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Xue G, Qin B, Ma C, Yin P, Liu C, Liu K. Large-Area Epitaxial Growth of Transition Metal Dichalcogenides. Chem Rev 2024. [PMID: 39132950 DOI: 10.1021/acs.chemrev.3c00851] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 08/13/2024]
Abstract
Over the past decade, research on atomically thin two-dimensional (2D) transition metal dichalcogenides (TMDs) has expanded rapidly due to their unique properties such as high carrier mobility, significant excitonic effects, and strong spin-orbit couplings. Considerable attention from both scientific and industrial communities has fully fueled the exploration of TMDs toward practical applications. Proposed scenarios, such as ultrascaled transistors, on-chip photonics, flexible optoelectronics, and efficient electrocatalysis, critically depend on the scalable production of large-area TMD films. Correspondingly, substantial efforts have been devoted to refining the synthesizing methodology of 2D TMDs, which brought the field to a stage that necessitates a comprehensive summary. In this Review, we give a systematic overview of the basic designs and significant advancements in large-area epitaxial growth of TMDs. We first sketch out their fundamental structures and diverse properties. Subsequent discussion encompasses the state-of-the-art wafer-scale production designs, single-crystal epitaxial strategies, and techniques for structure modification and postprocessing. Additionally, we highlight the future directions for application-driven material fabrication and persistent challenges, aiming to inspire ongoing exploration along a revolution in the modern semiconductor industry.
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Affiliation(s)
- Guodong Xue
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
| | - Biao Qin
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
| | - Chaojie Ma
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
| | - Peng Yin
- Key Laboratory of Quantum State Construction and Manipulation (Ministry of Education), Department of Physics, Renmin University of China, Beijing 100872, China
| | - Can Liu
- Key Laboratory of Quantum State Construction and Manipulation (Ministry of Education), Department of Physics, Renmin University of China, Beijing 100872, China
| | - Kaihui Liu
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China
- International Centre for Quantum Materials, Collaborative Innovation Centre of Quantum Matter, Peking University, Beijing 100871, China
- Songshan Lake Materials Laboratory, Dongguan 523808, China
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Lei J, Xie Y, Kutana A, Bets KV, Yakobson BI. Salt-Assisted MoS 2 Growth: Molecular Mechanisms from the First Principles. J Am Chem Soc 2022; 144:7497-7503. [DOI: 10.1021/jacs.2c02497] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/22/2022]
Affiliation(s)
- Jincheng Lei
- Department of Materials Science & Nanoengineering, Rice University, Houston, Texas 77005, United States
| | - Yu Xie
- Department of Materials Science & Nanoengineering, Rice University, Houston, Texas 77005, United States
| | - Alex Kutana
- Department of Materials Science & Nanoengineering, Rice University, Houston, Texas 77005, United States
| | - Ksenia V. Bets
- Department of Materials Science & Nanoengineering, Rice University, Houston, Texas 77005, United States
| | - Boris I. Yakobson
- Department of Materials Science & Nanoengineering, Rice University, Houston, Texas 77005, United States
- Department of Chemistry, Rice University, Houston, Texas 77005, United States
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Li X, Li B, Lei J, Bets KV, Sang X, Okogbue E, Liu Y, Unocic RR, Yakobson BI, Hone J, Harutyunyan AR. Nickel particle-enabled width-controlled growth of bilayer molybdenum disulfide nanoribbons. SCIENCE ADVANCES 2021; 7:eabk1892. [PMID: 34890223 PMCID: PMC8664269 DOI: 10.1126/sciadv.abk1892] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/27/2021] [Accepted: 10/25/2021] [Indexed: 05/19/2023]
Abstract
Transition metal dichalcogenides exhibit a variety of electronic behaviors depending on the number of layers and width. Therefore, developing facile methods for their controllable synthesis is of central importance. We found that nickel nanoparticles promote both heterogeneous nucleation of the first layer of molybdenum disulfide and simultaneously catalyzes homoepitaxial tip growth of a second layer via a vapor-liquid-solid (VLS) mechanism, resulting in bilayer nanoribbons with width controlled by the nanoparticle diameter. Simulations further confirm the VLS growth mechanism toward nanoribbons and its orders of magnitude higher growth speed compared to the conventional noncatalytic growth of flakes. Width-dependent Coulomb blockade oscillation observed in the transfer characteristics of the nanoribbons at temperatures up to 60 K evidences the value of this proposed synthesis strategy for future nanoelectronics.
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Affiliation(s)
- Xufan Li
- Honda Research Institute USA Inc., San Jose, CA 95134, USA
| | - Baichang Li
- Mechanical Engineering Department, Columbia University, New York, NY 10025, USA
| | - Jincheng Lei
- Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
| | - Ksenia V. Bets
- Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
| | - Xiahan Sang
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
| | | | - Yang Liu
- Mechanical Engineering Department, Columbia University, New York, NY 10025, USA
| | - Raymond R. Unocic
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
| | - Boris I. Yakobson
- Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
| | - James Hone
- Mechanical Engineering Department, Columbia University, New York, NY 10025, USA
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