Wang H, Wang X, Zeng C. Flexible, Heat-Durable, and Highly Sensitive Piezoelectrets from Cyclic Olefin Copolymer with Microhoneycomb Structure.
MICROMACHINES 2023;
14:829. [PMID:
37421061 DOI:
10.3390/mi14040829]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/01/2023] [Revised: 03/30/2023] [Accepted: 04/01/2023] [Indexed: 07/09/2023]
Abstract
This paper discusses the fabrication and characterization of cyclic olefin copolymer (COC)-based pseudo-piezoelectric materials (piezoelectrets) with exceptionally high piezoelectric activity, and their potential use in sensing applications. Piezoelectrets that utilize a novel microhoneycomb structure to achieve high piezoelectric sensitivity are carefully engineered and fabricated at a low temperature using a supercritical CO2-assisted assembly. The quasistatic piezoelectric coefficient d33 of the material can reach up to 12,900 pCN-1 when charged at 8000 V. The materials also exhibit excellent thermal stability. The charge build-up in the materials and the actuation behavior of the materials are also investigated. Finally, applications of these materials in pressure sensing and mapping and in wearable sensing are demonstrated.
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