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For: Palacio C, Arranz A. Chemical Structure of Ultrathin Silicon Nitride Films Grown by Low-Energy (0.25−5 keV) Nitrogen Implantation:  An Angle-Resolved X-ray Photoelectron Spectroscopy Si 2p Study. J Phys Chem B 2002. [DOI: 10.1021/jp025520q] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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