Recent advances in nanorobotic manipulation inside scanning electron microscopes

Characteristics of Carbon Nanotube Cold Cathode Triode Electron Gun Driven by MOSFET Working at Subthreshold Region

The carbon nanotube cold cathode has important applications in the X-ray source, microwave tube, neutralizer, etc. In this study, the characteristics of carbon nanotube (CNT) electron gun in series with metal-oxide-semiconductor field-effect transistor (MOSFET) were studied. CNTs were prepared on a stainless steel substrate by chemical vapor deposition and assembled with a mesh gate to form an electron gun. The anode current of the electron gun can be accurately regulated by precisely controlling the MOSFET gate voltage in the subthreshold region from 1 to 40 µA. The current stability measurements show the cathode current fluctuation was 0.87% under 10 h continuous operation, and the corresponding anode current fluctuation was 2.3%. The result has demonstrated that the MOSFET can be applied for the precise control of the CNT electron gun and greatly improve current stability.

Robotic Nanomanipulation Based on Spatiotemporal Modulation of Optical Gradients

Robotic nanomanipulation emerges as a cutting-edge technique pivotal for in situ nanofabrication, advanced sensing, and comprehensive material characterization. In this study, we develop an optical robotic platform (ORP) for the dynamic manipulation of colloidal nanoparticles (NPs). The ORP incorporates a human-in-the-loop control mechanism enhanced by real-time visual feedback. This feature enables the generation of custom optical landscapes with adjustable intensity and phase configurations. Based on the ORP, we achieve the parallel and reconfigurable manipulation of multiple NPs. Through the application of spatiotemporal phase gradient-reversals, our platform demonstrates capabilities in trapping, binding, rotating, and transporting NPs across custom trajectories. This presents a previously unidentified paradigm in the realm of in situ nanomanipulation. Additionally, the ORP facilities a "capture-and-print" assembly process, utilizing a strategic interplay of phase and intensity gradients. This process operates under a constant laser power setting, streamlining the assembly of NPs into any targeted configuration. With its precise positioning and manipulation capabilities, underpinned by the spatiotemporal modulation of optical gradients, the ORP will facilitate the development of colloid-based sensors and on-demand fabrication of nanodevices.

Recent advances in targeted drug delivery for the treatment of glioblastoma

Glioblastoma multiforme (GBM) is one of the highly malignant brain tumors characterized by significant morbidity and mortality. Despite the recent advancements in the treatment of GBM, major challenges persist in achieving controlled drug delivery to tumors. The management of GBM poses considerable difficulties primarily due to unresolved issues in the blood-brain barrier (BBB)/blood-brain tumor barrier (BBTB) and GBM microenvironment. These factors limit the uptake of anti-cancer drugs by the tumor, thus limiting the therapeutic options. Current breakthroughs in nanotechnology provide new prospects concerning unconventional drug delivery approaches for GBM treatment. Specifically, swimming nanorobots show great potential in active targeted delivery, owing to their autonomous propulsion and improved navigation capacities across biological barriers, which further facilitate the development of GBM-targeted strategies. This review presents an overview of technological progress in different drug administration methods for GBM. Additionally, the limitations in clinical translation and future research prospects in this field are also discussed. This review aims to provide a comprehensive guideline for researchers and offer perspectives on further development of new drug delivery therapies to combat GBM.

A 3D printed tensile testing system for micro-scale specimens

Mechanical property characterization of micro-scale material systems, such as free-standing films or small diameter wires (<20 µm), often requires expensive, specialized test systems. Conventional tensile test systems are usually designed for millimeter scale specimens with the force sensing capability of >1N while microdevice-based testers are intended for micro-/nano-scale specimens operating within a much smaller force range of <10 mN. This disparity leaves a technology gap in reliable and cost-effective characterization methods for specimens at the intermediate scale. In this research, we introduce the cost-effective and all-in-one tensile testing system with a built-in force sensor, self-aligning mechanisms, and loading frames. Owing to the advantages of 3D printing technologies, the ranges of force measurement (0.001-1 N) and displacement (up to tens of millimeters) of our 3D printed tensile tester can be readily tailored to suit specific material dimension and types. We have conducted a finite element simulation to identify the potential sources of the measurement error during tensile testing and addressed the dominant errors by simply modifying the dimension/design of the loading frames. As a proof-of-concept demonstration, we have characterized fine copper (Cu) wires with 10-25 µm diameters by the 3D printed tensile tester and confirmed that the measured mechanical properties match with the known values of bulk Cu. Our work shows that the proposed 3D printed tensile testing system offers a cost-efficient and easily accessible testing method for accurate mechanical characterization of specimens with cross-sectional dimensions of the order of tens of micrometers.

Electrical Activity and Extremes of Individual Suspended ZnO Nanowires for 3D Nanoelectronic Applications

We explored the electrical activity and extremes inside individual suspended zinc oxide (ZnO) nanowires (NWs) (diameter: 50-550 nm, length: 5-50 μm) subjected to high forward bias-induced Joule heating using two-terminal current-voltage measurements. NWs were isolated using a reproducible nanometrology technique, employing a nanomanipulator inside a scanning electron microscope. Schottky behavior is observed between installed tips and ZnO NW. The suspended ZnO NWs exhibited an average electrical resistivity ρ (approximately 2.3 × 10-2 Ω cm) and a high electron density n (exceeding 1.89 × 1018 cm-3), comparable to that of InP NWs, GaN NWs, and InAs NWs (1018∼1019 cm-3), suggesting the potential to drive advancements in high-performance NW devices. A maximum breakdown current density (JBD) of ∼0.14 MA/cm2 and a maximum breakdown power density (PBD) of 6.93 mW/μm3 were obtained, both of which are higher than substrate-bound ZnO NWs and consistent with previously reported results obtained from probed ZnO NWs grown vertically on the substrate. Moreover, we discovered that NWs experienced thermal breakdown due to Joule heating and exploited this breakdown mechanism to further investigate the temperature distribution along the ZnO NWs, as well as its dependence on the electrical properties and thermal conductance of contact electrodes. Thermal conductance was determined to be ∼0.4 nW K-1 and ∼1.66 pW K-1 at the tungsten(W)-ZnO NW and platinum(Pt)-ZnO NW contacts, respectively. In addition, we measured the elastic modulus (130-171 GPa), which closely approximated bulk values. We also estimated the nanoindentation hardness to be between 5 and 10 GPa. This work provides valuable insights into the electrical activity and extreme mechanisms, thus providing a better understanding of the potentials and limitations associated with utilizing suspended NWs in 3D nanodevices.

Electrochemical grippers based on the tuning of surface forces for applications in micro- and nanorobotics

Existing approaches to robotic manipulation often rely on external mechanical devices, such as hydraulic and pneumatic devices or grippers. Both types of devices can be adapted to microrobots only with difficulties and for nanorobots not all. Here, we present a fundamentally different approach that is based on tuning the acting surface forces themselves rather than applying external forces by grippers. Tuning of forces is achieved by the electrochemical control of an electrode's diffuse layer. Such electrochemical grippers can be integrated directly into an atomic force microscope, allowing for 'pick and place' procedures typically used in macroscopic robotics. Due to the low potentials involved, small autonomous robots could as well be equipped with these electrochemical grippers that will be particularly useful in soft robotics as well as nanorobotics. Moreover, these grippers have no moving parts and can be incorporated in new concepts for actuators. The concept can easily be scaled down and applied to a wide range of objects, such as colloids, proteins, and macromolecules.

Optically and electrically invariant multi-color single InGaN/GaN nanowire light-emitting diodes on a silicon substrate under mechanical compression

Recent years have seen immense advances in electroluminescent InGaN-based light-emitting diodes (LEDs) that may revolutionize lighting and display technologies. Driven by the need for the development of submicrometer-sized, multicolor light sources monolithically integrated on a single chip, it is necessary to accurately characterize the size-dependent electroluminescence (EL) properties of selective-area grown single InGaN-based nanowire (NW) LEDs. Moreover, InGaN-based planar LEDs generally undergo; external mechanical compression induced by the packaging process which could potentially degrade the emission efficiency this further motivates us to investigate the size-dependent EL properties of single InGaN-based NW LEDs on a Si substrate under external mechanical compression. In this work, we perform opto-electro-mechanical characterization of single InGaN/GaN NWs using a scanning electron microscopy (SEM)-based multi-physical characterization technique. We first tested the size-dependent EL properties of selective-area grown single InGaN/GaN NWs on a Si substrate with a high injection current density up to 12.99 kA cm^-2. In addition, the effect of external mechanical compression on the EL properties of the single NWs was investigated. Stable EL properties (no degradation of EL peak intensity and no peak wavelength shift) and electrical characteristics have been observed by applying a 5 μN compressive force to single NWs with different diameters. The results confirm no degradation of the NW light output with the applied stress (up to 62.2 MPa) and demonstrate the superior optical and electrical robustness of single InGaN/GaN NW LEDs under mechanical compression.

Pick-up strategies for and electrical characterization of ZnO nanowires with a SEM-based nanomanipulator

Because of their unique mechanical and electrical properties, zinc oxide (ZnO) nanowires are used widely in microscopic and nanoscopic devices and structures, but characterizing them remains challenging. In this paper, two pick-up strategies are proposed for characterizing the electrical properties of ZnO nanowires using SEM equipped with a nanomanipulator. To pick up nanowires efficiently, direct sampling is compared with electrification fusing, and experiments show that direct sampling is more stable while electrification fusing is more efficient. ZnO nanowires have cut-off properties, and good Schottky contact with the tungsten probes was established. In piezoelectric experiments, the maximum piezoelectric voltage generated by an individual ZnO nanowire was 0.07 V, and its impedance decreased with increasing input signal frequency until it became stable. This work offers a technical reference for the pick-up and construction of nanomaterials and nanogeneration technology.

MiGriBot: A miniature parallel robot with integrated gripping for high-throughput micromanipulation

Although robotic micromanipulation using microtweezers has been widely explored, the current manipulation throughput hardly exceeds one operation per second. Increasing the manipulation throughput is thus a key factor for the emergence of robotized microassembly industries. This article presents MiGriBot (Millimeter Gripper Robot), a miniaturized parallel robot with a configurable platform and soft joints, designed to perform pick-and-place operations at the microscale. MiGriBot combines in a single robot the benefits of a parallel kinematic architecture with a configurable platform and the use of soft joints at the millimeter scale. The configurable platform of the robot provides an internal degree of freedom that can be used to actuate microtweezers using piezoelectric bending actuators located at the base of the robot, which notably reduces the robot's inertia. The soft joints make it possible to miniaturize the mechanism and to avoid friction. These benefits enable MiGriBot to reach a throughput of 10 pick-and-place cycles per second of micrometer-sized objects, with a precision of 1 micrometer.

Diamagnetically levitated nanopositioners with large-range and multiple degrees of freedom

Precision positioning stages are often central to science and technology at the micrometer and nanometer length scales. Compact, multi-degree-of-freedom stages with large dynamic range are especially desirable, since they help to improve the throughput and versatility in manipulation without introducing spatial constraints. Here, we report compact diamagnetically levitated stages, which employ dual-sided actuation to achieve large-range, six degrees-of-freedom positioning. Dual-sided actuation is demonstrated to enable trapping a magnet array in 3D, with independent control of the trap stiffness about two axes, independent control of forces in 3D and torque about 2 axes. A simplified model is proposed to directly relate these physical quantities to the necessary actuation currents. Experimentally, we demonstrate six degrees-of-freedom positioning with low cross-axis motion, large range and nanometer-scale resolution. In particular, here we show linear motion range of 5 mm with positioning precision better than 1.88 nm, and angular motion range of 1.1 radian with a resolution of 50 micro-radian. With the volume of the stage being between 10-20 cm³, its utility as a compact nano-positioner is showcased by using it to automatically replace the tip of an atomic force microscope probe.

Precision positioning stages are often central to science and technology at the micrometer and nanometer length scales. Here, the authors report compact, diamagnetically levitated positioning stages that achieve large-range, six degrees-of-freedom positioning with nanometer-scale precision.

Investigating the Morphology and Mechanics of Biogenic Hierarchical Materials at and below Micrometer Scale

Investigating and understanding the intrinsic material properties of biogenic materials, which have evolved over millions of years into admirable structures with difficult to mimic hierarchical levels, holds the potential of replacing trial-and-error-based materials optimization in our efforts to make synthetic materials of similarly advanced complexity and properties. An excellent example is biogenic silica which is found in the exoskeleton of unicellular photosynthetic algae termed diatoms. Because of the complex micro- and nanostructures found in their exoskeleton, determining the intrinsic mechanical properties of biosilica in diatoms has only partly been accomplished. Here, a general method is presented in which a combination of in situ deformation tests inside an SEM with a realistic 3D model of the frustule of diatom Craspedostauros sp. (C. sp.) obtained by electron tomography, alongside finite element method (FEM) simulations, enables quantification of the Young’s modulus (E = 2.3 ± 0.1 GPa) of this biogenic hierarchical silica. The workflow presented can be readily extended to other diatom species, biominerals, or even synthetic hierarchical materials.

A stick-slip linear actuator with high speed and nano-resolution by resonance/non-resonance hybrid driving

To achieve high speed, nano-resolution, and large stroke, a resonance/non-resonance hybrid piezoelectric stick-slip actuator with a lever-type flexure hinge (LTFH-PSSA) is proposed in this work. The actuator can achieve high speed and large stroke in the resonance mode by the stick-slip working principle and achieve nano-resolution in the non-resonant mode by the direct drive working principle. The excitation electrical signals used in the two working modes are the sine waveform and half-sine waveform, respectively. Compared with the traditional sawtooth waveform, the excitation signal of the sine and half-sine waveforms have no sudden change of voltage, which are more conducive to reduce the impact and vibration of the system. Moreover, a series of static analysis and modal analysis of the stator are carried out by the finite element method. The experimental system is built to test the output characteristics of the LTFH-PSSA. In the resonance state by the stick-slip working principle, the impedance analysis and frequency characteristic test of the LTFH-PSSA are carried out, which states that the tested resonance frequency agrees well with the simulated ones. When the locking force, the voltage, and the frequency are 2 N, 100 V_p-p, and 1850 Hz, the speed of the LTFH-PSSA is up to 52.71 mm/s, and the backward motion is suppressed completely as well. In the non-resonance state, the resolution can reach 2.19 nm and 2.69 nm in the forward and backward motion, respectively. So far, the proposed actuator ranks first in speed and resolution among all reported LTFH-PSSAs.

Toward Totally Defined Nanocatalysis: Deep Learning Reveals the Extraordinary Activity of Single Pd/C Particles

Homogeneous catalysis is typically considered "well-defined" from the standpoint of catalyst structure unambiguity. In contrast, heterogeneous nanocatalysis often falls into the realm of "poorly defined" systems. Supported catalysts are difficult to characterize due to their heterogeneity, variety of morphologies, and large size at the nanoscale. Furthermore, an assortment of active metal nanoparticles examined on the support are negligible compared to those in the bulk catalyst used. To solve these challenges, we studied individual particles of the supported catalyst. We made a significant step forward to fully characterize individual catalyst particles. Combining a nanomanipulation technique inside a field-emission scanning electron microscope with neural network analysis of selected individual particles unexpectedly revealed important aspects of activity for widespread and commercially important Pd/C catalysts. The proposed approach unleashed an unprecedented turnover number of 10⁹ attributed to individual palladium on a nanoglobular carbon particle. Offered in the present study is the Totally Defined Catalysis concept that has tremendous potential for the mechanistic research and development of high-performance catalysts.

Simulation of Optical Nano-Manipulation with Metallic Single and Dual Probe Irradiated by Polarized Near-Field Laser

Nano-manipulation technology, as a kind of “bottom-up” tool, has exhibited an excellent capacity in the field of measurement and fabrication on the nanoscale. Although variety manipulation methods based on probes and microscopes were proposed and widely used due to locating and imaging with high resolution, the development of non-contacted schemes for these methods is still indispensable to operate small objects without damage. However, optical manipulation, especially near-field trapping, is a perfect candidate for establishing brilliant manipulation systems. This paper reports about simulations on the electric and force fields at the tips of metallic probes irradiated by polarized laser outputted coming from a scanning near-field optical microscope probe. Distributions of electric and force field at the tip of a probe have proven that the polarized laser can induce nanoscale evanescent fields with high intensity, which arouse effective force to move nanoparticles. Moreover, schemes with dual probes are also presented and discussed in this paper. Simulation results indicate that different combinations of metallic probes and polarized lasers will provide diverse near-field and corresponding optical force. With the suitable direction of probes and polarization direction, the dual probe exhibits higher trapping force and wider effective wavelength range than a single probe. So, these results give more novel and promising selections for realizing optical manipulation in experiments, so that distinguished multi-functional manipulation systems can be developed.

In Situ Manipulation and Micromechanical Characterization of Diatom Frustule Constituents Using Focused Ion Beam Scanning Electron Microscopy

Biocomposite structures are difficult to characterize by bulk approaches due to their morphological complexity and compositional heterogeneity. Therefore, a versatile method is required to assess, for example, the mechanical properties of geometrically simple parts of biocomposites at the relevant length scales. Here, it is demonstrated how a combination of Focused Ion Beam Scanning Electron Microscopy (FIB-SEM) and micromanipulators can be used to isolate, transfer, and determine the mechanical properties of frustule constituents of diatom Thalassiosira pseudonana (T.p.). Specifically, two parts of the diatom frustule, girdle bands and valves, are separated by FIB milling and manipulated using a sharp tungsten tip without compromising their physical or chemical integrity. In situ mechanical studies on isolated girdle bands combined with Finite Element Method (FEM) simulations, enables the quantitative assessment of the Young's modulus of this biosilica; E = 40.0 GPa. In addition, the mechanical strength of isolated valves could be measured by transferring and mounting them on top of premilled holes in the sample support. This approach may be extended to any hierarchical biocomposite material, regardless of its chemical composition, to isolate, transfer, and investigate the mechanical properties of selected constituents or specific regions.

Shape memory effect nanotools for nano-creation: examples of nanowire-based devices with charge density waves

Nanotweezers based on the shape memory effect have been developed and tested. In combination with a commercial nanomanipulator, they allow 3D nanoscale operation controlled in a scanning electron microscope. Here we apply the tweezers for the fabrication of nanostructures based on whiskers of NbS₃, a quasi one-dimensional compound with room-temperature charge density wave (CDW). The nanowhiskers were separated without damage from the growth batch, an entangled array, and safely transferred to a substrate with a preliminary deposited Au film. The contacts were fabricated with Pt sputtering on top of the whisker and the film. The high degree of synchronization of the sliding CDW under a RF field with a frequency up to 600 MHz confirms the high quality of the contacts and of the sample structure after the manipulations. The proposed technique paves the way to novel type micro- and nanostructures fabrication and their various applications.

Development of a flexure-based nano-actuator for high-frequency high-resolution directional sensing with atomic force microscopy

Scanning probe microscopies typically rely on the high-precision positioning of a nanoscale probe in order to gain local information about the properties of a sample. At a given location, the probe is used to interrogate a minute region of the sample, often relying on dynamical sensing for improved accuracy. This is the case for most force-based measurements in atomic force microscopy (AFM) where sensing occurs with a tip oscillating vertically, typically in the kHz to MHz frequency regime. While this approach is ideal for many applications, restricting dynamical sensing to only one direction (vertical) can become a serious limitation when aiming to quantify the properties of inherently three-dimensional systems, such as a liquid near a wall. Here, we present the design, fabrication, and calibration of a miniature high-speed scanner able to apply controlled fast and directional in-plane vibrations with sub-nanometer precision. The scanner has a resonance frequency of ∼35 kHz and is used in conjunction with a traditional AFM to augment the measurement capabilities. We illustrate its capabilities at a solid-liquid interface where we use it to quantify the preferred lateral flow direction of the liquid around every sample location. The AFM can simultaneously acquire high-resolution images of the interface, which can be superimposed with the directional measurements. Examples of sub-nanometer measurements conducted with the new scanner are also presented.

Accurate localization microscopy by intrinsic aberration calibration

A standard paradigm of localization microscopy involves extension from two to three dimensions by engineering information into emitter images, and approximation of errors resulting from the field dependence of optical aberrations. We invert this standard paradigm, introducing the concept of fully exploiting the latent information of intrinsic aberrations by comprehensive calibration of an ordinary microscope, enabling accurate localization of single emitters in three dimensions throughout an ultrawide and deep field. To complete the extraction of spatial information from microscale bodies ranging from imaging substrates to microsystem technologies, we introduce a synergistic concept of the rigid transformation of the positions of multiple emitters in three dimensions, improving precision, testing accuracy, and yielding measurements in six degrees of freedom. Our study illuminates the challenge of aberration effects in localization microscopy, redefines the challenge as an opportunity for accurate, precise, and complete localization, and elucidates the performance and reliability of a complex microelectromechanical system.

Recent Advances on SEM-Based In Situ Multiphysical Characterization of Nanomaterials

Functional nanomaterials possess exceptional mechanical, electrical, and optical properties which have significantly benefited their diverse applications to a variety of scientific and engineering problems. In order to fully understand their characteristics and further guide their synthesis and device application, the multiphysical properties of these nanomaterials need to be characterized accurately and efficiently. Among various experimental tools for nanomaterial characterization, scanning electron microscopy- (SEM-) based platforms provide merits of high imaging resolution, accuracy and stability, well-controlled testing conditions, and the compatibility with other high-resolution material characterization techniques (e.g., atomic force microscopy), thus, various SEM-enabled techniques have been well developed for characterizing the multiphysical properties of nanomaterials. In this review, we summarize existing SEM-based platforms for nanomaterial multiphysical (mechanical, electrical, and electromechanical) in situ characterization, outline critical experimental challenges for nanomaterial optical characterization in SEM, and discuss potential demands of the SEM-based platforms to characterizing multiphysical properties of the nanomaterials.

XYZ Micropositioning System Based on Compliance Mechanisms Fabricated by Additive Manufacturing

This article presents the design and implementation of a micropositioning system actuated by three piezoelectric stacks to control its displacements on XYZ axes. The use of conventional piezoelectric buzzers allows us to reduce fabrication costs. The working or mobile platform is the base for objects that will be manipulated, for example, in automated assembling. The micropositioner can be integrated into a microgripper to generate a complete manipulation system. For micropositioner fabrication, at first, Polylactic Acid (PLA) was chosen as the structural material, but after simulation and some experimental tests performed with a micropositioner made of Acrylonitrile Butadiene Styrene (ABS), it showed larger displacement (approx. 20%) due to its lower stiffness. A third test was performed with a positioner made with Polyethylene Terephthalate Glycol (PETG), obtaining an intermediate performance. The originality of this work resides in the geometrical arrangement based on thermoplastic polymer compliance mechanisms, as well as in the use of additive manufacturing to fabricate it. An experimental setup was developed to carry out experimental tests. ANSYS™ was used for simulation.

Mechanical/Electrical Characterization of ZnO Nanomaterial Based on AFM/Nanomanipulator Embedded in SEM

ZnO nanomaterials have been widely used in micro/nano devices and structure due to special mechanical/electrical properties, and its characterization is still deficient and challenging. In this paper, ZnO nanomaterials, including nanorod and nanowire are characterized by atomic force microscope (AFM) and nanomanipulator embedded in scanning electron microscope (SEM) respectively, which can manipulate and observe simultaneously, and is efficient and cost effective. Surface morphology and mechanical properties were observed by AFM. Results showed that the average Young's modulus of ZnO nanorods is 1.40 MPa and the average spring rate is 0.08 N/m. Electrical properties were characterized with nanomanipulator, which showed that the ZnO nanomaterial have cut-off characteristics and good schottky contact with the tungsten probes. A two-probe strategy was proposed for piezoelectric property measurement, which is easy to operate and adaptable to multiple nanomaterials. Experiments showed maximum voltage of a single ZnO nanowire is around 0.74 mV. Experiment criteria for ZnO manipulation and characterization were also studied, such as acceleration voltage, operation duration, sample preparation. Our work provides useful references for nanomaterial characterization and also theoretical basis for nanomaterials application.

Progress in Nanorobotics for Advancing Biomedicine

Nanorobotics, which has long been a fantasy in the realm of science fiction, is now a reality due to the considerable developments in diverse fields including chemistry, materials, physics, information and nanotechnology in the past decades. Not only different prototypes of nanorobots whose sizes are nanoscale are invented for various biomedical applications, but also robotic nanomanipulators which are able to handle nano-objects obtain substantial achievements for applications in biomedicine. The outstanding achievements in nanorobotics have significantly expanded the field of medical robotics and yielded novel insights into the underlying mechanisms guiding life activities, remarkably showing an emerging and promising way for advancing the diagnosis & treatment level in the coming era of personalized precision medicine. In this review, the recent advances in nanorobotics (nanorobots, nanorobotic manipulations) for biomedical applications are summarized from several facets (including molecular machines, nanomotors, DNA nanorobotics, and robotic nanomanipulators), and the future perspectives are also presented.

Vertical distance from shading in the SEM

Vertical data collected by Scanning Electron Microscopy (SEM) are important for sample characterization, 3D reconstruction, and flex manipulation. Traditional methods are limited by the extent to which the probe obstructs the view of the sample along the vertical axis. Herein, we propose a novel SEM microprobe for measuring the vertical distance between the probe and substrate. To form a semi-transparent hole that is set as the objective regions in processing of the SEM images, an epoxy film was embedded in the through-hole at the tip of the microforce probe with 3D printing. The film can be modified with a focused ion beam (FIB) system. The motion of the modified probe along the vertical axis is controlled by a nanopositioner and the process is recorded by taking a real-time SEM video. The change in gray contrast caused by the semi-transparent epoxy is corrected during the SEM image processing of the video. By comparing the gray contrast with the nanopositioner motion data, we find that the change in gray contrast can provide feedback for adjusting the displacement between the probe and the substrate, and the resolution can be up to 100 nm. We propose a novel and simple method for measuring vertical distances in the SEM, which is useful for in-situ measurements and nanomanipulations.

A Sub-Micron Spherical Atomic Force Microscopic Tip for Surface Measurements

We report a novel methodology for fabricating a sub-micron spherical atomic force microscope (AFM) tip controllably-a silicon sub-micron sphere atop microcantilevers, which is desired for precise nanoscale tribology measurements, biological studies, and colloid science. Silicon sub-micron spheres are fabricated through swelling of single-crystal silicon with proper high-energy helium ion dosing, a traditionally undesired phenomenon known in helium ion microscopy. Silicon sub-micron spheres with diameters from 100 nm to 1 μm are demonstrated, and the placement of silicon sub-micron spheres can be as accurate as 10 nm or even below. This AFM tip demonstrates robust measurements during friction tests on graphene/silicon oxide substrates for more than 10 000 cycles. This AFM tip overcomes a critical challenge of reducing the size of spherical AFM tips from the micrometer scale to the sub-micron scale and is promising in cross-scale mechanics studies, nanotribology, colloid science, and biology.

Design and stiffness modeling of a four-degree-of-freedom nanopositioning stage based on six-branched-chain compliant parallel mechanisms

Multi-degree-of-freedom (multi-DOF) nanopositioning stages (NPSs) have rapidly growing applications in the spatial micro-/nano-machining and manipulation. Compliant parallel mechanisms (CPMs) demonstrate advantages to achieve a large output stiffness and high payload. A four-DOF NPS based on six-branched-chain CPMs is proposed in this paper. First, a mechanism design approach is introduced. One primary vertical DOF is generated using three parallel-kinematic lever amplifiers. A three-revolute-revolute-revolute mechanism acts as the kinematic configuration to produce three secondary planar DOFs. Three types of single-axis and one type of double-axis notch flexure hinges (NFHs) are employed to realize the nanoscale displacement/movement guiding, transferring, and decoupling. Second, a stiffness modeling approach is derived. Combined with exact compliance matrices of 54 NFHs and 95 flexible beams, a four-DOF high-efficiency stiffness model of the six-branched-chain CPM is built. The calculation procedure of the whole input/output stiffnesses and coupling ratios takes 12.06 ms. Simulation and prototype test results validate the calculation accuracy. For example, the maximum calculation deviation of input stiffnesses is verified to be 4.52% and 8.18%, respectively. The two proposed approaches contribute to the statics parameter optimization of spatial multi-DOF NPSs.

Measurement of sub-nanonewton forces inside a scanning electron microscope

van der Waals forces, electrostatic interactions, and capillary forces are the dominant force interactions at the micro- and nanoscale. This complex ensemble of surface forces is oftentimes summarized as adhesion and is important for various applications and research fields. So far, numerous measurement techniques have evolved in this field. However, there is still a lack of experimental insight into the complex interplay of van der Waals, electrostatic, and capillary forces for small force ranges below 10 nN, as this is the order of magnitude of the latter, which can shadow other interactions in ambient and even inert gas environments. To exclude capillary forces and thus to turn the van der Waals and electrostatic forces into the most significant interactions, we develop an interferometric force spectroscopy setup based on a scanning probe technique, featuring a sub-nanonewton resolution, and integrate it into the vacuum chamber of a scanning electron microscope. In this work, we describe the setup integration, show the long-term drift behavior and resolution capabilities, and conduct first measurements of adhesion energies between a silica colloidal probe and a silicon substrate. The presented setup shows its capability to reliably measure adhesive interactions in vacuum and an ambient environment with a sub-nanonewton resolution proving its potential to allow for the investigation of the separate contribution of capillary, van der Waals, and electrostatic interactions to adhesion and for a systematic experimental validation of the established adhesion theories and approximations on the micro- and nanoscale.

Advances in Micromanipulation Actuated by Vibration-Induced Acoustic Waves and Streaming Flow

The use of vibration and acoustic characteristics for micromanipulation has been prevalent in recent years. Due to high biocompatibility, non-contact operation, and relatively low cost, the micromanipulation actuated by the vibration-induced acoustic wave and streaming flow has been widely applied in the sorting, translating, rotating, and trapping of targets at the submicron and micron scales, especially particles and single cells. In this review, to facilitate subsequent research, we summarize the fundamental theories of manipulation driven by vibration-induced acoustic waves and streaming flow. These methods are divided into two types: actuated by the acoustic wave, and actuated by the steaming flow induced by vibrating geometric structures. Recently proposed representative vibroacoustic-driven micromanipulation methods are introduced and compared, and their advantages and disadvantages are summarized. Finally, prospects are presented based on our review of the recent advances and developing trends.

Interactive Manipulation of Nonconductive Microparticles in Scanning Electron Microscope by a Virtual Nano-hand Strategy

Micro/nano-manipulation is the fabrication of particular constructs on devices at the micro/nano-scale. Precise manipulation of microparticles is one of the key technological difficulties in manufacturing micro/nano-scale components. Based on scanning electron microscopy and nanomanipulator, this paper adopts a direct push method to operate randomly distributed microparticles into ordered structures. A two-probe interaction strategy is proposed to enable microparticle movements in all directions efficiently and avoid scratching the substrate surface. To overcome the uncertainties in micromanipulation, a virtual nano-hand strategy was also implemented: long-range advance of each microparticle is realized by multiple single-step pushes, whose trajectory is theoretically analyzed. The pushes are well programmed to imitate effects of a more powerful and determined hand. Experimental results show that the theoretical single-step motion trajectory is in line with actual operation, and the proposed strategy can ensure precise operation of the microparticles in all directions and improve reliability and effectiveness of operation.

A magnification-continuous calibration method for SEM-based nanorobotic manipulation systems

Calibration for scanning electron microscope (SEM) based nanorobotic manipulation systems is important and difficult. Most current calibration methods are cumbersome because they require customized high precision calibration boards and repeated calibration procedures in different magnifications. This paper presents a convenient magnification-continuous calibration method with high precision for SEM-based nanorobotic manipulation systems. The projection matrix containing a continuous magnification factor is obtained by modifying the affine camera model. This facilitates the simplification of the parameter computing process. Movement features are used to align the moving axes of micropositioning stages and calibrate the system, which benefits for the realization of efficient automatic calibration. Three experiments are carried out, and the results demonstrate that the proposed method is effective and practical for calibrating SEM-based nanorobotic manipulation systems under a wide range of continuous magnifications. Experiments also confirm that high precision measurements can be conducted in different magnifications with only once calibration and the relative error is within 1%.

Optically controlled fiber-optic micro-gripper for sub-millimeter objects

A miniature, fully optically controlled, dielectric, opto-thermally actuated tweezer/micro-gripper that is suitable for the manipulation of small objects is presented. The tweezer/micro-gripper is formed at the tip of an optical fiber and utilizes a mid-power laser diode for its actuation. The manipulation of small objects such as short pieces of optical fibers is demonstrated. Small dimensions, fully dielectric design, non-electric actuation, remote operation through the fiber, and good harsh environment compatibility (chemical, radiation, and temperature) might provide opportunities for micromanipulation in a system and areas where current solutions are inadequate.

Integrating microsystems with metamaterials towards metadevices

Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

Anomaly Detection in Nanofibrous Materials by CNN-Based Self-Similarity

Automatic detection and localization of anomalies in nanofibrous materials help to reduce the cost of the production process and the time of the post-production visual inspection process. Amongst all the monitoring methods, those exploiting Scanning Electron Microscope (SEM) imaging are the most effective. In this paper, we propose a region-based method for the detection and localization of anomalies in SEM images, based on Convolutional Neural Networks (CNNs) and self-similarity. The method evaluates the degree of abnormality of each subregion of an image under consideration by computing a CNN-based visual similarity with respect to a dictionary of anomaly-free subregions belonging to a training set. The proposed method outperforms the state of the art.

Origami lattices with free-form surface ornaments

Lattice structures are used in the design of metamaterials to achieve unusual physical, mechanical, or biological properties. The properties of such metamaterials result from the topology of the lattice structures, which are usually three-dimensionally (3D) printed. To incorporate advanced functionalities into metamaterials, the surface of the lattice structures may need to be ornamented with functionality-inducing features, such as nanopatterns or electronic devices. Given our limited access to the internal surfaces of lattice structures, free-form ornamentation is currently impossible. We present lattice structures that are folded from initially flat states and show that they could bear arbitrarily complex surface ornaments at different scales. We identify three categories of space-filling polyhedra as the basic unit cells of the cellular structures and, for each of those, propose a folding pattern. We also demonstrate "sequential self-folding" of flat constructs to 3D lattices. Furthermore, we folded auxetic mechanical metamaterials from flat sheets and measured the deformation-driven change in their negative Poisson's ratio. Finally, we show how free-form 3D ornaments could be applied on the surface of flat sheets with nanometer resolution. Together, these folding patterns and experimental techniques present a unique platform for the fabrication of metamaterials with unprecedented combination of physical properties and surface-driven functionalities.

Site-specific characterization of beetle horn shell with micromechanical bending test in focused ion beam system

Biological materials are the result of years of evolution and possess a number of efficient features and structures. Researchers have investigated the possibility of designing biomedical structures that take advantage of these structural features. Insect shells, such as beetle shells, are among the most promising types of biological material for biomimetic development. However, due to their intricate geometries and small sizes, it is challenging to measure the mechanical properties of these microscale structures. In this study, we developed an in-situ testing platform for site-specific experiments in a focused ion beam (FIB) system. Multi-axis nano-manipulators and a micro-force sensor were utilized in the testing platform to allow better results in the sample preparation and data acquisition. The entire test protocol, consisting of locating sample, ion beam milling and micro-mechanical bending tests, can be carried out without sample transfer or reattachment. We used our newly devised test platform to evaluate the micromechanical properties and structural features of each separated layer of the beetle horn shell. The Young's modulus of both the exocuticle and endocuticle layers was measured. We carried out a bending test to characterize the layers mechanically. The exocuticle layer bent in a brick-like manner, while the endocuticle layer exhibited a crack blunting effect.

STATEMENT OF SIGNIFICANCE

This paper proposed an in-situ manipulation/test method in focused ion beam for characterizing micromechanical properties of beetle horn shell. The challenge in precise and accurate fabrication for the samples with complex geometry was overcome by using nano-manipulators having multi-degree of freedom and a micro-gripper. With the aid of this specially designed test platform, bending tests were carried out on cantilever-shaped samples prepared by focused ion beam milling. Structural differences between exocuticle and endocuticle layers of beetle horn shell were explored and the results provided insight into the structural advantages of each biocomposite structure.

Nanorobotic System iTRo for Controllable 1D Micro/nano Material Twisting Test

In-situ micro/nano characterization is an indispensable methodology for material research. However, the precise in-situ SEM twisting of 1D material with large range is still challenge for current techniques, mainly due to the testing device's large size and the misalignment between specimen and the rotation axis. Herein, we propose an in-situ twist test robot (iTRo) to address the above challenges and realize the precise in-situ SEM twisting test for the first time. Firstly, we developed the iTRo and designed a series of control strategies, including assembly error initialization, triple-image alignment (TIA) method for rotation axis alignment, deformation-based contact detection (DCD) method for sample assembly, and switch control for robots cooperation. After that, we chose three typical 1D material, i.e., magnetic microwire Fe74B13Si11C2, glass fiber, and human hair, for twisting test and characterized their properties. The results showed that our approach is able to align the sample to the twisting axis accurately, and it can provide large twisting range, heavy load and high controllability. This work fills the blank of current in-situ mechanical characterization methodologies, which is expected to give significant impact in the fundamental nanomaterial research and practical micro/nano characterization.

Microtechnologies for Cell Microenvironment Control and Monitoring

A great breadth of questions remains in cellular biology. Some questions cannot be answered using traditional analytical techniques and so demand the development of new tools for research. In the near future, the development of highly integrated microfluidic analytical platforms will enable the acquisition of unknown biological data. These microfluidic systems must allow cell culture under controlled microenvironment and high throughput analysis. For this purpose, the integration of a variable number of newly developed micro- and nano-technologies, which enable control of topography and surface chemistry, soluble factors, mechanical forces and cell–cell contacts, as well as technology for monitoring cell phenotype and genotype with high spatial and temporal resolution will be necessary. These multifunctional devices must be accompanied by appropriate data analysis and management of the expected large datasets generated. The knowledge gained with these platforms has the potential to improve predictive models of the behavior of cells, impacting directly in better therapies for disease treatment. In this review, we give an overview of the microtechnology toolbox available for the design of high throughput microfluidic platforms for cell analysis. We discuss current microtechnologies for cell microenvironment control, different methodologies to create large arrays of cellular systems and finally techniques for monitoring cells in microfluidic devices.

Programmable assembly of heterogeneous microparts by an untethered mobile capillary microgripper

At the sub-millimeter scale, capillary forces enable robust and reversible adhesion between biological organisms and varied substrates. Current human-engineered mobile untethered micromanipulation systems rely on forces which scale poorly or utilize gripper-part designs that promote manipulation. Capillary forces, alternatively, are dependent upon the surface chemistry (which is scale independent) and contact perimeter, which conforms to the part surface. We report a mobile capillary microgripper that is able to pick and place parts of various materials and geometries, and is thus ideal for microassembly tasks that cannot be accomplished by large tethered manipulators. We achieve the programmable assembly of sub-millimeter parts in an enclosed three-dimensional aqueous environment by creating a capillary bridge between the targeted part and a synthetic, untethered, mobile body. The parts include both hydrophilic and hydrophobic components: hydrogel, kapton, human hair, and biological tissue. The 200 μm untethered system can be controlled with five-degrees-of-freedom and advances progress towards autonomous desktop manufacturing for tissue engineering, complex micromachines, microfluidic devices, and meta-materials.

An Integrated Wireless Wearable Sensor System for Posture Recognition and Indoor Localization

In order to provide better monitoring for the elderly or patients, we developed an integrated wireless wearable sensor system that can realize posture recognition and indoor localization in real time. Five designed sensor nodes which are respectively fixed on lower limbs and a standard Kalman filter are used to acquire basic attitude data. After the attitude angles of five body segments (two thighs, two shanks and the waist) are obtained, the pitch angles of the left thigh and waist are used to realize posture recognition. Based on all these attitude angles of body segments, we can also calculate the coordinates of six lower limb joints (two hip joints, two knee joints and two ankle joints). Then, a novel relative localization algorithm based on step length is proposed to realize the indoor localization of the user. Several sparsely distributed active Radio Frequency Identification (RFID) tags are used to correct the accumulative error in the relative localization algorithm and a set-membership filter is applied to realize the data fusion. The experimental results verify the effectiveness of the proposed algorithms.

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system.