Stretchable photonic crystal cavity with wide frequency tunability

Mechanically-flexible wafer-scale integrated-photonics fabrication platform

The field of integrated photonics has advanced rapidly due to wafer-scale fabrication, with integrated-photonics platforms and fabrication processes being demonstrated at both infrared and visible wavelengths. However, these demonstrations have primarily focused on fabrication processes on silicon substrates that result in rigid photonic wafers and chips, which limit the potential application spaces. There are many application areas that would benefit from mechanically-flexible integrated-photonics wafers, such as wearable healthcare monitors and pliable displays. Although there have been demonstrations of mechanically-flexible photonics fabrication, they have been limited to fabrication processes on the individual device or chip scale, which limits scalability. In this paper, we propose, develop, and experimentally characterize the first 300-mm wafer-scale platform and fabrication process that results in mechanically-flexible photonic wafers and chips. First, we develop and describe the 300-mm wafer-scale CMOS-compatible flexible platform and fabrication process. Next, we experimentally demonstrate key optical functionality at visible wavelengths, including chip coupling, waveguide routing, and passive devices. Then, we perform a bend-durability study to characterize the mechanical flexibility of the photonic chips, demonstrating bending a single chip 2000 times down to a bend diameter of 0.5 inch with no degradation in the optical performance. Finally, we experimentally characterize polarization-rotation effects induced by bending the flexible photonic chips. This work will enable the field of integrated photonics to advance into new application areas that require flexible photonic chips.

Lasing Emission from Soft Photonic Crystals for Pressure and Position Sensing

In this report, we introduce a 1D photonic crystal (PhC) nanocavity with waveguide-like strain amplifiers within a soft polydimethylsiloxane substrate, presenting it as a potential candidate for highly sensitive pressure and position optical sensors. Due to its substantial optical wavelength response to uniform pressure, laser emission from this nanocavity enables the detection of a minimum applied uniform pressure of 1.6‱ in experiments. Based on this feature, we further studied and elucidated the distinct behaviors in wavelength shifts when applying localized pressure at various positions relative to the PhC nanocavity. In experiments, by mapping wavelength shifts of the PhC nanolaser under localized pressure applied using a micro-tip at different positions, we demonstrate the nanocavity's capability to detect minute position differences, with position-dependent minimum resolutions ranging from tens to hundreds of micrometers. Furthermore, we also propose and validate the feasibility of employing the strain amplifier as an effective waveguide for extracting the sensing signal from the nanocavity. This approach achieves a 64% unidirectional coupling efficiency for leading out the sensing signal to a specific strain amplifier. We believe these findings pave the way for creating a highly sensitive position-sensing module that can accurately identify localized pressure in a planar space.

Flexible passive integrated photonic devices with superior optical and mechanical performance

Flexible integrated photonics is a rapidly emerging technology with a wide range of possible applications in the fields of flexible optical interconnects, conformal multiplexing sensing, health monitoring, and biotechnology. One major challenge in developing mechanically flexible integrated photonics is the functional component within an integrated photonic circuit with superior performance. In this work, several essential flexible passive devices for such a circuit were designed and fabricated based on a multi-neutral-axis mechanical design and a monolithic integration technique. The propagation loss of the waveguide is calculated to be 4.2 dB/cm. In addition, we demonstrate a microring resonator, waveguide crossing, multimode interferometer (MMI), and Mach-Zehnder interferometer (MZI) for use at 1.55 µm, each exhibiting superior optical and mechanical performance. These results represent a significant step towards further exploring a complete flexible photonic integrated circuit.

CMOS-Compatible and Low-Cost Thin Film MACE Approach for Light-Emitting Si NWs Fabrication

Silicon nanowires (Si NWs) are emerging as an innovative building block in several fields, such as microelectronics, energetics, photonics, and sensing. The interest in Si NWs is related to the high surface to volume ratio and the simpler coupling with the industrial flat architecture. In particular, Si NWs emerge as a very promising material to couple the light to silicon. However, with the standard synthesis methods, the realization of quantum-confined Si NWs is very complex and often requires expensive equipment. Metal-Assisted Chemical Etching (MACE) is gaining more and more attention as a novel approach able to guarantee high-quality Si NWs and high density with a cost-effective approach. Our group has recently modified the traditional MACE approach through the use of thin metal films, obtaining a strong control on the optical and structural properties of the Si NWs as a function of the etching process. This method is Complementary Metal-Oxide-Semiconductors (CMOS)-technology compatible, low-cost, and permits us to obtain a high density, and room temperature light-emitting Si NWs due to the quantum confinement effect. A strong control on the Si NWs characteristics may pave the way to a real industrial transfer of this fabrication methodology for both microelectronics and optoelectronics applications.

Tunable, polarization-sensitive, dual guided-resonance modes in photonic crystals

We present a photonic-crystal design which supports multiple guided-resonance modes in a narrow spectral range. Introduction of mutually-orthogonal slots within a conventional lattice allows us to create polarization-sensitive guided modes with distinct near-field periodicities and tunable resonance wavelengths. The device can potentially be used as a reconfigurable optical trap, multiband tunable filter, or differential sensor.

Flexible Mid-infrared Photonic Circuits for Real-time and Label-Free Hydroxyl Compound Detection

Chip-scale chemical detections were demonstrated by mid-Infrared (mid-IR) integrated optics made by aluminum nitride (AlN) waveguides on flexible borosilicate templates. The AlN film was deposited using sputtering at room temperature, and it exhibited a broad infrared transmittance up to λ = 9 µm. The AlN waveguide profile was created by microelectronic fabrication processes. The sensor is bendable because it has a thickness less than 30 µm that significantly decreases the strain. A bright fundamental mode was obtained at λ = 2.50–2.65 µm without mode distortion or scattering observed. By spectrum scanning at the -OH absorption band, the waveguide sensor was able to identify different hydroxyl compounds, such as water, methanol, and ethanol, and the concentrations of their mixtures. Real-time methanol monitoring was achieved by reading the intensity change of the waveguide mode at λ = 2.65 μm, which overlap with the stretch absorption of the hydroxyl bond. Due to the advantages of mechanical flexibility and broad mid-IR transparency, the AlN chemical sensor will enable microphotonic devices for wearables and remote biomedical and environmental detection.

Stretchable Nanolasing from Hybrid Quadrupole Plasmons

This paper reports a robust and stretchable nanolaser platform that can preserve its high mode quality by exploiting hybrid quadrupole plasmons as an optical feedback mechanism. Increasing the size of metal nanoparticles in an array can introduce ultrasharp lattice plasmon resonances with out-of-plane charge oscillations that are tolerant to lateral strain. By patterning these nanoparticles onto an elastomeric slab surrounded by liquid gain, we realized reversible, tunable nanolasing with high strain sensitivity and no hysteresis. Our semiquantum modeling demonstrates that lasing build-up occurs at the hybrid quadrupole electromagnetic hot spots, which provides a route toward mechanical modulation of light-matter interactions on the nanoscale.

Monolithically integrated stretchable photonics

Mechanically stretchable photonics provides a new geometric degree of freedom for photonic system design and foresees applications ranging from artificial skins to soft wearable electronics. Here we describe the design and experimental realization of the first single-mode stretchable photonic devices. These devices, made of chalcogenide glass and epoxy polymer materials, are monolithically integrated on elastomer substrates. To impart mechanical stretching capability to devices built using these intrinsically brittle materials, our design strategy involves local substrate stiffening to minimize shape deformation of critical photonic components, and interconnecting optical waveguides assuming a meandering Euler spiral geometry to mitigate radiative optical loss. Devices fabricated following such design can sustain 41% nominal tensile strain and 3000 stretching cycles without measurable degradation in optical performance. In addition, we present a rigorous analytical model to quantitatively predict stress-optical coupling behavior in waveguide devices of arbitrary geometry without using a single fitting parameter.

Metasurface Freeform Nanophotonics

Freeform optics aims to expand the toolkit of optical elements by allowing for more complex phase geometries beyond rotational symmetry. Complex, asymmetric curvatures are employed to enhance the performance of optical components while minimizing their size. Unfortunately, these high curvatures and complex forms are often difficult to manufacture with current technologies, especially at the micron scale. Metasurfaces are planar sub-wavelength structures that can control the phase, amplitude, and polarization of incident light, and can thereby mimic complex geometric curvatures on a flat, wavelength-scale thick surface. We present a methodology for designing analogues of freeform optics using a silicon nitride based metasurface platform for operation at visible wavelengths. We demonstrate a cubic phase plate with a point spread function exhibiting enhanced depth of field over 300 micron along the optical axis with potential for performing metasurface-based white light imaging, and an Alvarez lens with a tunable focal length range of over 2.5 mm corresponding to a change in optical power of ~1600 diopters with 100 micron of total mechanical displacement. The adaptation of freeform optics to a sub-wavelength metasurface platform allows for further miniaturization of optical components and offers a scalable route toward implementing near-arbitrary geometric curvatures in nanophotonics.

A stretchable crumpled graphene photodetector with plasmonically enhanced photoresponsivity

Graphene has been widely explored for flexible, high-performance photodetectors due to its exceptional mechanical strength, broadband absorption, and high carrier mobility. However, the low stretchability and limited photoabsorption of graphene have restricted its applications in flexible and highly sensitive photodetection systems. Various hybrid systems based on photonic or plasmonic nanostructures have been introduced to improve the limited photoresponsivity of graphene photodetectors. In most cases, the hybrid systems succeeded in the enhancement of photoresponsivity, but showed limited mechanical stretchability. Here, we demonstrate a stretchable photodetector based on a crumpled graphene-gold nanoparticle (AuNP) hybrid structure with ∼1200% enhanced photoresponsivity, compared to a conventional flat graphene-only photodetector, and exceptional mechanical stretchability up to a 200% tensile strain. We achieve plasmonically enhanced photoresponsivity by integrating AuNPs with graphene. By crumpling the hybrid structure, we realize mechanical stretchability and further enhancement of the optical absorption by densification. We also demonstrate that our highly stretchable photodetector with enhanced photoresponsivity can be integrated on a contact lens and a spring structure. We believe that our stretchable, high performance graphene photodetector can find broad applications for conformable and flexible optical sensors and dynamic mechanical strain sensors.

Characteristics of strain-sensitive photonic crystal cavities in a flexible substrate

High-index semiconductor photonic crystal (PhC) cavities in a flexible substrate support strong and tunable optical resonances that can be used for highly sensitive and spatially localized detection of mechanical deformations in physical systems. Here, we report theoretical studies and fundamental understandings of resonant behavior of an optical mode excited in strain-sensitive rod-type PhC cavities consisting of high-index dielectric nanorods embedded in a low-index flexible polymer substrate. Using the three-dimensional finite-difference time-domain simulation method, we calculated two-dimensional transverse-electric-like photonic band diagrams and the three-dimensional dispersion surfaces near the first Γ-point band edge of unidirectionally strained PhCs. A broken rotational symmetry in the PhCs modifies the photonic band structures and results in the asymmetric distributions and different levels of changes in normalized frequencies near the first Γ-point band edge in the reciprocal space, which consequently reveals strain-dependent directional optical losses and selected emission patterns. The calculated electric fields, resonant wavelengths, and quality factors of the band-edge modes in the strained PhCs show an excellent agreement with the results of qualitative analysis of modified dispersion surfaces. Furthermore, polarization-resolved time-averaged Poynting vectors exhibit characteristic dipole-like emission patterns with preferentially selected linear polarizations, originating from the asymmetric band structures in the strained PhCs.

Tunable nanoblock lasers and stretching sensors

Reconfigurable, reliable, and robust nanolasers with wavelengths tunable in the telecommunication bands are currently being sought after for use as flexible light sources in photonic integrated circuits. Here, we propose and demonstrate tunable nanolasers based on 1D nanoblocks embedded within stretchable polydimethylsiloxane. Our lasers show a large wavelength tunability of 7.65 nm per 1% elongation. Moreover, this tunability is reconfigurable and reliable under repeated stretching/relaxation tests. By applying excessive stretching, wide wavelength tuning over a range of 80 nm (spanning the S, C, and L telecommunication bands) is successfully demonstrated. Furthermore, as a stretching sensor, an enhanced wavelength response to elongation of 9.9 nm per % is obtained via the signal differential from two nanoblock lasers positioned perpendicular to each other. The minimum detectable elongation is as small as 0.056%. Nanoblock lasers can function as reliable tunable light sources in telecommunications and highly sensitive on-chip structural deformation sensors.

A high-resolution strain-gauge nanolaser

Interest in mechanical compliance has been motivated by the development of flexible electronics and mechanosensors. In particular, studies and characterization of structural deformation at the fundamental scale can offer opportunities to improve the device sensitivity and spatiotemporal response; however, the development of precise measurement tools with the appropriate resolution remains a challenge. Here we report a flexible and stretchable photonic crystal nanolaser whose spectral and modal behaviours are sensitive to nanoscale structural alterations. Reversible spectral tuning of ∼26 nm in lasing wavelength, with a sub-nanometre resolution of less than ∼0.6 nm, is demonstrated in response to applied strain ranging from -10 to 12%. Instantaneous visualization of the sign of the strain is also characterized by exploring the structural and corresponding modal symmetry. Furthermore, our high-resolution strain-gauge nanolaser functions as a stable and deterministic strain-based pH sensor in an opto-fluidic system, which may be useful for further analysis of chemical/biological systems.

Disposable photonic integrated circuits for evanescent wave sensors by ultra-high volume roll-to-roll method

Flexible photonic integrated circuit technology is an emerging field expanding the usage possibilities of photonics, particularly in sensor applications, by enabling the realization of conformable devices and introduction of new alternative production methods. Here, we demonstrate that disposable polymeric photonic integrated circuit devices can be produced in lengths of hundreds of meters by ultra-high volume roll-to-roll methods on a flexible carrier. Attenuation properties of hundreds of individual devices were measured confirming that waveguides with good and repeatable performance were fabricated. We also demonstrate the applicability of the devices for the evanescent wave sensing of ambient refractive index. The production of integrated photonic devices using ultra-high volume fabrication, in a similar manner as paper is produced, may inherently expand methods of manufacturing low-cost disposable photonic integrated circuits for a wide range of sensor applications.

Direct writing of tunable multi-wavelength polymer lasers on a flexible substrate

Tunable multi-wavelength polymer lasers based on two-dimensional distributed feedback structures are fabricated on a transparent flexible substrate using interference ablation. A scalene triangular lattice structure was designed to support stable tri-wavelength lasing emission and was achieved through multiple exposure processes. Three wavelengths were controlled by three periods of the compound cavity. Mode competition among different cavity modes was observed by changing the pump fluence. Both a redshift and blueshift of the laser wavelength could be achieved by bending the soft substrate. These results not only provide insight into the physical mechanisms behind co-cavity polymer lasers but also introduce new laser sources and laser designs for white light lasers.

Dominant mode control of a graphene-embedded hybrid plasmonic resonator for a tunable nanolaser

A graphene-embedded tunable plasmonic nanodisk resonator operating at near-infrared wavelength range is proposed, in which a certain resonant mode among multiple whispering-gallery modes (WGMs) can be selected as a dominant mode by modulating the Fermi level of the graphene. Our theoretical investigation reveals that the dominant mode selection mechanism in the proposed resonator is governed by the figure-of-merit (FOM) of the one-dimensional (1D) waveguide of the resonator's vertical structure, which is defined as a propagation length to mode size ratio. As the conductivity of the graphene changes with a gating voltage, the wavelength dependence of the FOM changes and a WGM closest to the maximum FOM wavelength is selected. Partial tuning of the selected dominant mode is incurred by the change of the effective index of the 1D waveguide. This novel mode selection mechanism of the proposed resonator can be adopted to realize an optically pumped tunable nanolaser with a wide wavelength tuning range.

Reconfigurable and actuating structures from soft materials

The recent interest in reconfigurable soft materials may lead to the next paradigm in the development of adaptive and actuating materials and structures. Actuating soft materials eventually can be precisely designed to show stimuli-sensing, multi-length scale actuation, tunable transport, programmed shape control and multifunctional orthogonal responses. Herein, we discuss the various advances in the emerging field of reconfigurable soft materials with a focus on the various parameters that can be modulated to control a complex system behavior. In particular, we detail approaches that use either long-range fields (i.e. electrical, magnetic) or changes in local thermodynamic parameters (e.g., solvent quality) in order to elicit a precise dimensional and controlled response. The theoretical underpinnings and practical considerations for different approaches are briefly presented alongside several illustrative examples from the recent studies. In the end, we summarize recent accomplishments, critical issues to consider, and give perspectives on the developments of this exciting research field.

Soft plasmons with stretchable spectroscopic response based on thermally patterned gold nanoparticles

Flexible photonic crystals are attractive devices owing to their multifold tunable parameters additionally introduced by soft substrates or by nanostructured, nano-doped, or nano-embedded soft matters. This not only extends significantly the intrinsic functions of photonic crystals, but also facilitates easy integration of the photonic crystal device into various optoelectronic and sensing systems. So far, flexible metallic photonic structures have been constructed on micrometer scales with complex fabrication procedures. Much simpler and more reproducible methods are expected to achieve such metamaterials in large scales and at low costs. In address to these challenges, we developed a straightforward approach to create soft plasmonic photonic crystals consisting of gold nanolines arranged on stretchable substrates with nanoscale periods, centimeter-scale areas, and high reproducibility using annealed gold nanoparticle colloids.

In plane manipulation of a dielectric nanobeam with gradient optical forces

In this paper we investigate the optical forces induced by localized optical modes propagating along three parallel waveguides, of which only the central one is free to move. In this configuration, when all three waveguides are identical, the components of the optical-force acting on the free beam are decoupled along the axis of symmetry. As a result, two dimensional optomechanical control of the central waveguide, like single-mode optical trapping, can be achieved. We also study non symmetric configurations, that can be used, for example, to tailor the position of the optical trap. Unlike other techniques that rely on buckling, multi-mode excitation or radiation-pressure, single-mode optomechanical-operation should help the realization of faster and simpler on-chip positioning of a single nanobeam since most of the parameters involved can be controlled with great precision.

Nanowire electrodes for high-density stimulation and measurement of neural circuits

Brain-machine interfaces (BMIs) that can precisely monitor and control neural activity will likely require new hardware with improved resolution and specificity. New nanofabricated electrodes with feature sizes and densities comparable to neural circuits may lead to such improvements. In this perspective, we review the recent development of vertical nanowire (NW) electrodes that could provide highly parallel single-cell recording and stimulation for future BMIs. We compare the advantages of these devices and discuss some of the technical challenges that must be overcome for this technology to become a platform for next-generation closed-loop BMIs.