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Shindler S, Franklin T, Yang R. Prevention and characterization of thin film defects induced by contaminant aggregates in initiated chemical vapor deposition. J Chem Phys 2024; 160:144904. [PMID: 38597315 DOI: 10.1063/5.0195014] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/29/2023] [Accepted: 03/11/2024] [Indexed: 04/11/2024] Open
Abstract
As initiated Chemical Vapor Deposition (iCVD) finds increasing application in precision industries like electronics and optics, defect prevention will become critical. While studies of non-ideal morphology exist in the iCVD literature, no studies investigate the role of defects. To address this knowledge gap, we show that the buildup of short-chain polymers or oligomers during normal operation of an iCVD reactor can lead to defects that compromise film integrity. We used atomic force microscopy to show that oligomer aggregates selectively prevented film growth, causing these hole-like defects. X-ray diffraction and optical microscopy demonstrated the crystallinity of the aggregates, pointing to a flat-on lamellar or mono-lamellar structure. To understand the origin of the aggregates, spectroscopic ellipsometry showed that samples exposed to the reactor consistently accrued low-volatility contaminants. X-ray photoelectron spectroscopy revealed material derived from polymerization in the contamination, while scanning electron microscopy showed the presence of defect-causing aggregates. We directly linked oligomeric/polymeric contamination with defect formation by showing an increased defect rate when a contaminant polymer was heated alongside the sample. Most importantly, we showed that starting a deposition at a high sample temperature (e.g., 50 °C) before reducing it to the desired setpoint (e.g., 9 °C) unilaterally prevented defects, providing a simple method to prevent defects with minimal impact on operations.
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Affiliation(s)
- Simon Shindler
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, 120 Olin Hall, Ithaca, New York 14853, USA
| | - Trevor Franklin
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, 120 Olin Hall, Ithaca, New York 14853, USA
| | - Rong Yang
- Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, 120 Olin Hall, Ithaca, New York 14853, USA
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2
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Iyer K, Margossian M, Muthukumar M. Interlude of metastability in the melting of polymer crystals. J Chem Phys 2019; 151:124903. [DOI: 10.1063/1.5114645] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/02/2023] Open
Affiliation(s)
- Kiran Iyer
- Department of Chemical Engineering, University of Massachusetts, Amherst, Massachusetts 01003, USA
| | - Marzbed Margossian
- Department of Chemistry, University of Massachusetts, Amherst, Massachusetts 01003, USA
| | - Murugappan Muthukumar
- Department of Polymer Science and Engineering, University of Massachusetts, Amherst, Massachusetts 01003, USA
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3
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Affiliation(s)
- James N. Hay
- The School of Metallurgy and Materials, College of Physical Science and EngineeringThe University of BirminghamEdgbastonBirminghamUK
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4
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Agbolaghi S, Abbaspoor S, Abbasi F. A comprehensive review on polymer single crystals—From fundamental concepts to applications. Prog Polym Sci 2018. [DOI: 10.1016/j.progpolymsci.2017.11.006] [Citation(s) in RCA: 27] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023]
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5
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Wang B, Tang S, Wang Y, Shen C, Reiter R, Reiter G, Chen J, Zhang B. Systematic Control of Self-Seeding Crystallization Patterns of Poly(ethylene oxide) in Thin Films. Macromolecules 2018. [DOI: 10.1021/acs.macromol.7b02445] [Citation(s) in RCA: 21] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/19/2022]
Affiliation(s)
- Binghua Wang
- School of Materials Science & Engineering, Zhengzhou University, Zhengzhou 450002, People’s Republic of China
| | - Shaohua Tang
- School of Materials Science & Engineering, Zhengzhou University, Zhengzhou 450002, People’s Republic of China
| | - Yan Wang
- School of Materials Science & Engineering, Zhengzhou University, Zhengzhou 450002, People’s Republic of China
| | - Changyu Shen
- School of Materials Science & Engineering, Zhengzhou University, Zhengzhou 450002, People’s Republic of China
| | - Renate Reiter
- Institute of Physics, University of Freiburg, 79104 Freiburg, Germany
| | - Günter Reiter
- Institute of Physics, University of Freiburg, 79104 Freiburg, Germany
| | - Jingbo Chen
- School of Materials Science & Engineering, Zhengzhou University, Zhengzhou 450002, People’s Republic of China
| | - Bin Zhang
- School of Materials Science & Engineering, Zhengzhou University, Zhengzhou 450002, People’s Republic of China
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Hay JN. The role of a secondary process in polymer crystallization: 4 − Polyethylene revisited. POLYM INT 2018. [DOI: 10.1002/pi.5523] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
Affiliation(s)
- James N Hay
- School of Metallurgy and Materials, College of Physical Science and Engineering; University of Birmingham; UK
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7
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Lv ZY, Zhang MC, Zhang Y, Guo BH, Xu J. Study on melting and recrystallization of poly(butylene succinate) lamellar crystals via step heating differential scanning calorimetry. CHINESE JOURNAL OF POLYMER SCIENCE 2017. [DOI: 10.1007/s10118-017-1986-6] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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8
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Zhang B, Chen J, Zhang H, Baier MC, Mecking S, Reiter R, Mülhaupt R, Reiter G. Annealing-induced periodic patterns in solution grown polymer single crystals. RSC Adv 2015. [DOI: 10.1039/c4ra10563j] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
Faceted polymer single crystals have been transformed into periodically branched patterns by applying a slow annealing procedure.
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Affiliation(s)
- Bin Zhang
- Institute of Physics
- University of Freiburg
- 79104 Freiburg
- Germany
- Hermann Staudinger Graduate School
| | - Jingbo Chen
- School of Materials Science & Engineering
- Zhengzhou University
- Zhengzhou 450002
- People's Republic of China
| | - Hui Zhang
- Institute of Physics
- University of Freiburg
- 79104 Freiburg
- Germany
| | - Moritz C. Baier
- Chair of Chemical Materials Science
- Department of Chemistry
- University of Konstanz
- 78464 Konstanz
- Germany
| | - Stefan Mecking
- Chair of Chemical Materials Science
- Department of Chemistry
- University of Konstanz
- 78464 Konstanz
- Germany
| | - Renate Reiter
- Institute of Physics
- University of Freiburg
- 79104 Freiburg
- Germany
- Freiburg Materials Research Centre
| | - Rolf Mülhaupt
- Institute of Macromolecular Chemistry
- University of Freiburg
- 79104 Freiburg
- Germany
- Freiburg Materials Research Centre
| | - Günter Reiter
- Institute of Physics
- University of Freiburg
- 79104 Freiburg
- Germany
- Freiburg Materials Research Centre
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9
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Qiu BW, Chen F, Shangguan YG, Lin Y, Zheng Q. Effects of composition on microstructure and crystallization behavior for impact polypropylene copolymer investigated by restructuring the complex core-shell dispersed particles in ternary blends. CHINESE JOURNAL OF POLYMER SCIENCE 2014. [DOI: 10.1007/s10118-015-1556-8] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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10
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Liu R, Li K, Liu M, Liu Y, Liu H. Free poly(l-lactic acid) spherulites grown from thermally induced phase separation and crystallization kinetics. ACTA ACUST UNITED AC 2014. [DOI: 10.1002/polb.23587] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- Ruilai Liu
- Fujian Provincial Key Laboratory of Polymer Materials; College of Material Science and Engineering, Fujian Normal University; Fujian 350007 China
- College of Ecological and Resources Engineering; Wuyi University; Fujian 354300 China
| | - Kaina Li
- Fujian Provincial Key Laboratory of Polymer Materials; College of Material Science and Engineering, Fujian Normal University; Fujian 350007 China
| | - Min Liu
- Fujian Provincial Key Laboratory of Polymer Materials; College of Material Science and Engineering, Fujian Normal University; Fujian 350007 China
| | - Yingying Liu
- Fujian Provincial Key Laboratory of Polymer Materials; College of Material Science and Engineering, Fujian Normal University; Fujian 350007 China
| | - Haiqing Liu
- Fujian Provincial Key Laboratory of Polymer Materials; College of Material Science and Engineering, Fujian Normal University; Fujian 350007 China
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11
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Zhong LW, Ren XK, Yang S, Chen EQ, Sun CX, Stroeks A, Yang TY. Lamellar orientation of polyamide 6 thin film crystallization on solid substrates. POLYMER 2014. [DOI: 10.1016/j.polymer.2014.06.031] [Citation(s) in RCA: 27] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
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12
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Crystal orientation and melting behavior of poly(ɛ-Caprolactone) under one-dimensionally “hard” confined microenvironment. CHINESE JOURNAL OF POLYMER SCIENCE 2013. [DOI: 10.1007/s10118-013-1285-9] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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13
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Molecular weight dependence of crystal pattern transitions of poly(ethylene oxide). CHINESE JOURNAL OF POLYMER SCIENCE 2013. [DOI: 10.1007/s10118-013-1273-0] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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14
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EVOLUTION OF CRYSTAL PATTERNS OF SINGLE-LAYER LAMELLAE OF STAR-SHAPED PEO SAMPLES. ACTA POLYM SIN 2013. [DOI: 10.3724/sp.j.1105.2013.12330] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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15
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Wang M, Gao H, Zha L, Chen EQ, Hu W. Systematic Kinetic Analysis on Monolayer Lamellar Crystal Thickening via Chain-Sliding Diffusion of Polymers. Macromolecules 2012. [DOI: 10.1021/ma301926p] [Citation(s) in RCA: 22] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Mingqiu Wang
- Department of Polymer Science and Engineering, State Key Lab of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, 210093 Nanjing, China
- Department of Chemical and Pharmaceutical Engineering, Chengxian College, Southeast University, 210088 Nanjing, China
| | - Huanhuan Gao
- Department of Polymer Science and Engineering, State Key Lab of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, 210093 Nanjing, China
| | - Liyun Zha
- Department of Chemical and Pharmaceutical Engineering, Chengxian College, Southeast University, 210088 Nanjing, China
| | - Er-Qiang Chen
- Key Laboratory of Polymer Chemistry and Physics of Ministry of Education, College of Chemistry, Peking University, Beijing 100871, China
| | - Wenbing Hu
- Department of Polymer Science and Engineering, State Key Lab of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, 210093 Nanjing, China
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Liu YX, Zhong LW, Su SZ, Chen EQ. Phase Selection Pathways in Ultrathin Film Crystallization of a Low Molecular Weight Poly(ethylene oxide) Fraction on Mica Surfaces. Macromolecules 2011. [DOI: 10.1021/ma201885g] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Yi-Xin Liu
- Beijing National Laboratory for Molecular Sciences, Department of Polymer Science and Engineering and Key Laboratory of Polymer Chemistry and Physics of Ministry of Education, College of Chemistry, Peking University, Beijing 100871, China
| | - Lu-Wei Zhong
- Beijing National Laboratory for Molecular Sciences, Department of Polymer Science and Engineering and Key Laboratory of Polymer Chemistry and Physics of Ministry of Education, College of Chemistry, Peking University, Beijing 100871, China
| | - Shi-Zhao Su
- Beijing National Laboratory for Molecular Sciences, Department of Polymer Science and Engineering and Key Laboratory of Polymer Chemistry and Physics of Ministry of Education, College of Chemistry, Peking University, Beijing 100871, China
| | - Er-Qiang Chen
- Beijing National Laboratory for Molecular Sciences, Department of Polymer Science and Engineering and Key Laboratory of Polymer Chemistry and Physics of Ministry of Education, College of Chemistry, Peking University, Beijing 100871, China
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Kožíšek Z, Hikosaka M, Okada K, Demo P. Size distribution of folded chain crystal nuclei of polyethylene on active centers. J Chem Phys 2011; 134:114904. [PMID: 21428664 DOI: 10.1063/1.3571457] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
Abstract
Kinetic equations describing temporal evolution of the size distribution of crystalline nuclei of folded chain polyethylene on active centers are solved numerically. Basic characteristics of nucleation processes (the total number of supercritical nuclei and the size distribution of nuclei) are determined and compared with the experimental data. It is shown that even though the total number of supercritical nuclei coincides with the experimental data, the size distribution prediction fails. This is caused by the fact that the total number of nuclei (usually used in analysis of the experimental data), in contrast to the size distribution of nuclei, represents an integral quantity. Using the experimental data of the steady state size distribution of nuclei enables us to determine thermodynamic parameters (especially interfacial energies) of the studied system more precisely and consequently to correct kinetic parameters to get coincidence of kinetic model with the experimental data in both, the total number of supercritical nuclei and also the size distribution of nuclei.
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Affiliation(s)
- Zdeněk Kožíšek
- Institute of Physics, Academy of Sciences of the Czech Republic, Cukrovarnická 10, 162 00 Praha 6, Czech Republic.
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Pfefferkorn D, Kyeremateng SO, Busse K, Kammer HW, Thurn-Albrecht T, Kressler J. Crystallization and Melting of Poly(ethylene oxide) in Blends and Diblock Copolymers with Poly(methyl acrylate). Macromolecules 2011. [DOI: 10.1021/ma102867d] [Citation(s) in RCA: 35] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Dirk Pfefferkorn
- Department of Chemistry and Physics, Martin Luther University Halle-Wittenberg, D-06099 Halle (Saale), Germany
| | - Samuel O. Kyeremateng
- Department of Chemistry and Physics, Martin Luther University Halle-Wittenberg, D-06099 Halle (Saale), Germany
| | - Karsten Busse
- Department of Chemistry and Physics, Martin Luther University Halle-Wittenberg, D-06099 Halle (Saale), Germany
| | - Hans-Werner Kammer
- Faculty of Applied Sciences, Universiti Teknologi MARA, 40450 Shah Alam/Selangor, Malaysia
| | - Thomas Thurn-Albrecht
- Department of Chemistry and Physics, Martin Luther University Halle-Wittenberg, D-06099 Halle (Saale), Germany
| | - Jörg Kressler
- Department of Chemistry and Physics, Martin Luther University Halle-Wittenberg, D-06099 Halle (Saale), Germany
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Zhang G, Cao Y, Jin L, Zheng P, Van Horn RM, Lotz B, Cheng SZ, Wang W. Crystal growth pattern changes in low molecular weight poly(ethylene oxide) ultrathin films. POLYMER 2011. [DOI: 10.1016/j.polymer.2011.01.002] [Citation(s) in RCA: 26] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
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21
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Ren Y, Ma A, Li J, Jiang X, Ma Y, Toda A, Hu W. Melting of polymer single crystals studied by dynamic Monte Carlo simulations. THE EUROPEAN PHYSICAL JOURNAL. E, SOFT MATTER 2010; 33:189-202. [PMID: 20957404 DOI: 10.1140/epje/i2010-10661-8] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/23/2010] [Revised: 06/30/2010] [Accepted: 09/27/2010] [Indexed: 05/30/2023]
Abstract
We report dynamic Monte Carlo simulations of lattice polymers melting from a metastable chain-folded lamellar single crystal. The single crystal was raised and then melted in an ultrathin film of polymers wetting on a solid substrate, mimicking the melting observations made by using Atomic Force Microscopy. We observed that the thickness distribution of the single crystal appears quite inhomogeneous and the thickness increases gradually from facetted edges to the center. Therefore, at low melting temperatures, melting stops at a certain crystal thickness, and melting-recrystallization occurs when allowing crystal thickening; at intermediate temperatures, melting maintains the crystal shape and exhibits different speeds in two stages; at high temperatures, fast melting makes a melting hole in the thinnest region, as well as a saw-tooth-like pattern at the crystal edges. In addition, the linear melting rates at low temperatures align on the curve extrapolated from the linear crystal growth rates. The temperature dependence of the melting rates exhibits a regime transition similar to crystal growth. Such kinetic symmetry persists in the melting rates with variable frictional barriers for c -slip diffusion in the crystal as well as with variable chain lengths. Visual inspections revealed highly frequent reversals upon melting of single chains at the wedge-shaped lateral front of the lamellar crystal. We concluded that the melting kinetics is dominated by the reverse process of intramolecular secondary crystal nucleation of polymers.
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Affiliation(s)
- Y Ren
- Department of Polymer Science and Engineering, Nanjing University, China
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23
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Zhang G, Jin L, Zheng P, Shi AC, Wang W. Labyrinthine pattern of polymer crystals from supercooled ultrathin films. POLYMER 2010. [DOI: 10.1016/j.polymer.2009.11.061] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/20/2022]
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