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Hada M, Adegawa H, Aoki K, Ikezawa S, Iwami K. Polarization-separating Alvarez metalens. OPTICS EXPRESS 2024; 32:6672-6683. [PMID: 38439365 DOI: 10.1364/oe.516853] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/22/2023] [Accepted: 01/29/2024] [Indexed: 03/06/2024]
Abstract
The rapid advancements in optical communication technologies have highlighted traditional optical components' limitations, particularly in size, adaptability, and integration capabilities, underscoring the need for more compact and versatile solutions. Metalenses offer a promising pathway to address these challenges, with their ability to provide high-functionality, miniaturized optical components. We developed a varifocal metalens with a polarization separation function designed for the wavelength of 1550 nm for potential application for next-generation communication technologies. To integrate the varifocal and polarization separation functions, polarization-dependent phase profiles for an off-axis Alvarez lens were derived and encoded by amorphous silicon pillar meta-atoms with rectangular cross sections to provide independent 0-2π phase delays for both orthogonal linear polarization components. The fabricated metalens achieved a varifocal range of 0.75 mm to 10.65 mm and a polarization extinction ratio of 18.5 dB.
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Tabassum S, Nayemuzzaman SK, Kala M, Kumar Mishra A, Mishra SK. Metasurfaces for Sensing Applications: Gas, Bio and Chemical. SENSORS (BASEL, SWITZERLAND) 2022; 22:s22186896. [PMID: 36146243 PMCID: PMC9504383 DOI: 10.3390/s22186896] [Citation(s) in RCA: 12] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/29/2022] [Revised: 08/22/2022] [Accepted: 08/23/2022] [Indexed: 05/11/2023]
Abstract
Performance of photonic devices critically depends upon their efficiency on controlling the flow of light therein. In the recent past, the implementation of plasmonics, two-dimensional (2D) materials and metamaterials for enhanced light-matter interaction (through concepts such as sub-wavelength light confinement and dynamic wavefront shape manipulation) led to diverse applications belonging to spectroscopy, imaging and optical sensing etc. While 2D materials such as graphene, MoS2 etc., are still being explored in optical sensing in last few years, the application of plasmonics and metamaterials is limited owing to the involvement of noble metals having a constant electron density. The capability of competently controlling the electron density of noble metals is very limited. Further, due to absorption characteristics of metals, the plasmonic and metamaterial devices suffer from large optical loss. Hence, the photonic devices (sensors, in particular) require that an efficient dynamic control of light at nanoscale through field (electric or optical) variation using substitute low-loss materials. One such option may be plasmonic metasurfaces. Metasurfaces are arrays of optical antenna-like anisotropic structures (sub-wavelength size), which are designated to control the amplitude and phase of reflected, scattered and transmitted components of incident light radiation. The present review put forth recent development on metamaterial and metastructure-based various sensors.
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Affiliation(s)
- Shawana Tabassum
- Electrical Engineering, The University of Texas at Tyler, Tyler, TX 75799, USA
| | - SK Nayemuzzaman
- Electrical Engineering, The University of Texas at Tyler, Tyler, TX 75799, USA
| | - Manish Kala
- Department of Physics, Indian Institute of Technology Roorkee, Roorkee 247667, India
| | - Akhilesh Kumar Mishra
- Department of Physics, Indian Institute of Technology Roorkee, Roorkee 247667, India
| | - Satyendra Kumar Mishra
- Centre of Optics and Photonics (COPL), University of Laval, Quebec, QC G1V 0A6, Canada
- Correspondence:
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Ren Z, Zhang Z, Wei J, Dong B, Lee C. Wavelength-multiplexed hook nanoantennas for machine learning enabled mid-infrared spectroscopy. Nat Commun 2022; 13:3859. [PMID: 35790752 PMCID: PMC9256719 DOI: 10.1038/s41467-022-31520-z] [Citation(s) in RCA: 29] [Impact Index Per Article: 14.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/22/2021] [Accepted: 06/03/2022] [Indexed: 12/19/2022] Open
Abstract
Infrared (IR) plasmonic nanoantennas (PNAs) are powerful tools to identify molecules by the IR fingerprint absorption from plasmon-molecules interaction. However, the sensitivity and bandwidth of PNAs are limited by the small overlap between molecules and sensing hotspots and the sharp plasmonic resonance peaks. In addition to intuitive methods like enhancement of electric field of PNAs and enrichment of molecules on PNAs surfaces, we propose a loss engineering method to optimize damping rate by reducing radiative loss using hook nanoantennas (HNAs). Furthermore, with the spectral multiplexing of the HNAs from gradient dimension, the wavelength-multiplexed HNAs (WMHNAs) serve as ultrasensitive vibrational probes in a continuous ultra-broadband region (wavelengths from 6 μm to 9 μm). Leveraging the multi-dimensional features captured by WMHNA, we develop a machine learning method to extract complementary physical and chemical information from molecules. The proof-of-concept demonstration of molecular recognition from mixed alcohols (methanol, ethanol, and isopropanol) shows 100% identification accuracy from the microfluidic integrated WMHNAs. Our work brings another degree of freedom to optimize PNAs towards small-volume, real-time, label-free molecular recognition from various species in low concentrations for chemical and biological diagnostics. Infrared spectroscopy with plasmonic nanoantennas is limited by small overlap between molecules and hot spots, and sharp resonance peaks. The authors demonstrate spectral multiplexing of hook nanoantennas with gradient dimensions as ultrasensitive vibrational probes in a continuous ultra-broadband region and utilize machine learning for enhanced sensing performance.
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Wu XX, Lu CY, Huang TY. Creating hot spots within air for better sensitivity through design of oblique-wire-bundle metamaterial perfect absorbers. Sci Rep 2022; 12:3557. [PMID: 35241730 PMCID: PMC8894341 DOI: 10.1038/s41598-022-07338-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/12/2021] [Accepted: 02/16/2022] [Indexed: 11/18/2022] Open
Abstract
Better sensitivity of a biosensor could boost up the detection limit of analytes, thus a must in the fields of bio-sensing and bio-detection. To further enhance the sensitivity of a biosensor, in this work, we design an oblique-flat-sheet metamaterial perfect absorber (MPA) to concentrate the hot spots within air between the oblique flat sheet and the continuous ground metal, thus enabling fully interaction between analytes and hot spots. The corresponding field distributions in simulation corroborated our assumption and its sensitivity could be up to 1049 nm/RIU. Then, we fabricated the sample by e-beam lithography process for a seed layer and simply tilting the sample during deposition to obtain oblique flat sheets. When considering the stochastic nature of the deposited multiple oblique flat sheets, we modified the metallic upper resonator of the MPA from the single oblique-flat-sheet into randomly distributed oblique-wire-bundle (OWB) and in simulation, its sensitivity is boosted up to 3319 nm/RIU. In experiments, the measured sensitivity is 1329 nm/RIU under different concentrations of glucose solutions that is four times larger than the 330 nm/RIU of the planar MPA. The higher sensitivity was attributed to that the OWB MPA could provide hot spots within air not only between OWB and grounded metal but also among wires. Moreover, the OWB could also trap and concentrate the analytes locally.
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Affiliation(s)
- Xin-Xian Wu
- Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, 243303, Taiwan
| | - Cheng-Yu Lu
- Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, 243303, Taiwan
| | - Tsung-Yu Huang
- Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, 243303, Taiwan.
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Li D, Zhou H, Hui X, He X, Huang H, Zhang J, Mu X, Lee C, Yang Y. Multifunctional Chemical Sensing Platform Based on Dual-Resonant Infrared Plasmonic Perfect Absorber for On-Chip Detection of Poly(ethyl cyanoacrylate). ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2021; 8:e2101879. [PMID: 34423591 PMCID: PMC8529490 DOI: 10.1002/advs.202101879] [Citation(s) in RCA: 16] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/06/2021] [Revised: 06/29/2021] [Indexed: 05/05/2023]
Abstract
Multifunctional chemical sensing is highly desirable in industry, agriculture, and environmental sciences, but remains challenging due to the diversity of chemical substances and reactions. Surface-enhanced infrared absorption (SEIRA) spectroscopy can potentially address the above problems by ultra-sensitive detection of molecular fingerprint vibrations. Here, a multifunctional chemical sensing platform based on dual-resonant SEIRA device for sensitive and multifunctional on-chip detection of poly(ethyl cyanoacrylate) (PECA) is reported. It is experimentally demonstrated that the SEIRA sensing platform achieves multiple functions required by the PECA glue industry, including vibrational detection, thickness measurement, and in situ observation of polymerization and curing, which are usually realized by separately using a spectrometer, a viscometer, and an ellipsometer in the past. Specifically, the all-in-one sensor offers a dual-band fingerprint vibration identification, sub-nm level detection limit, and ultrahigh sensitivity of 0.76%/nm in thickness measurement, and second-level resolution in real-time observation of polymerization and curing. This work not only provides a valuable toolkit for ultra-sensitive and multifunctional on-chip detection of PECA, but also gives new insights into the SEIRA technology for multi-band, multi-functional, and on-chip chemical sensing.
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Affiliation(s)
- Dongxiao Li
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing100083P. R. China
| | - Hong Zhou
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
- Department of Electrical and Computer EngineeringCenter for Intelligent Sensors and MEMS (CISM)and NUS Graduate School for Integrative Sciences and EngineeringNational University of SingaporeSingapore117576Singapore
| | - Xindan Hui
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Xianming He
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - He Huang
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Jiajia Zhang
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Xiaojing Mu
- Key Laboratory of Optoelectronic Technology & Systems of Ministry of EducationInternational R & D center of Micro‐nano Systems and New Materials TechnologyChongqing UniversityChongqing400044P. R. China
| | - Chengkuo Lee
- Department of Electrical and Computer EngineeringCenter for Intelligent Sensors and MEMS (CISM)and NUS Graduate School for Integrative Sciences and EngineeringNational University of SingaporeSingapore117576Singapore
| | - Ya Yang
- CAS Center for Excellence in NanoscienceBeijing Key Laboratory of Micro‐nano Energy and SensorBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing100083P. R. China
- School of Nanoscience and TechnologyUniversity of Chinese Academy of SciencesBeijing100049P. R. China
- Center on Nanoenergy ResearchSchool of Physical Science and TechnologyGuangxi UniversityNanning530004P. R. China
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Liu M, Yu L, Lei Y, Fang X, Ma Y, Liu L, Zheng J, Lin K, Gao P. Numerical Investigation of Multifunctional Plasmonic Micro-Fiber Based on Fano Resonances and LSPR Excited via Cylindrical Vector Beam. SENSORS 2021; 21:s21165642. [PMID: 34451083 PMCID: PMC8402329 DOI: 10.3390/s21165642] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/22/2021] [Revised: 08/13/2021] [Accepted: 08/18/2021] [Indexed: 12/23/2022]
Abstract
Function expansion of fiber sensor is highly desired for ultrasensitive optical detection and analysis. Here, we present an approach of multifunctional fiber sensor based on Fano resonances and localized surface plasmon resonance (LSPR) excited via cylindrical vector beam with ability of refractive index (RI) sensing, nano-distance detection, and surface enhanced Raman spectroscopy (SERS). Silver (Ag)-nanocube modified microfiber is theoretically proved to enable to detect RI of the nearby solids and gases based on Fano resonances with a sensitivity of 128.63 nm/refractive index unit (RIU) and 148.21 nm/RIU for solids and gases, respectively. The scattering spectrum of the Ag nanocube has the red-shift response to the varies of the nano-distance between the nanocube and the nearby solid, providing a detection sensitivity up to 1.48 nm (wavelength)/nm (distance). Moreover, this configuration is theoretically verified to have ability to significantly enhance electric field intensity. Radially polarized beam is proved to enhance the electric field intensity as large as 5 times in the side-face configuration compared with linear polarization beam. This fiber-based sensing method is helpful in fields of remote detection, multiple species detection, and cylindrical vector beam-based detection.
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Affiliation(s)
- Min Liu
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
- Guangzhou Institute of Technology, Xidian University, Guangzhou 510555, China
| | - Lan Yu
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
| | - Yunze Lei
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
| | - Xiang Fang
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
| | - Ying Ma
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
| | - Lixin Liu
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
| | - Juanjuan Zheng
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
| | - Ke Lin
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
| | - Peng Gao
- School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China; (M.L.); (L.Y.); (Y.L.); (X.F.); (Y.M.); (L.L.); (J.Z.); (K.L.)
- Correspondence:
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Hwang I, Kim M, Yu J, Lee J, Choi JH, Park SA, Chang WS, Lee J, Jung JY. Ultrasensitive Molecule Detection Based on Infrared Metamaterial Absorber with Vertical Nanogap. SMALL METHODS 2021; 5:e2100277. [PMID: 34927875 DOI: 10.1002/smtd.202100277] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/11/2021] [Revised: 04/22/2021] [Indexed: 05/14/2023]
Abstract
Surface-enhanced infrared absorption (SEIRA) spectroscopy is a powerful methodology for sensing and identifying small quantities of analyte molecules via coupling between molecular vibrations and an enhanced near-field induced in engineered structures. A metamaterial absorber (MA) is proposed as an efficient SEIRA platform; however, its efficiency is limited because it requires the appropriate insulator thickness and has a limited accessible area for sensing. SEIRA spectroscopy is proposed using an MA with a 10 nm thick vertical nanogap, and a record-high reflection difference SEIRA signal of 36% is experimentally achieved using a 1-octadecanethiol monolayer target molecule. Theoretical and experimental comparative studies are conducted using MAs with three different vertical nanogaps. The MAs with a vertical nanogap are processed using nanoimprint lithography and isotropic dry etching, which allow cost-effective large-area patterning and mass production. The proposed structure may provide promising routes for ultrasensitive sensing and detection applications.
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Affiliation(s)
- Inyong Hwang
- Department of Electrical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea
| | - Mingyun Kim
- Department of Electrical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon, 305-343, Republic of Korea
| | - Jaeyeon Yu
- Department of Electrical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea
| | - Jihye Lee
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon, 305-343, Republic of Korea
| | - Jun-Hyuk Choi
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon, 305-343, Republic of Korea
| | - Su A Park
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon, 305-343, Republic of Korea
| | - Won Seok Chang
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon, 305-343, Republic of Korea
| | - Jongwon Lee
- Department of Electrical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, Republic of Korea
| | - Joo-Yun Jung
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon, 305-343, Republic of Korea
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Kitajima Y, Sakamoto H, Ueno K. Coupled plasmonic systems: controlling the plasmon dynamics and spectral modulations for molecular detection. NANOSCALE 2021; 13:5187-5201. [PMID: 33687413 DOI: 10.1039/d0nr06681h] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/21/2023]
Abstract
This review describes recent studies on coupled plasmonic systems for controlling plasmon dynamics and molecular detection using spectral modulations. The plasmon dephasing time can be controlled by weak and strong coupling regimes between the plasmonic nanostructures or localized surface plasmon resonances (LSPRs) and the other optical modes such as microcavities. The modal coupling induces near-field enhancement by extending the plasmon dephasing time to increase the near-field enhancement at certain wavelengths resulting in the enhancement of molecular detection. On the other hand, the interaction between LSPR and molecular excited or vibrational states also modulates the resonance spectrum, which can also be used for detecting a small number of molecules with a subtle change in the spectrum. The spectral modulation is induced by weak and strong couplings between LSPRs and the electronic or vibrational states of molecules, and this method is sensitive enough to measure a single molecule.
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Affiliation(s)
- Yuto Kitajima
- Department of Chemistry, Faculty of Science, Hokkaido University, Sapporo 060-0810, Japan.
| | - Hiyori Sakamoto
- Department of Chemistry, Faculty of Science, Hokkaido University, Sapporo 060-0810, Japan.
| | - Kosei Ueno
- Department of Chemistry, Faculty of Science, Hokkaido University, Sapporo 060-0810, Japan.
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Xu J, Ren Z, Dong B, Liu X, Wang C, Tian Y, Lee C. Nanometer-Scale Heterogeneous Interfacial Sapphire Wafer Bonding for Enabling Plasmonic-Enhanced Nanofluidic Mid-Infrared Spectroscopy. ACS NANO 2020; 14:12159-12172. [PMID: 32812748 DOI: 10.1021/acsnano.0c05794] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
As one of the most effective surface-enhanced infrared absorption (SEIRA) techniques, metal-insulator-metal structured metamaterial perfect absorbers possess an ultrahigh sensitivity and selectivity in molecular infrared fingerprint detection. However, most of the localized electromagnetic fields (i.e., hotspots) are confined in the dielectric layer, hindering the interaction between analytes and hotspots. By replacing the dielectric layer with the nanofluidic channel, we develop a sapphire (Al2O3)-based mid-infrared (MIR) hybrid nanofluidic-SEIRA (HN-SEIRA) platform for liquid sensors with the aid of a low-temperature interfacial heterogeneous sapphire wafer direct bonding technique. The robust atomic bonding interface is confirmed by transmission electron microscope observation. We also establish a design methodology for the HN-SEIRA sensor using coupled-mode theory to carry out the loss engineering and experimentally validate its feasibility through the accurate nanogap control. Thanks to the capillary force, liquid analytes can be driven into sensing hotspots without external actuation systems. Besides, we demonstrate an in situ real-time dynamic monitoring process for the acetone molecular diffusion in deionized water. A small concentration change of 0.29% is distinguished and an ultrahigh sensitivity (0.8364 pmol-1 %) is achieved. With the aid of IR fingerprint absorption, our HN-SEIRA platform brings the selectivity of liquid molecules with similar refractive indexes. It also resolves water absorption issues in traditional IR liquid sensors thanks to the sub-nm long light path. Considering the wide transparency window of Al2O3 in MIR (up to 5.2 μm), the HN-SEIRA platform covers more IR absorption range for liquid sensing compared to fused glass commonly used in micro/nanofluidics. Leveraging the aforementioned advantages, our work provides insights into developing a MIR real-time liquid sensing platform with intrinsic IR fingerprint selectivity, label-free ultrahigh sensitivity, and ultralow analyte volume, demonstrating a way toward quantitative molecule identification and dynamic analysis for the chemical and biological reaction processes.
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Affiliation(s)
- Jikai Xu
- State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
| | - Bowei Dong
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
| | - Xinmiao Liu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
| | - Chenxi Wang
- State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
| | - Yanhong Tian
- State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117576, Singapore
- NUS Graduate School for Integrative Sciences and Engineering, National University of Singapore, Singapore 117456, Singapore
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