Colloidal Lithographic Nanopatterning via Reactive Ion Etching

Impact of multiscale surface topography characteristics on Candida albicans biofilm formation: From cell repellence to fungicidal activity

While there has been significant research conducted on bacterial colonization on implant materials, with a focus on developing surface modifications to prevent the formation of bacterial biofilms, the study of Candida albicans biofilms on implantable materials is still in its infancy, despite its growing relevance in implant-associated infections. C. albicans fungal infections represent a significant clinical concern due to their severity and associated high fatality rate. Pathogenic yeasts account for an increasing proportion of implant-associated infections, since Candida spp. readily form biofilms on medical and dental device surfaces. In addition, these biofilms are highly antifungal-resistant, making it crucial to explore alternative solutions for the prevention of Candida implant-associated infections. One promising approach is to modify the surface properties of the implant, such as the wettability and topography of these substrata, to prevent the initial Candida attachment to the surface. This review summarizes recent research on the effects of surface wettability, roughness, and architecture on Candida spp. attachment to implantable materials. The nanofabrication of material surfaces are highlighted as a potential method for the prevention of Candida spp. attachment and biofilm formation on medical implant materials. Understanding the mechanisms by which Candida spp. attach to surfaces will allow such surfaces to be designed such that the incidence and severity of Candida infections in patients can be significantly reduced. Most importantly, this approach could also substantially reduce the need to use antifungals for the prevention and treatment of these infections, thereby playing a crucial role in minimizing the possibility contributing to instances of antimicrobial resistance. STATEMENT OF SIGNIFICANCE: In this review we provide a systematic analysis of the role that surface characteristics, such as wettability, roughness, topography and architecture, play on the extent of C. albicans cells attachment that will occur on biomaterial surfaces. We show that exploiting bioinspired surfaces could significantly contribute to the prevention of antimicrobial resistance to antifungal and chemical-based preventive measures. By reducing the attachment and growth of C. albicans cells using surface structure approaches, we can decrease the need for antifungals, which are conventionally used to treat such infections.

Stimulus-responsive nonclose-packed photonic crystals: fabrications and applications

Stimulus-responsive photonic crystals (PCs) possessing unconventional nonclosely packed structures have received growing attention due to their unique capability of mimicking the active structural colors of natural organisms (for example, chameleons' mechanochromic properties). However, there is rarely any systematic review regarding the progress of nonclose-packed photonic crystals (NPCs), involving their fabrication, working mechanisms, and applications. Herein, a comprehensive review of the fundamental principles and practical fabrication strategies of one/two/three-dimensional NPCs is summarized from the perspective of designing nonclose-packed structures. Subsequently, responsive NPCs with exciting functions and working mechanisms are sorted and delineated according to their diverse responses to physical (force, temperature, magnetic, and electric fields), chemical (ions, pH, vapors, and solvents), and biological (glucose, organophosphate, creatinine, and bacteria) stimuli. We then systematically introduced and discussed the applications of NPCs in sensors, printing, anticounterfeiting, display, optical devices, etc. Finally, the current challenges and development prospects for NPCs are presented. This review not only concludes the design principle for NPCs but also provides a significant basis for the exploration of next-generation NPCs.

An anti-scratch flexible SERS substrate for pesticide residue detection on the surface of fruits and vegetables

We propose an anti-scratch flexible surface-enhanced Raman scattering substrate with arrayed nanocavity microstructures fabricated by colloidal lithography. The nanocavity microstructure of the substrate can well protect the inner gold nanoparticles during wipe sampling. The prepared flexible substrate was able to detect 4-aminothiophenol (4-ATP) with a concentration down to 1 fM. Furthermore, the substrate was used to detect 6-BA residues on the surface of apples and bean sprouts through wipe sampling, which shows great potential in the field of rapid on-site detection, especially in the detection of pesticide residues on the surface of fruits and vegetables.

Playing with sizes and shapes of colloidal particles via dry etching methods

Monolayers of self-assembled quasi-spherical colloidal particles are essential building blocks in the field of materials science and engineering. More typically, they are used as a template for the fabrication of nanostructures if they serve, for instance, as a mask for deposition of new material on the surface on which particles are assembled or for etching of the material underneath; in this case, they are removed afterwards. This is what occurs in colloidal or nanosphere lithography. In some other cases, they are not used as a sacrificial material but they are incorporated in the final structure because they are inherently interesting for their properties. Independently of their specific use and application, different strategies have been devised in order to modify size and shape of colloidal particles, so as to enrich the variety of attainable patterns and to tailor the properties of the final structures and materials. In this review, we will focus on one of the most widespread methods to shape spherical colloidal particles, i.e. dry etching techniques. We will follow the development of such approaches until recent days, so as to trace an extensive panorama of the diverse parameters that can be harnessed to achieve specific morphological changes and highlight the characteristic features of the variants of this method. We will finally discuss how particles modified via dry etching can be used for patterning or can be resuspended in solvents for very diverse applications.

Dual photonic bandgap hollow sphere colloidal photonic crystals for real-time fluorescence enhancement in living cells

To overcome the problems of refractive index matching and increased disorder when working with traditional heterostructure colloidal photonic crystals (CPCs) with dual or multiple photonic bandgaps (PBGs) for fluorescence enhancement in water, we propose the use of a chemical heterostructure in hollow sphere CPCs (HSCPCs). A partial chemical modification of the HSCPC creates a large contrast in wettability to induce the heterostructure, while the hollow spheres increase the refractive index difference when used in aqueous environment. With the platform, fluorescence enhancement reaches around 160 times in solution, and 72 times (signal-to-background ratio ~7 times) in cells during proof-of-concept live cardiomyocyte contractility experiments. Such photonic platform can be further exploited for chemical sensing, bioassays, and environmental monitoring. Moreover, the introduction of chemical heterostructures provides new design principles for functionalized photonic devices.

Shaping in the Third Direction; Synthesis of Patterned Colloidal Crystals by Polyester Fabric-Guided Self-Assembly

A polyester fabric with rectangular openings was used as a sacrificial template for the guiding of a sub-micron sphere (polystyrene (PS) and silica) aqueous colloid self-assembly process during evaporation as a patterned colloidal crystal (PCC). This simple process is also a robust one, being less sensitive to external parameters (ambient pressure, temperature, humidity, vibrations). The most interesting feature of the concave-shape-pattern unit cell (350 μm × 400 μm × 3 μm) of this crystal is the presence of triangular prisms at its border, each prism having a one-dimensional sphere array at its top edge. The high-quality ordered single layer found inside of each unit cell presents the super-prism effect and left-handed behavior. Wider yet elongated deposits with ordered walls and disordered top surfaces were formed under the fabric knots. Rectangular patterning was obtained even for 20 μm PS spheres. Polyester fabrics with other opening geometries and sizes (~300–1000 μm) or with higher fiber elasticity also allowed the formation of similar PCCs, some having curved prismatic walls. A higher colloid concentration (10–20%) induces the formation of thicker walls with fiber-negative replica morphology. Additionally, thick-wall PCCs (~100 μm) with semi-cylindrical morphology were obtained using SiO₂ sub-microspheres and a wavy fabric. The colloidal pattern was used as a lithographic mask for natural lithography and as a template for the synthesis of triangular-prism-shaped inverted opals.

Programmable Color in a Free-Standing Photonic Microgel Film with Ultra-Fast Response

In this work, a free-standing microgel film with programmable and angle-independent structural color is prepared via a simple but effective method. Dried poly(styrene-N-isopropylacrylamide-acrylic acid) (pStNIPAAmAA) microgels were stabilized by inter-microgel crosslinking, and thus, only microgels were used to build the optical hydrogel. The free-standing microgel film displayed tunable structural color by the swelling/deswelling of the microgels under external stimuli, such as temperature, pH, ionic strength, and organic solvent. Moreover, the structural color of the film is angle-independent for the disordered microgel arrays. It is worth noting that programmable color stripes which have the panther chameleon's ability to change skin color are successfully fabricated by patterning microgels with different thermoresponsivities. More importantly, the microgel film has an ultrafast response to temperature (1.41 s from 20 to 40 °C) and pH (2.24 s from pH 8.3 to pH 2.0), much faster than that of most optical materials reported in previous studies.

Breaking the symmetry of nanosphere lithography with anisotropic plasma etching induced by temperature gradients

We report a novel anisotropic process, termed plasma etching induced by temperature gradients (PE-TG), which we use to modify the 3D morphology of a hexagonally close-packed polystyrene sphere array. Specifically, we combined an isotropic oxygen plasma (generated by a plasma cleaner) and a vertical temperature gradient applied from the bottom to the top of a colloidal mask to create an anisotropic etching process. As a result, an ordered array of well-defined and separated nano mushrooms is obtained. We demonstrate that the features of the mushrooms, namely the hat size and their intrinsic undercut, as well as the pillar diameter and height, can be easily tuned by adjusting the main parameters of the process i.e. the temperature gradient and etching time, or the spheres' size. We show that PS mushroom arrays can be used as nanostructured templates to fabricate plasmonic arrays, such as gold-capped nano mushrooms and ultra-small nanoapertures, by using vertical and oblique gold sputtering deposition respectively. PE-TG reveals a new, cheap and facile approach to produce plasmonic nanostructures of great interest in the fields of molecular sensing, surface-enhanced Raman scattering (SERS), energy harvesting and optoelectronics. We study the optical properties of the Au-capped nano mushroom arrays and their performance as biosensing platforms by performing SERS measurements.

A Hierarchical Anodic Aluminum Oxide Template

Anodic aluminum oxide (AAO) templates are widely used for the development of various functional nanomaterials due to their highly ordered and tunable porous structures. Here, we report a new hierarchical AAO (hAAO) template with the hexagonally ordered unit cells and the radially distributed nanochannels. It is formed by integrating the self-assembled polystyrene microsphere template into the AAO fabrication process and rationalized in terms of mechanical stress and electric-field-induced oxide dissolution. The back side of the hAAO template resembles a moth-eye-like nanoarray, which shows good hydrophobicity. A variety of radial nanopillar arrays and moth-eye-like nanoarrays are fabricated by a series of materials and synthesis techniques employing the hAAO template. These unique nanoarrays demonstrate many physicochemical properties that are distinct from those obtained from the conventional AAO template.

Controlling the Interparticular Distances of Extended Non-Close-Packed Colloidal Monolayers

A versatile method for the preparation extended, well-ordered, non-close-packed monolayers of silica nanoparticles (137 ± 4 nm diameter) with adjustable interparticle distances is presented, which is based on a simple self-assembly procedure using aqueous dispersion with different ionic strengths. It is shown that these structures can be successfully transferred to air without suffering from aggregation. Scanning electron microscopy (SEM) is used to characterize the structures after transfer into the atmosphere. These investigations were combined with a quartz crystal microbalance with dissipation (QCM-D) experiments to follow the self-assembly process in solution. The nearest-neighbor distance distribution reveals a monotonous decrease of the average nearest-neighbor distance from 290 to 200 nm with increasing ionic strength from 0.05 to 1 mM, which indicates an increased shielding of the electrostatic interaction with increasing ionic strength. The observed saturation coverages for all studied ionic strengths are well explained with an effective hard-sphere model in which the saturation coverage is limited by Coulomb repulsion. However, at ionic strengths above 1 mM, significant amounts of aggregates are found in the dried samples, suggesting that the observed aggregates at high ionic strengths are formed during the drying process caused by capillary forces between the particles. Tuning the barrier for lateral diffusion, e.g., by changing the surface morphology or functionalization of the particles will offer a route to further extend the range of particle distances. The present approach can be easily expanded to a broad range of colloidal materials on surfaces, while it only requires low-cost laboratory equipment.

Nanosphere Lithography for Structuring Polycrystalline Diamond Films

This paper deals with the structuring of polycrystalline diamond thin films using the technique of nanosphere lithography. The presented multistep approaches relied on a spin-coated self-assembled monolayer of polystyrene spheres, which served as a lithographic mask for the further custom nanofabrication steps. Various arrays of diamond nanostructures—close-packed and non-close-packed monolayers over substrates with various levels of surface roughness, noble metal films over nanosphere arrays, ordered arrays of holes, and unordered pores—were created using reactive ion etching, chemical vapour deposition, metallization, and/or lift-off processes. The size and shape of the lithographic mask was altered using oxygen plasma etching. The periodicity of the final structure was defined by the initial diameter of the spheres. The surface morphology of the samples was characterized using scanning electron microscopy. The advantages and limitations of the fabrication technique are discussed. Finally, the potential applications (e.g., photonics, plasmonics) of the obtained nanostructures are reviewed.

Chiral plasmonic nanocrescents: large-area fabrication and optical properties

Large-area arrays of substrate-supported plasmonic gold crescents are fabricated by using the new colloidal lithography technique, which is based on an in situ-deposited silica resistance layer. The method provides the means to control the particles' asymmetry just by changing the mutual deposition angle of gold and silica. Asymmetric crescent structures exhibit a pronounced circular dichroism in near-infrared region, with the chiral asymmetry factor reaching 0.2. According to the simulation, the optical chirality enhancement reaches between one and two orders of magnitude and is localized near the crescents' tips.

Current status and future developments in preparation and application of nonspherical polymer particles

Nonspherical polymer particles (NPPs) are nano/micro-particulates of macromolecules that are anisotropic in shape, and can be designed anisotropic in chemistry. Due to shape and surface anisotropies, NPPs bear many unique structures and fascinating properties which are distinctly different from those of spherical polymer particles (SPPs). In recent years, the research on NPPs has surprisingly blossomed in recent years, and many practical materials based on NPPs with potential applications in photonic device, material science and biomedical engineering have been generated. In this review, we give a systematic, balanced and comprehensive summary of the main aspects of NPPs related to their preparation and application, and propose perspectives for the future developments of NPPs.

Bioinspired bactericidal surfaces with polymer nanocone arrays

Infections resulting from bacterial biofilm formation on the surface of medical devices are challenging to treat and can cause significant patient morbidity. Recently, it has become apparent that regulation of surface nanotopography can render surfaces bactericidal. In this study, poly(ethylene terephthalate) nanocone arrays are generated through a polystyrene nanosphere-mask colloidal lithographic process. It is shown that modification of the mask diameter leads to a direct modification of centre-to-centre spacing between nanocones. By altering the oxygen plasma etching time it is possible to modify the height, tip width and base diameter of the individual nanocone features. The bactericidal activity of the nanocone arrays was investigated against Escherichia coli and Klebsiella pneumoniae. It is shown that surfaces with the most densely populated nanocone arrays (center-to-center spacing of 200 nm), higher aspect ratios (>3) and tip widths <20 nm kill the highest percentage of bacteria (∼30%).

Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes

When designing a new nanostructure or microstructure, one can follow a processing-based manufacturing pathway, in which the structure properties are defined based on the processing capabilities of the fabrication method at hand. Alternatively, a performance-based pathway can be followed, where the envisioned performance is first defined, and then suitable fabrication methods are sought. To support the latter pathway, fabrication methods are here reviewed based on the geometric and material complexity, resolution, total size, geometric and material diversity, and throughput they can achieve, independently from processing capabilities. Ten groups of fabrication methods are identified and compared in terms of these seven moderators. The highest resolution is obtained with electron beam lithography, with feature sizes below 5 nm. The highest geometric complexity is attained with vat photopolymerization. For high throughput, parallel methods, such as photolithography (≈10¹ m² h^-1 ), are needed. This review offers a decision-making tool for identifying which method to use for fabricating a structure with predefined properties.

Plasma sputtering depositions with colloidal masks for fabrication of nanostructured surfaces with enhanced photocatalytic activity

Titanium oxide/silicon oxide (TiO₂/SiO₂) 2D patterns were obtained by magnetron sputtering depositions of Ti on close-packed and size-reduced colloidal masks on Si and quartz substrates, followed by mask lift-off and ending with thermal oxidation. The physical processes involved in growing 2D Ti patterns and their oxidation are analyzed. For the magnetron sputtering deposition, two regimes are considered: the low-pressure regime when the flux of sputtered atoms is anisotropic, and the high-pressure regime, when the flux of sputtered atoms is isotropic due to frequent collisions. Moreover, magnetron sputtering operation modes, such as dc sputtering and high power impulse sputtering, are compared. The changes in pattern size and morphology determined by the oxidation of the Ti patterns and Si substrate are analyzed. The hydrophilicity induced by UV-light irradiation and the visible-light photocatalytic activity towards the degradation of the methylene blue of the fabricated TiO₂/SiO₂ patterns were considerably higher when compared to the performances of uniform TiO₂ films.

Confined Etching within 2D and 3D Colloidal Crystals for Tunable Nanostructured Templates: Local Environment Matters

We report the isotropic etching of 2D and 3D polystyrene (PS) nanosphere hcp arrays using a benchtop O₂ radio frequency plasma cleaner. Unexpectedly, this slow isotropic etching allows tuning of both particle diameter and shape. Due to a suppressed etching rate at the point of contact between the PS particles originating from their arrangement in 2D and 3D crystals, the spherical PS templates are converted into polyhedral structures with well-defined hexagonal cross sections in directions parallel and normal to the crystal c-axis. Additionally, we found that particles located at the edge (surface) of the hcp 2D (3D) crystals showed increased etch rates compared to those of the particles within the crystals. This indicates that 2D and 3D order affect how nanostructures chemically interact with their surroundings. This work also shows that the morphology of nanostructures periodically arranged in 2D and 3D supercrystals can be modified via gas-phase etching and programmed by the superlattice symmetry. To show the potential applications of this approach, we demonstrate the lithographic transfer of the PS template hexagonal cross section into Si substrates to generate Si nanowires with well-defined hexagonal cross sections using a combination of nanosphere lithography and metal-assisted chemical etching.

Silicon nanowire heterostructures for advanced energy and environmental applications: a review

Semiconductor nanowires (NWs), in particular Si NWs, have attracted much attention in the last decade for their unique electronic properties and potential applications in several emerging areas. With the introduction of heterostructures (HSs) on NWs, new functionalities are obtained and the device performance is improved significantly in many cases. Due to the easy fabrication techniques, excellent optoelectronic properties and compatibility of forming HSs with different inorganic/organic materials, Si NW HSs have been utilized in various configurations and device architectures. Herein, we review the recent developments in Si NW HS-based devices including the fabrication techniques, properties (e.g., light emitting, antireflective, photocatalytic, electrical, photovoltaic, sensing etc) and related emerging applications in energy generation, conversion, storage, and environmental cleaning and monitoring. In particular, recent advances in Si NW HS-based solar photovoltaics, light-emitting devices, thermoelectrics, Li-ion batteries, supercapacitors, hydrogen generation, artificial photosynthesis, photocatalytic degradation of organic dyes in water treatment, chemical and gas sensors, biomolecular sensors for microbial monitoring etc have been addressed in detail. The problems and challenges in utilizing Si NW HSs in device applications and the key parameters to improve the device performance are pointed out. The recent trends in the commercial applications of Si NW HS-based devices and future outlook of the field are presented at the end.

Direct fabrication of complex 3D hierarchical nanostructures by reactive ion etching of hollow sphere colloidal crystals

Direct reactive ion etching (RIE) of hollow SiO2 sphere colloidal crystals (HSCCs) is employed as a facile, low-cost method to fabricate complex three-dimensional (3D) hierarchical nanostructures. These multilayered structures are gradually transformed into nanostructures of increasing complexity by controlling the etching time, without complicated procedures (no mask needed). The resulting 3D topologies are unique, and cannot be obtained through traditional approaches. The formation mechanism of these structures is explained in detail by geometrical modeling during the different etching stages, through shadow effects of the higher layers. SEM images confirm the modeled morphological changes. The nanostructures obtained by our approach show very fine features as small as ∼30 nm. Our approach opens new avenues to directly obtain complex 3D nanostructures from colloidal crystals and can find applications in sensing, templating, and catalysis where fine tuning the specific surface might be critical.

Direct Fabrication of Monodisperse Silica Nanorings from Hollow Spheres - A Template for Core-Shell Nanorings

We report a new type of nanosphere colloidal lithography to directly fabricate monodisperse silica (SiO2) nanorings by means of reactive ion etching of hollow SiO2 spheres. Detailed TEM, SEM, and AFM structural analysis is complemented by a model describing the geometrical transition from hollow sphere to ring during the etching process. The resulting silica nanorings can be readily redispersed in solution and subsequently serve as universal templates for the synthesis of ring-shaped core-shell nanostructures. As an example we used silica nanorings (with diameter of ∼200 nm) to create a novel plasmonic nanoparticle topology, a silica-Au core-shell nanoring, by self-assembly of Au nanoparticles (<20 nm) on the ring's surface. Spectroscopic measurements and finite difference time domain simulations reveal high quality factor multipolar and antibonding surface plasmon resonances in the near-infrared. By loading different types of nanoparticles on the silica core, hybrid and multifunctional composite nanoring structures could be realized for applications such as MRI contrast enhancement, catalysis, drug delivery, plasmonic and magnetic hyperthermia, photoacoustic imaging, and biochemical sensing.

Controlling the Interaction and Non-Close-Packed Arrangement of Nanoparticles on Large Areas

In light of the importance of nanostructured surfaces for a variety of technological applications, the quest for simple and reliable preparation methods of ordered, nanometer ranged structures is ongoing. Herein, a versatile method to prepare ordered, non-close-packed arrangements of nanoparticles on centimeter sized surfaces by self-assembly is described using monodisperse (118-162 nm Ø), amino-functionalized silica nanoparticles as an exploratory example. It is shown that the arrangement of the particles is governed by the interplay between the electrostatic repulsion between the particles and the interaction between particles and surfaces. The latter is tuned by the properties of the particles such as their surface roughness as well as the chemistry of the linkage. Weak dispersive interactions between amino groups and gold surfaces are compared to a covalent amide linkage of the amino groups with carboxylic acid functionalized self-assembled monolayers. It was shown that the order of the former systems may suffer from capillary forces between particles during the drying process, while the covalently bonded systems do not. In turn, covalently bonded systems can be dried quickly, while the van der Waals bonded systems require a slow drying process to minimize aggregation. These highly ordered structures can be used as templates for the formation of a second, ordered, non-close-packed layer of nanoparticles exemplified for larger polystyrene particles (Ø 368 ± 14 nm), which highlights the prospect of this approach as a simple preparation method for ordered arrays of nanoparticles with tunable properties.

Quantitative Characterization of Mechanical Property of Annealed Monolayer Colloidal Crystal

Quantitative characterization of the mechanical properties of a polystyrene (PS) monolayer colloidal crystal (MCC) annealed with solvent vapor has been performed for the first time by means of atomic force microscopy nanoindentation. The results showed that both the compressive and bending elastic modulus of PS MCC increased with the prolongation of annealing time from initial to 13 min. When the annealing time reached 15 min or even more, the PS MCC almost deformed to a planar film, and the elastic modulus of the PS MCC presented a drastic increase. These results provide a basis for tailoring the mechanical properties of a polymer colloidal monolayer via solvent vapor annealing. Such self-supported and high-mechanical-strength colloidal monolayers can be transferred to other surfaces for potential and promising applications in the bottom-up fabrication of highly ordered nanostructured materials such as nano dot arrays, photonic crystals, and many others.

Fabrication of hollow-structured composite microspheres with amphiphilic and superparamagnetic properties

Solvent etching for constructing hollow-structured composite microspheres with superparamagnetic and amphiphilic properties.

Bio-inspired photonic crystals with superwettability

This review focus on the recent developments in the mechanism, fabrication and application of bio-inspired PCs with superwettability.

Nanoring Arrays on Fe Coated Substrate: Formation and Guidance for the Growth of Hierarchical CNTs

In this article, we report the formation of nanoring structures on Fe coated substrate and their application in guiding the growth of carbon nanotube (CNT) patterns with hierarchical structures. The formation of nanorings involves the etching of polystyrene (PS) monolayer colloidal crystals (MCCs) under reactive ion etching (RIE), and the redeposition and cross-linkage of the active degradation products at the contact line between the MCCs and the substrate. After washing out the MCCs, insoluble nanorings with hexagonal order on the substrate are developed. The RIE process can control the morphology of the nanorings, as well as the distribution of the Fe element on the substrate; thus, a continuous Fe layer and separated Fe discs on the substrate are created on substrate after washing, depending on the etching time and the shield of MCCs. The surviving Fe element can work as the catalyst to initiate the in situ growth of aligned CNTs in the following chemical vapor deposition (CVD) process, while the Fe element underneath the nanorings keep its inactivity. Eventually, CNT patterns with hierarchical structures are formed. One level originates from the surviving Fe layer; the other level is templated from the nanoring structures, which cause the blank area in the CNT bundles.

Microfluidic-based fabrication, characterization and magnetic functionalization of microparticles with novel internal anisotropic structure

Easy fabrication and independent control of the internal and external morphologies of core-shell microparticles still remain challenging. Core-shell microparticle comprised of a previously unknown internal anisotropic structure and a spherical shell was fabricated by microfluidic-based emulsificaiton and photopolymerization. The interfacial and spatial 3D morphology of the anisotropic structure were observed by SEM and micro-CT respectively. Meanwhile, a series of layer-by-layer scans of the anisotropic structure were obtained via the micro-CT, which enhanced the detail characterization and analysis of micro materials. The formation mechanism of the internal anisotropic structure may be attributed to solution-directed diffusion caused by the semipermeable membrane structure and chemical potential difference between inside and outside of the semipermeable membrane-like polymerized shell. The morphology evolution of the anisotropic structure was influenced and controlled by adjusting reaction parameters including polymerization degree, polymerization speed, and solute concentration difference. The potential applications of these microparticles in microrheological characterization and image enhancement were also proposed by embedding magnetic nanoparticles in the inner core.

Moiré Nanosphere Lithography

We have developed moiré nanosphere lithography (M-NSL), which incorporates in-plane rotation between neighboring monolayers, to extend the patterning capability of conventional nanosphere lithography (NSL). NSL, which uses self-assembled layers of monodisperse micro/nanospheres as masks, is a low-cost, scalable nanofabrication technique and has been widely employed to fabricate various nanoparticle arrays. Combination with dry etching and/or angled deposition has greatly enriched the family of nanoparticles NSL can yield. In this work, we introduce a variant of this technique, which uses sequential stacking of polystyrene nanosphere monolayers to form a bilayer crystal instead of conventional spontaneous self-assembly. Sequential stacking leads to the formation of moiré patterns other than the usually observed thermodynamically stable configurations. Subsequent O2 plasma etching results in a variety of complex nanostructures. Using the etched moiré patterns as masks, we have fabricated complementary gold nanostructures and studied their optical properties. We believe this facile technique provides a strategy to fabricate complex nanostructures or metasurfaces.

Partial dark-field microscopy for investigating domain structures of double-layer microsphere film

A lateral dislocation in a double-layer microsphere film is very difficult to identify because the constituent domains have the same two-dimensional crystalline orientation. Orientation-sensitive optical techniques cannot resolve this issue. Here, we demonstrate that partial dark-field (pDF) optical microscopy can be very effective in identifying this type of domain boundary and dislocation of a close-packed microsphere double-layer. Using the hexagonal symmetry of the close-packed microsphere film and the light-focusing property of microspheres, the partially blocked dark-field condenser can provide much higher contrast than other optical microscopy modes can in identifying the laterally dislocated domains. The former can also distinguish domains with different crystalline orientation by rotating the pDF stop. The simplicity of the pDF mode will make it an ideal tool for the structural study of close-packed double-layer microsphere films.

Distorted colloidal arrays as designed template

In this paper, a novel type of colloidal template with broken symmetry was generated using commercial, inductively coupled plasma reactive ion etching (ICP-RIE). With proper but simple treatment, the traditional symmetric non-close-packed colloidal template evolves into an elliptical profile with high uniformity. This unique feature can add flexibility to colloidal lithography and/or other lithography techniques using colloidal particles as building blocks to fabricate nano-/micro-structures with broken symmetry. Beyond that the novel colloidal template we developed possesses on-site tunability, i.e. the transformability from a symmetric into an asymmetric template. Sandwich-type particles with eccentric features were fabricated utilizing this tunable template. This distinguishing feature will provide the possibility to fabricate structures with unique asymmetric features using one set of colloidal template, providing flexibility and broad tunability to enable nano-/micro-structure fabrication with colloidal templates.

Solvent-controlled spin-coating method for large-scale area deposition of two-dimensional silica nanosphere assembled layers

In this article, we show that introducing a N,N-dimethyl-formamide (DMF) solvent for silica nanosphere (SNS) monolayer spin-coating can offer a low-cost and simple spin-coating approach for SNS monolayer deposition even on large-area silicon surfaces. From our method, more than 95% monolayer coverage for a 2 in round Si surface was achieved, which is one of the highest reported coverage by a spin-coating method. We prove that DMF offers highly enhanced wettability and slow solvent evaporation rate compared to a conventional solvent, water, in addition to excellent SNS dispersibility in solution preventing SNS cluster deposition on the surface and consequently produces a close-packed SNS monolayer with good uniformity over the surface. In addition, the benefits of DMF are retained as the deposition area increases indicating its high tolerance to spin-coating area. Better than 90% SNS monolayer coverage on a 4 in Si substrate was achieved with the DMF spin-coating method. Moreover, DMF has the advantage that SNS spin-coating can be done under common ambient laboratory conditions with 100% pure DMF unlike previous approaches which require humidity and temperature controls or additional surfactant additions to the solution.

Plasmonic films based on colloidal lithography

This paper reviews recent advances in the field of plasmonic films fabricated by colloidal lithography. Compared with conventional lithography techniques such as electron beam lithography and focused ion beam lithography, the unconventional colloidal lithography technique with advantages of low-cost and high-throughput has made the fabrication process more efficient, and moreover brought out novel films that show remarkable surface plasmon features. These plasmonic films include those with nanohole arrays, nanovoid arrays and nanoshell arrays with precisely controlled shapes, sizes, and spacing. Based on these novel nanostructures, optical and sensing performances can be greatly enhanced. The introduction of colloidal lithography provides not only efficient fabrication processes but also plasmonic films with unique nanostructures, which are difficult to be fabricated by conventional lithography techniques.

Fabrication of broadband antireflective plasmonic gold nanocone arrays on flexible polymer films

Flexible broadband antireflective and light-absorbing nanostructured gold thin films are fabricated by gold vapor deposition onto Teflon films modified with nanocone arrays. The nanostructures are created by the oxygen plasma etching of polystyrene bead monolayers on Teflon surfaces. The periodicity and height of the nanocone arrays are controlled by the bead diameter and the overall etching time. The gold nanocone arrays exhibit a reflectivity of less than 1% over a wide spectral range (450-900 nm) and a wide range of incident angles (0-70°); this unique optical response is attributed to a combination of diffractive scattering loss and localized plasmonic absorption. In addition to nanocones, periodic nanostructures of nanocups, nanopyramids, and nanocavities can be created by the plasma etching of colloidal bilayers. This fabrication method can be used to create flexible nanocone-structured gold thin films over large surface areas (cm(2)) and should be rapidly incorporated into new technological applications that require wide-angle and broadband antireflective coatings.

Asymmetric free-standing 2-D photonic crystal films and their Janus particles

We report the fabrication of large area, thin asymmetric free-standing two-dimensional (2-D) photonic crystals. We fabricate large area 2-D close-packed monodisperse polystyrene (PS) particle monolayers at air/water interfaces by using our needle tip flow method. We then layer tetraethyl orthosilicate (TEOS) onto the 2-D array to form a thin TEOS layer on the 2-D particle array on water. The hemispheres of PS particles located within the TEOS phase swell such that the adjacent particle hemispheres fuse. After TEOS evaporation, we obtain a free-standing connected photonic crystal film of hemispheres that efficiently diffracts light. The other side of the photonic crystal film consists of a fused connecting thin, flat sheet. Reactive ion etching (RIE) of the asymmetric films forms unusual, rough particle 2-D arrays and 2-D flower-like arrays. Mechanical abrasion allows one to separate the resulting novel Janus particles.

Shape control of Ag nanostructures for practical SERS substrates

Large-area, highly ordered, Ag-nanostructured arrays with various geometrical features were prepared for use as surface-enhanced Raman scattering (SERS)-active substrates by the self-assembly of inorganic particles on an SU-8 surface, followed by particle embedding and Ag vapor deposition. By adjusting the embedding time of the inorganic particles, the size of the Ag nanogap between the geometrically separated hole arrays and bowl-shaped arrays could be controlled in the range of 60 nm to 190 nm. More importantly, the SU-8 surface was covered with hexagonally ordered nanopillars, which were formed as a result of isotropic dry etching of the interstices, leading to triangular-shaped Ag plates on nanopillar arrays after Ag vapor deposition. The size and sharpness of the triangular Ag nanoplates and nanoscale roughness of the bottom surface were adjusted by controlling the etching time. The potential of the various Ag nanostructures for use as practical SERS substrates was verified by the detection of a low concentration of benzenethiol. Finite-difference time-domain (FDTD) methodology was used to demonstrate the SERS-activities of these highly controllable substrates by calculating the electric field intensity distribution on the metallic nanostructures. These substrates, with high sensitivity and simple shape-controllability, provide a practical SERS-based sensing platform.

Tunable fabrication of two-dimensional arrays of polymer nanobowls for biomimic growth of amorphous calcium carbonate

Two-dimensional arrays of polymer nanobowls can be fabricated by an oxygen plasma etching technique. The 2D colloidal crystals made of SiO(2) @PMMA particles are fabricated by a convective self-assembly method. The oxygen plasma treatment is applied to the colloidal crystals to selectively etch the PMMA shells. Because the oxygen plasma etching proceeds in a layer-by-layer manner from top to bottom, the top parts of the PMMA shells are etched first, and the silica cores are exposed to the atmosphere, which can be removed with HF, leaving the bowl-shaped PMMA shells to form 2D arrays of polymer nanobowls. The size and packing density of the nanobowl arrays can be tuned with tightly controlled etching time. The polymer nanobowl arrays can also serve as a template to direct the growth of calcium carbonate within the interstice of the nanobowls.

Fabrication of heterogeneous double-ring-like structure arrays by combination of colloidal lithography and controllable dewetting

We report a novel technique for fabricating the heterogeneous double-ring-like structural array by colloidal lithography and two-step dewetting process. First, the 2D non-closed-packed (ncp) silica sphere arrays were obtained by lift-up lithography. Then, the ncp sphere array transferred onto the Rhodamine B (RB)@poly(vinyl alcohol) (PVA) film was used for the mask during reactive ion etching (RIE) process. Sequentially, the substrate with RB@PVA ring-like structure arrays under the silica sphere was dip-coated from poly(N-vinylcarbazole) (PVK) chloroform solution with certain concentration. Due to the presence of ordered 2D sphere arrays, the two-step dewetting behavior happened on top of the sphere and the silicon wafer between adjacent spheres, respectively. After removing the silica sphere arrays by hydrofluoric acid, the RB@PVA/PVK heterogeneous double-ring-like structure array was exhibited on the substrate. We characterized this particular structure by SEM, AFM, and fluorescence spectrum, which prove that both the inner RB@PVA ring and outer PVK ring are independent without any reaction. Accordingly, this method could be extended to other materials owing to its universality. These unique structural arrays have potential application in optoelectronic devices, surface photocatalysis, and surface enhanced Raman scattering (SERS).

HYBRID NANOPATTERNING USING COLLOIDAL LITHOGRAPHY AND NANOIMPRINT FOR THE FABRICATION OF NANOTEMPLATE

In this work, various 2D nano- and micropatterns with the feature resolution from micrometer to nanometer scale by using colloidal self-assembly and nanoimprint lithography (or micromolding) for the fabrication of patterned catalyst pattern are fabricated. To control size and shape of colloidal templates and patterned catalyst metals, colloidal self-assembly based on bottom-up approach and dry etching conditions were deliberately controlled.

Large-area protein patterns generated by ordered binary colloidal assemblies as templates

We demonstrate the use of binary colloidal assemblies as lithographic masks to generate tunable Au patterns on SiO(2) substrates with dimensions ranging from micrometers to nanometers. Such patterns can be modified with different chemistries to create patterns with well-defined sites for selective adsorption of proteins, where the pattern size and spacing is adjustable depending on particle choice. In our system, the binary colloidal assemblies contain large and small particles of similar or different material and are self-assembled from dilute dispersions with particle size ratios ranging from 0.10 to 0.50. This allows masks with variable morphology and thus production of chemical patterns of tunable geometry. Finally, the Au or SiO(2) regions of the pattern are surface modified with protein resistant oligoethyleneglycol self-assembled molecules, which facilitates site selective adsorption of proteins into the unmodified regions of the pattern. This we show with fluorescently labeled bovine serum albumin.

Fabrication of size-controllable hexagonal non-close-packed colloidal crystals and binary colloidal crystals by pyrolysis combined with plasma-electron coirradiation of polystyrene colloidal monolayer

We present an unprecedented and systematic route to controllably fabricate hexagonal non-close-packed (hncp) monolayer colloidal crystals and binary colloidal crystals (BCCs) based on plasma-electron coirradiation of polystyrene colloidal monolayers followed by thermal decomposition. Hncp colloidal crystals with tunable particle sizes and periods could be fabricated by changing the pristine colloidal particle size and the thermal decomposition time. In addition, BCCs and trimodal colloidal crystals that are composed of different-sized colloidal particles can also be fabricated by adding small particles on the prepared hncp colloidal crystals. Both the particle size ratio and the volume fraction of the BCCs can be widely tuned. These hncp colloidal crystals and BCCs have various potential applications as optical and photonic materials as well as in catalysis and sensors.

Nanostructures and functional materials fabricated by interferometric lithography

Interferometric lithography (IL) is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in a light-sensitive medium, such as a photoresist, that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with IL are a platform for further fabrication of nanostructures and growth of functional materials and are building blocks for devices. This article provides a brief review of IL technologies and focuses on various applications for nanostructures and functional materials based on IL including directed self-assembly of colloidal nanoparticles, nanophotonics, semiconductor materials growth, and nanofluidic devices. Perspectives on future directions for IL and emerging applications in other fields are presented.