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Sunday DF, Chen X, Albrecht TR, Nowak D, Delgadillo PR, Dazai T, Miyagi K, Maehashi T, Yamazaki A, Nealey PF, Kline RJ. The Influence of Additives on the Interfacial Width and Line Edge Roughness in Block Copolymer Lithography. CHEMISTRY OF MATERIALS : A PUBLICATION OF THE AMERICAN CHEMICAL SOCIETY 2020; 32:https://doi.org/10.1021/acs.chemmater.9b04833. [PMID: 33100517 PMCID: PMC7580231] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
The challenges of patterning next generation integrated circuits have driven the semiconductor industry to look outside of traditional lithographic methods in order to continue cost effective size scaling. The directed self-assembly (DSA) of block copolymers (BCPs) is a nanofabrication technique used to reduce the periodicity of patterns prepared with traditional optical methods. BCPs with large interaction parameters (χ eff), provide access to smaller pitches and reduced interface widths. Larger χ eff is also expected to be correlated with reduced line edge roughness (LER), a critical performance parameter in integrated circuits. One approach to increasing χ eff is blending the BCP with a phase selective additive, such as an Ionic liquid (IL). The IL does not impact the etching rates of either phase, and this enables a direct interrogation of whether the change in interface width driven by higher χ eff translates into lower LER. The effect of the IL on the layer thickness and interface width of a BCP are examined, along with the corresponding changes in LER in a DSA patterned sample. The results demonstrate that increased χ eff through additive blending will not necessarily translate to a lower LER, clarifying an important design criterion for future material systems.
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Affiliation(s)
- Daniel F. Sunday
- Materials Science and Engineering Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899
| | - Xuanxuan Chen
- Institute for Molecular Engineering, University of Chicago, 5801 S Ellis Ave, Chicago, IL 60637
| | | | | | | | - Takahiro Dazai
- Tokyo Ohka Kogyo, 1590 Tabata, Samukawa-Machi, Koza-Gun, Kanagawa 253-0114, Japan
| | - Ken Miyagi
- Tokyo Ohka Kogyo, 1590 Tabata, Samukawa-Machi, Koza-Gun, Kanagawa 253-0114, Japan
| | - Takaya Maehashi
- Tokyo Ohka Kogyo, 1590 Tabata, Samukawa-Machi, Koza-Gun, Kanagawa 253-0114, Japan
| | - Akiyoshi Yamazaki
- Tokyo Ohka Kogyo, 1590 Tabata, Samukawa-Machi, Koza-Gun, Kanagawa 253-0114, Japan
| | - Paul F. Nealey
- Institute for Molecular Engineering, University of Chicago, 5801 S Ellis Ave, Chicago, IL 60637
| | - R. Joseph Kline
- Materials Science and Engineering Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899
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Van Horn RM, Steffen MR, O'Connor D. Recent progress in block copolymer crystallization. POLYMER CRYSTALLIZATION 2018. [DOI: 10.1002/pcr2.10039] [Citation(s) in RCA: 16] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/16/2022]
Affiliation(s)
- Ryan M. Van Horn
- Department of Chemistry Allegheny College Meadville Pennsylvania
| | | | - Dana O'Connor
- Department of Chemistry Allegheny College Meadville Pennsylvania
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3
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Anokhin DV, Gorbunova MA, Estrin YI, Komratova VV, Badamshina ER. The role of fast and slow processes in the formation of structure and properties of thermoplastic polyurethanes. Phys Chem Chem Phys 2018; 18:31769-31776. [PMID: 27841401 DOI: 10.1039/c6cp05895g] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
New multi-blocked thermoplastic polymers containing rigid polyurethane-urea and soft polydiethylene glycol adipate blocks have been synthesized. Basic features of their structure formation have been revealed. Three types of supramolecular organization have been found, which define the behavior of samples under heating and deformation conditions. The shape memory effect has been interpreted through the transition of one type of morphology to another. The variation of the functional characteristics of the material was addressed in the process of long-time storage at room temperature. The changes of physical-mechanical and thermodynamical properties of the materials were related to structural evolution within 60 months of storage. The competing role of crystallization and phase separation was proposed to explain the unusual mechanical behavior of the materials.
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Affiliation(s)
- D V Anokhin
- IPCP RAS, Semenov Prospect 1, Chernogolovka, 141432, Russia. and Lomonosov Moscow State University, Faculty of Fundamental Physical and Chemical Engineering, GSP-1, 1-51 Leninskie Gory, Moscow, 119991, Russia
| | - M A Gorbunova
- IPCP RAS, Semenov Prospect 1, Chernogolovka, 141432, Russia.
| | - Ya I Estrin
- IPCP RAS, Semenov Prospect 1, Chernogolovka, 141432, Russia.
| | - V V Komratova
- IPCP RAS, Semenov Prospect 1, Chernogolovka, 141432, Russia.
| | - E R Badamshina
- IPCP RAS, Semenov Prospect 1, Chernogolovka, 141432, Russia.
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Interplay of microphase separation, crystallization and liquid crystalline ordering in crystalline/liquid crystalline block copolymers. POLYMER 2017. [DOI: 10.1016/j.polymer.2017.09.071] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
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5
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Polymethylene-b-poly(acrylic acid) diblock copolymers: Morphology and crystallization evolution influenced by polyethyene polyamine with dual confinement effects. POLYMER 2017. [DOI: 10.1016/j.polymer.2016.12.007] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/13/2023]
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6
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Chuang WT, Hsu YM, Lin EL, Lin IM, Sun YS, Chiang YW, Su CJ, Lee YC, Jeng US. Live Templates of a Supramolecular Block Copolymer for the Synthesis of Ordered Nanostructured TiO 2 Films via Guest Exchange. ACS APPLIED MATERIALS & INTERFACES 2016; 8:33221-33229. [PMID: 27934174 DOI: 10.1021/acsami.6b12216] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
In this work, we introduce a facile method based on host-guest chemistry to synthesize a range of nanostructured TiO2 materials using supramolecular templates of a dendron-jacketed block copolymer (DJBCP). The DJBCP is composed of amphiphilic dendrons (4'-(3,4,5-tridodecyloxybenzoyloxy)benzoic acid, TDB) selectively incorporated into a P4VP block of polystyrene-block-poly(4-vinylpyridine) (PS-b-P4VP) via hydrogen bonding. The PS-b-P4VP host acts as a structure-directing template, while the guest molecules (TDB) assist the self-assembly nanostructures and zone-axis alignment, resulting in the nanostructured template of vertically oriented cylinders formed via successive phase transformations from Im3̅m to R3̅m to P6mm upon thermal annealing in the doctor-blade-cast film. The guest molecules subsequently direct the titania precursors into the P4VP domains of the templates via supramolecular guest exchange during immersion of the film in a designated precursor solution containing a P4VP-selective solvent. The subsequent UV irradiation step leads to the formation of PS-b-P4VP/TiO2 hybrids. Finally, removal of the host template by calcination leaves behind mesoporous channels and makes sacrifices to be a carbon source for carbon-doping TiO2 materials. Various TiO2 nanoarchitectures, namely, vertical and wiggly micrometer-length channels, inverse opals, fingerprint-like channels, heterogeneous multilayers, and nanotubes, have been fabricated by highly tunable DJBCP nanostructures.
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Affiliation(s)
- Wei-Tsung Chuang
- National Synchrotron Radiation Research Center , Hsinchu, 30076, Taiwan
| | - Yan-Ming Hsu
- Department of Chemical and Materials Engineering, National Central University , Taoyuan 32001, Taiwan
| | - En-Li Lin
- Department of Materials and Optoelectronic Science, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University , Kaohsiung 80424, Taiwan
| | - I-Ming Lin
- Department of Materials and Optoelectronic Science, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University , Kaohsiung 80424, Taiwan
| | - Ya-Sen Sun
- Department of Chemical and Materials Engineering, National Central University , Taoyuan 32001, Taiwan
| | - Yeo-Wan Chiang
- Department of Materials and Optoelectronic Science, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University , Kaohsiung 80424, Taiwan
| | - Chun-Jen Su
- National Synchrotron Radiation Research Center , Hsinchu, 30076, Taiwan
| | - Yao-Chang Lee
- National Synchrotron Radiation Research Center , Hsinchu, 30076, Taiwan
| | - U-Ser Jeng
- National Synchrotron Radiation Research Center , Hsinchu, 30076, Taiwan
- Department of Chemical Engineering, National Tsing Hua University , Hsinchu 30013, Taiwan
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Rancatore BJ, Kim B, Mauldin CE, Fréchet JMJ, Xu T. Organic Semiconductor-Containing Supramolecules: Effect of Small Molecule Crystallization and Molecular Packing. Macromolecules 2016. [DOI: 10.1021/acs.macromol.5b02449] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Benjamin J. Rancatore
- Materials
Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
| | - BongSoo Kim
- Department
of Science Education, Ewha Womans University, Seoul 120-750, Republic of Korea
| | | | - Jean M. J. Fréchet
- Materials
Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
- King Abdullah
University of Science and Technology, Thuwal, Saudi Arabia 23955-6900
| | - Ting Xu
- Materials
Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States
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