Scalable Fabrication of Flexible Microstencils by Using Sequentially Induced Dewetting Phenomenon

Enhanced Flexible Mold Lifetime for Roll-to-Roll Scaled-Up Manufacturing of Adhesive Complex Microstructures

Various functional complex 3D patterned surfaces with micro- or nanostructures have been developed and their superior performances over non-patterned smooth surfaces proven. However, it is challenging to mass-produce such complex micro-/nanopatterned surfaces, which limits their commercialization drastically. Although roll-to-roll (R2R) manufacturing using flexible molds has been implemented for mass-production of such functional surfaces, the poor mold repeatability issue has not been resolved yet. Here, a strategy to significantly improve the repeatability of the micropatterned flexible silicone molds over 1000 cycles against highly adhesive polyurethane acrylates (PUAs) in UV light curing based R2R systems by using a two-step curing process is reported. The mold repeatability is drastically increased from 10s of cycles to over 1000 cycles through the proposed strategy in spite of the complicated 3D undercut geometry and high tackiness of the microstructure. This two-step process would enable scaled-up production of micro-/nanostructured adhesives, such as gecko-inspired microfiber adhesives as demonstrated in this study, as well as various other functional micro-/nanostructured surfaces by enhancing the flexible mold lifetime.

Rotating Cylinder-Assisted Nanoimprint Lithography for Enhanced Chemisorbable Filtration Complemented by Molecularly Imprinted Polymers

Rotating cylindrical stamp-based nanoimprint technique has many advantages, including the continuous fabrication of intriguing micro/nanostructures and rapid pattern transfer on a large scale. Despite these advantages, the previous nanoimprint lithography has rarely been used for producing sophisticated nanoscale patterns on a non-planar substrate that has many extended applications. Here, the simple integration of nanoimprinting process with a help of a transparent stamp wrapped on the cylindrical roll and UV optical source in the core to enable high-throughput pattern transfer, particularly on a fabric substrate is demonstrated. Moreover, as a functional resin material, this innovative strategy involves a synergistic approach on the synthesis of molecularly imprinted polymer, which are spatially organized free-standing perforated nanostructures such as nano/microscale lines, posts, and holes patterns on various woven or nonwoven blank substrates. The proposed materials can serve as a self-encoded filtration medium for selective separation of formaldehyde molecules. It is envisioned that the combinatorial fabrication process and attractive material paves the way for designing next-generation separation systems in use to capture industrial or household toxic substances.

Piezo-Actuated One-Axis Vibrational Patterning for Mold-Free Continuous Fabrication of High-Precision Period-Programmable Micro- and Nanopatterns

We present a mold-free high-resolution nanopatterning technology named piezo-actuated one-axis vibrational patterning (POP) that enables continuous and scalable fabrication of micro- and nanopatterns with precisely programmable periods and dimensions. POP utilizes the piezoelectric stack-actuated high-precision uniaxial vibration of a flat, pattern-free rigid tool edge to conduct sub-50 nm-periodic indentations on various compliant substrates laterally fed underneath. By controlling the tool vibration frequency, tool temperature, and substrate feed rate and by combining sequential tool strokes along multiple directions, diverse functional micro- and nanopatterns with variable periods and depths and multidimensional profiles can be continuously created without resorting to mold prefabrication. With its simple but universal principle, excellent scalability, and versatile processability, POP can be practically applied to many functional devices particularly requiring large-area micro- and nanopatterns with specifically designed periods and dimensions.

Degassed micromolding lithography for rapid fabrication of anisotropic hydrogel microparticles with high-resolution and high uniformity

Replica molding techniques, which are used to synthesize microparticles inside anisotropic micromolds, have been developed to enable the mass production of hydrogel particles. However, these techniques are limited in their ability to synthesize only a narrow range of particle compositions and shapes because of the difficulty in loading precursors into the micromolds as well as the low particle homogeneity due to the uneven evaporation of the precursors. Herein, we describe a simple yet powerful technique, called degassed micromolding lithography, which can load precursors within 1 min regardless of the wettability. This technique is based on the gas-solubility of a degassed micromold that acts as a suction pump to completely fill the mold by drawing precursor liquids in. The semi-closed system within the micromold prevents the uneven evaporation of the precursor, which is essential for the production of homogeneous particles. Furthermore, controlled uniformity of the hydrogel microparticles (C.V. < 2%) can be achieved by engineering the design of the micromold array.

Remora-Inspired Reversible Adhesive for Underwater Applications

The remoras are marine species that can effectively move by clinging onto other marine species via a suction disk on their dorsal side, which is composed of complex structures. The inner suction disk could be divided into three large parts, namely, lip, lamella, and spinule. The lamella is deformed actively to generate pressure difference between the inside and outside of the suction disk, and the lip maintains the sealing. The spinule, which is composed of hairs with diameter of 300 μm or less hair, enhances the frictional force. In this study, we easily fabricated polymer-based adhesive inspired by the suction disk of the remora and conducted an experiment to determine its performance. The adhesive exhibited admirable performance with a 26.68 N cm^-2 (266.8 kPa) pull-off strength and a 19.42 N cm^-2 (194.2 kPa) shear strength in water. The durability test result indicated that the adhesion and friction characteristics of the adhesive were well maintained even after multiple uses.

Plasmonic roller lithography

Photo roller lithography systems can generate patterns continuously over large areas by employing flexible photomasks on rotating quartz cylinders. In comparison, plasmonic lithography systems can reach deep sub-wavelength resolution utilizing evanescent waves carrying high spatial frequency components. In this work, we demonstrate a plasmonic roller system by integrating a quartz mechanical roller with a specially designed photomask based on plasmonic waveguide lithography. Deep sub-wavelength uniform patterns with high aspect ratios were printed continuously over a moving substrate. The plasmonic roller system may find practical applications in the large-scale production of electronic and photonic devices in a cost-effective way.

Transfer Tiling of Nanostructures for Large-Area Fabrication

The fabrication of nanoscale patterns over a large area has been considered important but difficult, because there are few ways to satisfy both conditions. Previously, visually tolerable tiling (VTT) for fabricating nanopatterns for optical applications has been reported as a candidate for large area fabrication. The essence of VTT is the inevitable stitching of the nanoscale optical component, which is not seen by the naked eye if the boundary is very narrow while the tiles are overlapped. However, it had been difficult to control the shape of the spread of liquid prepolymers in the previous work, and there was room for the development of tiling. Here, we propose a method for transferring various shapes of tiles, which can be defined with a shadow mask. The method of using a transparent shadow mask can provide a wide process window, because it allows the spreading of a liquid prepolymer to be more easily controlled. We optimize the coating condition of a liquid prepolymer and the ultraviolet (UV) exposure time. Using this method, we can attach tiles of various shapes without a significant visible trace in the overlapped region.

Scalable and continuous fabrication of bio-inspired dry adhesives with a thermosetting polymer

Many research groups have developed unique micro/nano-structured dry adhesives by mimicking the foot of the gecko with the use of molding methods. Through these previous works, polydimethylsiloxane (PDMS) has been developed and become the most commonly used material for making artificial dry adhesives. The material properties of PDMS are well suited for making dry adhesives, such as conformal contacts with almost zero preload, low elastic moduli for stickiness, and easy cleaning with low surface energy. From a performance point of view, dry adhesives made with PDMS can be highly advantageous but are limited by its low productivity, as production takes an average of approximately two hours. Given the low productivity of PDMS, some research groups have developed dry adhesives using UV-curable materials, which are capable of continuous roll-to-roll production processes. However, UV-curable materials were too rigid to produce good adhesion. Thus, we established a PDMS continuous-production system to achieve good productivity and adhesion performance. We designed a thermal roll-imprinting lithography (TRL) system for the continuous production of PDMS microstructures by shortening the curing time by controlling the curing temperature (the production speed is up to 150 mm min-1). Dry adhesives composed of PDMS were fabricated continuously via the TRL system.

Direct fabrication of electrochromic devices with complex patterns on three-dimensional substrates using polymeric stencil films

This article describes a direct fabrication technique for electrodes and further electrochromic devices with complex shapes on three-dimensional substrates.