Ultrahigh-Q nanocavities written with a nanoprobe

Reconfigurable nanocavity formation in graphene-loaded Si photonic crystal structures

We propose and numerically demonstrate that a reconfigurable nanocavity can be created in a graphene-loaded Si photonic crystal waveguide. The cavity formation is caused by the local mode-gap modulation induced by electrostatic gate-tuning of graphene. Although most recent graphene photonic devices are based on a change in the imaginary part of the refractive index, here we make use of a change in the real part of the refractive index for gated graphene. We clarify that nanocavities can be formed in two different cases, red-shifted and blue-shifted tunings. These novel formation mechanisms enable us to create and annihilate a nanocavity in a reconfigurable way by varying the gate voltage, which is promising for novel control in photonic processing.

Advanced oxidation scanning probe lithography

Force microscopy enables a variety of approaches to manipulate and/or modify surfaces. Few of those methods have evolved into advanced probe-based lithographies. Oxidation scanning probe lithography (o-SPL) is the only lithography that enables the direct and resist-less nanoscale patterning of a large variety of materials, from metals to semiconductors; from self-assembled monolayers to biomolecules. Oxidation SPL has also been applied to develop sophisticated electronic and nanomechanical devices such as quantum dots, quantum point contacts, nanowire transistors or mechanical resonators. Here, we review the principles, instrumentation aspects and some device applications of o-SPL. Our focus is to provide a balanced view of the method that introduces the key steps in its evolution, provides some detailed explanations on its fundamentals and presents current trends and applications. To illustrate the capabilities and potential of o-SPL as an alternative lithography we have favored the most recent and updated contributions in nanopatterning and device fabrication.

Tip-Based Nanofabrication for Scalable Manufacturing

Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.

Advanced scanning probe lithography

The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented its exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on robust methods, such as those based on thermal effects, chemical reactions and voltage-induced processes, that demonstrate a potential for applications.

Movable high-Q nanoresonators realized by semiconductor nanowires on a Si photonic crystal platform

Subwavelength semiconductor nanowires have recently attracted interest for photonic applications because they possess various unique optical properties and offer great potential for miniaturizing devices. However, realizing tight light confinement or efficient coupling with photonic circuits is not straightforward and remains a challenge. Here we show that a high-Q nanocavity can be created by placing a single III–V semiconductor nanowire with a diameter of under 100 nm in a grooved waveguide in a Si photonic crystal, by means of nanoprobe manipulation. We observe very fast spontaneous emission (91 ps) from nanowires accelerated by the strong Purcell enhancement in nanocavities, which proves that very strong light confinement can be achieved. Furthermore, this system enables us to move the nanocavity anywhere along the waveguide. This configuration provides a significant degree of flexibility in integrated photonics and permits the addition and displacement of various functionalities of III–V nanocavity devices in Si photonic circuits.

Ultra-compact 32-channel drop filter with 100 GHz spacing

We demonstrated 32-channel drop filters with 100 GHz spacing consisting of arrayed nanocavities and a waveguide in a photonic crystal silicon slab. Changing the lattice constant of the nanocavities on the subnanometer scale successfully controlled the drop wavelengths at 100 GHz spacing in the wavelength range between 1510 and 1550 nm. The device size was as small as 15 μm × 270 μm, and the variation in drop wavelengths was less than 0.3 nm in terms of standard deviation. We also present a movie showing the operation of the drop filter, demonstrating that the arrayed nanocavities have the potential for developing ultracompact 100 GHz spaced filters in a dense wavelength division multiplexing system.

Reconfigurable, defect-free, ultrahigh-Q photonic crystal microcavities for sensing

We propose a new approach for creating reconfigurable high-Q cavities in defect-free photonic crystal slabs (PCSs). The approach relies on selective air-hole infiltration in otherwise defect-free PCSs. We show that using this method we can design ultrahigh-Q microcavities, with Q˜10⁶. Numerical calculations indicate a large number of high-Q modes with high sensitivity, which are ideal for simultaneous, multi-parameter refractive index-based sensing.

Ultrahigh-Q photonic crystal nanocavities in wide optical telecommunication bands

We have studied the feasibility of extending the operating wavelength range of high-Q silicon nanocavities above and below the 1.55 μm wavelength band, while maintaining Q factors of more than one million. We have succeeded in developing such nanocavities in the optical telecommunication bands from 1.27 μm to 1.50 μm. Very high Q values of more than two million were obtained even for the 1.30 μm band. The Q values increase proportionally to the resonant wavelength because the scattering loss decreases. We have also analyzed the influence of absorption due to surface water. We conclude that high-Q nanocavities are feasible for an even wider wavelength region including parts of the mid-infrared.