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Sotnichuk SV, Skryabina OV, Shishkin AG, Golovchanskiy IA, Bakurskiy SV, Stolyarov VS, Napolskii KS. Controlled electrodeposition of cobalt nanowires using iRcompensation and their electron transport properties. NANOTECHNOLOGY 2024; 35:465001. [PMID: 39121868 DOI: 10.1088/1361-6528/ad6d72] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/01/2024] [Accepted: 08/09/2024] [Indexed: 08/12/2024]
Abstract
Superconducting hybrid structures based on single nanowires are a new type of nanoscale devices with peculiar transport characteristics. Control over the nanowire structure is essential for understanding hybrid electronic phenomena arising in such complex systems. In this work, we report a technique for the fabrication of cobalt nanowires by template-assisted electrodeposition usingiRcompensation, which allows revealing the fundamental dependence of the preferred direction of nanowire growth on the deposition potential. Long coarse-grained cobalt nanowires with a diameter of 70 nm have been implemented into Nb/Co/Nb hybrid structures. We demonstrate that using electrode fabrication techniques that do not contaminate the surface of the nanowire leads to a high quality of devices with low-resistance interfaces. Low-temperature resistivity of 4.94 ± 0.83µΩ cm and other transport characteristics of Co nanowires are reported. The absence of long-range superconducting proximity effect for Nb/Co/Nb systems with different nanowire length is discussed.
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Affiliation(s)
- Stepan V Sotnichuk
- National University of Science and Technology MISIS, Moscow 119049, Russia
| | - Olga V Skryabina
- National University of Science and Technology MISIS, Moscow 119049, Russia
| | - Andrey G Shishkin
- National University of Science and Technology MISIS, Moscow 119049, Russia
| | | | - Sergey V Bakurskiy
- National University of Science and Technology MISIS, Moscow 119049, Russia
| | - Vasily S Stolyarov
- National University of Science and Technology MISIS, Moscow 119049, Russia
| | - Kirill S Napolskii
- National University of Science and Technology MISIS, Moscow 119049, Russia
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2
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Seewald LM, Sattelkow J, Brugger-Hatzl M, Kothleitner G, Frerichs H, Schwalb C, Hummel S, Plank H. 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:4477. [PMID: 36558331 PMCID: PMC9787867 DOI: 10.3390/nano12244477] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/25/2022] [Revised: 12/07/2022] [Accepted: 12/15/2022] [Indexed: 06/17/2023]
Abstract
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in the sub-10 nm regime to allow for high-resolution imaging during morphological imaging, conductive AFM (CAFM) and electrostatic force microscopy (EFM). The study starts with design aspects to motivate the proposed HC architecture, followed by detailed fabrication characterization to identify and optimize FEBID process parameters. To arrive at desired material properties, e-beam assisted purification in low-pressure water atmospheres was applied at room temperature, which enabled the removal of carbon impurities from as-deposited structures. The microstructure of final HCs was analyzed via scanning transmission electron microscopy-high-angle annular dark field (STEM-HAADF), whereas electrical and mechanical properties were investigated in situ using micromanipulators. Finally, AFM/EFM/CAFM measurements were performed in comparison to non-functional, high-resolution tips and commercially available electric probes. In essence, we demonstrate that the proposed all-metal HCs provide the resolution capabilities of the former, with the electric conductivity of the latter onboard, combining both assets in one design.
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Affiliation(s)
- Lukas Matthias Seewald
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Jürgen Sattelkow
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Michele Brugger-Hatzl
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Gerald Kothleitner
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | | | - Christian Schwalb
- GETec Microscopy Inc., 1020 Wien, Austria
- Quantum Design Microscopy, 64293 Darmstadt, Germany
| | | | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
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3
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Baranowski M, Sachser R, Marinković BP, Ivanović SD, Huth M. Charge Transport inside TiO 2 Memristors Prepared via FEBID. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:4145. [PMID: 36500769 PMCID: PMC9740258 DOI: 10.3390/nano12234145] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/21/2022] [Revised: 11/15/2022] [Accepted: 11/18/2022] [Indexed: 05/27/2023]
Abstract
We fabricated memristive devices using focused electron beam-induced deposition (FEBID) as a direct-writing technique employing a Pt/TiO2/Pt sandwich layer device configuration. Pinching in the measured current-voltage characteristics (i-v), the characteristic fingerprint of memristive behavior was clearly observed. The temperature dependence was measured for both high and low resistive states in the range from 290 K down to about 2 K, showing a stretched exponential behavior characteristic of Mott-type variable-range hopping. From this observation, a valence change mechanism of the charge transport inside the TiO2 layer can be deduced.
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Affiliation(s)
- Markus Baranowski
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
| | - Roland Sachser
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
| | - Bratislav P. Marinković
- Institute of Physics Belgrade, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia
| | - Stefan Dj. Ivanović
- Institute of Physics Belgrade, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia
| | - Michael Huth
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
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4
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Utke I, Swiderek P, Höflich K, Madajska K, Jurczyk J, Martinović P, Szymańska I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coord Chem Rev 2022. [DOI: 10.1016/j.ccr.2021.213851] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
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5
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Keller L, Huth M. Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:2581-2598. [PMID: 30345218 PMCID: PMC6176821 DOI: 10.3762/bjnano.9.240] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/26/2018] [Accepted: 08/28/2018] [Indexed: 05/30/2023]
Abstract
Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam's movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.
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Affiliation(s)
- Lukas Keller
- Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
| | - Michael Huth
- Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
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6
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Direct-write of free-form building blocks for artificial magnetic 3D lattices. Sci Rep 2018; 8:6160. [PMID: 29670129 PMCID: PMC5906635 DOI: 10.1038/s41598-018-24431-x] [Citation(s) in RCA: 68] [Impact Index Per Article: 11.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/17/2018] [Accepted: 03/29/2018] [Indexed: 11/30/2022] Open
Abstract
By the fabrication of periodically arranged nanomagnetic systems it is possible to engineer novel physical properties by realizing artificial lattice geometries that are not accessible via natural crystallization or chemical synthesis. This has been accomplished with great success in two dimensions in the fields of artificial spin ice and magnetic logic devices, to name just two. Although first proposals have been made to advance into three dimensions (3D), established nanofabrication pathways based on electron beam lithography have not been adapted to obtain free-form 3D nanostructures. Here we demonstrate the direct-write fabrication of freestanding ferromagnetic 3D nano-architectures. By employing micro-Hall sensing, we have determined the magnetic stray field generated by our free-form structures in an externally applied magnetic field and we have performed micromagnetic and macro-spin simulations to deduce the spatial magnetization profiles in the structures and analyze their switching behavior. Furthermore we show that the magnetic 3D elements can be combined with other 3D elements of different chemical composition and intrinsic material properties.
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7
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P RKT, Weirich P, Hrachowina L, Hanefeld M, Bjornsson R, Hrodmarsson HR, Barth S, Fairbrother DH, Huth M, Ingólfsson O. Electron interactions with the heteronuclear carbonyl precursor H 2FeRu 3(CO) 13 and comparison with HFeCo 3(CO) 12: from fundamental gas phase and surface science studies to focused electron beam induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:555-579. [PMID: 29527432 PMCID: PMC5827713 DOI: 10.3762/bjnano.9.53] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/07/2017] [Accepted: 12/20/2017] [Indexed: 05/11/2023]
Abstract
In the current contribution we present a comprehensive study on the heteronuclear carbonyl complex H2FeRu3(CO)13 covering its low energy electron induced fragmentation in the gas phase through dissociative electron attachment (DEA) and dissociative ionization (DI), its decomposition when adsorbed on a surface under controlled ultrahigh vacuum (UHV) conditions and exposed to irradiation with 500 eV electrons, and its performance in focused electron beam induced deposition (FEBID) at room temperature under HV conditions. The performance of this precursor in FEBID is poor, resulting in maximum metal content of 26 atom % under optimized conditions. Furthermore, the Ru/Fe ratio in the FEBID deposit (≈3.5) is higher than the 3:1 ratio predicted. This is somewhat surprising as in recent FEBID studies on a structurally similar bimetallic precursor, HFeCo3(CO)12, metal contents of about 80 atom % is achievable on a routine basis and the deposits are found to maintain the initial Co/Fe ratio. Low temperature (≈213 K) surface science studies on thin films of H2FeRu3(CO)13 demonstrate that electron stimulated decomposition leads to significant CO desorption (average of 8-9 CO groups per molecule) to form partially decarbonylated intermediates. However, once formed these intermediates are largely unaffected by either further electron irradiation or annealing to room temperature, with a predicted metal content similar to what is observed in FEBID. Furthermore, gas phase experiments indicate formation of Fe(CO)4 from H2FeRu3(CO)13 upon low energy electron interaction. This fragment could desorb at room temperature under high vacuum conditions, which may explain the slight increase in the Ru/Fe ratio of deposits in FEBID. With the combination of gas phase experiments, surface science studies and actual FEBID experiments, we can offer new insights into the low energy electron induced decomposition of this precursor and how this is reflected in the relatively poor performance of H2FeRu3(CO)13 as compared to the structurally similar HFeCo3(CO)12.
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Affiliation(s)
- Ragesh Kumar T P
- Science Institute and Department of Chemistry, University of Iceland, Reykjavík, Iceland
| | - Paul Weirich
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | | | - Marc Hanefeld
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | - Ragnar Bjornsson
- Science Institute and Department of Chemistry, University of Iceland, Reykjavík, Iceland
| | - Helgi Rafn Hrodmarsson
- Science Institute and Department of Chemistry, University of Iceland, Reykjavík, Iceland
| | - Sven Barth
- Institute of Materials Chemistry, TU Wien, 1060 Vienna, Austria
| | | | - Michael Huth
- Physikalisches Institut, Max-von-Laue-Str. 1, Goethe-Universität, 60438 Frankfurt am Main, Germany
| | - Oddur Ingólfsson
- Science Institute and Department of Chemistry, University of Iceland, Reykjavík, Iceland
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Puydinger dos Santos MV, Szkudlarek A, Rydosz A, Guerra-Nuñez C, Béron F, Pirota KR, Moshkalev S, Diniz JA, Utke I. Comparative study of post-growth annealing of Cu(hfac) 2, Co 2(CO) 8 and Me 2Au(acac) metal precursors deposited by FEBID. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:91-101. [PMID: 29441254 PMCID: PMC5789384 DOI: 10.3762/bjnano.9.11] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/21/2017] [Accepted: 12/14/2017] [Indexed: 05/15/2023]
Abstract
Non-noble metals, such as Cu and Co, as well as noble metals, such as Au, can be used in a number modern technological applications, which include advanced scanning-probe systems, magnetic memory and storage, ferroelectric tunnel junction memristors, metal interconnects for high performance integrated circuits in microelectronics and nano-optics applications, especially in the areas of plasmonics and metamaterials. Focused-electron-beam-induced deposition (FEBID) is a maskless direct-write tool capable of defining 3-dimensional metal deposits at nanometre scale for above applications. However, codeposition of organic ligands when using organometallic precursors is a typical problem that limits FEBID of pure metal nanostructures. In this work, we present a comparative study using a post-growth annealing protocol at 100, 200, and 300 °C under high vacuum on deposits obtained from Co2(CO)8, Cu(II)(hfac)2, and Me2Au(acac) to study improvements on composition and electrical conductivity. Although the as-deposited material was similar for all precursors, metal grains embedded in a carbonaceous matrix, the post-growth annealing results differed. Cu-containing deposits showed the formation of pure Cu nanocrystals at the outer surface of the initial deposit for temperatures above 100 °C, due to the migration of Cu atoms from the carbonaceous matrix containing carbon, oxygen, and fluorine atoms. The average size of the Cu crystals doubles between 100 and 300 °C of annealing temperature, while the composition remains constant. In contrast, for Co-containing deposits oxygen release was observed upon annealing, while the carbon content remained approximately constant; the cobalt atoms coalesced to form a metallic film. The as-deposited Au-containing material shows subnanometric grains that coalesce at 100 °C, maintaining the same average size at annealing temperatures up to 300 °C. Raman analysis suggests that the amorphous carbonaceous matrix of the as-written Co, Cu and Au deposits turned into nanocrystalline graphite with comparable crystal sizes of 12-14 nm at 300 °C annealing temperature. However, we observed a more effective formation of graphite clusters in Co- than in Cu- and Au-containing deposits. The graphitisation has a minor influence on the electrical conductivity improvements of Co-C deposits, which is attributed to the high as-deposited Co content and the related metal grain percolation. On the contrary, electrical conductivity improvements by factors of 30 and 12 for, respectively, Cu-C and Au-C deposits with low metal content are mainly attributed to the graphitisation. This relatively simple vacuum-based post-growth annealing protocol may be useful for other precursors as it proved to be efficient in reliably tuning the electrical properties of as-deposited FEBID materials. Finally, a H2-assisted gold purification protocol is demonstrated at temperatures around 300 °C by fully removing the carbon matrix and drastically reducing the electrical resistance of the deposit.
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Affiliation(s)
- Marcos Vinicius Puydinger dos Santos
- Institute of Physics Gleb Wataghin, University of Campinas, Rua Sérgio Buarque de Holanda 777 Cidade Universitária, 13083-859, Campinas-SP, Brazil
- Faculty of Electrical and Computing Engineering and Center for Semiconductor Components and Nanotechnologies, University of Campinas, Rua Pandiá Calógeras 90, Cidade Universitária, 13083-870, Campinas-SP, Brazil
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA), Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Aleksandra Szkudlarek
- AGH University of Science and Technology, Academic Centre for Materials and Nanotechnology, al. A. Mickiewicza 30, 30-059 Krakow, Poland
| | - Artur Rydosz
- AGH University of Science and Technology, Faculty of Computer Science, Electronics and Telecommunications, Av. Mickiewicza 30, 30-059 Krakow, Poland
| | - Carlos Guerra-Nuñez
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA), Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Fanny Béron
- Institute of Physics Gleb Wataghin, University of Campinas, Rua Sérgio Buarque de Holanda 777 Cidade Universitária, 13083-859, Campinas-SP, Brazil
| | - Kleber Roberto Pirota
- Institute of Physics Gleb Wataghin, University of Campinas, Rua Sérgio Buarque de Holanda 777 Cidade Universitária, 13083-859, Campinas-SP, Brazil
| | - Stanislav Moshkalev
- Faculty of Electrical and Computing Engineering and Center for Semiconductor Components and Nanotechnologies, University of Campinas, Rua Pandiá Calógeras 90, Cidade Universitária, 13083-870, Campinas-SP, Brazil
| | - José Alexandre Diniz
- Faculty of Electrical and Computing Engineering and Center for Semiconductor Components and Nanotechnologies, University of Campinas, Rua Pandiá Calógeras 90, Cidade Universitária, 13083-870, Campinas-SP, Brazil
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA), Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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Sanz-Hernández D, Fernández-Pacheco A. Modelling focused electron beam induced deposition beyond Langmuir adsorption. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2151-2161. [PMID: 29090116 PMCID: PMC5647696 DOI: 10.3762/bjnano.8.214] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/04/2017] [Accepted: 09/18/2017] [Indexed: 05/03/2023]
Abstract
In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion are investigated and compared under a wide range of conditions. The different growth regimes observed are fully explained by relative changes in FEBID characteristic frequencies. Additionally, we present a set of FEBID frequency maps where growth rate and surface coverage are plotted as a function of characteristic timescales. From the analysis of Langmuir, as well as homogeneous and heterogeneous multilayer maps, we infer that three types of growth regimes are possible for FEBID under no diffusion, resulting into four types of adsorption isotherms. We propose the use of these maps as a powerful tool for the analysis of FEBID processes.
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Affiliation(s)
- Dédalo Sanz-Hernández
- Cavendish Laboratory, University of Cambridge, JJ Thomson Cambridge, CB3 0HE, United Kingdom
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10
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Porrati F, Sachser R, Gazzadi GC, Frabboni S, Terfort A, Huth M. Alloy multilayers and ternary nanostructures by direct-write approach. NANOTECHNOLOGY 2017; 28:415302. [PMID: 28805652 DOI: 10.1088/1361-6528/aa8619] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
The fabrication of nanopatterned multilayers, as used in optical and magnetic applications, is usually achieved by two independent steps, which consist in the preparation of multilayer films and in the successive patterning by means of lithography and etching processes. Here we show that multilayer nanostructures can be fabricated by using focused electron beam induced deposition (FEBID), which allows the direct writing of nanostructures of any desired shape with nanoscale resolution. In particular, [Formula: see text] multilayers are prepared by the alternating deposition from the metal carbonyl precursors, [Formula: see text] and [Formula: see text], and neopentasilane, [Formula: see text]. The ability to fabricate nanopatterned multilayers by FEBID is of interest for the realization of hyperbolic metamaterials and related nanodevices. In a second experiment, we treated the multilayers by low-energy electron irradiation in order to induce atomic species intermixing with the purpose to obtain ternary nanostructured compounds. Transmission electron microscopy and electrical transport measurements indicate that in thick multilayers, (n = 12), the intermixing is only partial, taking place mainly in the upper part of the structures. However, for thin multilayers, (n = 2), the intermixing is such that a transformation into the L21 phase of the Co2FeSi Heusler compound takes place over the whole sample volume.
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Affiliation(s)
- F Porrati
- Physikalisches Institut, Goethe-Universität, Max-von-Laue-Str. 1, D-60438 Frankfurt am Main, Germany
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11
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Puydinger Dos Santos MV, Velo MF, Domingos RD, Zhang Y, Maeder X, Guerra-Nuñez C, Best JP, Béron F, Pirota KR, Moshkalev S, Diniz JA, Utke I. Annealing-Based Electrical Tuning of Cobalt-Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition. ACS APPLIED MATERIALS & INTERFACES 2016; 8:32496-32503. [PMID: 27933832 DOI: 10.1021/acsami.6b12192] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
Abstract
An effective postgrowth electrical tuning, via an oxygen releasing method, to enhance the content of non-noble metals in deposits directly written with gas-assisted focused-electron-beam-induced deposition (FEBID) is presented. It represents a novel and reproducible method for improving the electrical transport properties of Co-C deposits. The metal content and electrical properties of Co-C-O nanodeposits obtained by electron-induced dissociation of volatile Co2(CO)8 precursor adsorbate molecules were reproducibly tuned by applying postgrowth annealing processes at 100 °C, 200 °C, and 300 °C under high-vacuum for 10 min. Advanced thin film EDX analysis showed that during the annealing process predominantly oxygen is released from the Co-C-O deposits, yielding an atomic ratio of Co:C:O = 100:16:1 (85:14:1) with respect to the atomic composition of as-written Co:C:O = 100:21:28 (67:14:19). In-depth Raman analysis suggests that the amorphous carbon contained in the as-written deposit turns into graphite nanocrystals with size of about 22.4 nm with annealing temperature. Remarkably, these microstructural changes allow for tuning of the electrical resistivity of the deposits over 3 orders of magnitude from 26 mΩ cm down to 26 μΩ cm, achieving a residual resistivity of ρ2K/ρ300 K = 0.56, close to the value of 0.53 for pure Co films with similar dimensions, making it especially interesting and advantageous over the numerous works already published for applications such as advanced scanning-probe systems, magnetic memory, storage, and ferroelectric tunnel junction memristors, as the graphitic matrix protects the cobalt from being oxidized under an ambient atmosphere.
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Affiliation(s)
- Marcos V Puydinger Dos Santos
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA) , Feuerwerkstrasse 39, 3602 Thun, Switzerland
- Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas , Rua Sérgio Buarque de Holanda 777, Cidade Universitária, 13083-859 Campinas-SP, Brazil
- Faculdade de Engenharia Elétrica e Computação e Centro de Componentes Semicondutores, Universidade Estadual de Campinas , Avenida Albert Einstein 400, 13083-852 Campinas-SP, Brazil
| | - Murilo F Velo
- Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas , Rua Sérgio Buarque de Holanda 777, Cidade Universitária, 13083-859 Campinas-SP, Brazil
| | - Renan D Domingos
- Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas , Rua Sérgio Buarque de Holanda 777, Cidade Universitária, 13083-859 Campinas-SP, Brazil
| | - Yucheng Zhang
- Electron Microscopy Center, Swiss Federal Laboratories for Materials Science and Technology (EMPA) , Überlandstrasse 129, 8600 Dübendorf, Switzerland
| | - Xavier Maeder
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA) , Feuerwerkstrasse 39, 3602 Thun, Switzerland
| | - Carlos Guerra-Nuñez
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA) , Feuerwerkstrasse 39, 3602 Thun, Switzerland
| | - James P Best
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA) , Feuerwerkstrasse 39, 3602 Thun, Switzerland
| | - Fanny Béron
- Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas , Rua Sérgio Buarque de Holanda 777, Cidade Universitária, 13083-859 Campinas-SP, Brazil
| | - Kleber R Pirota
- Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas , Rua Sérgio Buarque de Holanda 777, Cidade Universitária, 13083-859 Campinas-SP, Brazil
| | - Stanislav Moshkalev
- Faculdade de Engenharia Elétrica e Computação e Centro de Componentes Semicondutores, Universidade Estadual de Campinas , Avenida Albert Einstein 400, 13083-852 Campinas-SP, Brazil
| | - José A Diniz
- Faculdade de Engenharia Elétrica e Computação e Centro de Componentes Semicondutores, Universidade Estadual de Campinas , Avenida Albert Einstein 400, 13083-852 Campinas-SP, Brazil
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Swiss Federal Laboratories for Materials Science and Technology (EMPA) , Feuerwerkstrasse 39, 3602 Thun, Switzerland
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12
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Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers. Nat Commun 2016; 7:12487. [PMID: 27666316 PMCID: PMC5052671 DOI: 10.1038/ncomms12487] [Citation(s) in RCA: 32] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/04/2015] [Accepted: 07/07/2016] [Indexed: 01/07/2023] Open
Abstract
The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically through size reduction. The need for such increased performance for high-speed nanocharacterization and bio-sensing, drives their sub-micrometre miniaturization in a variety of research fields. However, existing detection methods of the cantilever motion do not scale down easily, prohibiting further increase in the sensitivity and detection speed. Here we report a nanomechanical sensor readout based on electron co-tunnelling through a nanogranular metal. The sensors can be deposited with lateral dimensions down to tens of nm, allowing the readout of nanoscale cantilevers without constraints on their size, geometry or material. By modifying the inter-granular tunnel-coupling strength, the sensors' conductivity can be tuned by up to four orders of magnitude, to optimize their performance. We show that the nanoscale printed sensors are functional on 500 nm wide cantilevers and that their sensitivity is suited even for demanding applications such as atomic force microscopy. Reducing the size of cantilever-based sensors increases the sensitivity and detection speed of techniques such as atomic force microscopy. Here, the authors demonstrate a nanomechanical readout method that can be easily scaled down in size by using electron co-tunnelling through a nanogranular metal.
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Spencer JA, Wu YC, McElwee-White L, Fairbrother DH. Electron Induced Surface Reactions of cis-Pt(CO)2Cl2: A Route to Focused Electron Beam Induced Deposition of Pure Pt Nanostructures. J Am Chem Soc 2016; 138:9172-82. [PMID: 27346707 DOI: 10.1021/jacs.6b04156] [Citation(s) in RCA: 33] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/06/2023]
Abstract
Using mechanistic data from surface science studies on electron-induced reactions of organometallic precursors, cis-Pt(CO)2Cl2 (1) was designed specifically for use in focused electron beam induced deposition (FEBID) of Pt nanostructures. Electron induced decomposition of adsorbed 1 under ultrahigh vacuum (UHV) conditions proceeds through initial CO loss as determined by in situ X-ray photoelectron spectroscopy and mass spectrometry. Although the Pt-Cl bonds remain intact during the initial decomposition step, larger electron doses induce removal of the residual chloride through an electron-stimulated desorption process. FEBID structures created from cis-Pt(CO)2Cl2 under steady state deposition conditions in an Auger spectrometer were determined to be PtCl2, free of carbon and oxygen. Coupled with the electron stimulated removal of chlorine demonstrated in the UHV experiments, the Auger deposition data establish a route to FEBID of pure Pt. Results from this study demonstrate that structure-activity relationships can be used to design new precursors specifically for FEBID.
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Affiliation(s)
- Julie A Spencer
- Department of Chemistry, Johns Hopkins University , Baltimore, Maryland 21218, United States
| | - Yung-Chien Wu
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida , Gainesville, Florida 32611-7200, United States
| | - D Howard Fairbrother
- Department of Chemistry, Johns Hopkins University , Baltimore, Maryland 21218, United States
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14
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Córdoba R, Barcones B, Roelfsema E, Verheijen MA, Mulders JJL, Trompenaars PHF, Koopmans B. Functional nickel-based deposits synthesized by focused beam induced processing. NANOTECHNOLOGY 2016; 27:065303. [PMID: 26759183 DOI: 10.1088/0957-4484/27/6/065303] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Functional nanostructures fabricated by focused electron/ion beam induced processing (FEBIP/FIBIP) open a promising route for applications in nanoelectronics. Such developments rely on the exploration of new advanced materials. We report here the successful fabrication of nickel-based deposits by FEBIP/FIBIP using bis(methyl cyclopentadienyl)nickel as a precursor. In particular, binary compounds such as nickel oxide (NiO) are synthesized by using an in situ two-step process at room temperature. By this method, as-grown Ni deposits transform into homogeneous NiO deposits using focused electron beam irradiation under O2 flux. This procedure is effective in producing highly pure NiO deposits with resistivity of 2000 Ωcm and a polycrystalline structure with face-centred cubic lattice and grains of 5 nm. We demonstrate that systems based on NiO deposits displaying resistance switching and an exchange-bias effect could be grown by FEBIP using optimized parameters. Our results provide a breakthrough towards using these techniques for the fabrication of functional nanodevices.
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Affiliation(s)
- R Córdoba
- Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands
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15
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Stanford MG, Lewis BB, Noh JH, Fowlkes JD, Rack PD. Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits. ACS APPLIED MATERIALS & INTERFACES 2015; 7:19579-88. [PMID: 26126173 DOI: 10.1021/acsami.5b02488] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/12/2023]
Abstract
Electron-beam-induced deposition patterns, with composition of PtC5, were purified using a pulsed laser-induced purification reaction to erode the amorphous carbon matrix and form pure platinum deposits. Enhanced mobility of residual H2O molecules via a localized injection of inert Ar-H2 (4%) is attributed to be the reactive gas species for purification of the deposits. Surface purification of deposits was realized at laser exposure times as low as 0.1 s. The ex situ purification reaction in the deposit interior was shown to be rate-limited by reactive gas diffusion into the deposit, and deposit contraction associated with the purification process caused some loss of shape retention. To circumvent the intrinsic flaws of the ex situ anneal process, in situ deposition and purification techniques were explored that resemble a direct write atomic layer deposition (ALD) process. First, we explored a laser-assisted electron-beam-induced deposition (LAEBID) process augmented with reactive gas that resulted in a 75% carbon reduction compared to standard EBID. A sequential deposition plus purification process was also developed and resulted in deposition of pure platinum deposits with high fidelity and shape retention.
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Affiliation(s)
- Michael G Stanford
- Materials Science and Engineering Department, University of Tennessee , Knoxville, Tennessee 37996, United States
| | - Brett B Lewis
- Materials Science and Engineering Department, University of Tennessee , Knoxville, Tennessee 37996, United States
| | - Joo Hyon Noh
- Materials Science and Engineering Department, University of Tennessee , Knoxville, Tennessee 37996, United States
| | - Jason D Fowlkes
- Materials Science and Engineering Department, University of Tennessee , Knoxville, Tennessee 37996, United States
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory , Oak Ridge, Tennessee 37381, United States
| | - Philip D Rack
- Materials Science and Engineering Department, University of Tennessee , Knoxville, Tennessee 37996, United States
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory , Oak Ridge, Tennessee 37381, United States
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16
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Dobrovolskiy OV, Kompaniiets M, Sachser R, Porrati F, Gspan C, Plank H, Huth M. Tunable magnetism on the lateral mesoscale by post-processing of Co/Pt heterostructures. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2015; 6:1082-90. [PMID: 26171284 PMCID: PMC4464159 DOI: 10.3762/bjnano.6.109] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/17/2014] [Accepted: 03/31/2015] [Indexed: 05/25/2023]
Abstract
Controlling magnetic properties on the nanometer-scale is essential for basic research in micro-magnetism and spin-dependent transport, as well as for various applications such as magnetic recording, imaging and sensing. This has been accomplished to a very high degree by means of layered heterostructures in the vertical dimension. Here we present a complementary approach that allows for a controlled tuning of the magnetic properties of Co/Pt heterostructures on the lateral mesoscale. By means of in situ post-processing of Pt- and Co-based nano-stripes prepared by focused electron beam induced deposition (FEBID) we are able to locally tune their coercive field and remanent magnetization. Whereas single Co-FEBID nano-stripes show no hysteresis, we find hard-magnetic behavior for post-processed Co/Pt nano-stripes with coercive fields up to 850 Oe. We attribute the observed effects to the locally controlled formation of the CoPt L10 phase, whose presence has been revealed by transmission electron microscopy.
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Affiliation(s)
- Oleksandr V Dobrovolskiy
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
- Physics Department, V. Karazin Kharkiv National University, 61077 Kharkiv, Ukraine
| | - Maksym Kompaniiets
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
| | - Roland Sachser
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
| | - Fabrizio Porrati
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
| | | | - Harald Plank
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute for Electron Microscopy and Nanoanalysis, TU Graz, 8010 Graz, Austria
| | - Michael Huth
- Physikalisches Institut, Goethe University, 60438 Frankfurt am Main, Germany
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17
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Begun E, Dobrovolskiy OV, Kompaniiets M, Sachser R, Gspan C, Plank H, Huth M. Post-growth purification of Co nanostructures prepared by focused electron beam induced deposition. NANOTECHNOLOGY 2015; 26:075301. [PMID: 25620617 DOI: 10.1088/0957-4484/26/7/075301] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
Abstract
In the majority of cases nanostructures prepared by focused electron beam induced deposition (FEBID) employing an organometallic precursor contain predominantly carbon-based ligand dissociation products. This is unfortunate with regard to using this high-resolution direct-write approach for the preparation of nanostructures for various fields, such as mesoscopic physics, micromagnetism, electronic correlations, spin-dependent transport and numerous applications. Here we present an in situ cleaning approach to obtain pure Co-FEBID nanostructures. The purification procedure lies in the exposure of heated samples to a H2 atmosphere in conjunction with the irradiation by low-energy electrons. The key finding is that the combination of annealing at 300 °C, H2 exposure and electron irradiation leads to compact, carbon- and oxygen free Co layers down to a thickness of about 20 nm starting from as-deposited Co-FEBID structures. In addition to this, in temperature-dependent electrical resistance measurements on post-processed samples we find a typical metallic behavior. In low-temperature magnetoresistance and Hall effect measurements we observe ferromagnetic behavior.
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Affiliation(s)
- E Begun
- Physikalisches Institut, Goethe University, D-60438 Frankfurt am Main, Germany
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18
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Winkler R, Szkudlarek A, Fowlkes JD, Rack PD, Utke I, Plank H. Toward ultraflat surface morphologies during focused electron beam induced nanosynthesis: disruption origins and compensation. ACS APPLIED MATERIALS & INTERFACES 2015; 7:3289-97. [PMID: 25591033 DOI: 10.1021/am508052k] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/26/2023]
Abstract
Emerging applications for nanoscale materials demand precise deposit shape retention from design to deposition. This study investigates the effects that disrupt high-fidelity shapes during focused electron beam induced nanosynthesis. It is shown that process parameters, patterning strategies and deposit topography can impose lateral precursor coverage gradients during growth resulting in unwanted topographic artifacts. The study classifies the evolving surface shapes into four general types and explains the formation and transition from a fundamental point of view. Continuum model calculations and simulations expand the experimental results to provide a comprehensive insight into understand the disruption mechanism. The findings demonstrate that the well-established concept of growth regimes has to be expanded by its lateral gradients as they strongly influence final shape fidelities. Finally, the study is complemented by a compensation strategy that improves the edge fidelity on the lower nanoscale to further push this technique toward the intrinsic limitations.
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Affiliation(s)
- Robert Winkler
- Graz Centre for Electron Microscopy , Steyrergasse 17, 8010 Graz, Austria
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19
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Lewis BB, Stanford MG, Fowlkes JD, Lester K, Plank H, Rack PD. Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2015; 6:907-18. [PMID: 25977862 PMCID: PMC4419598 DOI: 10.3762/bjnano.6.94] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/23/2014] [Accepted: 03/09/2015] [Indexed: 05/23/2023]
Abstract
Platinum-carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top-down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.
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Affiliation(s)
- Brett B Lewis
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Michael G Stanford
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Jason D Fowlkes
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Kevin Lester
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Harald Plank
- Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Philip D Rack
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
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20
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Fowlkes JD, Geier B, Lewis BB, Rack PD, Stanford MG, Winkler R, Plank H. Electron nanoprobe induced oxidation: a simulation of direct-write purification. Phys Chem Chem Phys 2015; 17:18294-304. [DOI: 10.1039/c5cp01196e] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/05/2023]
Abstract
A simulation provides insight into the electron beam driven purification of carbon contaminated nanoscale deposits using O2 and H2O gas.
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Affiliation(s)
- J. D. Fowlkes
- Nanofabrication Research Laboratory
- Center for Nanophase Materials Sciences
- Oak Ridge National Laboratory
- Oak Ridge
- USA
| | - B. Geier
- Graz Centre for Electron Microscopy
- 8010 Graz
- Austria
| | - B. B. Lewis
- Materials Science and Engineering Department
- The University of Tennessee
- Knoxville
- USA
| | - P. D. Rack
- Nanofabrication Research Laboratory
- Center for Nanophase Materials Sciences
- Oak Ridge National Laboratory
- Oak Ridge
- USA
| | - M. G. Stanford
- Materials Science and Engineering Department
- The University of Tennessee
- Knoxville
- USA
| | - R. Winkler
- Graz Centre for Electron Microscopy
- 8010 Graz
- Austria
| | - H. Plank
- Graz Centre for Electron Microscopy
- 8010 Graz
- Austria
- Institute for Electron Microscopy and Nanoanalysis
- Graz University of Technology
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21
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Schmied R, Fowlkes JD, Winkler R, Rack PD, Plank H. Fundamental edge broadening effects during focused electron beam induced nanosynthesis. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2015; 6:462-71. [PMID: 25821687 PMCID: PMC4362041 DOI: 10.3762/bjnano.6.47] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/20/2014] [Accepted: 01/23/2015] [Indexed: 05/14/2023]
Abstract
The present study explores lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition using MeCpPt(IV)Me3 precursor. In particular, the scaling behavior of proximity effects as a function of the primary electron energy and the deposit height is investigated through experiments and validated through simulations. Correlated Kelvin force microscopy and conductive atomic force microscopy measurements identified conductive and non-conductive proximity regions. It was determined that the highest primary electron energies enable the highest edge sharpness while lower energies contain a complex convolution of broadening effects. Moreover, it is demonstrated that intermediate energies lead to even more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution.
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Affiliation(s)
| | - Jason D Fowlkes
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996, USA
| | | | - Phillip D Rack
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996, USA
| | - Harald Plank
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
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22
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Szkudlarek A, Rodrigues Vaz A, Zhang Y, Rudkowski A, Kapusta C, Erni R, Moshkalev S, Utke I. Formation of pure Cu nanocrystals upon post-growth annealing of Cu-C material obtained from focused electron beam induced deposition: comparison of different methods. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2015; 6:1508-17. [PMID: 26425404 PMCID: PMC4578412 DOI: 10.3762/bjnano.6.156] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/16/2015] [Accepted: 06/24/2015] [Indexed: 05/12/2023]
Abstract
In this paper we study in detail the post-growth annealing of a copper-containing material deposited with focused electron beam induced deposition (FEBID). The organometallic precursor Cu(II)(hfac)2 was used for deposition and the results were compared to that of compared to earlier experiments with (hfac)Cu(I)(VTMS) and (hfac)Cu(I)(DMB). Transmission electron microscopy revealed the deposition of amorphous material from Cu(II)(hfac)2. In contrast, as-deposited material from (hfac)Cu(I)(VTMS) and (hfac)Cu(I)(DMB) was nano-composite with Cu nanocrystals dispersed in a carbonaceous matrix. After annealing at around 150-200 °C all deposits showed the formation of pure Cu nanocrystals at the outer surface of the initial deposit due to the migration of Cu atoms from the carbonaceous matrix containing the elements carbon, oxygen, and fluorine. Post-irradiation of deposits with 200 keV electrons in a transmission electron microscope favored the formation of Cu nanocrystals within the carbonaceous matrix of freestanding rods and suppressed the formation on their surface. Electrical four-point measurements on FEBID lines from Cu(hfac)2 showed five orders of magnitude improvement in conductivity when being annealed conventionally and by laser-induced heating in the scanning electron microscope chamber.
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Affiliation(s)
- Aleksandra Szkudlarek
- Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- AGH University of Science and Technology, Academic Centre for Materials and Nanotechnology, al. A. Mickiewicza 30, 30-059 Krakow, Poland
| | - Alfredo Rodrigues Vaz
- Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Center for Semiconductor Components, State University of Campinas, 13083-870, Campinas, SP, Brazil
| | - Yucheng Zhang
- Empa, Swiss Federal Laboratories for Materials Science and Technology, Electron Microscopy Center, Überlandstrasse 129, 8600 Dübendorf, Switzerland
| | - Andrzej Rudkowski
- AGH University of Science and Technology, Faculty of Physics and Applied Computer Science, Department of Solid State Physics, al. A. Mickiewicza 30, 30-059 Krakow, Poland
| | - Czesław Kapusta
- AGH University of Science and Technology, Faculty of Physics and Applied Computer Science, Department of Solid State Physics, al. A. Mickiewicza 30, 30-059 Krakow, Poland
| | - Rolf Erni
- Empa, Swiss Federal Laboratories for Materials Science and Technology, Electron Microscopy Center, Überlandstrasse 129, 8600 Dübendorf, Switzerland
| | - Stanislav Moshkalev
- Center for Semiconductor Components, State University of Campinas, 13083-870, Campinas, SP, Brazil
| | - Ivo Utke
- Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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Stanford MG, Lewis BB, Noh JH, Fowlkes JD, Roberts NA, Plank H, Rack PD. Purification of nanoscale electron-beam-induced platinum deposits via a pulsed laser-induced oxidation reaction. ACS APPLIED MATERIALS & INTERFACES 2014; 6:21256-63. [PMID: 25371990 DOI: 10.1021/am506246z] [Citation(s) in RCA: 30] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/06/2023]
Abstract
Platinum-carbon deposits made via electron-beam-induced deposition were purified via a pulsed laser-induced oxidation reaction and erosion of the amorphous carbon to form pure platinum. Purification proceeds from the top down and is likely catalytically facilitated via the evolving platinum layer. Thermal simulations suggest a temperature threshold of ∼485 K, and the purification rate is a function of the PtC5 thickness (80-360 nm) and laser pulse width (1-100 μs) in the ranges studied. The thickness dependence is attributed to the ∼235 nm penetration depth of the PtC5 composite at the laser wavelength, and the pulse-width dependence is attributed to the increased temperatures achieved at longer pulse widths. Remarkably fast purification is realized at cumulative laser exposure times of less than 1 s.
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Affiliation(s)
- Michael G Stanford
- Materials Science and Engineering Department, University of Tennessee , Knoxville, Tennessee 37996, United States
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