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Ito S, Nakamura T, Nakagawa M. Organic–Inorganic Hybrid Replica Molds with High Mechanical Strength for Step-and-Repeat Ultraviolet Nanoimprinting. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN 2020. [DOI: 10.1246/bcsj.20200093] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
Affiliation(s)
- Shunya Ito
- Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
| | - Takahiro Nakamura
- Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
| | - Masaru Nakagawa
- Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
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Zhang M, Jiang S, Gao Y, Nie J, Sun F. UV-Nanoimprinting Lithography Photoresists with No Photoinitiator and Low Polymerization Shrinkage. Ind Eng Chem Res 2020. [DOI: 10.1021/acs.iecr.9b07103] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Mingliang Zhang
- College of Chemistry, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
| | - Shengling Jiang
- College of Materials Science and Engineering, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
- Key Laboratory of Carbon Fiber and Functional Polymers, Ministry of Education, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
| | - Yanjing Gao
- College of Chemistry, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
| | - Jun Nie
- State Key Laboratory of Chemical Resource Engineering, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
- College of Materials Science and Engineering, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
| | - Fang Sun
- State Key Laboratory of Chemical Resource Engineering, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
- College of Chemistry, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
- Anqing Research Institute, Beijing University of Chemical Technology, Anqing 246000, People’s Republic of China
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3
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Dual-functional fluorinated-thiolated silsesquioxane nanoparticles for UV nanoimprinting via thiol-ene chemistry. POLYMER 2017. [DOI: 10.1016/j.polymer.2017.06.040] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
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4
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Takeuchi H, Konno T, Mori H. Synthesis of multifunctional silsesquioxane nanoparticles with hydroxyl and polymerizable groups for UV-curable hybrid coating. REACT FUNCT POLYM 2017. [DOI: 10.1016/j.reactfunctpolym.2017.03.016] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/30/2023]
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Yang XF, Cao C, Chen ZH, Liu J, Luo MX, Lai GQ. Synthesis of ladder-like polyphenylsilsesquioxanes with fairly high regularity using 1,2-ethylenediamine as endo-template. CHINESE JOURNAL OF POLYMER SCIENCE 2015. [DOI: 10.1007/s10118-015-1678-z] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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Lee BK, Baek IB, Kim Y, Jang WI, Yoon YS, Yu HY. Fabrication of Large-Area Hierarchical Structure Array Using Siliconized-Silsesquioxane as a Nanoscale Etching Barrier. ACS APPLIED MATERIALS & INTERFACES 2015; 7:13490-13496. [PMID: 26047057 DOI: 10.1021/acsami.5b02673] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
A material approach to fabricate a large-area hierarchical structure array is presented. The replica molding and oxygen (O2) plasma etching processes were combined to fabricate a large-area hierarchical structure array. Liquid blends consisting of siliconized silsesquioxane acrylate (Si-SSQA), ethylene glycol dimethacrylate (EGDMA), and photoinitiator are developed as a roughness amplifying material during O2 plasma etching. Microstructures composed of the Si-SSQA/EGDMA mixtures are fabricated by replica molding. Nanoscale roughness on molded microstructures is realized by O2 etching. The nanoscale roughness on microstructures is efficiently controlled by varying the etching time and the weight ratio of Si-SSQA to EGDMA. The hierarchical structures fabricated by combining replica molding and O2 plasma etching showed superhydrophilicity with long-term stability, resulting in the formation of hydroxyl-terminated silicon oxide layer with the reorientation limit. On the other hand, the hierarchical structures modified with a perfluorinated monolayer showed superhydrophobicity. The increment of water contact angles is consistent with increment of the nano/microroughness of hierarchical structures and decrement of the top contact area of water/hierarchical structures.
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Kalyani V, Satyanarayana VSV, Singh V, Pradeep CP, Ghosh S, Sharma SK, Gonsalves KE. New Polyoxometalates Containing Hybrid Polymers and Their Potential for Nano-Patterning. Chemistry 2014; 21:2250-8. [DOI: 10.1002/chem.201405369] [Citation(s) in RCA: 31] [Impact Index Per Article: 3.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/23/2014] [Indexed: 11/07/2022]
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Preparation of high modulus thin films based on photocurable azido-functionalized ladder-like structured polysilsesquioxanes. Macromol Res 2014. [DOI: 10.1007/s13233-014-2152-4] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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9
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Lin G, Zhang F, Zhang Q, Wei J, Guo J. Fluorinated silsesquioxane-based photoresist as an ideal high-performance material for ultraviolet nanoimprinting. RSC Adv 2014. [DOI: 10.1039/c4ra06022a] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
A new kind of fluorinated silsesquioxane-based photoresist has been demonstrated for ultraviolet nanoimprint lithography (UV-NIL), which opens up a way to utilize simple but multi-functional component materials for developing photoresist with superior performance.
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Affiliation(s)
- Guanghui Lin
- College of Materials Science and Engineering
- Beijing University of Chemical Technology
- Beijing 100029, P. R. China
| | - Fang Zhang
- College of Materials Science and Engineering
- Beijing University of Chemical Technology
- Beijing 100029, P. R. China
| | - Qi Zhang
- College of Materials Science and Engineering
- Beijing University of Chemical Technology
- Beijing 100029, P. R. China
| | - Jie Wei
- College of Materials Science and Engineering
- Beijing University of Chemical Technology
- Beijing 100029, P. R. China
| | - Jinbao Guo
- College of Materials Science and Engineering
- Beijing University of Chemical Technology
- Beijing 100029, P. R. China
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10
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Hybrid thiol–ene network nanocomposites based on multi(meth)acrylate POSS. J Colloid Interface Sci 2013; 406:30-6. [DOI: 10.1016/j.jcis.2013.05.044] [Citation(s) in RCA: 44] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/18/2013] [Revised: 05/14/2013] [Accepted: 05/17/2013] [Indexed: 11/19/2022]
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11
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Lee ASS, Choi SS, Lee HS, Jeon HY, Baek KY, Hwang SS. Synthesis and characterization of organic-inorganic hybrid block copolymers containing a fully condensed ladder-like polyphenylsilsesquioxane. ACTA ACUST UNITED AC 2012. [DOI: 10.1002/pola.26269] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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12
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Ganesan R, Dinachali SS, Lim SH, Saifullah MSM, Chong WT, Lim AHH, Yong JJ, Thian ES, He C, Low HY. Direct nanoimprint lithography of Al₂O₃ using a chelated monomer-based precursor. NANOTECHNOLOGY 2012; 23:315304. [PMID: 22802208 DOI: 10.1088/0957-4484/23/31/315304] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
Nanostructuring of Al₂O₃ is predominantly achieved by the anodization of aluminum film and is limited to obtaining porous anodized aluminum oxide (AAO). One of the main restrictions in developing approaches for direct fabrication of various types of Al₂O₃ patterns, such as lines, pillars, holes, etc, is the lack of a processable aluminum-containing resist. In this paper, we demonstrate a stable precursor prepared by reacting aluminum tri-sec-butoxide with 2-(methacryloyloxy)ethyl acetoacetate, a chelating monomer, which can be used for large area direct nanoimprint lithography of Al₂O₃. Chelation in the precursor makes it stable against hydrolysis whilst the presence of a reactive methacrylate group renders it polymerizable. The precursor was mixed with a cross-linker and their in situ thermal free-radical co-polymerization during nanoimprinting rigidly shaped the patterns, trapped the metal atoms, reduced the surface energy and strengthened the structures, thereby giving a ~100% yield after demolding. The imprinted structures were heat-treated, leading to the loss of organics and their subsequent shrinkage. Amorphous Al₂O₃ patterns with line-widths as small as 17 nm were obtained. Our process utilizes the advantages of sol-gel and methacrylate routes for imprinting and at the same time alleviates the disadvantages associated with both these methods. With these benefits, the chelating monomer route may be the harbinger of the universal scheme for direct nanoimprinting of metal oxides.
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Affiliation(s)
- Ramakrishnan Ganesan
- Institute of Materials Research and Engineering, A*STAR-Agency for Science, Technology and Research, 3 Research Link, Singapore 117602, Republic of Singapore.
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Lin H, Wan X, Jiang X, Wang Q, Yin J. A “thiol-ene” photo-curable hybrid fluorinated resist for the high-performance replica mold of nanoimprint lithography (NIL). ACTA ACUST UNITED AC 2012. [DOI: 10.1039/c1jm13765d] [Citation(s) in RCA: 35] [Impact Index Per Article: 2.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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14
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Lee BK, Park KS, Kim DP, Ryu JH, Park J, Jeong YS, Baek KH, Do LM. Siliconized silsesquioxane-based nonstick molds for ultrahigh-resolution lithography. ACTA ACUST UNITED AC 2012. [DOI: 10.1039/c2jm32386a] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Zheng P, McCarthy TJ. D4(H)/D4(V) silicone: a replica material with several advantages for nanoimprint lithography and capillary force lithography. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2011; 27:7976-7979. [PMID: 21627132 DOI: 10.1021/la201141k] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
Reported are demonstrations that D(4)(H)/D(4)(V) silicone (the product of the platinum-catalyzed hydrosilylation reaction between tetramethylcyclotetrasiloxane and tetramethyltetravinylcyclotetrasiloxane) is useful and practical as a replica material for both nanoimprint lithography (NIL) and capillary force lithography (CFL). The multiple advantageous properties of this extremely cross-linked material include UV transparency (for photo NIL and photo CFL), thermal stability (for high printing temperatures), high modulus (for high printing pressures), low surface energy (for easy demolding), and low viscosity precursors (for replicating small scale features). The replication performance of this material was tested using Blu-ray discs with sub-25 nm features and anodized aluminum foil with sub-10 nm features. Structures of ∼5 nm length scale on the surface of the anodized Al were replicated using D(4)(H)/D(4)(V) silicone as a mold material for CFL with a photocurable epoxy resin and for NIL with poly(methyl methacrylate) (PMMA). Features (holes in the anodized aluminum) with aspect ratios of greater than 9 were replicated.
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Affiliation(s)
- Peiwen Zheng
- Polymer Science and Engineering Department, University of Massachusetts, Amherst, Massachusetts 01003, USA
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Lee BK, Kawai T, Chung BH. Direct Nanopatterning of Silsesquioxane/Poly(ethylene glycol) Blends with High Stability and Nonfouling Properties. Macromol Biosci 2010; 11:600-6. [PMID: 21188687 DOI: 10.1002/mabi.201000362] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/06/2010] [Revised: 09/20/2010] [Indexed: 11/10/2022]
Affiliation(s)
- Bong Kuk Lee
- BioNanotechnology Research Center, Korea Research Institute of Bioscience & Biotechnology, Yuseong-gu, Daejeon, Korea
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