Nanopatterned carbon films with engineered morphology by direct carbonization of UV-stabilized block copolymer films

Large-Area Uniform 1-nm-Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A "Next-Generation" Cu Diffusion Barrier?

A reliable method for preparing a conformal amorphous carbon (a-C) layer with a thickness of 1-nm-level, is tested as a possible Cu diffusion barrier layer for next-generation ultrahigh-density semiconductor device miniaturization. A polystyrene brush of uniform thickness is grafted onto 4-inch SiO₂ /Si wafer substrates with "self-limiting" chemistry favoring such a uniform layer. UV crosslinking and subsequent carbonization transforms this polymer film into an ultrathin a-C layer without pinholes or hillocks. The uniform coating of nonplanar regions or surfaces is also possible. The Cu diffusion "blocking ability" is evaluated by time-dependent dielectric breakdown (TDDB) tests using a metal-oxide-semiconductor (MOS) capacitor structure. A 0.82 nm-thick a-C barrier gives TDDB lifetimes 3.3× longer than that obtained using the conventional 1.0 nm-thick TaN_x diffusion barrier. In addition, this exceptionally uniform ultrathin polymer and a-C film layers hold promise for selective ion permeable membranes, electrically and thermally insulating films in electronics, slits of angstrom-scale thickness, and, when appropriately functionalized, as a robust ultrathin coating with many other potential applications.

Large-Area Fabrication of Vertical Silicon Nanotube Arrays via Toroidal Micelle Self-Assembly

We present a highly scalable, room-temperature strategy for fabricating vertical silicon nanotube arrays derived from a toroidal micelle pattern via a water vapor-induced block copolymer (BCP) self-assembly mechanism. A polystyrene-b-poly(ethylene oxide) (PS-b-PEO) BCP system can be self-assembled into toroidal micelle structures (diameter: 400-600 nm) on a PS-OH-modified substrate in a facile manner contrasting with other complex processes described in the literature. It was found that a minimum PS-b-PEO thickness of ∼86 nm is required for the toroidal self-assembly. Furthermore, a water vapor annealing treatment at room conditions (∼25 °C, 60 min) is shown to vastly enhance the ordering of micellar structures. A liquid-phase infiltration process was used to generate arrays of iron and nickel oxide nanorings. These oxide structures were used as templates for pattern transfer into the underlying silicon substrate via plasma etching, resulting in large-area 3D silicon nanotube arrays. The overall simplicity of this technique, as well as the wide potential versatility of the resulting metal structures, proves that such room-temperature synthesis routes are a viable pathway for complex nanostructure fabrication, with potential applicability in fields such as optics or catalysis.

Highly Aligned Carbon Nanowire Array by E-Field Directed Assembly of PAN-Containing Block Copolymers

Nanoscale engineering of carbon materials is immensely demanded in various scientific areas. We present highly ordered nitrogen-doped carbon nanowire arrays via block copolymer (BCP) self-assembly under an electric field. Large dielectric constant difference between distinct polymer blocks offers rapid alignment of PMMA-b-PAN self-assembled nanodomains under an electric field. Lithographic patterning of the graphene electrode as well as straightforward thermal carbonization of the PAN block creates well-aligned carbon nanowire device structures. Diverse carbon nanopatterns including radial and curved arrays can be readily assembled by the modification of electrode shapes. Our carbon nanopatterns bear a nitrogen content over 26%, highly desirable for NO₂ sensing, as the nitrogen element acts as adsorption sites for NO₂ molecules. Aligned carbon nanowire arrays exhibits a 6-fold enhancement of NO₂ sensitivity from a randomly aligned counterpart. Taking advantage of well-established benefits from device-oriented BCP nanopatterning, our approach proposes a viable route to highly ordered carbon nanostructures compatible to next-generation device architectures.

Hierarchically Porous Carbon Materials from Self-Assembled Block Copolymer/Dopamine Mixtures

Hierarchically porous carbon materials with interconnected frameworks of macro- and mesopores are desirable for electrochemical applications in biosensors, electrocatalysis, and supercapacitors. In this study, we report a facile synthetic route to fabricate hierarchically porous carbon materials by controlled macro- and mesophase separation of a mixture of polystyrene-block-poly(ethylene) and dopamine. The morphology of mesopores is tailored by controlling the coassembly of PS-b-PEO and dopamine in the acidic tetrahydrofuran-water cosolvent. HCl addition plays a critical role via enhancing the charge-dipole interactions between PEO and dopamine and suppressing the clustering and chemical reactions of dopamine in solution. As a result, subsequent drying can produce interpenetrated PS-b-PEO/DA mixtures without forming dopamine microsized crystallites. Dopamine oxidative polymerization induced by solvent annealing in NH₄OH vapor enables the formation of percolating macropores. Subsequent pyrolysis to selectively remove the PS-b-PEO template from the complex can produce hierarchically porous carbon materials with interconnected frameworks of macro- and mesopores when pyrolysis is implemented at a low temperature or when DA is a minor component.

Polymer-Based Synthetic Routes to Carbon-Based Metal-Free Catalysts

Carbons are increasingly important as possible alternatives to expensive metal catalysts owing to the wide range of chemical properties they can exhibit and the growing set of synthetic routes available to produce them. This progress report discusses the process of making catalytic carbons from polymeric precursors, focusing on mechanisms of carbonization and how the polymer structures and synthetic procedures affect the resulting carbons. In considering what is necessary to move laboratory catalytic carbons to industrial and commercial applications, the cost and complexity to produce them are a considerable challenge to overcome. Industrially produced carbons are typically made from biopolymers such as lignin while many of the catalytic carbons studied in literature are from synthetic polymers. Thus, studying polymer-derived carbons can provide insights into the carbonization process and the properties of catalytic carbons, which can subsequently be translated to improve biopolymer-derived carbons in an economical way. Aspects of polymer carbonization discussed include carbonization mechanisms, effects of crosslinkers, polymer microstructure, heteroatom control, and effects of nanostructuring.

A facile method to functionalize gold nano-tripods with high suspension stability in an aqueous environment

Here we aim to develop a facile emulsion-based method to prepare tripod gold nanoparticles (AuNPs) with high suspension stability in an aqueous environment. A gyroid-structured polymer template formed by the hydrolysis of a degradable block copolymer, polystyrene (PS)-b-poly(l-lactide), is used for the fabrication of AuNPs. Also, a successful emulsification of dichloromethane (DCM) in the aqueous phase is developed by using thiolated polyethylene glycol (PEG-SH) as the stabilizer. Subsequently, the nanohybrids of PS/Au can be fabricated by templated electroless plating, and then selectively dissolving in the DCM dispersive phase. Most interestingly, a dedicated process for the simultaneous release of the tripod AuNPs from the dissolution of PS associated with PEG-SH at the interface of the emulsion is achieved, giving PEG-SH-functionalized tripod AuNPs dispersed in the aqueous phase, which significantly improves the suspension stabilization of tripod AuNPs. The in situ temperature-programmed electrospray-differential mobility analysis provides a quantitative, statistical analysis of mobility diameter, dynamic shape factor, polydispersity, and colloidal stability.

Block-Copolymer-Templated Hierarchical Porous Carbon Nanostructures with Nitrogen-Rich Functional Groups for Molecular Sensing

The self-assembly of a block copolymer offers access to micellar nanodomains with tunable dimensions and structural diversity through control of such molecular parameters as the volume fraction and molecular mass. We fabricated hierarchical porous carbon (HPC) nanostructures with bundles of aggregated nanospheres and with nitrogen-rich functional groups through pyrolysis of diblock copolymer micelles in multiple layers. The resultant HPC nanostructures with a considerable specific surface area serve as an excellent substrate for surface-enhanced Raman spectroscopy (SERS), coupled with fluorescence quenching, for molecular sensing of physically adsorbed Rhodamine 6G. The abundant nitrogen atoms terminating on the surface of HPC nanostructures play a critical role in promoting a large Raman enhancement generated via a chemical mechanism. Most importantly, the observed enhancement factors show a clear dependence on the mesoscale porosity within HPC nanostructures, indicating that the chemical enhancement can be steadily tuned with control over the interfacial areas as a function of the nanosphere size. The unique architecture of HPC nanostructures based on the construction of a building block of a well-defined network of core-shell nanospheres provides a new design strategy for fabricating SERS substrates.

Redox Route from Inorganic Precursor Li2C2 to Nanopatterned Carbon

We present the synthesis route to carbon with hierarchical morphology on the nanoscale. The structures are generated using crystalline orthorhombic lithium carbide (Li₂C₂) as precursor with nanolamellar organization. Careful treatment by SnI₄ oxidizes carbon at the fairly low temperature of 80 °C to the elemental state and keeps intact the initial crystallite shape, the internal lamellar texture of particles, and the lamellae stacking. The reaction product is amorphous but displays in the microstructure parallel band-like arrangements with diameters in the range of 200-500 nm. These bands exhibit internal fine structure made up by thin strips of about 60 nm width running inclined with respect to the long axis of the band. The stripes of neighboring columns sometimes meet and give rise to arrow-like arrangements in the microstructure. This is an alternative preparation method of nanostructured carbon from an inorganic precursor by a chemical redox route without applying physical methods such as ion implantation, printing, or ablation. The polymerization reaction of the triple bond of acetylide anions gives rise to a network of carbon sp² species with statistically sized and distributed pores with diameters between 2 and 6 Å resembling zeolite structures. The pores show partially paracrystal-like ordering and may indicate the possible formation of carbon species derived from graphitic foams.

Tailoring Carbon Nanostructure with Diverse and Tunable Morphology by the Pyrolysis of Self-Assembled Lamellar Nanodomains of a Block Copolymer

The pyrolysis of a block copolymer thin film, the free surface of which was in contact with air or a capping layer of SiO₂, produced four carbon nanostructures. Thin films of a diblock copolymer having perpendicularly oriented lamellar nanodomains served as carbon and nitrogen precursors. Before pyrolysis, the lamellar nanodomains were cross-linked with UV irradiation under nitrogen gas (UVIN). Without a capping layer, pyrolysis caused a structural transformation from lamellar nanodomains to short carbon nanowires or to dropletlike nanocarbons in a row via Rayleigh instability, depending on the duration of pyrolysis. When capped with a layer of SiO₂ followed by pyrolysis, the lamellar nanodomains were converted to pod-like, spaghetti-like, or long worm-like carbon nanostructures. These carbon nanostructures were driven by controlling the surface or interface tension and the residual yield of solid carbonaceous species.

A hypercrosslinking-induced self-assembly strategy for preparation of advanced hierarchical porous polymers with customizable functional components

Advanced hierarchical porous polymers with customizable functional components were synthesized by development of a facile and efficient hypercrosslinking-induced self-assembly strategy.

Live Templates of a Supramolecular Block Copolymer for the Synthesis of Ordered Nanostructured TiO2 Films via Guest Exchange

In this work, we introduce a facile method based on host-guest chemistry to synthesize a range of nanostructured TiO₂ materials using supramolecular templates of a dendron-jacketed block copolymer (DJBCP). The DJBCP is composed of amphiphilic dendrons (4'-(3,4,5-tridodecyloxybenzoyloxy)benzoic acid, TDB) selectively incorporated into a P4VP block of polystyrene-block-poly(4-vinylpyridine) (PS-b-P4VP) via hydrogen bonding. The PS-b-P4VP host acts as a structure-directing template, while the guest molecules (TDB) assist the self-assembly nanostructures and zone-axis alignment, resulting in the nanostructured template of vertically oriented cylinders formed via successive phase transformations from Im3̅m to R3̅m to P6mm upon thermal annealing in the doctor-blade-cast film. The guest molecules subsequently direct the titania precursors into the P4VP domains of the templates via supramolecular guest exchange during immersion of the film in a designated precursor solution containing a P4VP-selective solvent. The subsequent UV irradiation step leads to the formation of PS-b-P4VP/TiO₂ hybrids. Finally, removal of the host template by calcination leaves behind mesoporous channels and makes sacrifices to be a carbon source for carbon-doping TiO₂ materials. Various TiO₂ nanoarchitectures, namely, vertical and wiggly micrometer-length channels, inverse opals, fingerprint-like channels, heterogeneous multilayers, and nanotubes, have been fabricated by highly tunable DJBCP nanostructures.

Directed Self-Assembly on Photo-Crosslinked Polystyrene Sub-Layers: Nanopattern Uniformity and Orientation

A photo-crosslinked polystyrene (PS) thin film is investigated as a potential guiding sub-layer for polystyrene-block-poly (methyl methacrylate) block copolymer (BCP) cylindrical nanopattern formation via topographic directed self-assembly (DSA). When compared to a non-crosslinked PS brush sub-layer, the photo-crosslinked PS sub-layer provided longer correlation lengths of the BCP nanostructure, resulting in a highly uniform DSA nanopattern with a low number of BCP dislocation defects. Depending on the thickness of the sub-layer used, parallel or orthogonal orientations of DSA nanopattern arrays were obtained that covered the entire surface of patterned Si substrates, including both trench and mesa regions. The design of DSA sub-layers and guide patterns, such as hardening the sub-layer by photo-crosslinking, nano-structuring on mesas, the relation between trench/mesa width, and BCP equilibrium period, were explored with a view to developing defect-reduced DSA lithography technology.

Liquid immersion thermal crosslinking of 3D polymer nanopatterns for direct carbonisation with high structural integrity

The direct pyrolytic carbonisation of polymer patterns has attracted interest for its use in obtaining carbon materials. In the case of carbonisation of nanopatterned polymers, the polymer flow and subsequent pattern change may occur in order to relieve their high surface energies. Here, we demonstrated that liquid immersion thermal crosslinking of polymer nanopatterns effectively enhanced the thermal resistance and maintained the structure integrity during the heat treatment. We employed the liquid immersion thermal crosslinking for 3D porous SU8 photoresist nanopatterns and successfully converted them to carbon nanopatterns while maintaining their porous features. The thermal crosslinking reaction and carbonisation of SU8 nanopatterns were characterised. The micro-crystallinity of the SU8-derived carbon nanopatterns was also characterised. The liquid immersion heat treatment can be extended to the carbonisation of various polymer or photoresist nanopatterns and also provide a facile way to control the surface energy of polymer nanopatterns for various purposes, for example, to block copolymer or surfactant self-assemblies.

Tailor-made dimensions of diblock copolymer truncated micelles on a solid by UV irradiation

We investigated the structural evolution of truncated micelles in ultrathin films of polystyrene-block-poly(2-vinylpyridine), PS-b-P2VP, of monolayer thickness on bare silicon substrates (SiOx/Si) upon UV irradiation in air- (UVIA) and nitrogen-rich (UVIN) environments. The structural evolution of micelles upon UV irradiation was monitored using GISAXS measurements in situ, while the surface morphology was probed using atomic force microscopy ex situ and the chemical composition using X-ray photoelectron spectroscopy (XPS). This work provides clear evidence for the interpretation of the relationship between the structural evolution and photochemical reactions in PS-b-P2VP truncated micelles upon UVIA and UVIN. Under UVIA treatment, photolysis and cross-linking reactions coexisted within the micelles; photolysis occurred mainly at the top of the micelles, whereas cross-linking occurred preferentially at the bottom. The shape and size of UVIA-treated truncated micelles were controlled predominantly by oxidative photolysis reactions, which depended on the concentration gradient of free radicals and oxygen along the micelle height. Because of an interplay between photolysis and photo-crosslinking, the scattering length densities (SLD) of PS and P2VP remained constant. In contrast, UVIN treatments enhanced the contrast in SLD between the PS shell and the P2VP core as cross-linking dominated over photolysis in the presence of nitrogen. The enhancement of the SLD contrast was due to the various degrees of cross-linking under UVIN for the PS and P2VP blocks.

Electrocatalytic activity of a nitrogen-enriched mesoporous carbon framework and its hybrids with metal nanoparticles fabricated through the pyrolysis of block copolymers

Small metal NPs at NEMCF exhibit a four-electron transfer pathway, a large kinetic current density and a small onset potential.

Conversion from self-assembled block copolymer nanodomains to carbon nanostructures with well-defined morphology

A SiO₂ capping layer appears to have two advantages – increased areal yields and an improved morphological fidelity.

Periodic layered inverse micelle multilayers with tunable photonic band gap: fabrication and application in dye-sensitized solar cells

Periodic organic-inorganic multilayer films are constructed by stepwise alternate build-up of UV-stabilized poly(styrene-block-vinylpyridine) block copolymer inverse micelles and poly(styrene-block-ethylene oxide) block copolymer layers containing inorganic moieties at the polar core blocks. The layered block copolymer inverse micelle films show strong reflective color and well-defined photonic stop bands in the entire wavelength region from visible to near IR, which can be fine-tuned by controlling the inner architectures, i.e., the periodic size of the layered structure. The layered block copolymer films are integrated into the back-side of counter electrodes as a light reflection layer and thereby an enhancement ratio of ∼11% in the cell efficiency is achieved, which can be attributed to the increased light harvesting by the sensitized dye molecules. Tailoring the inner structure of the photonic band gap multilayers, the wavelength of reflected light can be adjusted to the wavelength of dye absorption, leading to a noticeable enhancement in photocurrent and power conversion efficiency.

Configuration-controlled Au nanocluster arrays on inverse micelle nano-patterns: versatile platforms for SERS and SPR sensors

Nanopatterned 2-dimensional Au nanocluster arrays with controlled configuration are fabricated onto reconstructed nanoporous poly(styrene-block-vinylpyridine) inverse micelle monolayer films. Near-field coupling of localized surface plasmons is studied and compared for disordered and ordered core-centered Au NC arrays. Differences in evolution of the absorption band and field enhancement upon Au nanoparticle adsorption are shown. The experimental results are found to be in good agreement with theoretical studies based on the finite-difference time-domain method and rigorous coupled-wave analysis. The realized Au nanopatterns are exploited as substrates for surface-enhanced Raman scattering and integrated into Kretschmann-type SPR sensors, based on which unprecedented SPR-coupling-type sensors are demonstrated.

Nanostructured metal/carbon hybrids for electrocatalysis by direct carbonization of inverse micelle multilayers

A synthetic strategy for the fabrication of graphitic carbon nanomaterials containing highly dispersed arrays of metal nanoparticles is reported. This synthetic strategy involves successive deposition of inverse micelle monolayers containing a metal precursor and reduction of the latter, followed by direct carbonization of the obtained multilayer structure of inverse micelles containing metal nanoparticles. Thus, a "direct-carbonization" concept, in which the block copolymer simultaneously serves as soft template and as carbon source, was combined with a multilayer buildup protocol. The inner architecture of the multilayer structures consisting of carbon and metal nanoparticles was studied by X-ray reflectivity, grazing incidence small-angle X-ray scattering, and cross-sectional transmission electron microscopy imaging. The hexagonal near ordering of the metal nanoparticles in the block copolymer micelle multilayers was by and large conserved after carbonization. The resulting carbon structures containing multilayers of highly dispersed metal nanoparticles exhibit superior electrocatalytic activity in formic acid and methanol oxidation, suggesting that they are promising electrode materials for fuel cells.

Water-dispersible, uniform nanospheres by heating-enabled micellization of amphiphilic block copolymers in polar solvents

Uniform nanospheres with tunable size down to 30 nm were prepared simply by heating amphiphilic block copolymers in polar solvents. Unlike reverse micelles prepared in nonpolar, oily solvents, these nanospheres have a hydrophilic surface, giving them good dispersibility in water. Furthermore, they are present as individual, separated, rigid particles upon casting from the solution other than continuous thin films of merged micelles cast from micellar solution in nonpolar solvents. These nanospheres were generated by a heating-enabled micellization process in which the affinity between the solvent and the polymer chains as well as the segmental mobility of both hydrophilic and hydrophobic blocks was enhanced, triggering the micellization of the glassy copolymers in polar solvents. This heating-enabled micellization produces purely well-defined nanospheres without interference of other morphologies. The micelle sizes and corona thickness are tunable mainly by changing the lengths of the hydrophobic and hydrophilic blocks, respectively. The heating-enabled micellization route for the preparation of polymeric nanospheres is extremely simple, and is particularly advantageous in producing rigid, micellar nanospheres from block copolymers with long glassy, hydrophobic blocks which are otherwise difficult to prepare with high efficiency and purity. Furthermore, encapsulation of hydrophobic molecules (e.g., dyes) into micelle cores could be integrated into the heating-enabled micellization, leading to a simple and effective process for dye-labeled nanoparticles and drug carriers.

An unconventional route to high-efficiency dye-sensitized solar cells via embedding graphitic thin films into TiO2 nanoparticle photoanode

Graphitic thin films embedded with highly dispersed titanium dioxide (TiO(2)) nanoparticles were incorporated for the first time into the conventional dye-sensitized solar cells (DSSCs), resulting in a remarkably improved cell efficiency due to its superior electron conductivity. Massively ordered arrays of TiO(2) dots embedded in carbon matrix were fabricated via UV-stabilization of polystyrene-block-poly(4-vinylpyridine) films containing TiO(2) precursors followed by direct carbonization. For dye-sensitized TiO(2) based solar cells containing carbon/TiO(2) thin layers at both sides of pristine TiO(2) layer, an increase of 62.3% [corrected] in overall power conversion efficiency was achieved compared with neat TiO(2)-based DSSCs. Such a remarkably improved cell efficiency was ascribed to the superior electron conductivity and extended electron lifetime elucidated by cyclic voltammetry and impedance spectroscopy.

An emerging pore-making strategy: confined swelling-induced pore generation in block copolymer materials

Block copolymers (BCPs) composed of two or more thermodynamically incompatible homopolymers self-assemble into periodic microdomains. Exposing self-assembled BCPs with solvents selective to one block causes a swelling of the domains composed of this block. Strong swelling in the confinement imposed by the matrix of the other glassy block leads to well-defined porous structures via morphology reconstruction. This confined swelling-induced pore-making process has emerged recently as a new strategy to produce porous materials due to synergic advantages that include extreme simplicity, high pore regularity, involvement of no chemical reactions, no weight loss, reversibility of the pore forming process, etc. The mechanism, kinetics, morphology, and governing parameters of the confined swelling-induced pore-making process in BCP thin films are discussed, and the main applications of nanoporous thin films in the fields of template synthesis, surface patterning, and guidance for the areal arrangements of nanomaterials and biomolecules are summarized. Recent, promising results of extending this mechanism to produce BCP nanofibers or nanotubes and bulk materials with well-defined porosity, which makes this strategy also attractive to researchers outside the nanocommunity, are also presented.

Swelling-induced morphology reconstruction in block copolymer nanorods: kinetics and impact of surface tension during solvent evaporation

Nanoscopic domain structures of BCP nanorods can be converted into well-defined mesopore systems by swelling the BCP minority component with a selective solvent at temperatures below the bulk glass transition temperature of the nonswelling matrix. The initial stage of this process involves rapid morphology reconstruction of the nonswelling majority domains to accommodate the increased volume of the swelling minority domains caused by rapid solvent uptake. Morphology reconstruction slows down once entropic restoring forces of the swelling chains impede further uptake of swelling agent. Upon evaporation of the swelling agent, mesopores form in place of the swollen domains as the swollen minority blocks undergo entropic relaxation while intermediate nonequilibrium morphologies in the BCP nanorods are fixated by the reconstructed majority component. The surface area of mesopores developing when swollen cylindrical minority domains collapse may be minimized by the growth of Rayleigh instabilities. Depending on swelling temperature, swelling agent, and BCP architecture, BCP nanorods with one or several cylindrical channels undulated or uniform in diameter running along their long axes, linear strings of spherical cavities, and continuous mesopore systems can be obtained.

Responsive micellar films of amphiphilic block copolymer micelles: control on micelle opening and closing

We reported the deliberate control on the micelle opening and closing of amphiphilic polystyrene-block-poly(2-vinylpyridine) (PS-b-P2VP) micellar films by exposing them to selective solvents. We first treated the micellar films with polar solvents including ethanol and water (pH = 4, 8, and 12) that have different affinities to P2VP. We observed opening of the micelles in all the cases. Both the size of opened pores and the opening rate are dependent on the solvency of different solvents for P2VP. We then explored the closing behavior of the opened micelles using solvents having different affinities to PS. We found that the opened micelles were recovered to their initial closed micelle forms. The recovery was accompanied by a slow micelle disassociation process which gradually reduced the micelle size. The rates of the micelle closing and disassociation are also dependent on the solvency of different solvents for PS.

Nanostructure formation via print diffusion etching through block copolymer templates

The present work demonstrates nanoscale etching of silicon with standard aqueous fluoride etchants running through the hydrophilic domains of a vertically aligned copolymer template. The delivery of etchants was unprecedentedly achieved by an etchant-solution-saturated agarose gel stamp, a technique we call print diffusion etching. Three-dimensional nanoprotrusion features with controllable shapes and sizes (about 20 nm) were formed. To prove that the block copolymers serve to direct the silicon surface morphology by controlling the spatial location of the reaction as well as concentration of reagents, the same etching steps both on silicon and PS-b-PEO (polystyrene-block-polyethyleneoxide) templates were carried out for comparison. The mechanism of the nanoprotrusion formation was elucidated, and the morphology evolution vs. etching time studied.