Direct Resistless Soft Nanopatterning of Freeform Surfaces

Direct nanoimprint of chalcogenide glasses with optical functionalities via solvent-based surface softening

Chalcogenide glasses are attractive materials for optical applications. However, these applications often require patterning of the surface with functional micro-/ nanostructures. Such patterning is challenging by traditional microfabrication methods. Here, we present a new, to the best of our knowledge, approach of direct imprint via solvent-based surface softening, for the patterning of As₂Se₃ surface. Our approach is based on an elastomeric stamp soaked in an organic solvent. During the imprint, the solvent diffuses into the imprinted substrate, plasticizes its surface, and thereby allows its imprint at the temperature below its glass transition point. Thus, our approach combines the full pattern transfer with the maintenance of the shape of the imprinted substrate, which is necessary for optical devices. By using this approach, we demonstrated functional antireflective microstructures directly imprinted on As₂Se₃ surface. Furthermore, we showed that our approach can produce imprinted features sized down to 20 nm scale. We believe that our new approach paves the way for more future applications of chalcogenide glasses.

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

There is an astonishing number of optoelectronic, photonic, biological, sensing, or storage media devices, just to name a few, that rely on a variety of extraordinary periodic surface relief miniaturized patterns fabricated on polymer-covered rigid or flexible substrates. Even more extraordinary is that these surface relief patterns can be further filled, in a more or less ordered fashion, with various functional nanomaterials and thus can lead to the realization of more complex structured architectures. These architectures can serve as multifunctional platforms for the design and the development of a multitude of novel, better performing nanotechnological applications. In this work, we aim to provide an extensive overview on how multifunctional structured platforms can be fabricated by outlining not only the main polymer patterning methodologies but also by emphasizing various deposition methods that can guide different structures of functional nanomaterials into periodic surface relief patterns. Our aim is to provide the readers with a toolbox of the most suitable patterning and deposition methodologies that could be easily identified and further combined when the fabrication of novel structured platforms exhibiting interesting properties is targeted.

Surface plasticizing of chalcogenide glasses: a route for direct nanoimprint with multifunctional antireflective and highly hydrophobic structures

Chalcogenide glasses are attractive materials for optical applications. However, these applications often require pattering of the surface with functional micro-/ nanostructures, which is challenging by traditional microfabrication. Here, we present a novel, robust, and scalable approach for the direct patterning of chalcogenide glasses, based on soft imprinting of a solvent-plasticized glass layer formed on the glass surface. We established a methodology for surfaces plasticizing, through tuning of its glass transition temperature by process conditions, without compromising on the chemical composition, structure, and optical properties of the plasticized layer. This control over the glass transition temperature allowed to imprint the surface of chalcogenide glass with features sized down to 20 nm, and achieve an unprecedented combination of full pattern transfer and complete maintenance of the shape of the imprinted substrate. We demonstrated two applications of our patterning approach: a diffraction grating, and a multifunctional pattern with both antireflective and highly hydrophobic water-repellent functionalities - a combination that has never been demonstrated for chalcogenide glasses. This work opens a new route for the nanofabrication of optical devices based on chalcogenide glasses and paves the way to numerous future applications for these important optical materials.