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Masuhara H. Time-Resolved Spectroscopic and Imaging Studies on Laser Ablation of Molecular Systems: From Mechanistic Study to Bio/Nano Applications. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN 2013. [DOI: 10.1246/bcsj.20130066] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/13/2023]
Affiliation(s)
- Hiroshi Masuhara
- Department of Applied Chemistry and Institute of Molecular Science, National Chiao Tung University
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Laser-Induced Backside Wet Etching of Transparent Materials with Organic and Metallic Absorbers. ACTA ACUST UNITED AC 2008. [DOI: 10.1155/2008/170632] [Citation(s) in RCA: 25] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
Abstract
Laser-induced backside wet etching (LIBWE) allows the high-quality etching of transparent materials for micro- and nanopatterning. Recent own results of LIBWE with hydrocarbon and metallic absorbers (H- and M-LIBWE) are summarized and compared with selected results of other groups regarding the etching process and the etched surface. Significant results on the impact of the liquid absorber, the material and the wavelength, and the pulse length of the laser to the etching are selected for this comparison. The etching of submicron-sized periodic structures in sapphire and fused silica with interference techniques and the selection of the preferred method in dependence on the material and the processing goal discussed. The experimental results are discussed on a thermal model considering both interface and volume absorption of the laser beam. These results have the conclusion that the etching at M-LIBWE is mainly due to material melting and evaporation whereas at H-LIBWE, a modified near-surface region with a very high absorption is ablated.
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Affiliation(s)
- Yaroslava G. Yingling
- Department of Chemistry, 152 Davey Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
| | - Barbara J. Garrison
- Department of Chemistry, 152 Davey Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
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Tsuboi Y, Seto T, Kitamura N. Laser-Driven Shock Wave-Induced Triboluminescence of an Organic Crystal: Toward a Semiquantitative Study. J Phys Chem B 2003. [DOI: 10.1021/jp034904t] [Citation(s) in RCA: 24] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Yasuyuki Tsuboi
- Division of Chemistry, Graduate School of Science, Hokkaido University, Sapporo 060-0810, Japan
| | - Toshiaki Seto
- Division of Chemistry, Graduate School of Science, Hokkaido University, Sapporo 060-0810, Japan
| | - Noboru Kitamura
- Division of Chemistry, Graduate School of Science, Hokkaido University, Sapporo 060-0810, Japan
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Tsuboi Y, Irie K, Miyasaka H, Itaya A. Nonlinear Photophysics and Ablation of Liquid Naphthalene Derivatives: Fluence-Dependence of Luminescence Spectra upon 248 nm Laser Excitation. J Phys Chem A 2003. [DOI: 10.1021/jp021615g] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Yasuyuki Tsuboi
- Department of Polymer Science and Engineering, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
| | - Kentaro Irie
- Department of Polymer Science and Engineering, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
| | - Hiroshi Miyasaka
- Department of Polymer Science and Engineering, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
| | - Akira Itaya
- Department of Polymer Science and Engineering, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan
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Zhigilei LV, Leveugle E, Garrison BJ, Yingling YG, Zeifman MI. Computer simulations of laser ablation of molecular substrates. Chem Rev 2003; 103:321-48. [PMID: 12580634 DOI: 10.1021/cr010459r] [Citation(s) in RCA: 246] [Impact Index Per Article: 11.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Leonid V Zhigilei
- Department of Materials Science and Engineering, 116 Engineer's Way, University of Virginia, Charlottesville, Virginia 22904, USA.
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Georgiou S, Koubenakis A. Laser-induced material ejection from model molecular solids and liquids: mechanisms, implications, and applications. Chem Rev 2003; 103:349-94. [PMID: 12580635 DOI: 10.1021/cr010429o] [Citation(s) in RCA: 107] [Impact Index Per Article: 5.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/20/2022]
Affiliation(s)
- Savas Georgiou
- Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, 71110 Heraklion, Crete, Greece.
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Yingling YG, Garrison BJ. Photochemical induced effects in material ejection in laser ablation. Chem Phys Lett 2002. [DOI: 10.1016/s0009-2614(02)01327-1] [Citation(s) in RCA: 23] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Hatanaka K, Tsuboi Y, Fukumura H, Masuhara H. Nanosecond and Femtosecond Laser Photochemistry and Ablation Dynamics of Neat Liquid Benzenes. J Phys Chem B 2002. [DOI: 10.1021/jp014332h] [Citation(s) in RCA: 27] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Koji Hatanaka
- Department of Chemistry, Graduate School of Science, Tohoku University, Sendai, Miyagi 980-8578, Japan, Department of Chemistry, Graduate School of Science, Hokkaido University, Sapporo, Hokkaido 060-0812, Japan, and Department of Applied Physics and Frontier Research Center, Osaka University, Suita, Osaka 565-0871, Japan
| | - Yasuyuki Tsuboi
- Department of Chemistry, Graduate School of Science, Tohoku University, Sendai, Miyagi 980-8578, Japan, Department of Chemistry, Graduate School of Science, Hokkaido University, Sapporo, Hokkaido 060-0812, Japan, and Department of Applied Physics and Frontier Research Center, Osaka University, Suita, Osaka 565-0871, Japan
| | - Hiroshi Fukumura
- Department of Chemistry, Graduate School of Science, Tohoku University, Sendai, Miyagi 980-8578, Japan, Department of Chemistry, Graduate School of Science, Hokkaido University, Sapporo, Hokkaido 060-0812, Japan, and Department of Applied Physics and Frontier Research Center, Osaka University, Suita, Osaka 565-0871, Japan
| | - Hiroshi Masuhara
- Department of Chemistry, Graduate School of Science, Tohoku University, Sendai, Miyagi 980-8578, Japan, Department of Chemistry, Graduate School of Science, Hokkaido University, Sapporo, Hokkaido 060-0812, Japan, and Department of Applied Physics and Frontier Research Center, Osaka University, Suita, Osaka 565-0871, Japan
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Masubuchi T, Tada T, Nomura E, Hatanaka K, Fukumura H, Masuhara H. Laser-Induced Decomposition and Ablation Dynamics Studied by Nanosecond Interferometry. 4. A Polyimide Film. J Phys Chem A 2002. [DOI: 10.1021/jp012512l] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Tomokazu Masubuchi
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Takuji Tada
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Eiji Nomura
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Koji Hatanaka
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Hiroshi Fukumura
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Hiroshi Masuhara
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
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Masubuchi T, Fukumura H, Masuhara H, Suzuki K, Hayashi N. Laser-induced decomposition and ablation dynamics studied by nanosecond interferometry. J Photochem Photobiol A Chem 2001. [DOI: 10.1016/s1010-6030(01)00585-8] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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12
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Yingling YG, Zhigilei LV, Garrison BJ. The role of the photochemical fragmentation in laser ablation: a molecular dynamics study. J Photochem Photobiol A Chem 2001. [DOI: 10.1016/s1010-6030(01)00580-9] [Citation(s) in RCA: 35] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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Pommeret S, Gobert F, Mostafavi M, Lampre I, Mialocq JC. Femtochemistry of the Hydrated Electron at Decimolar Concentration. J Phys Chem A 2001. [DOI: 10.1021/jp0123381] [Citation(s) in RCA: 64] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- S. Pommeret
- CEA/Saclay, DSM/DRECAM/SCM URA 331 CNRS, 91191 Gif-sur-Yvette Cédex, France, and Laboratoire de Chimie Physique UMR 8000, CNRS/Université Paris-Sud, Centre d'Orsay, Bâtiment 349, 91405 Orsay Cedex, France
| | - F. Gobert
- CEA/Saclay, DSM/DRECAM/SCM URA 331 CNRS, 91191 Gif-sur-Yvette Cédex, France, and Laboratoire de Chimie Physique UMR 8000, CNRS/Université Paris-Sud, Centre d'Orsay, Bâtiment 349, 91405 Orsay Cedex, France
| | - M. Mostafavi
- CEA/Saclay, DSM/DRECAM/SCM URA 331 CNRS, 91191 Gif-sur-Yvette Cédex, France, and Laboratoire de Chimie Physique UMR 8000, CNRS/Université Paris-Sud, Centre d'Orsay, Bâtiment 349, 91405 Orsay Cedex, France
| | - I. Lampre
- CEA/Saclay, DSM/DRECAM/SCM URA 331 CNRS, 91191 Gif-sur-Yvette Cédex, France, and Laboratoire de Chimie Physique UMR 8000, CNRS/Université Paris-Sud, Centre d'Orsay, Bâtiment 349, 91405 Orsay Cedex, France
| | - J.-C. Mialocq
- CEA/Saclay, DSM/DRECAM/SCM URA 331 CNRS, 91191 Gif-sur-Yvette Cédex, France, and Laboratoire de Chimie Physique UMR 8000, CNRS/Université Paris-Sud, Centre d'Orsay, Bâtiment 349, 91405 Orsay Cedex, France
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Toyota K, Tanaka T, Nishiwaki SI, Nakashima S, Okada T. Analysis of products from breakdown of liquid benzene, toluene and cyclohexane caused by Nd3+:YAG pulsed laser irradiation. J Photochem Photobiol A Chem 2001. [DOI: 10.1016/s1010-6030(01)00433-6] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/17/2022]
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Masubuchi T, Furutani H, Fukumura H, Masuhara H. Laser-Induced Nanometer−Nanosecond Expansion and Contraction Dynamics of Poly(methyl methacrylate) Film Studied by Time-Resolved Interferometry. J Phys Chem B 2001. [DOI: 10.1021/jp0025328] [Citation(s) in RCA: 24] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Tomokazu Masubuchi
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Hiroshi Furutani
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Hiroshi Fukumura
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
| | - Hiroshi Masuhara
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan
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Hatanaka K, Itoh T, Asahi T, Ichinose N, Kawanishi S, Sasuga T, Fukumura H, Masuhara H. Femtosecond Laser Ablation of Liquid Toluene: Molecular Mechanism Studied by Time-Resolved Absorption Spectroscopy. J Phys Chem A 1999. [DOI: 10.1021/jp992565r] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Koji Hatanaka
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
| | - Tamitake Itoh
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
| | - Tsuyoshi Asahi
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
| | - Nobuyuki Ichinose
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
| | - Shunichi Kawanishi
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
| | - Tsuneo Sasuga
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
| | - Hiroshi Fukumura
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
| | - Hiroshi Masuhara
- Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan, and Advanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, Neyagawa, Osaka 572−0019, Japan
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Time-resolved ultraviolet–visible absorption spectroscopic study on femtosecond KrF laser ablation of liquid benzyl chloride. Chem Phys Lett 1999. [DOI: 10.1016/s0009-2614(98)01438-9] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
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