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Fukata N, Jevasuwan W. Formation and characterization of Group IV semiconductor nanowires. NANOTECHNOLOGY 2024; 35:122001. [PMID: 38096568 DOI: 10.1088/1361-6528/ad15b8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/29/2023] [Accepted: 12/13/2023] [Indexed: 01/05/2024]
Abstract
To enable the application to next-generation devices of semiconductor nanowires (NWs), it is important to control their formation and tune their functionality by doping and the use of heterojunctions. In this paper, we introduce formation and the characterization methods of nanowires, focusing on our research results. We describe a top-down method of controlling the size and alignment of nanowires that shows advantages over bottom-up growth methods. The latter technique causes damage to the nanowire surfaces, requiring defect removal after the NW formation process. We show various methods of evaluating the bonding state and electrical activity of impurities in NWs. If an impurity is doped in a NW, mobility decreases due to the scattering that it causes. As a strategy for solving this problem, we describe research into core-shell nanowires, in which Si and Ge heterojunctions are formed in the diameter direction inside the NW. This structure can separate the impurity-doped region from the carrier transport region, promising as a channel for the new ultimate high-mobility transistor.
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Affiliation(s)
- Naoki Fukata
- Research Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
- Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Wipakorn Jevasuwan
- Research Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
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Fukata N, Jevasuwan W, Sun YL, Sugimoto Y. Defect control and Si/Ge core-shell heterojunction formation on silicon nanowire surfaces formed using the top-down method. NANOTECHNOLOGY 2022; 33:135602. [PMID: 34985416 DOI: 10.1088/1361-6528/ac3fe4] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/19/2021] [Accepted: 12/02/2021] [Indexed: 06/14/2023]
Abstract
Control of surface defects and impurity doping are important keys to realizing devices that use semiconductor nanowires (NWs). As a structure capable of suppressing impurity scattering, p-Si/i (intrinsic)-Ge core-shell NWs with radial heterojunctions inside the NWs were formed. When forming NWs using a top-down method, the positions of the NWs can be controlled, but their surface is damaged. When heat treatment for repairing surface damage is performed, the surface roughness of the NWs closely depends on the kind of atmospheric gas. Oxidation and chemical etching prior to shell formation removes the surface damaged layer on p-SiNWs and simultaneously achieves a reduction in the diameter of the NWs. Finally, hole gas accumulation, which is important for suppressing impurity scattering, can be observed in the i-Ge layers of p-Si/i-Ge core-shell NWs.
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Affiliation(s)
- Naoki Fukata
- International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
- Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Wipakorn Jevasuwan
- International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
| | - Yong-Lie Sun
- International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
- Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Yoshimasa Sugimoto
- International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
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Ghezzi B, Lagonegro P, Fukata N, Parisi L, Calestani D, Galli C, Salviati G, Macaluso GM, Rossi F. Sub-Micropillar Spacing Modulates the Spatial Arrangement of Mouse MC3T3-E1 Osteoblastic Cells. NANOMATERIALS 2019; 9:nano9121701. [PMID: 31795174 PMCID: PMC6955749 DOI: 10.3390/nano9121701] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/30/2019] [Revised: 11/22/2019] [Accepted: 11/25/2019] [Indexed: 12/11/2022]
Abstract
Surface topography is one of the main factors controlling cell responses on implanted devices and a proper definition of the characteristics that optimize cell behavior may be crucial to improve the clinical performances of these implants. Substrate geometry is known to affect cell shape, as cells try to optimize their adhesion by adapting to the irregularities beneath, and this in turn profoundly affects their activity. In the present study, we cultured murine calvaria MC3T3-E1 cells on surfaces with pillars arranged as hexagons with two different spacings and observed their morphology during adhesion and growth. Cells on these highly ordered substrates attached and proliferated effectively, showing a marked preference for minimizing the inter-pillar distance, by following specific pathways across adjacent pillars and displaying consistent morphological modules. Moreover, cell behavior appeared to follow tightly controlled patterns of extracellular protein secretion, which preceded and matched cells and, on a sub-cellular level, cytoplasmic orientation. Taken together, these results outline the close integration of surface features, extracellular proteins alignment and cell arrangement, and provide clues on how to control and direct cell spatial order and cell morphology by simply acting on inter-pillar spacing.
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Affiliation(s)
- Benedetta Ghezzi
- Centro Universitario di Odontoiatria, Università di Parma, Via Gramsci 14, 43126 Parma, Italy; (L.P.); (G.M.M.)
- Dipartimento di Medicina e Chirurgia, Università di Parma, Via Gramsci 14, 43126 Parma, Italy;
- Correspondence:
| | - Paola Lagonegro
- ISMAC-CNR, Institute for macromolecular studies, Via Corti, 12, 20133 Milano, Italy;
- IMEM-CNR, Institute of Materials for Electronics and Magnetism, Parco Area delle Scienze, 37/A, 43124 Parma, Italy; (D.C.); (G.S.); (F.R.)
| | - Naoki Fukata
- International Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan;
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
| | - Ludovica Parisi
- Centro Universitario di Odontoiatria, Università di Parma, Via Gramsci 14, 43126 Parma, Italy; (L.P.); (G.M.M.)
- Dipartimento di Medicina e Chirurgia, Università di Parma, Via Gramsci 14, 43126 Parma, Italy;
- Labör für Orale Molekularbiologie, Klinik für Kieferorthopädie, Zahnmedizinische Klinik, Universität Bern, Freiburgstrasse 7, 3008 Bern, Switzerland
| | - Davide Calestani
- IMEM-CNR, Institute of Materials for Electronics and Magnetism, Parco Area delle Scienze, 37/A, 43124 Parma, Italy; (D.C.); (G.S.); (F.R.)
| | - Carlo Galli
- Dipartimento di Medicina e Chirurgia, Università di Parma, Via Gramsci 14, 43126 Parma, Italy;
| | - Giancarlo Salviati
- IMEM-CNR, Institute of Materials for Electronics and Magnetism, Parco Area delle Scienze, 37/A, 43124 Parma, Italy; (D.C.); (G.S.); (F.R.)
| | - Guido M. Macaluso
- Centro Universitario di Odontoiatria, Università di Parma, Via Gramsci 14, 43126 Parma, Italy; (L.P.); (G.M.M.)
- Dipartimento di Medicina e Chirurgia, Università di Parma, Via Gramsci 14, 43126 Parma, Italy;
- IMEM-CNR, Institute of Materials for Electronics and Magnetism, Parco Area delle Scienze, 37/A, 43124 Parma, Italy; (D.C.); (G.S.); (F.R.)
| | - Francesca Rossi
- IMEM-CNR, Institute of Materials for Electronics and Magnetism, Parco Area delle Scienze, 37/A, 43124 Parma, Italy; (D.C.); (G.S.); (F.R.)
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