Micromachined Chip Scale Thermal Sensor for Thermal Imaging

Accurate detection of subsurface microcavity by bimodal atomic force microscopy

Subsurface detection capability of bimodal atomic force microscopy (AFM) was investigated using the buried microcavity as a reference sample, prepared by partially covering a piece of highly oriented pyrolytic graphite (HOPG) flake with different thickness on a piece of a cleaned CD-R disk substrate. This capability can be manifested as the image contrast between the locations with and without the buried microcavities. The theoretical and experimental results demonstrated that the image contrast is significantly affected by the critical parameters, including the second eigenmode amplitude and frequency as well as local structural and mechanical properties of the sample itself. Specifically, improper parameter settings generally lead to incorrect identification of the buried microcavity due to the contrast reduction, contrast reversal and even disappearance. For accurate detection, the second eigenmode amplitude should be as small as possible on the premise of satisfying the signal-to-noise ratio and second eigenmode frequency should be close to the resonance frequency of the cantilever. In addition, the detectable depth is closely related to microcavity dimension (thickness and width) of the HOPG flake and local stiffness of the sample. These results would be helpful for further understanding of the detection mechanism of bimodal AFM and facilitating its application in nano-characterization of subsurface structures, such as the micro-/nano- channels to direct the flow of liquids in lab-on-a-chip devices.

Nanoscale Rheology: Dynamic Mechanical Analysis over a Broad and Continuous Frequency Range Using Photothermal Actuation Atomic Force Microscopy

Polymeric materials are widely used in industries ranging from automotive to biomedical. Their mechanical properties play a crucial role in their application and function and arise from the nanoscale structures and interactions of their constitutive polymer molecules. Polymeric materials behave viscoelastically, i.e., their mechanical responses depend on the time scale of the measurements; quantifying these time-dependent rheological properties at the nanoscale is relevant to develop, for example, accurate models and simulations of those materials, which are needed for advanced industrial applications. In this paper, an atomic force microscopy (AFM) method based on the photothermal actuation of an AFM cantilever is developed to quantify the nanoscale loss tangent, storage modulus, and loss modulus of polymeric materials. The method is then validated on styrene-butadiene rubber (SBR), demonstrating the method's ability to quantify nanoscale viscoelasticity over a continuous frequency range up to 5 orders of magnitude (0.2-20,200 Hz). Furthermore, this method is combined with AFM viscoelastic mapping obtained with amplitude modulation-frequency modulation (AM-FM) AFM, enabling the extension of viscoelastic quantification over an even broader frequency range and demonstrating that the novel technique synergizes with preexisting AFM techniques for quantitative measurement of viscoelastic properties. The method presented here introduces a way to characterize the viscoelasticity of polymeric materials and soft and biological matter in general at the nanoscale for any application.

Ultrasensitive Photothermal Spectroscopy: Harnessing the Seebeck Effect for Attogram-Level Detection

Molecular-level spectroscopy is crucial for sensing and imaging applications, yet detecting and quantifying minuscule quantities of chemicals remain a challenge, especially when they surface adsorb in low numbers. Here, we introduce a photothermal spectroscopic technique that enables the high selectivity sensing of adsorbates with an attogram detection limit. Our approach utilizes the Seebeck effect in a microfabricated nanoscale thermocouple junction, incorporated into the apex of a microcantilever. We observe minimal thermal mass exhibited by the sensor, which maintains exceptional thermal insulation. The temperature variation driving the thermoelectric junction arises from the nonradiative decay of molecular adsorbates' vibrational states on the tip. We demonstrate the detection of photothermal spectra of physisorbed trinitrotoluene (TNT) and dimethyl methylphosphonate (DMMP) molecules, as well as representative polymers, with an estimated mass of 10-18 g.

Direct observation of hot-electron-enhanced thermoelectric effects in silicon nanodevices

The study of thermoelectric behaviors in miniatured transistors is of fundamental importance for developing bottom-level thermal management. Recent experimental progress in nanothermetry has enabled studies of the microscopic temperature profiles of nanostructured metals, semiconductors, two-dimensional material, and molecular junctions. However, observations of thermoelectric (such as nonequilibrium Peltier and Thomson) effect in prevailing silicon (Si)-a critical step for on-chip refrigeration using Si itself-have not been addressed so far. Here, we carry out nanothermometric imaging of both electron temperature (T_e) and lattice temperature (T_L) of a Si nanoconstriction device and find obvious thermoelectric effect in the vicinity of the electron hotspots: When the electrical current passes through the nanoconstriction channel generating electron hotspots (with T_e~1500 K being much higher than T_L~320 K), prominent thermoelectric effect is directly visualized attributable to the extremely large electron temperature gradient (~1 K/nm). The quantitative measurement shows a distinctive third-power dependence of the observed thermoelectric on the electrical current, which is consistent with the theoretically predicted nonequilibrium thermoelectric effects. Our work suggests that the nonequilibrium hot carriers may be potentially utilized for enhancing the thermoelectric performance and therefore sheds new light on the nanoscale thermal management of post-Moore nanoelectronics.

Temperature Distribution in TaO x Resistive Switching Devices Assessed In Operando by Scanning Thermal Microscopy

Understanding the physical changes during electroformation and switching processes in transition-metal-oxide-based non-volatile memory devices is important for advancing this technology. Relatively few characteristics of these devices have been assessed in operando. In this work, we present scanning thermal microscopy measurements in vacuum on TaO _x -based memory devices electroformed in both positive and negative polarities and high- and low-resistance states. The observed surface temperature footprints of the filament showed higher peak temperatures and narrower temperature distributions when the top electrode served as the anode in the electroformation process. This is consistent with a model in which a hot spot is created by a gap in the conducting filament that forms closest to the anode. A similar behavior was seen on comparing the high-resistance state to the low-resistance state, with the low-resistance footprint showing a lower peak and a larger width, consistent with the gap disappearing when the device is switched from high resistance to low resistance.

Interpenetration of Donor-Acceptor Hybrid Frameworks for Highly Sensitive Thermal Sensors

Donor-acceptor (D-A) alignment that integrates D-A pairs into the modular and versatile crystalline metal-organic frameworks is a powerful strategy to precisely fabricate multifunctional materials with unique optoelectronic properties and applications at the molecular level. Herein, we reported an unprecedented threefold interpenetrating D-A hybrid framework by incorporating an electron-deficient linear viologen zwitterion into the lead-halide systems. The 1D iodoplumbate nanoribbon and interpenetrating close-packed D-A structure endowed this hitherto unknown semiconductive alignment with the anisotropic conductivity and high stability. When used in a thermal sensor, it presented exceptional electrical properties with a high sensitivity (high thermal index B of 4671 K) and decent temperature coefficient of resistivity (0.72% °C^-1) in wide operational temperature ranges (40-220 °C), which are among the best of the related thermistors. This work develops a pathway to bridge the gaps between hybrid materials and electron devices.

An Assessment of MXenes through Scanning Probe Microscopy

Recently, exploring the unique properties of 2D materials has constituted a new wave of research, which lead these materials to enormous applications ranging from optoelectronics to healthcare systems. Due to the profusion of surface terminated functionalities, MXenes have become an emerging class of 2D materials that can be easily integrated with other materials. The versatility of MXenes allows to tune their finest material properties for further device applications. This review initiates with the classification of preparation methods of MXenes, where the authors elaborate on the significance of top-down approaches including the exfoliation of solid layers. Next, the focus is diverted toward the materials analysis of MXenes including their terminations analysis as well as their intriguing electrical and mechanical behaviors through scanning probe microscopy. Finally, critical challenges and perspectives for MXenes analysis and applications are explored and discussed. Therefore, this comprehensive review can encourage researchers, and offer a precise direction to employ MXenes in various applications.

Visualization of Thermal Transport Properties of Self-Assembled Monolayers on Au(111) by Contact and Noncontact Scanning Thermal Microscopy

Thermal transport properties of patterned binary self-assembled monolayers (SAMs) on Au(111) were examined using scanning thermal microscopy (SThM) with both contact and noncontact methods. We fabricated two-dimensional (2D) patterns with two separate domains of n-hexadecanethiol/benzenethiol, benzenethiol/n-butanethiol, or n-hexadecanethiol/n-butanethiol. In the experimental setup, the efficiency of thermal transport from a SThM tip to the SAM surface can be evaluated in terms of the temperature change at the SThM tip. In the contact regime, where a SThM tip physically contacts the SAM surface, direct thermal transport through the SAM and radiation-based thermal transport through the space where SAMs exist may contribute to a drop in temperature at the tip. In the noncontact regime, thermal transport relies on radiation-based heat dissipation from the heated tip to the SAMs. 2D mapping of the spatial temperature distribution on SAMs reflects the difference in thermal transport properties of the two SAM domains. We found that the contact method is effective for visualizing the temperature contrast, which reflects the thermal transport properties of the constituent molecules when the domains of the SAMs have a similar height, while the noncontact method allows visualization of the temperature distribution, which is related to the height of each domain of the SAMs, rather than the chemical structures of the constituent molecules. Combination of contact and noncontact SThM enables 2D imaging of thermal transport properties and topographic imaging simultaneously and represents a new technique for investigating the thermal properties of materials surfaces, which is essential for nanoscale thermal management.

Silver fractal dendrites for highly sensitive and transparent polymer thermistors

Effective temperature measurement using non-invasive sensors finds applications in virtually every field of human life. Recently, significant efforts have been made toward developing polymer positive temperature coefficient (PTC) thermistors because they have advantages including flexibility, conformability, and biocompatibility. However, most polymer PTC thermistors still have issues such as low sensitivity, low optical transparency, and poor operational durability because of low electrical conductivity and inefficient hopping transport of conventional conductive filler. Here, a highly sensitive and transparent polymer thermistor composed of silver fractal dendrites (AgFDs) and a polyacrylate (PA) matrix has been successfully demonstrated. A AgFDs-PA composite film exhibits a superior PTC effect (about 10⁴Ω°C^-1) around 35 °C because of the high electrical conductivity of the AgFDs and the quantum tunneling effect among them. A thermistor based on the AgFDs-PA composite shows excellent sensitivity, PTC intensity (∼10⁷), and sensing resolution through dramatic resistance changes from thousands to billions of ohms in the human body temperature range (34-37 °C). Moreover, it exhibits excellent optical transparency (82.14%), mechanical flexibility, and operational durability. An electrical impedance spectroscopy analysis shows that the distance between the AgFDs increases with temperature, which implies that the quantum tunneling effect amplified by the branches of the AgFDs has a significant influence on the changes in resistance. This characteristic makes the thermistor immediately suitable for monitoring body temperature. We anticipate that the new thermistor based on the AgFDs-PA composite can be a key component of various sensing applications.

A flexible bimodal sensor based on an electrospun nanofibrous structure for simultaneous pressure-temperature detection

We developed a flexible and multifunctional resistive sensor integrating uniform conductive coating layers with an interlaced nanofibrous structure through a large-scale and cost-efficient strategy. The elastomer nanofiber framework not only endows the multi-mode sensor with superior flexibility, but also provides abundant contact sites and contact areas, which can significantly enhance the sensitivity and operating range of the obtained sensor. More impressively, the multilevel sensing paths comprising both interlaminar and intrastratal signal transmissions fulfill the simultaneous and precise detection of pressure-temperature stimuli without interference with each other. The obtained sensor ultimately shows an ultrahigh pressure sensitivity of 1185.8 kPa-1 and superior reliability, enabling the rapid detection of a subtle stimulus as low as 2.4 Pa and superior response behavior under 5000 cyclic loading tests. Besides, high linearity and stability are achieved for the temperature sensing characteristic even under various pressure loadings. These outstanding performances are further evaluated by preparing a 4 × 5 bimodal sensor array to synchronously monitor multiple signals, consequently demonstrating precise sensing capability with negligible interference and providing an effective approach for developing multiparametric sensing platforms and wearable devices.

Spatial Mapping of Hot-Spots at Lateral Heterogeneities in Monolayer Transition Metal Dichalcogenides

Lateral heterogeneities in atomically thin 2D materials such as in-plane heterojunctions and grain boundaries (GBs) provide an extrinsic knob for manipulating the properties of nano- and optoelectronic devices and harvesting novel functionalities. However, these heterogeneities have the potential to adversely affect the performance and reliability of the 2D devices through the formation of nanoscopic hot-spots. In this report, scanning thermal microscopy (SThM) is utilized to map the spatial distribution of the temperature rise within monolayer transition metal dichalcogenide (TMD) devices upon dissipating a high electrical power through a lateral interface. The results directly demonstrate that lateral heterojunctions between MoS₂ and WS₂ do not largely impact the distribution of heat dissipation, while GBs of MoS₂ appreciably localize heating in the device. High-resolution scanning transmission electron microscopy reveals that the atomic structure is nearly flawless around heterojunctions but can be quite defective near GBs. The results suggest that the interfacial atomic structure plays a crucial role in enabling uniform charge transport without inducing localized heating. Establishing such structure-property-processing correlation provides a better understanding of lateral heterogeneities in 2D TMD systems which is crucial in the design of future all-2D electronic circuitry with enhanced functionalities, lifetime, and performance.

Mapping Hot Spots at Heterogeneities of Few-Layer Ti3C2 MXene Sheets

Structural defects and heterogeneities play an enormous role in the formation of localized hot spots in 2D materials used in a wide range of applications from electronics to energy systems. In this report, we employ scanning thermal microscopy (SThM) to spatially map the temperature rise across various defects and heterogeneities of titanium carbide (Ti₃C₂T _x; T stands for surface terminations) MXene nanostructures under high electrical bias with sub-50 mK temperature resolution and sub-100 nm spatial resolution. We investigated several Ti₃C₂T _x flakes having different thicknesses as well as heterogeneous MXene structures incorporating line defects or vertical heterojunctions. High-resolution temperature rise maps allow us to identify localized hot spots and to quantify the nonuniformity of the temperature fields across various morphological features. The results show that the local heating is most severe in vertical junctions of MXene flakes and is highly affected by nonuniform conduction due to the presence of line defects. These results provide a direct insight into the power dissipation of MXene-based devices and the roles of various heterogeneities that are inherent to the material synthesis process. This study provides a guideline for how a better understanding of the structure-property-processing correlations and further optimization of the synthesis routes could improve the lifetime, safety, and operation limits of the MXene-based devices.