Three dimensional nanofabrication using surface forces

Mechanically-Guided 3D Assembly for Architected Flexible Electronics

Architected flexible electronic devices with rationally designed 3D geometries have found essential applications in biology, medicine, therapeutics, sensing/imaging, energy, robotics, and daily healthcare. Mechanically-guided 3D assembly methods, exploiting mechanics principles of materials and structures to transform planar electronic devices fabricated using mature semiconductor techniques into 3D architected ones, are promising routes to such architected flexible electronic devices. Here, we comprehensively review mechanically-guided 3D assembly methods for architected flexible electronics. Mainstream methods of mechanically-guided 3D assembly are classified and discussed on the basis of their fundamental deformation modes (i.e., rolling, folding, curving, and buckling). Diverse 3D interconnects and device forms are then summarized, which correspond to the two key components of an architected flexible electronic device. Afterward, structure-induced functionalities are highlighted to provide guidelines for function-driven structural designs of flexible electronics, followed by a collective summary of their resulting applications. Finally, conclusions and outlooks are given, covering routes to achieve extreme deformations and dimensions, inverse design methods, and encapsulation strategies of architected 3D flexible electronics, as well as perspectives on future applications.

Transition Metal Dichalcogenides Nanoscrolls: Preparation and Applications

Two-dimensional (2D) transition metal dichalcogenides (TMDCs) nanosheets have shown extensive applications due to their excellent physical and chemical properties. However, the low light absorption efficiency limits their application in optoelectronics. By rolling up 2D TMDCs nanosheets, the one-dimensional (1D) TMDCs nanoscrolls are formed with spiral tubular structure, tunable interlayer spacing, and opening ends. Due to the increased thickness of the scroll structure, the light absorption is enhanced. Meanwhile, the rapid electron transportation is confined along the 1D structure. Therefore, the TMDCs nanoscrolls show improved optoelectronic performance compared to 2D nanosheets. In addition, the high specific surface area and active edge site from the bending strain of the basal plane make them promising materials for catalytic reaction. Thus, the TMDCs nanoscrolls have attracted intensive attention in recent years. In this review, the structure of TMDCs nanoscrolls is first demonstrated and followed by various preparation methods of the TMDCs nanoscrolls. Afterwards, the applications of TMDCs nanoscrolls in the fields of photodetection, hydrogen evolution reaction, and gas sensing are discussed.

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Transformation of conventional 2D platforms into unusual 3D configurations provides exciting opportunities for sensors, electronics, optical devices, and biological systems. Engineering material properties or controlling and modulating stresses in thin films to pop-up 3D structures out of standard planar surfaces has been a highly active research topic over the last decade. Implementation of 3D micro and nanoarchitectures enables unprecedented functionalities including multiplexed, monolithic mechanical sensors, vertical integration of electronics components, and recording of neuron activities in 3D organoids. This paper provides an overview on stress engineering approaches to developing 3D functional microsystems. The paper systematically presents the origin of stresses generated in thin films and methods to transform a 2D design into an out-of-plane configuration. Different types of 3D micro and nanostructures, along with their applications in several areas are discussed. The paper concludes with current technical challenges and potential approaches and applications of this fast-growing research direction.

Sensing technologies and experimental platforms for the characterization of advanced oral drug delivery systems

Complex and miniaturized oral drug delivery systems are being developed rapidly for targeted, controlled drug release and improved bioavailability. Standard analytical techniques are widely used to characterize i) drug carrier and active pharmaceutical ingredients before loading into a delivery device (to ensure the solid form), and ii) the entire drug delivery system during the development process. However, in light of the complexity and the size of some of these systems, standard techniques as well as novel sensing technologies and experimental platforms need to be used in tandem. These technologies and platforms are discussed in this review, with a special focus on passive delivery systems in size range from a few 100 µm to a few mm. Challenges associated with characterizing these systems and evaluating their effect on oral drug delivery in the preclinical phase are also discussed.

Capillary Origami with Atomically Thin Membranes

Small-scale optical and mechanical components and machines require control over three-dimensional structure at the microscale. Inspired by the analogy between paper and two-dimensional materials, origami-style folding of atomically thin materials offers a promising approach for making microscale structures from the thinnest possible sheets. In this Letter, we show that a monolayer of molybdenum disulfide (MoS₂) can be folded into three-dimensional shapes by a technique called capillary origami, in which the surface tension of a droplet drives the folding of a thin sheet. We define shape nets by patterning rigid metal panels connected by MoS₂ hinges, allowing us to fold micron-scale polyhedrons. Finally, we demonstrate that these shapes can be folded in parallel without the use of micropipettes or microfluidics by means of a microemulsion of droplets that dissolves into the bulk solution to drive folding. These results demonstrate controllable folding of the thinnest possible materials using capillary origami and indicate a route forward for design and parallel fabrication of more complex three-dimensional micron-scale structures and machines.

Micro/Nanoscale 3D Assembly by Rolling, Folding, Curving, and Buckling Approaches

The miniaturization of electronics has been an important topic of study for several decades. The established roadmaps following Moore's Law have encountered bottlenecks in recent years, as planar processing techniques are already close to their physical limits. To bypass some of the intrinsic challenges of planar technologies, more and more efforts have been devoted to the development of 3D electronics, through either direct 3D fabrication or indirect 3D assembly. Recent research efforts into direct 3D fabrication have focused on the development of 3D transistor technologies and 3D heterogeneous integration schemes, but these technologies are typically constrained by the accessible range of sophisticated 3D geometries and the complexity of the fabrication processes. As an alternative route, 3D assembly methods make full use of mature planar technologies to form predefined 2D precursor structures in the desired materials and sizes, which are then transformed into targeted 3D mesostructures by mechanical deformation. The latest progress in the area of micro/nanoscale 3D assembly, covering the various classes of methods through rolling, folding, curving, and buckling assembly, is discussed, focusing on the design concepts, principles, and applications of different methods, followed by an outlook on the remaining challenges and open opportunities.

Folding 2D Structures into 3D Configurations at the Micro/Nanoscale: Principles, Techniques, and Applications

Compared to their 2D counterparts, 3D micro/nanostructures show larger degrees of freedom and richer functionalities; thus, they have attracted increasing attention in the past decades. Moreover, extensive applications of 3D micro/nanostructures are demonstrated in the fields of mechanics, biomedicine, optics, etc., with great advantages. However, the mainstream micro/nanofabrication technologies are planar ones; therefore, they cannot be used directly for the construction of 3D micro/nanostructures, making 3D fabrication at the micro/nanoscale a great challenge. A promising strategy to overcome this is to combine the state-of-the-art planar fabrication techniques with the folding method to produce 3D structures. In this strategy, 2D components can be easily produced by traditional planar techniques, and then, 3D structures are constructed by folding each 2D component to specific orientations. In this way, not only will the advantages of existing planar techniques, such as high precision, programmable patterning, and mass production, be preserved, but the fabrication capability will also be greatly expanded without complex and expensive equipment modification/development. The goal here is to highlight the recent progress of the folding method from the perspective of principles, techniques, and applications, as well as to discuss the existing challenges and future prospectives.

Shape memory polymers and their composites in biomedical applications

As a kind of intelligent material, shape memory polymer (SMP) can respond to outside stimuli and possesses good properties including shape memory effect, deformability and biological compatibility, etc. SMPs have been introduced for medical applications such as tissue engineering, biological sutures, stents and bladder sensors. Due to the shape memory effect, the medical devices based on SMP can be implanted into body through minimally invasive surgery in contraction or folded state and recovered to their requisite original shapes at target position. In this paper, a review of SMPs utilized in biomedical applications and their actuation methods are listed. Various biomedical applications and potential applications based on the beneficial properties of SMP are also summarized.

Ion-Induced Localized Nanoscale Polymer Reflow for Three-Dimensional Self-Assembly

Thermal reflow of polymers is a well-established phenomenon that has been used in various microfabrication processes. However, present techniques have critical limitations in controlling the various attributes of polymer reflow, such as the position and extent of reflow, especially at the nanoscale. These challenges primarily result from the reflow heat source supplying heat energy to the entire substrate rather than a specific area. In this work, a focused ion beam (FIB) microscope is used to achieve controllable localized heat generation, leading to precise control over the nanoscale polymer reflow. Through the use of the patterning capability of FIB microscopy, dramatically different reflow performances within nanoscale distances of each other are demonstrated in both discrete periodic and continuous polymer structures. Further, we utilize a self-assembly process induced by nanoscale polymer reflow to realize 3D optical devices, specifically, vertically aligned nanoresonators and graphene-based nanocubes. HFSS and Comsol simulations have been carried out to analyze the advantages of the polymer-based 3D metamaterials as opposed to those fabricated with a metallic hinge. The simulation results clearly demonstrate that the polymer hinges have a dual advantage; first, the removal of any interference from the transmission spectrum leading to strong and distinct resonance peaks and, second, the elimination of parasitic leeching of the enhanced field by the metallic hinge resulting in stronger volumetric enhancement. Thus, the 2-fold advantages existing in 3D polymer-hinge optical metamaterials can open pathways for applications in 3D optoelectronic devices and sensors, vibrational molecular spectroscopy, and other nanoscale 3D plasmonic devices.

Fabrication of Three-Dimensional Graphene-Based Polyhedrons via Origami-Like Self-Folding

The assembly of two-dimensional (2D) graphene into three-dimensional (3D) polyhedral structures while preserving the graphene's excellent inherent properties has been of great interest for the development of novel device applications. Here, fabrication of 3D, microscale, hollow polyhedrons (cubes) consisting of a few layers of 2D graphene or graphene oxide sheets via an origami-like self-folding process is described. This method involves the use of polymer frames and hinges, and aluminum oxide/chromium protection layers that reduce tensile, spatial, and surface tension stresses on the graphene-based membranes when the 2D nets are transformed into 3D cubes. The process offers control of the size and shape of the structures as well as parallel production. In addition, this approach allows the creation of surface modifications by metal patterning on each face of the 3D cubes. Raman spectroscopy studies show the method allows the preservation of the intrinsic properties of the graphene-based membranes, demonstrating the robustness of our method.

Small-Scale Biological and Artificial Multidimensional Sensors for 3D Sensing

A vast majority of existing sub-millimeter-scale sensors have a planar, 2D geometry as a result of conventional top-down lithographic procedures. However, 2D sensors often suffer from restricted sensing capability, allowing only partial measurements of 3D quantities. Here, nano/microscale sensors with different geometric (1D, 2D, and 3D) configurations are reviewed to introduce their advantages and limitations when sensing changes in quantities in 3D space. This Review categorizes sensors based on their geometric configuration and sensing capabilities. Among the sensors reviewed here, the 3D configuration sensors defined on polyhedral structures are especially advantageous when sensing spatially distributed 3D quantities. The nano- and microscale vertex configuration forming polyhedral structures enable full 3D spatial sensing due to orthogonally aligned sensing elements. Particularly, the cubic configuration leveraged in 3D sensors offers an array of diverse applications in the field of biosensing for micro-organisms and proteins, optical metamaterials for invisibility cloaking, 3D imaging, and low-power remote sensing of position and angular momentum for use in microbots. Here, various 3D sensors are compared to assess the advantages of their geometry and its impact on sensing mechanisms. 3D biosensors in nature are also explored to provide vital clues for the development of novel 3D sensors.

Assembly and Self-Assembly of Nanomembrane Materials-From 2D to 3D

Nanoscience and nanotechnology offer great opportunities and challenges in both fundamental research and practical applications, which require precise control of building blocks with micro/nanoscale resolution in both individual and mass-production ways. The recent and intensive nanotechnology development gives birth to a new focus on nanomembrane materials, which are defined as structures with thickness limited to about one to several hundred nanometers and with much larger (typically at least two orders of magnitude larger, or even macroscopic scale) lateral dimensions. Nanomembranes can be readily processed in an accurate manner and integrated into functional devices and systems. In this Review, a nanotechnology perspective of nanomembranes is provided, with examples of science and applications in semiconductor, metal, insulator, polymer, and composite materials. Assisted assembly of nanomembranes leads to wrinkled/buckled geometries for flexible electronics and stacked structures for applications in photonics and thermoelectrics. Inspired by kirigami/origami, self-assembled 3D structures are constructed via strain engineering. Many advanced materials have begun to be explored in the format of nanomembranes and extend to biomimetic and 2D materials for various applications. Nanomembranes, as a new type of nanomaterials, allow nanotechnology in a controllable and precise way for practical applications and promise great potential for future nanorelated products.

Self-Assembled Three-Dimensional Graphene-Based Polyhedrons Inducing Volumetric Light Confinement

The ability to transform two-dimensional (2D) materials into a three-dimensional (3D) structure while preserving their unique inherent properties might offer great enticing opportunities in the development of diverse applications for next generation micro/nanodevices. Here, a self-assembly process is introduced for building free-standing 3D, micro/nanoscale, hollow, polyhedral structures configured with a few layers of graphene-based materials: graphene and graphene oxide. The 3D structures have been further modified with surface patterning, realized through the inclusion of metal patterns on their 3D surfaces. The 3D geometry leads to a nontrivial spatial distribution of strong electric fields (volumetric light confinement) induced by 3D plasmon hybridization on the surface of the graphene forming the 3D structures. Due to coupling in all directions, resulting in 3D plasmon hybridization, the 3D closed box graphene generates a highly confined electric field within as well as outside of the cubes. Moreover, since the uniform coupling reduces the decay of the field enhancement away from the surface, the confined electric field inside of the 3D structure shows two orders of magnitude higher than that of 2D graphene before transformation into the 3D structure. Therefore, these structures might be used for detection of target substances (not limited to only the graphene surfaces, but using the entire volume formed by the 3D graphene-based structure) in sensor applications.

Plasma Triggered Grain Coalescence for Self-Assembly of 3D Nanostructures

Grain coalescence has been applied in many areas of nanofabrication technology, including modification of thin-film properties, nanowelding, and self-assembly of nanostructures. However, very few systematic studies of self-assembly using the grain coalescence, especially for three-dimensional (3D) nanostructures, exist at present. Here, we investigate the mechanism of plasma triggered grain coalescence to achieve the precise control of nanoscale phase and morphology of the grain coalescence induced by exothermic energy. Exothermic energy is generated through etching a silicon substrate via application of plasma. By tuning the plasma power and the flow rates of reactive gases, different etching rates and profiles can be achieved, resulting in various morphologies of grain coalescence. Balancing the isotropic/anisotropic substrate etching profile and the etching rate makes it possible to simultaneously release 2D nanostructures from the substrate and induce enough surface tension force, generated by grain coalescence, to form 3D nanostructures. Diverse morphologies of 3D nanostructures have been obtained by the grain coalescence, and a strategy to achieve self-assembly, resulting in desired 3D nanostructures, has been proposed and demonstrated.

Let's twist again: elasto-capillary assembly of parallel ribbons

We show the self-assembly through twisting and bending of side by side ribbons under the action of capillary forces. Micro-ribbons made of silicon nitride are batch assembled at the wafer scale. We study their assembly as a function of their dimensions and separating distance. Model experiments are carried out at the macroscopic scale where the tension in ribbons can easily be tuned. The process is modeled considering the competition between capillary, elastic and tension forces. Theory shows a good agreement for macroscale assemblies, while the accuracy is within 30% at the micrometer scale. This simple self-assembly technique yields highly symmetric and controllable structures which could be used for batch fabrication of functional 3D micro-structures.

In Situ Monitored Self-Assembly of Three-Dimensional Polyhedral Nanostructures

The self-assembly of 3D nanostructures is a promising technology for the fabrication of next generation nanodevices and the exploration of novel phenomena. However, the present techniques for assembly of 3D nanostructures are invisible and have to be done without physical contact, which bring great challenges in controlling the shapes with nanoscale precision. This situation leads to an extremely low yield of self-assembly, especially in 3D nanostructures built with metal and semiconductor materials. Here, an in situ self-assembly process using a focused ion beam (FIB) microscopy system has been demonstrated to realize 3D polyhedral nanostructures from 2D multiple pieces. An excited ion beam in the FIB microscopy system offers not only a visualization of the nanoscale self-assembly process but also the necessary energy for inducing the process. Because the beam energy that induces the self-assembly can be precisely adjusted while monitoring the status of the self-assembly, it is possible to control the self-assembly process with sub-10 nm scale precision, resulting in the realization of diverse 3D nanoarchitectures with a high yield. This approach will lead to state-of-the-art applications utilizing properties of 3D nanostructures in diverse fields.

Self-folding nanostructures with imprint patterned surfaces (SNIPS)

A significant need in nanotechnology is the development of methods to mass-produce three-dimensional (3D) nanostructures and their ordered assemblies with patterns of functional materials such as metals, ceramics, device grade semiconductors, and polymers. While top-down lithography approaches can enable heterogeneous integration, tunability, and significant material versatility, these methods enable inherently two-dimensional (2D) patterning. Bottom-up approaches enable mass-production of 3D nanostructures and their assemblies but with limited precision, and tunability in surface patterning. Here, we demonstrate a methodology to create Self-folding Nanostructures with Imprint Patterned Surfaces (SNIPS). By a variety of examples, we illustrate that SNIPS, either individually or in ordered arrays, are mass-producible and have significant tunability, material heterogeneity, and patterning precision.

Contactless automated manipulation of mesoscale objects using opto-fluidic actuation and visual servoing

This work describes an automated opto-fluidic system for parallel non-contact manipulation of microcomponents. The strong dynamics of laser-driven thermocapillary flows were used to drag microcomponents at high speeds. High-speed flows allowed to manipulate micro-objects in a parallel manner only using a single laser and a mirror scanner. An automated process was implemented using visual servoing with a high-speed camera in order to achieve accurately parallel manipulation. Automated manipulation of two glass beads of 30 up to 300 μm in diameter moving in parallel at speeds in the range of mm/s was demonstrated.

Origami inspired self-assembly of patterned and reconfigurable particles

There are numerous techniques such as photolithography, electron-beam lithography and soft-lithography that can be used to precisely pattern two dimensional (2D) structures. These technologies are mature, offer high precision and many of them can be implemented in a high-throughput manner. We leverage the advantages of planar lithography and combine them with self-folding methods^1-20 wherein physical forces derived from surface tension or residual stress, are used to curve or fold planar structures into three dimensional (3D) structures. In doing so, we make it possible to mass produce precisely patterned static and reconfigurable particles that are challenging to synthesize.

In this paper, we detail visualized experimental protocols to create patterned particles, notably, (a) permanently bonded, hollow, polyhedra that self-assemble and self-seal due to the minimization of surface energy of liquefied hinges^21-23 and (b) grippers that self-fold due to residual stress powered hinges^24,25. The specific protocol described can be used to create particles with overall sizes ranging from the micrometer to the centimeter length scales. Further, arbitrary patterns can be defined on the surfaces of the particles of importance in colloidal science, electronics, optics and medicine. More generally, the concept of self-assembling mechanically rigid particles with self-sealing hinges is applicable, with some process modifications, to the creation of particles at even smaller, 100 nm length scales^{22, 26} and with a range of materials including metals²¹, semiconductors⁹ and polymers²⁷. With respect to residual stress powered actuation of reconfigurable grasping devices, our specific protocol utilizes chromium hinges of relevance to devices with sizes ranging from 100 μm to 2.5 mm. However, more generally, the concept of such tether-free residual stress powered actuation can be used with alternate high-stress materials such as heteroepitaxially deposited semiconductor films^5,7 to possibly create even smaller nanoscale grasping devices.

Parallel assembly of particles and wires on substrates by dictating instability evolution in liquid metal films

Liquid metal wires supported on substrates destabilize into droplets. The destabilization exhibits many characteristics of the Rayleigh-Plateau model of fluid jet breakup in vacuum. In either case, breakup is driven by unstable, varicose surface oscillations with wavelengths greater than the critical one (λ(c)). Here, by controlling the nanosecond liquid lifetime as well as stability of a rivulet as a function of its length by lithography, we demonstrate the ability to dictate the parallel assembly of wires and particles with precise placement.

Self-folding polymeric containers for encapsulation and delivery of drugs

Self-folding broadly refers to self-assembly processes wherein thin films or interconnected planar templates curve, roll-up or fold into three dimensional (3D) structures such as cylindrical tubes, spirals, corrugated sheets or polyhedra. The process has been demonstrated with metallic, semiconducting and polymeric films and has been used to curve tubes with diameters as small as 2nm and fold polyhedra as small as 100nm, with a surface patterning resolution of 15nm. Self-folding methods are important for drug delivery applications since they provide a means to realize 3D, biocompatible, all-polymeric containers with well-tailored composition, size, shape, wall thickness, porosity, surface patterns and chemistry. Self-folding is also a highly parallel process, and it is possible to encapsulate or self-load therapeutic cargo during assembly. A variety of therapeutic cargos such as small molecules, peptides, proteins, bacteria, fungi and mammalian cells have been encapsulated in self-folded polymeric containers. In this review, we focus on self-folding of all-polymeric containers. We discuss the mechanistic aspects of self-folding of polymeric containers driven by differential stresses or surface tension forces, the applications of self-folding polymers in drug delivery and we outline future challenges.

Complete wetting of elastically responsive substrates

We analyze theoretically complete wetting of a substrate supporting an array of parallel, vertical plates which can tilt elastically. The adsorbed liquid tilts the plates, inducing clustering, and thus modifies the substrate geometry. In turn, this change in geometry alters the wetting properties of the substrate and, consequently, the adsorption of liquid. This geometry-wetting feedback loop leads to stepped adsorption isotherms with each step corresponding to an abrupt change in the substrate geometry. We discuss how this can be used for constructing substrates with tunable wetting and adsorption properties.

Elasto-capillarity: deforming an elastic structure with a liquid droplet

Although negligible at macroscopic scales, capillary forces become dominant as the sub-millimetric scales of micro-electro-mechanical systems (MEMS) are considered. We review various situations, not limited to micro-technologies, where capillary forces are able to deform elastic structures. In particular, we define the different length scales that are relevant for 'elasto-capillary' problems. We focus on the case of slender structures (lamellae, rods and sheets) and describe the size of a bundle of wet hair, the condition for a flexible rod to pierce a liquid interface or the fate of a liquid droplet deposited on a flexible thin sheet. These results can be generalized to similar situations involving adhesion or fracture energy, which widens the scope of possible applications from biological systems, to stiction issues in micro-fabrication processes, the manufacturing of 3D microstructures or the formation of blisters in thin film coatings.

Plastic deformation drives wrinkling, saddling, and wedging of annular bilayer nanostructures

We describe the spontaneous wrinkling, saddling, and wedging of metallic, annular bilayer nanostructures driven by grain coalescence in one of the layers. Experiments revealed these different outcomes based on the dimensions of the annuli, and we find that the essential features are captured using finite element simulations of the plastic deformation in the metal bilayers. Our results show that the dimensions and nanomechanics associated with the plastic deformation of planar nanostructures can be important in forming complex three-dimensional nanostructures.