Monitoring Ozone Using Portable Substrate-Integrated Hollow Waveguide-Based Absorbance Sensors in the Ultraviolet Range

Design and Performance Evaluation of a Deep Ultraviolet LED-Based Ozone Sensor for Semiconductor Industry Applications

Ozone (O3) is a critical gas in various industrial applications, particularly in semiconductor manufacturing, where it is used for wafer cleaning and oxidation processes. Accurate and reliable detection of ozone concentration is essential for process control, ensuring product quality, and safeguarding workplace safety. By studying the UV absorption characteristics of O3 and combining the specific operational needs of semiconductor process gas analysis, a pressure-insensitive ozone gas sensor has been developed. In its optical structure, a straight-through design without corners was adopted, achieving a coupling efficiency of 52% in the gas chamber. This device can operate reliably in a temperature range from 0 °C to 50 °C, with only ±0.3% full-scale error across the entire temperature range. The sensor consists of a deep ultraviolet light-emitting diode in a narrow spectrum centered at 254 nm, a photodetector, and a gas chamber, with dimensions of 85 mm × 25 mm × 35 mm. The performance of the sensor has been meticulously evaluated through simulation and experimental analysis. The sensor's gas detection accuracy is 750 ppb, with a rapid response time (t90) of 7 s, and a limit of detection of 2.26 ppm. It has the potential to be applied in various fields for ozone monitoring, including the semiconductor industry, water treatment facilities, and environmental research.

Fabrication of Low-Cost Miniaturized Gas Cells via SLA 3D-Printing for UV-Based Gas Sensors

The use of 3D-printing technology for producing optical devices (i.e., mirrors and waveguides) remains challenging, especially in the UV spectral regime. Gas sensors based on absorbance measurements in the UV region are suitable for determining numerous volatile species in a variety of samples and analytical scenarios. The performance of absorbance-based gas sensors is dependent on the ability of the gas cell to propagate radiation across the absorption path length and facilitate interaction between photons and analytes. In this technical note, we present a 3D-printed substrate-integrated hollow waveguide (iHWG) to be used as a miniaturized and ultralightweight gas cell used in UV gas-sensing schemes. The substrates were fabricated via UV stereolithography and polished, and the light-guiding channel was coated with aluminum for UV reflectivity. This procedure resulted in a surface roughness of 11.2 nm for the reflective coating, yielding a radiation attenuation of 2.25 W/cm2. The 3D-printed iHWG was coupled to a UV light source and a portable USB-connected spectrometer. The sensing device was applied for the quantification of isoprene and acetone, serving as a proof-of-concept study. Detection limits of 0.22 and 0.03% in air were obtained for acetone and isoprene, respectively, with a nearly instantaneous sensor response. The development of portable, low-cost, and ultralightweight UV optical sensors enables their use in a wide range of scenarios ranging from environmental monitoring to clinical/medical applications.

A miniaturized photometric ozone sensor using ultraviolet LED with unbalance differential correction and 3D printing

Ozone (O3) sensing is of great significance to discern the ambient virulence from environmental deterioration. We developed a miniature, low power, low cost, and wide-temperature-range (-40 to +85 °C) photometric O3 sensor for continuous and in-situ ambient O3 monitoring. The primary innovation in this sensor is the combination of ultraviolet light emitting diodes (UV-LEDs) with unbalanced differential optical measurement with algorithm correction, sensitive electronic module, and 3D printing fabrication. The sensor operated in the Hartley band of O3 with a UV-LED (258 nm, 1mw) and software phase-sensitive detection. Experimental results showed high performance of the sensor with detection limit of 8 ppb and relative error of 0.22%. The dimension, power, and weight of the sensor are as low as 11.4 × 5 × 2.4 cm, 0.5 W, and 0.1 kg, respectively, much lower than that of most O3 sensors. We also demonstrated the feasibility of the sensor in continuously O3 monitoring in an office.

Sensing Liquid- and Gas-Phase Hydrocarbons via Mid-Infrared Broadband Femtosecond Laser Source Spectroscopy

In this study, we demonstrate the combination of a tunable broadband mid-infrared (MIR) femtosecond laser source separately coupled to a ZnSe crystal horizontal attenuated total reflection (ATR) sensor cell for liquid phase samples and to a substrate-integrated hollow waveguide (iHWG) for gas phase samples. Utilizing this emerging light source technology as an alternative MIR radiation source for Fourier transform infrared (FTIR) spectroscopy opens interesting opportunities for analytical applications. In a first approach, we demonstrate the quantitative analysis of three individual samples, ethanol (liquid), methane (gas), and 2-methyl-1-propene (gas), with limits of detection of 0.3% (ethanol) and 22 ppmv and 74 ppmv (methane and isobutylene), respectively, determined at selected emission wavelengths of the MIR laser source (i.e., 890 cm-1, 1046 and 1305 cm-1). Hence, the applicability of a broadband MIR femtosecond laser source as a bright alternative light source for quantitative analysis via FTIR spectroscopy in various sensing configurations has been demonstrated.

Wearable Nano-Based Gas Sensors for Environmental Monitoring and Encountered Challenges in Optimization

With a rising emphasis on public safety and quality of life, there is an urgent need to ensure optimal air quality, both indoors and outdoors. Detecting toxic gaseous compounds plays a pivotal role in shaping our sustainable future. This review aims to elucidate the advancements in smart wearable (nano)sensors for monitoring harmful gaseous pollutants, such as ammonia (NH3), nitric oxide (NO), nitrous oxide (N2O), nitrogen dioxide (NO2), carbon monoxide (CO), carbon dioxide (CO2), hydrogen sulfide (H2S), sulfur dioxide (SO2), ozone (O3), hydrocarbons (CxHy), and hydrogen fluoride (HF). Differentiating this review from its predecessors, we shed light on the challenges faced in enhancing sensor performance and offer a deep dive into the evolution of sensing materials, wearable substrates, electrodes, and types of sensors. Noteworthy materials for robust detection systems encompass 2D nanostructures, carbon nanomaterials, conducting polymers, nanohybrids, and metal oxide semiconductors. A dedicated section dissects the significance of circuit integration, miniaturization, real-time sensing, repeatability, reusability, power efficiency, gas-sensitive material deposition, selectivity, sensitivity, stability, and response/recovery time, pinpointing gaps in the current knowledge and offering avenues for further research. To conclude, we provide insights and suggestions for the prospective trajectory of smart wearable nanosensors in addressing the extant challenges.

Recent trends in ozone sensing technology

The harmful impact of ozone on humans and the environment makes the development of economical, accurate, and efficient ozone monitoring technologies necessary. Therefore, in the present review, we critically discuss developments in the methods for the synthesis of ozone sensing materials such as metal oxides (Ni, Co, Pd, In, Cu, Zn, Fe, Sn, W, Ti and Mo), carbon nanotubes, organic compounds, perovskites, and quartz. Additionally, the recent advancements and innovations in ozone technology will be discussed. In this review, we focus on assembling ozone-sensing devices and developing related wireless communication, data transferring, and analyzing technologies together with satellite, airborne, and ground-based novel ozone-sensing strategies for monitoring the atmosphere, urban areas, and working environments. Furthermore, the developments in ozone-monitoring miniaturized devices technology will be considered. The effects of different factors, such as spatial-temporal variation, humidity, and calibration, on ozone measurements will also be discussed. It is anticipated that this review will bridge the knowledge gaps among materials chemists, engineers, and industry.

Flexible terahertz gas sensing platform based on substrate-integrated hollow waveguides and an opto-electronic light source

We report on a flexible platform for molecular sensing in the terahertz range. Merging the well-established technologies of near-infrared electro-optic modulation and photomixing realizes a spectrally adaptable terahertz source, which is combined with a new generation of compact gas cells, so-called substrate-integrated hollow waveguides (iHWGs). iHWGs have been developed in the mid-infrared and provide flexibility in the design of the optical absorption path. Here, we demonstrate its suitability for the terahertz domain by presenting its low propagation losses and by measuring rotational transitions of nitrious oxide (N₂O). A fast frequency sideband modulation technique results in substantially reduced measurement times and increased accuracy compared to a standard wavelength tuning method.