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For: Blakey I, George GA, Hill DJT, Liu H, Rasoul F, Whittaker AK, Zimmerman P. XPS and19F NMR Study of the Photodegradation at 157 nm of Photolithographic-Grade Teflon AF Thin Films. Macromolecules 2005. [DOI: 10.1021/ma047436+] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Number Cited by Other Article(s)
1
Baudin C, Renault JP, Esnouf S, Palacin S, Berthelot T. VUV grafting: an efficient method for 3D bulk patterning of polymer sheets. Polym Chem 2014. [DOI: 10.1039/c3py01463k] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
2
Polysulfone based non-CA resists for 193nm immersion lithography: Effect of increasing polymer absorbance on sensitivity. Radiat Phys Chem Oxf Engl 1993 2011. [DOI: 10.1016/j.radphyschem.2010.07.040] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
3
Yu A, Liu H, Blinco JP, Jack KS, Leeson M, Younkin TR, Whittaker AK, Blakey I. Patterning of Tailored Polycarbonate Based Non-Chemically Amplified Resists Using Extreme Ultraviolet Lithography. Macromol Rapid Commun 2010;31:1449-55. [DOI: 10.1002/marc.201000117] [Citation(s) in RCA: 29] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/18/2010] [Revised: 04/07/2010] [Indexed: 11/09/2022]
4
Blakey I, George GA, Hill DJT, Liu H, Rasoul F, Rintoul L, Zimmerman P, Whittaker AK. Mechanism of 157 nm Photodegradation of Poly[4,5-difluoro-2,2- bis(trifluoromethyl)-1,3-dioxole-co-tetrafluoroethylene] (Teflon AF). Macromolecules 2007. [DOI: 10.1021/ma071549m] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
5
Du L, Elliott B, Echegoyen L, DesMarteau DD. Synthesis of Pentafluorosulfanyl Trifluorovinyl Ether and Its Facile Rearrangement to Difluoro(pentafluorosulfanyl)acetyl Fluoride. Angew Chem Int Ed Engl 2007;46:6626-8. [PMID: 17661301 DOI: 10.1002/anie.200702425] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
6
Du L, Elliott B, Echegoyen L, DesMarteau D. Synthesis of Pentafluorosulfanyl Trifluorovinyl Ether and Its Facile Rearrangement to Difluoro(pentafluorosulfanyl)acetyl Fluoride. Angew Chem Int Ed Engl 2007. [DOI: 10.1002/ange.200702425] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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