Transfer of Sub-30-nm Patterns from Templates Based on Supramolecular Assemblies

High-Resolution Metal Nanopatterning by Means of Switchable Block Copolymer Templates

In this review, recent developments in the fabrication of hexagonal and parallel ordered arrays of metallic nanodomains on a substrate are described. We focus on the nanopatterning approach by means of switchable block copolymer thin films. This approach is highly advantageous, because it can lead to extremely regular patterns with metal subunits of only a few nanometers in diameter and center-to-center distances of tens of nanometers. Hence, the resulting 1D or 2D periodic arrays of metal nanodots and nanowires on silicon substrates can be fabricated with extremely high unit densities and on very large areas. The templated deposition of presynthesized metal nanoparticles on functional block copolymers is described in detail. Current challenges are discussed and an outlook for further developments is given.

Polylactide-poly(dimethylsiloxane)-polylactide triblock copolymers as multifunctional materials for nanolithographic applications

Highly immiscible block copolymers are attractive materials for applications in nanolithography due to their ability to self-assemble on length scales that are difficult to access by conventional lithography. The incorporation of inorganic domains into such block copolymers provides etch contrast that can potentially reduce processing times and costs in nanolithographic applications. We explored thin films of polylactide-poly(dimethylsiloxane)-polylactide (PLA-PDMS-PLA) triblock copolymers as multifunctional nanolithographic templates. We demonstrate the formation of well-ordered arrays of hexagonally packed PDMS cylinders oriented normal to the substrate, the orthogonal etchability of these cylinders and the PLA matrix, and the formation of etch-resistant domains that can be used as pattern transfer masks.

Ultrahigh-Density Carbon Nanoring Arrays on Silicon Wafer through Templated Solution Deposition Method

Ultrahigh-density carbon nanoring arrays on a silicon wafer are achieved by a novel templated solution deposition method. Initially the silica nanodot arrays obtained from a nanoporous thin film are used as a template to direct the surface dewetting of a phenolic precursor, while further curing and calcination of the phenolic precursor, followed by etching of the silica arrays, results in large area carbon nanoring arrays with a diameter as small as 25 nm. This study provides a simple and robust chemical route to fabricate complex nanoring arrays with ultrahigh density of about one terabit per square inch.

Fabrication of Highly Ordered Polymeric Nanodot and Nanowire Arrays Templated by Supramolecular Assembly Block Copolymer Nanoporous Thin Films

Realizing the vast technological potential of patternable block copolymers requires both the precise controlling of the orientation and long-range ordering, which is still a challenging topic so far. Recently, we have demonstrated that ordered nanoporous thin film can be fabricated from a simple supramolecular assembly approach. Here we will extend this approach and provide a general route to fabricate large areas of highly ordered polymeric nanodot and nanowire arrays. We revealed that under a mixture solvent annealing atmosphere, a near-defect-free nanoporous thin film over large areas can be achieved. Under the direction of interpolymer hydrogen bonding and capillary action of nanopores, this ordered porous nanotemplate can be properly filled with phenolic resin precursor, followed by curation and pyrolysis at middle temperature to remove the nanotemplate, a perfect ordered polymer nanodot arrays replication was obtained. The orientation of the supramolecular assembly thin films can be readily re-aligned parallel to the substrate upon exposure to chloroform vapor, so this facile nanotemplate replica method can be further extend to generate large areas of polymeric nanowire arrays. Thus, we achieved a successful sub-30 nm patterns nanotemplates transfer methodology for fabricating polymeric nanopattern arrays with highly ordered structure and tunable morphologies.

Nanopatterned carbon films with engineered morphology by direct carbonization of UV-stabilized block copolymer films

Nanopatterned thin carbon films were prepared by direct and expeditious carbonization of the block copolymer polystyrene- block-poly(2-vinylpyridine) (PS- b-P2VP) without the necessity of slow heating to the process temperature and of addition of further carbon precursors. Carbonaceous films having an ordered "dots-on-film" surface topology were obtained from reverse micelle monolayers. The regular nanoporous morphology of PS- b-P2VP films obtained by subjecting reverse micelle monolayers to swelling-induced surface reconstruction could likewise be transferred to carbon films thus characterized by ordered nanopit arrays. Stabilization of PS- b-P2VP by UV irradiation and the concurrent carbonization of both blocks were key to the conservation of the film topography. The approach reported here may enable the realization of a broad range of nanoscaled architectures for carbonaceous materials using a block copolymer ideally suited as a template because of the pronounced repulsion between its blocks and its capability to form highly ordered microdomain structures.

Nondestructive replication of self-ordered nanoporous alumina membranes via cross-linked polyacrylate nanofiber arrays

Ordered nanofiber arrays are a promising material platform for artificial adhesive structures, tissue engineering, wound dressing, sensor arrays, and self-cleaning surfaces. Their production via self-ordered porous alumina hard templates serving as shape-defining molds is well-established. However, their release requires the destruction of the hard templates, the fabrication of which is costly and time-consuming, by wet-chemical etching steps with acids or bases. We report the nondestructive mechanical extraction of arrays of cross-linked polyacrylate nanofibers from thus recyclable self-ordered nanoporous alumina hard templates. Silica replicas of the latter were synthesized using the extricated nanofiber arrays as secondary molds that could be mechanically detached from the molded material. The approach reported here, which can be combined with microstructuring, may pave the way for the high-throughput production of both functional nanofiber arrays and ordered nanoporous membranes consisting of a broad range of material systems.