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Ahn J, Jang H, Jeong Y, Choi S, Ko J, Hwang SH, Jeong J, Jung YS, Park I. Illuminating Recent Progress in Nanotransfer Printing: Core Principles, Emerging Applications, and Future Perspectives. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2303704. [PMID: 38032705 PMCID: PMC10767444 DOI: 10.1002/advs.202303704] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/07/2023] [Revised: 08/20/2023] [Indexed: 12/01/2023]
Abstract
As the demand for diverse nanostructures in physical/chemical devices continues to rise, the development of nanotransfer printing (nTP) technology is receiving significant attention due to its exceptional throughput and ease of use. Over the past decade, researchers have attempted to enhance the diversity of materials and substrates used in transfer processes as well as to improve the resolution, reliability, and scalability of nTP. Recent research on nTP has made continuous progress, particularly using the control of the interfacial adhesion force between the donor mold, target material, and receiver substrate, and numerous practical nTP methods with niche applications have been demonstrated. This review article offers a comprehensive analysis of the chronological advancements in nTP technology and categorizes recent strategies targeted for high-yield and versatile printing based on controlling the relative adhesion force depending on interfacial layers. In detail, the advantages and challenges of various nTP approaches are discussed based on their working mechanisms, and several promising solutions to improve morphological/material diversity are presented. Furthermore, this review provides a summary of potential applications of nanostructured devices, along with perspectives on the outlook and remaining challenges, which are expected to facilitate the continued progress of nTP technology and to inspire future innovations.
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Affiliation(s)
- Junseong Ahn
- Department of Mechanical EngineeringKorea Advanced Institute of Science and Technology (KAIST)Daejeon34141Republic of Korea
- Department of Nano Manufacturing TechnologyKorea Institute of Machinery and Materials (KIMM)Daejeon34103Republic of Korea
| | - Hanhwi Jang
- Department of Materials Science and EngineeringKorea Advanced Institute of Science and Technology (KAIST)Daejeon34141Republic of Korea
| | - Yongrok Jeong
- Department of Mechanical EngineeringKorea Advanced Institute of Science and Technology (KAIST)Daejeon34141Republic of Korea
- Department of Nano Manufacturing TechnologyKorea Institute of Machinery and Materials (KIMM)Daejeon34103Republic of Korea
- Radioisotope Research DivisionKorea Atomic Energy Research Institute (KAERI)Daejeon34057Republic of Korea
| | - Seongsu Choi
- Department of Materials Science and EngineeringKorea Advanced Institute of Science and Technology (KAIST)Daejeon34141Republic of Korea
| | - Jiwoo Ko
- Department of Materials Science and EngineeringKorea Advanced Institute of Science and Technology (KAIST)Daejeon34141Republic of Korea
| | - Soon Hyoung Hwang
- Department of Nano Manufacturing TechnologyKorea Institute of Machinery and Materials (KIMM)Daejeon34103Republic of Korea
| | - Jun‐Ho Jeong
- Department of Nano Manufacturing TechnologyKorea Institute of Machinery and Materials (KIMM)Daejeon34103Republic of Korea
| | - Yeon Sik Jung
- Department of Materials Science and EngineeringKorea Advanced Institute of Science and Technology (KAIST)Daejeon34141Republic of Korea
| | - Inkyu Park
- Department of Mechanical EngineeringKorea Advanced Institute of Science and Technology (KAIST)Daejeon34141Republic of Korea
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Park H, Choi HY, Chae H, Noe Oo MM, Kang DJ. Electrohydrodynamic Nanopatterning: A Novel Solvent-Assisted Technique for Unconventional Substrates. NANO LETTERS 2023; 23:11949-11957. [PMID: 38079430 DOI: 10.1021/acs.nanolett.3c04177] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/28/2023]
Abstract
Electrohydrodynamic (EHD)-driven patterning is a pioneering lithographic technique capable of replicating and modifying micro/nanostructures efficiently. However, this process is currently restricted to conventional substrates, as it necessitates a uniform and robust electric field over a large area. Consequently, the use of nontraditional substrates, such as those that are flexible, nonflat, or have high insulation, has been notably limited. In our study, we extend the applicability of EHD-driven patterning by introducing a solvent-assisted capillary peel-and-transfer method that allows the successful removal of diverse EHD-induced structures from their original substrates. Compared with the traditional route, our process boasts a success rate close to 100%. The detached structures can then be efficiently transferred to nonconventional substrates, overcoming the limitations of the traditional EHD process. Our method exhibits significant versatility, as evidenced by successful transfer of structures with engineered wettability and patterned structures composed of metals and metal oxides onto nonconventional substrates.
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Affiliation(s)
- Hyunje Park
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea
- Research Institute of Basic Sciences, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea
| | - Ha Young Choi
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea
| | - Heejoon Chae
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea
| | - May Myat Noe Oo
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea
| | - Dae Joon Kang
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea
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He Y, Li H, Steiner AM, Fery A, Zhang Y, Ye C. Tunable Chiral Plasmonic Activities Enabled via Stimuli Responsive Micro-Origami. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2303595. [PMID: 37489842 DOI: 10.1002/adma.202303595] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/18/2023] [Revised: 07/21/2023] [Indexed: 07/26/2023]
Abstract
Chiral plasmonic nanomaterials with distinctive circularly polarized light-dependent optical responses over a broad range of frequency have great potential for photonic and biomedical applications. However, it still remains challenging to fabricate 3D plasmonic chiral micro-constructs with readily modulated chiroptical properties over the magnitude of ellipticity, mode frequency, and switchable handedness, especially in the vis-NIR range. In this study, polymeric micro-origami-based 3D plasmonic chiral structures are constructed through self-rolling of gold nanospheres (AuNSs)-decorated polymeric micro-sheets. Spherical AuNSs are assembled as highly ordered linear chains on 2D rectangular micro-sheets by polydimethylsiloxane-wrinkle assisted assembly. Upon rolling the micro-sheets to micro-tubules, the AuNS chains transform into 3D helices. The AuNS-assembled helices induce collective plasmonic modes propagating in a helical manner, leading to a strong chiral response over the vis-NIR range. The circular dichroism (CD) is measured to be as high as hundreds of millidegree, and the position and sign of CD peaks are actively modulated by controlling the orientated angle of AuNS chains, enabled by tuning the collective plasmonic modes. This micro-origami-based strategy incorporates the incompatible 2D assembly technique with 3D chiral structures, opening up an intriguing way toward constructing chiral plasmonic structures and modulating chiroptical effects based on responsive polymeric materials.
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Affiliation(s)
- Yisheng He
- School of Physical Science and Technology, Shanghai Tech University, 393 Huaxia Middle Rd. Pudong, Shanghai, 201210, China
| | - Haoyu Li
- Department of Physics, University of Science and Technology Beijing, 30 Xueyuan Rd., Beijing, 10008, China
| | - Anja Maria Steiner
- Institute of Physical Chemistry and Polymer Physics, Leibniz-Institut für Polymerforschung Dresden e.V., Hohe Strasse 6, 01069, Dresden, Germany
| | - Andreas Fery
- Institute of Physical Chemistry and Polymer Physics, Leibniz-Institut für Polymerforschung Dresden e.V., Hohe Strasse 6, 01069, Dresden, Germany
| | - Yuan Zhang
- Key Laboratory of Material Physics Ministry of Education, School of Physics and Microelectronics, Zhengzhou University, 100 Kexue Ave., Zhengzhou, 450052, China
- Institute of Quantum Materials and Physics, Henan Academy of Sciences, 266 Mingli Rd., Zhengzhou, 450046, China
| | - Chunhong Ye
- School of Physical Science and Technology, Shanghai Tech University, 393 Huaxia Middle Rd. Pudong, Shanghai, 201210, China
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Li P, Chen S, Dai H, Yang Z, Chen Z, Wang Y, Chen Y, Peng W, Shan W, Duan H. Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications. NANOSCALE 2021; 13:1529-1565. [PMID: 33432962 DOI: 10.1039/d0nr07539f] [Citation(s) in RCA: 51] [Impact Index Per Article: 17.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing. Among the various fabrication techniques, focused ion beam (FIB) nanofabrication has been established as a well-suited and promising technique in nearly all fields of nanotechnology for the fabrication of 3D nanostructures and devices because of increasing demands from industry and research. In this article, a series of FIB nanofabrication factors related to the fabrication of 3D nanostructures and devices, including mechanisms, instruments, processes, and typical applications of FIB nanofabrication, are systematically summarized and analyzed in detail. Additionally, current challenges and future development trends of FIB nanofabrication in this field are also given. This work intends to provide guidance for practitioners, researchers, or engineers who wish to learn more about the FIB nanofabrication technology that is driving the revolution in 3D nanostructures and devices.
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Affiliation(s)
- Ping Li
- National Engineering Research Centre for High Efficiency Grinding, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, P. R. China.
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Zhao ZJ, Ahn J, Hwang SH, Ko J, Jeong Y, Bok M, Kang HJ, Choi J, Jeon S, Park I, Jeong JH. Large-Area Nanogap-Controlled 3D Nanoarchitectures Fabricated via Layer-by-Layer Nanoimprint. ACS NANO 2021; 15:503-514. [PMID: 33439612 DOI: 10.1021/acsnano.0c05290] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The fabrication of large-area and flexible nanostructures currently presents various challenges related to the special requirements for 3D multilayer nanostructures, ultrasmall nanogaps, and size-controlled nanomeshes. To overcome these rigorous challenges, a simple method for fabricating wafer-scale, ultrasmall nanogaps on a flexible substrate using a temperature above the glass transition temperature (Tg) of the substrate and by layer-by-layer nanoimprinting is proposed here. The size of the nanogaps can be easily controlled by adjusting the pressure, heating time, and heating temperature. In addition, 3D multilayer nanostructures and nanocomposites with 2, 3, 5, 7, and 20 layers were fabricated using this method. The fabricated nanogaps with sizes ranging from approximately 1 to 40 nm were observed via high-resolution transmission electron microscopy (HRTEM). The multilayered nanostructures were evaluated using focused ion beam (FIB) technology. Compared with conventional methods, our method could not only easily control the size of the nanogaps on the flexible large-area substrate but could also achieve fast, simple, and cost-effective fabrication of 3D multilayer nanostructures and nanocomposites without any post-treatment. Moreover, a transparent electrode and nanoheater were fabricated and evaluated. Finally, surface-enhanced Raman scattering substrates with different nanogaps were evaluated using rhodamine 6G. In conclusion, it is believed that the proposed method can solve the problems related to the high requirements of nanofabrication and can be applied in the detection of small molecules and for manufacturing flexible electronics and soft actuators.
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Affiliation(s)
- Zhi-Jun Zhao
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
| | - Junseong Ahn
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, South Korea
| | - Soon Hyoung Hwang
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
| | - Jiwoo Ko
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, South Korea
| | - Yongrok Jeong
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
| | - Moonjeong Bok
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
| | - Hyeok-Joong Kang
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
| | - Jungrak Choi
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, South Korea
| | - Sohee Jeon
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
| | - Inkyu Park
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, South Korea
| | - Jun-Ho Jeong
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
- Department of Nano Mechatronics, University of Science and Technology, 217, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea
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Dore C, Dörling B, Garcia-Pomar JL, Campoy-Quiles M, Mihi A. Hydroxypropyl Cellulose Adhesives for Transfer Printing of Carbon Nanotubes and Metallic Nanostructures. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2020; 16:e2004795. [PMID: 33135371 DOI: 10.1002/smll.202004795] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/06/2020] [Revised: 09/18/2020] [Indexed: 06/11/2023]
Abstract
Transfer printing is one of the key nanofabrication techniques for the large-scale manufacturing of complex device architectures. It provides a cost-effective and high-throughput route for the integration of independently processed materials into spatially tailored architectures. Furthermore, this method enables the fabrication of flexible and curvilinear devices, paving the way for the fabrication of a new generation of technologies for optics, electronics, and biomedicine. In this work, hydroxypropyl cellulose (HPC) membranes are used as water soluble adhesives for transfer printing processes with improved performance and versatility compared to conventional silicone alternatives. The high-water solubility and excellent mechanical properties of HPC facilitate transfer printing with high yield for both metal and carbon nanotubes (CNTs) inks. In the case of metal inks, crack-free stripping of silver films and the simple fabrication of Moiré Plasmonic architectures of different geometries are demonstrated. Furthermore, HPC membranes are used to transfer print carbon nanotube films with different thicknesses and up to 77% transparency in the visible and near infrared region with potential applications as transparent conductive substrates. Finally, the use of prepatterned HPC membranes enables nanoscale patterning of CNT with feature resolution down to 1 µm.
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Affiliation(s)
- Camilla Dore
- Institut de Ciència de Materials de Barcelona (ICMAB-CSIC), Campus de la UAB, Bellaterra, 08193, Spain
| | - Bernhard Dörling
- Institut de Ciència de Materials de Barcelona (ICMAB-CSIC), Campus de la UAB, Bellaterra, 08193, Spain
| | - Juan Luis Garcia-Pomar
- Institut de Ciència de Materials de Barcelona (ICMAB-CSIC), Campus de la UAB, Bellaterra, 08193, Spain
| | - Mariano Campoy-Quiles
- Institut de Ciència de Materials de Barcelona (ICMAB-CSIC), Campus de la UAB, Bellaterra, 08193, Spain
| | - Agustín Mihi
- Institut de Ciència de Materials de Barcelona (ICMAB-CSIC), Campus de la UAB, Bellaterra, 08193, Spain
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Xiong R, Luan J, Kang S, Ye C, Singamaneni S, Tsukruk VV. Biopolymeric photonic structures: design, fabrication, and emerging applications. Chem Soc Rev 2020; 49:983-1031. [PMID: 31960001 DOI: 10.1039/c8cs01007b] [Citation(s) in RCA: 65] [Impact Index Per Article: 16.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/03/2023]
Abstract
Biological photonic structures can precisely control light propagation, scattering, and emission via hierarchical structures and diverse chemistry, enabling biophotonic applications for transparency, camouflaging, protection, mimicking and signaling. Corresponding natural polymers are promising building blocks for constructing synthetic multifunctional photonic structures owing to their renewability, biocompatibility, mechanical robustness, ambient processing conditions, and diverse surface chemistry. In this review, we provide a summary of the light phenomena in biophotonic structures found in nature, the selection of corresponding biopolymers for synthetic photonic structures, the fabrication strategies for flexible photonics, and corresponding emerging photonic-related applications. We introduce various photonic structures, including multi-layered, opal, and chiral structures, as well as photonic networks in contrast to traditionally considered light absorption and structural photonics. Next, we summarize the bottom-up and top-down fabrication approaches and physical properties of organized biopolymers and highlight the advantages of biopolymers as building blocks for realizing unique bioenabled photonic structures. Furthermore, we consider the integration of synthetic optically active nanocomponents into organized hierarchical biopolymer frameworks for added optical functionalities, such as enhanced iridescence and chiral photoluminescence. Finally, we present an outlook on current trends in biophotonic materials design and fabrication, including current issues, critical needs, as well as promising emerging photonic applications.
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Affiliation(s)
- Rui Xiong
- School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0245, USA.
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Zhu J, Lin G, Huang Y, Zhang K, Wu M, Wu W, Lu P. Three-dimensional cavity-coupled metamaterials for plasmonic color and real-time colorimetric biosensors. NANOSCALE 2020; 12:4418-4425. [PMID: 32026916 DOI: 10.1039/c9nr10343k] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Plasmonic structure color has significant potential for visual biochemical sensing by simple instrumentation or even naked eye detection. Herein, we present a visual and real-time sensing strategy for refraction index sensing and detection of the biotin-avidin system based on three-dimensional cavity-coupled metamaterials. These metamaterials composed of a top array of gold disks, aluminium pillars and a bottom reflection film of aluminium have structures similar to the metal-insulator-metal structure. The insulating layer comprises air-gap cavities that are easily filled with gaseous or liquid dielectrics. Therefore, analytes can permeate into the nano-scale cavities and produce strong light-matter interactions. The sensor shows that any tiny change in the refraction index will induce a significant color variation and the sensitivity reaches 683.5 nm per refraction index unit with a figure of merit of 3.5. The color of the metamaterials changes from rose-red to violet and then loden after a monomolecular layer of thiolated biotin and streptavidin bind to the surface of the nanostructure successively. This sensing strategy offers new opportunities for the convenient detection of proteins, nucleic acids, and lipids.
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Affiliation(s)
- Jia Zhu
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, P.R. China.
| | - Guanzhou Lin
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, P.R. China.
| | - Yun Huang
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, P.R. China.
| | - Kenan Zhang
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, P.R. China. and College of Physics and Information Engineering, Fuzhou University, Fuzhou, 350108, P.R. China
| | - Meizhang Wu
- School of Automation, University of Science and Technology Beijing, Beijing 100083, P.R. China
| | - Wengang Wu
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, P.R. China.
| | - Peimin Lu
- College of Physics and Information Engineering, Fuzhou University, Fuzhou, 350108, P.R. China
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