1
|
Pi M, Zheng C, Zhao H, Peng Z, Guan G, Ji J, Huang Y, Min Y, Liang L, Song F, Bai X, Zhang Y, Wang Y, Tittel FK. Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space. ACS NANO 2023; 17:17761-17770. [PMID: 37379223 DOI: 10.1021/acsnano.3c02699] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/30/2023]
Abstract
On-chip waveguide sensors are potential candidates for deep-space exploration because of their high integration and low power consumption. Since the fundamental absorption of most gas molecules exists in the mid-infrared (e.g., 3-12 μm), it is of great significance to fabricate wideband mid-infrared sensors with high external confinement factor (ECF). To overcome the limited transparency window and strong waveguide dispersion, a chalcogenide suspended nanorib waveguide sensor was proposed for ultra-wideband mid-infrared gas sensing, and three waveguide sensors (WG1-WG3) with optimized dimensions exhibit a wide waveband of 3.2-5.6 μm, 5.4-8.2 μm, and 8.1-11.5 μm with exceptionally high ECFs of 107-116%, 107-116%, and 116-128%, respectively. The waveguide sensors were fabricated by a two-step lift-off method without dry etching to reduce the process complexity. Experimental ECFs of 112%, 110%, and 110% were obtained at 3.291 μm, 4.319 μm, and 7.625 μm, respectively, through methane (CH4) and carbon dioxide (CO2) measurements. A limit of detection of 5.9 ppm was achieved for an averaging time of 64.2 s through the Allan deviation analysis of CH4 at 3.291 μm, leading to a comparable noise equivalent absorption sensitivity of 2.3 × 10-5 cm-1 Hz-1/2 as compared to the hollow-core fiber and on-chip gas sensors.
Collapse
Affiliation(s)
- Mingquan Pi
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Chuantao Zheng
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Huan Zhao
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Zihang Peng
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Gangyun Guan
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Jialin Ji
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Yijun Huang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Yuting Min
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Lei Liang
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
| | - Fang Song
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Xue Bai
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Yu Zhang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Yiding Wang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
| | - Frank K Tittel
- Department of Electrical and Computer Engineering, Rice University, 6100 Main Street, Houston, Texas 77005, United States
| |
Collapse
|
2
|
Li B, Menduni G, Giglio M, Patimisco P, Sampaolo A, Zifarelli A, Wu H, Wei T, Spagnolo V, Dong L. Quartz-enhanced photoacoustic spectroscopy (QEPAS) and Beat Frequency-QEPAS techniques for air pollutants detection: A comparison in terms of sensitivity and acquisition time. PHOTOACOUSTICS 2023; 31:100479. [PMID: 37255964 PMCID: PMC10225917 DOI: 10.1016/j.pacs.2023.100479] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/10/2023] [Revised: 03/10/2023] [Accepted: 03/22/2023] [Indexed: 06/01/2023]
Abstract
In this work, a comparison between Quartz Enhanced Photoacoustic Spectroscopy (QEPAS) and Beat Frequency-QEPAS (BF-QEPAS) techniques for environmental monitoring of pollutants is reported. A spectrophone composed of a T-shaped Quartz Tuning Fork (QTF) coupled with resonator tubes was employed as a detection module. An interband cascade laser has been used as an exciting source, allowing the targeting of two NO absorption features, located at 1900.07 cm-1 and 1900.52 cm-1, and a water vapor absorption feature, located at 1901.76 cm-1. Minimum detection limits of 90 ppb and 180 ppb were achieved with QEPAS and BF-QEPAS techniques, respectively, for NO detection. The capability to detect multiple components in the same gas mixture using BF-QEPAS was also demonstrated.
Collapse
Affiliation(s)
- Biao Li
- State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China
- Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Giansergio Menduni
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Marilena Giglio
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Pietro Patimisco
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Angelo Sampaolo
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Andrea Zifarelli
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Hongpeng Wu
- State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China
- Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Tingting Wei
- State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China
- Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
| | - Vincenzo Spagnolo
- State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| | - Lei Dong
- State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China
- Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
- PolySense Lab - Dipartimento Interateneo di Fisica, University and Politecnico of Bari, Via Amendola 173, Bari, Italy
| |
Collapse
|