Micromechanical Bolometers for Subterahertz Detection at Room Temperature

Ultra-broadband absorbance of nanometer-thin pyrolyzed-carbon film on silicon nitride membrane

Fifty percents absorption by thin film, with thickness is much smaller than the skin depth and optical thickness much smaller than the wavelength, is a well-known concept of classical electrodynamics. This is a valuable feature that has been numerously widely explored for metal films, while chemically inert nanomembranes are a real fabrication challenge. Here we report the 20 nm thin pyrolyzed carbon film (PyC) placed on 300 nm thick silicon nitride (Si3N4) membrane demonstrating an efficient broadband absorption in the terahertz and near infrared ranges. While the bare Si3N4membrane is completely transparent in the THz range, the 20 nm thick PyC layer increases the absorption of the PyC coated Si3N4membrane to 40%. The reflection and transmission spectra in the near infrared region reveal that the PyC film absorption persists to a level of at least 10% of the incident power. Such a broadband absorption of the PyC film opens new pathways toward broadband bolometric radiation detectors.

Multilayer Bolometric Structures for Efficient Wideband Communication Signal Reception

It is known that the dielectric layer (resonator) located behind the conducting plate of the bolometer system can significantly increase its sensitivity near the resonance frequencies. In this paper, the possibility of receiving broadband electromagnetic signals in a multilayer bolometric meta-material made of alternating conducting (e.g., silicon semiconductor) and dielectric layers is demonstrated both experimentally and numerically. It is shown that such a multilayer structure acts as a lattice of resonators and can significantly increase the width of the frequency band of efficient electromagnetic energy absorption. The parameters of the dielectric and semiconductor layers determine the frequency bands. Numerical modeling of the effect has been carried out under the conditions of our experiment. The numerical results show acceptable qualitative agreement with the experimental data. This study develops the previously proposed technique of resonant absorption of electromagnetic signals in bolometric structures.

Terahertz Detectors Using Microelectromechanical System Resonators

The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sensitive terahertz (THz) detection. The MEMS resonator absorbs THz radiation and induces a temperature rise, leading to a shift in its resonance frequency. This frequency shift is proportional to the amount of THz radiation absorbed by the resonator and can be detected and quantified, thereby allowing the THz radiation to be measured. In this review, we present an overview of the THz bolometer based on the doubly clamped MEMS beam resonators in the aspects of working principle, readout, detection speed, sensitivity, and attempts at improving the performance. This allows one to have a comprehensive view of such a novel THz detector.

Peculiarities of Resonant Absorption of Electromagnetic Signals in Multilayer Bolometric Sensors

We examine the effect of resonant absorption of electromagnetic signals in a silicon semiconductor plasma layer when the dielectric plate is placed behind it both experimentally and numerically. It is shown that such plate acts as a dielectric resonator and can significantly increase the electromagnetic energy absorption in the semiconductor for certain frequencies determined by the dielectric plate parameters. Numerical modelling of the effect is performed under the conditions of conducted experiment. The numerical results are found to be in qualitative agreement with experimental ones. This study confirms the proposed earlier method of increasing the efficiency of bolometric-type detectors of electromagnetic radiation.