for applications in electronic microfabrication.
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Affiliation(s)
- Gayashani Ginige
- Department of Chemistry, University of Alberta, 11227-Saskatchewan Drive, Edmonton, Alberta T6G 2G2, Canada
| | - Youngdong Song
- Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Brian C Olsen
- Department of Chemistry, University of Alberta, 11227-Saskatchewan Drive, Edmonton, Alberta T6G 2G2, Canada
| | - Erik J Luber
- Department of Chemistry, University of Alberta, 11227-Saskatchewan Drive, Edmonton, Alberta T6G 2G2, Canada
| | - Cafer T Yavuz
- Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- KAUST Catalysis Center (KCC), Physical Sciences and Engineering (PSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
- Advanced Membranes and Porous Materials Center (AMPM), Physical Sciences and Engineering (PSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
| | - Jillian M Buriak
- Department of Chemistry, University of Alberta, 11227-Saskatchewan Drive, Edmonton, Alberta T6G 2G2, Canada
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7
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Ghoshal T, Senthamaraikannan R, Shaw MT, Lundy R, Selkirk A, Morris MA. Fabrication of Graphoepitaxial Gate-All-Around Si Circuitry Patterned Nanowire Arrays Using Block Copolymer Assisted Hard Mask Approach. ACS NANO 2021; 15:9550-9558. [PMID: 34042425 PMCID: PMC8291765 DOI: 10.1021/acsnano.0c09232] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/04/2020] [Accepted: 05/20/2021] [Indexed: 05/25/2023]
Abstract
We demonstrate the fabrication of sub-20 nm gate-all-around silicon (Si) nanowire field effect transistor structures using self-assembly. To create nanopatterned Si feature arrays, a block-copolymer-assisted hard mask approach was utilized using a topographically patterned substrate with well-defined Si3N4 features for graphoepitaxially alignment of the self-assembled patterns. Microphase-separated long-range ordered polystyrene-b-poly(ethylene oxide) (PS-b-PEO) block-copolymer-derived dot and line nanopatterns were achieved by a thermo-solvent approach within the substrate topographically defined channels of various widths and lengths. Solvent annealing parameters (temperature, annealing time, etc.) were varied to achieve the desired patterns. The BCP structures were modified by anhydrous ethanol to facilitate insertion of iron oxide features within the graphoepitaxial trenches that maintained the parent BCP arrangements. Vertical and horizontal ordered Si nanowire structures within trenches were fabricated using the iron oxide features as hard masks in an inductively coupled plasma (ICP) etch process. Cross-sectional micrographs depict wires of persistent width and flat sidewalls indicating the effectiveness of the mask. The aspect ratios could be varied by varying etch times. The sharp boundaries between the transistor components was also examined through the elemental mapping.
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Affiliation(s)
- Tandra Ghoshal
- School
of Chemistry, AMBER and CRANN, Trinity College
Dublin, Dublin, Ireland D02 AK60
| | | | - Matthew T. Shaw
- Intel
Ireland Ltd., Collinstown Industrial
Park, Leixlip, Co. Kildare, Ireland W23 CX68
| | - Ross Lundy
- School
of Chemistry, AMBER and CRANN, Trinity College
Dublin, Dublin, Ireland D02 AK60
| | - Andrew Selkirk
- School
of Chemistry, AMBER and CRANN, Trinity College
Dublin, Dublin, Ireland D02 AK60
| | - Michael A. Morris
- School
of Chemistry, AMBER and CRANN, Trinity College
Dublin, Dublin, Ireland D02 AK60
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8
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Li J, Rincon-Delgadillo PA, Suh HS, Mannaert G, Nealey PF. Understanding Kinetics of Defect Annihilation in Chemoepitaxy-Directed Self-Assembly. ACS APPLIED MATERIALS & INTERFACES 2021; 13:25357-25364. [PMID: 34004117 DOI: 10.1021/acsami.1c03830] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Directed self-assembly (DSA) of block copolymers (BCP) has attracted considerable interest from the semiconductor industry because it can achieve semiconductor-relevant structures with a relatively simple process and low cost. However, the self-assembling structures can become kinetically trapped into defective states, which greatly impedes the implementation of DSA in high-volume manufacturing. Understanding the kinetics of defect annihilation is crucial to optimizing the process and eventually eliminating defects in DSA. Such kinetic experiments, however, are not commonly available in academic laboratories. To address this challenge, we perform a kinetic study of chemoepitaxy DSA in a 300 mm wafer fab, where the complete defectivity information at various annealing conditions can be readily captured. Through extensive statistical analysis, we reveal the statistical model of defect annihilation in DSA for the first time. The annihilation kinetics can be well described by a power law model, indicating that all dislocations can be removed by sufficiently long annealing time. We further develop image analysis algorithms to analyze the distribution of dislocation size and configurations and discover that the distribution stays relatively constant over time. The defect distribution is determined by the role of the guiding stripe, which is found to stabilize the defects. Although this study is based on polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA), we anticipate that these findings can be readily applied to other BCP platforms as well.
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Affiliation(s)
- Jiajing Li
- Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
| | | | | | | | - Paul F Nealey
- Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
- Argonne National Laboratory, Materials Science Division, Lemont, Illinois 60439, United States
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9
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Rottler J, Müller M. Kinetic Pathways of Block Copolymer Directed Self-Assembly: Insights from Efficient Continuum Modeling. ACS NANO 2020; 14:13986-13994. [PMID: 32909745 DOI: 10.1021/acsnano.0c06433] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
We introduce a computationally efficient continuum technique to simulate the complex kinetic pathways of block copolymer self-assembly. Subdiffusive chain dynamics is taken into account via nonlocal Onsager coefficients. An application to directed self-assembly of thin films of diblock copolymers on patterned substrates reveals the conditions under which experimentally observed metastable structures intervene in the desired thin-film morphology. The approach generalizes easily to multiblock copolymers and more complex guiding patterns on the substrate, and its efficiency allows for the systematic optimization of guiding patterns and process conditions.
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Affiliation(s)
- Jörg Rottler
- Department of Physics and Astronomy and Quantum Matter Institute, University of British Columbia, Vancouver, British Columbia V6T 1Z1, Canada
| | - Marcus Müller
- Institute for Theoretical Physics, Georg-August-Universität Göttingen, 37077 Göttingen, Germany
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10
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Bezik CT, de Pablo JJ. Formation, Stability, and Annihilation of the Stitched Morphology in Block Copolymer Thin Films. Macromolecules 2020. [DOI: 10.1021/acs.macromol.0c01777] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Cody T. Bezik
- Institute for Molecular Engineering, University of Chicago, Chicago, lllinois 60637, United States
| | - Juan J. de Pablo
- Institute for Molecular Engineering, University of Chicago, Chicago, lllinois 60637, United States
- Materials Science Division, Argonne National Laboratory, Lemont, Illinois 60439, United States
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11
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Ren Y, Müller M. Impact of Molecular Architecture on Defect Removal in Lamella-Forming Triblock Copolymers. Macromolecules 2020. [DOI: 10.1021/acs.macromol.0c00736] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Yongzhi Ren
- Key Lab of In-Fiber Integrated Optics, Ministry of Education, 150001 Harbin, China
- College of Physics and Optoelectronic Engineering, Harbin Engineering University, 150001 Harbin, China
| | - Marcus Müller
- Institut für Theoretische Physik, Universität Göttingen, 37077 Göttingen, Germany
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12
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Doise J, Koh JH, Kim JY, Zhu Q, Kinoshita N, Suh HS, Delgadillo PR, Vandenberghe G, Willson CG, Ellison CJ. Strategies for Increasing the Rate of Defect Annihilation in the Directed Self-Assembly of High-χ Block Copolymers. ACS APPLIED MATERIALS & INTERFACES 2019; 11:48419-48427. [PMID: 31752485 DOI: 10.1021/acsami.9b17858] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Directed self-assembly (DSA) of high-χ block copolymer thin films is a promising approach for nanofabrication of features with length scale below 10 nm. Recent work has highlighted that kinetics are of crucial importance in determining whether a block copolymer film can self-assemble into a defect-free ordered state. In this work, different strategies for improving the rate of defect annihilation in the DSA of a silicon-containing, high-χ block copolymer film were explored. Chemo-epitaxial DSA of poly(4-methoxystyrene-block-4-trimethylsilylstyrene) with 5× density multiplication was implemented on 300 mm wafers by using production level nanofabrication tools, and the influence of different processes and material parameters on dislocation defect density was studied. It was observed that only at sufficiently low χN can the block copolymer assemble into well-aligned patterns within a practical time frame. In addition, there is a clear correlation between the rate of the lamellar grain coarsening in unguided self-assembly and the rate of dislocation annihilation in DSA. For a fixed chemical pattern, the density of kinetically trapped dislocation defects can be predicted by measuring the correlation length of the unguided self-assembly under the same process conditions. This learning enables more efficient screening of block copolymers and annealing conditions by rapid analysis of block copolymer films that were allowed to self-assemble into unguided (commonly termed fingerprint) patterns.
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Affiliation(s)
- Jan Doise
- imec , Kapeldreef 75 , 3001 Heverlee , Belgium
| | - Jai Hyun Koh
- McKetta Department of Chemical Engineering , University of Texas at Austin , Austin , Texas 78712 , United States
| | - Ji Yeon Kim
- McKetta Department of Chemical Engineering , University of Texas at Austin , Austin , Texas 78712 , United States
| | - Qingjun Zhu
- McKetta Department of Chemical Engineering , University of Texas at Austin , Austin , Texas 78712 , United States
| | - Natsuko Kinoshita
- McKetta Department of Chemical Engineering , University of Texas at Austin , Austin , Texas 78712 , United States
- JSR Fine Electronic Materials Research Laboratories , Yokkaichi , Mie 510-8552 , Japan
| | | | | | | | - C Grant Willson
- McKetta Department of Chemical Engineering , University of Texas at Austin , Austin , Texas 78712 , United States
| | - Christopher J Ellison
- Department of Chemical Engineering and Materials Science , University of Minnesota Twin Cities , Minneapolis , Minnesota 55455 , United States
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13
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Zhou C, Dolejsi M, Xiong S, Ren J, Ashley EM, Craig GSW, Nealey PF. Combining double patterning with self-assembled block copolymer lamellae to fabricate 10.5 nm full-pitch line/space patterns. NANOTECHNOLOGY 2019; 30:455302. [PMID: 31342916 DOI: 10.1088/1361-6528/ab34f6] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Directed self-assembly of block copolymers and self-aligned double patterning are two commonly used pitch scaling techniques to increase the density of lithographic features. In this work, both of these pitch scaling techniques were combined, enabling patterning at even higher densities. In this process, directed self-assembly of a high-χ block copolymer was used to form a line/space pattern, which served as a template for mandrels. Via these mandrels, atomic layer deposition was used to deposit a thin aluminium oxide spacer. By this method, a total pitch scaling factor of 8, equivalent to a 10.5 nm full pitch, was reached. The types of defects and the line roughness at the different steps of the process were discussed.
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Affiliation(s)
- Chun Zhou
- Pritzker School of Molecular Engineering, The University of Chicago, 5801 South Ellis Avenue, Chicago, IL 60637, United States of America
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14
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Chen X, Delgadillo PR, Jiang Z, Craig GSW, Gronheid R, Nealey PF. Defect Annihilation in the Directed Self-Assembly of Block Copolymers in Films with Increasing Thickness. Macromolecules 2019. [DOI: 10.1021/acs.macromol.9b01030] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Xuanxuan Chen
- Intel Corporation, 2501 NE Century Boulevard, Hillsboro, Oregon 97124, United States
- Institute for Molecular Engineering, University of Chicago, 5640 S Ellis Avenue, Chicago, Illinois 60637, United States
| | - Paulina R. Delgadillo
- Institute for Molecular Engineering, University of Chicago, 5640 S Ellis Avenue, Chicago, Illinois 60637, United States
- Imec, Kapeldreef 75, Leuven B-3001, Belgium
| | - Zhang Jiang
- X-ray Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439, United States
| | - Gordon S. W. Craig
- Institute for Molecular Engineering, University of Chicago, 5640 S Ellis Avenue, Chicago, Illinois 60637, United States
| | | | - Paul F. Nealey
- Institute for Molecular Engineering, University of Chicago, 5640 S Ellis Avenue, Chicago, Illinois 60637, United States
- Material Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, Illinois 60439, United States
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15
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Nakatani R, Chandra A, Uchiyama T, Nabae Y, Hayakawa T. Dynamic Ordering in High-χ Block Copolymer Lamellae Based on Cross-Sectional Orientational Alignment. ACS Macro Lett 2019; 8:1122-1127. [PMID: 35619441 DOI: 10.1021/acsmacrolett.9b00353] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/07/2023]
Abstract
Further development of next-generation block copolymer (BCP) lithography processes is contingent on comprehensive studies of the ordering dynamics of high-χ BCPs that can form sub-10 nm features on thin films. However, quantitative analyses of the degree of ordering on the surface and cross sections of thin films have been difficult to execute. To tackle this challenge, we employ a perpendicular lamella-forming high-χ BCP, poly(polyhedral oligomeric silsesquixone-block-2,2,2-trifluoroethyl methacrylate) (PMAPOSS-b-PTFEMA), and reveal that the high-χ PMAPOSS-b-PTFEMA requires three times the activation energy (Ea) compared to that of poly(styrene-block-methyl methacrylate) (PS-b-PMMA) for defect annihilation, at Ea = 2600 ± 420 kJ mol-1, and a transition from a fast ordering regime with a growth exponent of Φ = 0.30 at lower orientational order parameters (ψ2 < 0.36) to a slow ordering regime with Φ < 0.05 at ψ2 > 0.36, where well-aligned lamellae restrict defect annihilations to enthalpically unfavorable glide mechanisms that require BCP intermixing.
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Affiliation(s)
- Ryuichi Nakatani
- Department of Materials Science and Engineering, School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1-S8-36 Ookayama, Meguro-ku, Tokyo 152-8552, Japan
| | - Alvin Chandra
- Department of Materials Science and Engineering, School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1-S8-36 Ookayama, Meguro-ku, Tokyo 152-8552, Japan
| | - Takumi Uchiyama
- Department of Materials Science and Engineering, School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1-S8-36 Ookayama, Meguro-ku, Tokyo 152-8552, Japan
| | - Yuta Nabae
- Department of Materials Science and Engineering, School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1-S8-36 Ookayama, Meguro-ku, Tokyo 152-8552, Japan
| | - Teruaki Hayakawa
- Department of Materials Science and Engineering, School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1-S8-36 Ookayama, Meguro-ku, Tokyo 152-8552, Japan
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16
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Zhao W, Duan C, Li W. Hybrid line-dot nanopatterns from directed self-assembly of diblock copolymers by trenches. Phys Chem Chem Phys 2019; 21:10011-10021. [PMID: 31041947 DOI: 10.1039/c9cp00949c] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
We demonstrate that the directed self-assembly of AB diblock copolymers by periodic trenches can be used to fabricate large-scale ordered hybrid line-dot nanopatterns in addition to a defect-free dot nanopattern. The formation of line or dot nanopatterns in thin films with proper surface affinities is controlled by the film thickness, which is modulated by a topographic pattern consisting of steps and trenches. Two kinds of line-dot nanopatterns are achieved with cylinder-forming and sphere-forming copolymers, respectively. One kind of hybrid nanopatterns is composed of perpendicularly standing cylinders (dots) on the steps and parallel monolayer cylinders (lines) within the trenches, while the dots of the other kind are replaced by monolayer spheres on the steps. The thermodynamic stability region of target hybrid nanopatterns is identified by constructing two-dimensional phase diagrams with respect to two control parameters of step height and film thickness using self-consistent field theory. Furthermore, a process window of the line-dot nanopatterns is estimated using cell dynamics simulations based on time-dependent Ginzburg-Landau theory, confirming their feasibility in kinetics.
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Affiliation(s)
- Wenfeng Zhao
- State Key Laboratory of Molecular Engineering of Polymers, Key Laboratory of Computational Physical Sciences, Department of Macromolecular Science, Fudan University, Shanghai 200433, China.
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