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Xu H, Venkatachalam S, Rabenimanana TH, Boyaval C, Eliet S, Braud F, Collin E, Theron D, Zhou X. Imaging Nanomechanical Vibrations and Manipulating Parametric Mode Coupling via Scanning Microwave Microscopy. NANO LETTERS 2024; 24:8550-8557. [PMID: 38953564 DOI: 10.1021/acs.nanolett.4c01401] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 07/04/2024]
Abstract
In this study, we present a novel platform based on scanning microwave microscopy for manipulating and detecting tiny vibrations of nanoelectromechanical resonators using a single metallic tip. The tip is placed on the top of a grounded silicon nitride membrane, acting as a movable top gate of the coupled resonator. We demonstrate its ability to map mechanical modes and investigate mechanical damping effects in a capacitive coupling scheme, based on its spatial resolution. We also manipulate the energy transfer coherently between the mode of the scanning tip and the underlying silicon nitride membrane, via parametric coupling. Typical features of optomechanics, such as anti-damping and electromechanically induced transparency, have been observed. Since the microwave optomechanical technology is fully compatible with quantum electronics and very low temperature conditions, it should provide a powerful tool for studying phonon tunnelling between two spatially separated vibrating elements, which could potentially be applied to quantum sensing.
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Affiliation(s)
- Hao Xu
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
| | - Srisaran Venkatachalam
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
| | - Toky-Harrison Rabenimanana
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
| | - Christophe Boyaval
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
| | - Sophie Eliet
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
| | - Flavie Braud
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
| | - Eddy Collin
- Univ. Grenoble Alpes, Institut NEEL - CNRS UPR2940, 25 rue des Martyrs, BP 166, 38042 Grenoble Cedex 9, France
| | - Didier Theron
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
| | - Xin Zhou
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 - IEMN, F-59000 Lille, France
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2
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Liu T, Ou JY, Plum E, MacDonald KF, Zheludev NI. Visualization of Subatomic Movements in Nanostructures. NANO LETTERS 2021; 21:7746-7752. [PMID: 34469159 DOI: 10.1021/acs.nanolett.1c02644] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Electron microscopy, scanning probe, and optical super-resolution imaging techniques with nanometric resolution are now routinely available but cannot capture the characteristically fast (MHz-GHz frequency) movements of micro-/nano-objects. Meanwhile, optical interferometric techniques can detect high-frequency picometric displacements but only with diffraction-limited lateral resolution. Here, we introduce a motion visualization technique, based on the spectrally resolved detection of secondary electron emission from moving objects, that combines picometric displacement sensitivity with the nanometric spatial (positional/imaging) resolution of electron microscopy. The sensitivity of the technique is quantitatively validated against the thermodynamically defined amplitude of a nanocantilever's Brownian motion. It is further demonstrated in visualizing externally driven modes of cantilever, nanomechanical photonic metamaterial, and MEMS device structures. With a noise floor reaching ∼1 pm/Hz1/2, it can provide for the study of oscillatory movements with subatomic amplitudes, presenting new opportunities for the interrogation of motion in functional structures across the materials, bio- and nanosciences.
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Affiliation(s)
- Tongjun Liu
- Optoelectronics Research Centre and Centre for Photonic Metamaterials, University of Southampton, Highfield, Southampton SO17 1BJ, U.K
| | - Jun-Yu Ou
- Optoelectronics Research Centre and Centre for Photonic Metamaterials, University of Southampton, Highfield, Southampton SO17 1BJ, U.K
| | - Eric Plum
- Optoelectronics Research Centre and Centre for Photonic Metamaterials, University of Southampton, Highfield, Southampton SO17 1BJ, U.K
| | - Kevin F MacDonald
- Optoelectronics Research Centre and Centre for Photonic Metamaterials, University of Southampton, Highfield, Southampton SO17 1BJ, U.K
| | - Nikolay I Zheludev
- Optoelectronics Research Centre and Centre for Photonic Metamaterials, University of Southampton, Highfield, Southampton SO17 1BJ, U.K
- Centre for Disruptive Photonic Technologies, School of Physical and Mathematical Sciences and The Photonics Institute, Nanyang Technological University, Singapore 637378, Singapore
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3
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Singh R, Purdy TP. Detecting Acoustic Blackbody Radiation with an Optomechanical Antenna. PHYSICAL REVIEW LETTERS 2020; 125:120603. [PMID: 33016743 DOI: 10.1103/physrevlett.125.120603] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/02/2020] [Accepted: 08/05/2020] [Indexed: 06/11/2023]
Abstract
Nanomechanical systems are generally embedded in a macroscopic environment where the sources of thermal noise are difficult to pinpoint. We engineer a silicon nitride membrane optomechanical resonator such that its thermal noise is acoustically driven by a spatially well-defined remote macroscopic bath. This bath acts as an acoustic blackbody emitting and absorbing acoustic radiation through the silicon substrate. Our optomechanical system acts as a sensitive detector for the blackbody temperature and for photoacoustic imaging. We demonstrate that the nanomechanical mode temperature is governed by the blackbody temperature and not by the local material temperature of the resonator. Our work presents a route to mitigate self-heating effects in optomechanical thermometry and other quantum optomechanics experiments, as well as acoustic communication in quantum information.
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Affiliation(s)
- Robinjeet Singh
- Joint Quantum Institute, University of Maryland, College Park, Maryland 20742, USA
- National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA
| | - Thomas P Purdy
- National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA
- Department of Physics and Astronomy, University of Pittsburgh, Pittsburgh, Pennsylvania 15260, USA
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4
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Davidovikj D, Poot M, Cartamil-Bueno SJ, van der Zant HSJ, Steeneken PG. On-chip Heaters for Tension Tuning of Graphene Nanodrums. NANO LETTERS 2018; 18:2852-2858. [PMID: 29653051 PMCID: PMC6023267 DOI: 10.1021/acs.nanolett.7b05358] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
For the study and application of graphene membranes, it is essential to have means to control their resonance frequency and temperature. Here, we present an on-chip heater platform for local tuning of in-plane tension in graphene mechanical resonators. By Joule heating of a metallic suspension ring we show thermomechanical resonance frequency tuning in a few-layer (FL) graphene nanodrum, which is accompanied by an increase in its quality factor, which we attribute to the increase of the in-plane tension. The in situ control of temperature, in-plane tension, resonance frequency, and quality factor of suspended two-dimensional (2D) nanodrums makes this device a unique platform for investigating the origin of dissipation in these ultrathin structures and can be of fundamental importance for studying the thermal properties of 2D materials. Moreover, by simultaneously controlling the heater and the backgate voltage, we can independently control the resonance frequency and quality factor, which is of great importance for applications in sensors and resonant mechanical filters.
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Affiliation(s)
- Dejan Davidovikj
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- E-mail:
| | - Menno Poot
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Physik
Department, Technische Universität
München, 85748 Garching, Germany
- Institute
for Advanced Study, Universität München, 85748 Garching, Germany
- E-mail:
| | - Santiago J. Cartamil-Bueno
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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5
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Güttinger J, Noury A, Weber P, Eriksson AM, Lagoin C, Moser J, Eichler C, Wallraff A, Isacsson A, Bachtold A. Energy-dependent path of dissipation in nanomechanical resonators. NATURE NANOTECHNOLOGY 2017; 12:631-636. [PMID: 28507334 DOI: 10.1038/nnano.2017.86] [Citation(s) in RCA: 53] [Impact Index Per Article: 7.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/29/2016] [Accepted: 03/30/2017] [Indexed: 05/22/2023]
Abstract
Energy decay plays a central role in a wide range of phenomena, such as optical emission, nuclear fission, and dissipation in quantum systems. Energy decay is usually described as a system leaking energy irreversibly into an environmental bath. Here, we report on energy decay measurements in nanomechanical systems based on multilayer graphene that cannot be explained by the paradigm of a system directly coupled to a bath. As the energy of a vibrational mode freely decays, the rate of energy decay changes abruptly to a lower value. This finding can be explained by a model where the measured mode hybridizes with other modes of the resonator at high energy. Below a threshold energy, modes are decoupled, resulting in comparatively low decay rates and giant quality factors exceeding 1 million. Our work opens up new possibilities to manipulate vibrational states, engineer hybrid states with mechanical modes at completely different frequencies, and to study the collective motion of this highly tunable system.
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Affiliation(s)
- Johannes Güttinger
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels (Barcelona), Spain
| | - Adrien Noury
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels (Barcelona), Spain
| | - Peter Weber
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels (Barcelona), Spain
| | - Axel Martin Eriksson
- Department of Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden
| | - Camille Lagoin
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels (Barcelona), Spain
| | - Joel Moser
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels (Barcelona), Spain
| | | | | | - Andreas Isacsson
- Department of Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden
| | - Adrian Bachtold
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels (Barcelona), Spain
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7
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Tunable micro- and nanomechanical resonators. SENSORS 2015; 15:26478-566. [PMID: 26501294 PMCID: PMC4634492 DOI: 10.3390/s151026478] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/28/2015] [Accepted: 10/09/2015] [Indexed: 01/02/2023]
Abstract
Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.
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8
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Niguès A, Siria A, Verlot P. Dynamical backaction cooling with free electrons. Nat Commun 2015; 6:8104. [PMID: 26381454 PMCID: PMC4595593 DOI: 10.1038/ncomms9104] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/15/2014] [Accepted: 07/19/2015] [Indexed: 11/20/2022] Open
Abstract
The ability to cool single ions, atomic ensembles, and more recently macroscopic degrees of freedom down to the quantum ground state has generated considerable progress and perspectives in fundamental and technological science. These major advances have been essentially obtained by coupling mechanical motion to a resonant electromagnetic degree of freedom in what is generally known as laser cooling. Here, we experimentally demonstrate the first self-induced coherent cooling mechanism that is not mediated by an electromagnetic resonance. Using a focused electron beam, we report a 50-fold reduction of the motional temperature of a nanowire. Our result primarily relies on the sub-nanometre confinement of the electron beam and generalizes to any delayed and spatially confined interaction, with important consequences for near-field microscopy and fundamental nanoscale dissipation mechanisms. Cooling atoms and ions to the quantum ground state is generally achieved by resonantly coupling their mechanical motion to an electromagnetic wave. Here the authors report self-induced cooling based on sub-nanometre confinement with an electron beam, rather than an electromagnetic resonance.
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Affiliation(s)
- A Niguès
- Laboratoire de Physique Statistique de l'Ecole Normale Supérieure, UMR8550, ENS, 24, rue Lhomond, 75005 Paris, France
| | - A Siria
- Laboratoire de Physique Statistique de l'Ecole Normale Supérieure, UMR8550, ENS, 24, rue Lhomond, 75005 Paris, France
| | - P Verlot
- Institut Lumière Matière, UMR5306 Université Lyon 1-CNRS, Université de Lyon, 69622 Villeurbanne Cedex, France
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9
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Abstract
All physical systems are to some extent open and interacting with their environment. This insight, basic as it may seem, gives rise to the necessity of protecting quantum systems from decoherence in quantum technologies and is at the heart of the emergence of classical properties in quantum physics. The precise decoherence mechanisms, however, are often unknown for a given system. In this work, we make use of an opto-mechanical resonator to obtain key information about spectral densities of its condensed-matter heat bath. In sharp contrast to what is commonly assumed in high-temperature quantum Brownian motion describing the dynamics of the mechanical degree of freedom, based on a statistical analysis of the emitted light, it is shown that this spectral density is highly non-Ohmic, reflected by non-Markovian dynamics, which we quantify. We conclude by elaborating on further applications of opto-mechanical systems in open system identification. All quantum systems are connected to their environment, and this reduces their quantumness through decoherence. Here, the authors show that the interaction between a macroscale quantum system—a micromechanical oscillator—and its environment leads to non-Markovian Brownian motion
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10
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Schneider BH, Singh V, Venstra WJ, Meerwaldt HB, Steele GA. Observation of decoherence in a carbon nanotube mechanical resonator. Nat Commun 2014; 5:5819. [PMID: 25524228 DOI: 10.1038/ncomms6819] [Citation(s) in RCA: 33] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/02/2014] [Accepted: 11/11/2014] [Indexed: 11/09/2022] Open
Abstract
In physical systems, decoherence can arise from both dissipative and dephasing processes. In mechanical resonators, the driven frequency response measures a combination of both, whereas time-domain techniques such as ringdown measurements can separate the two. Here we report the first observation of the mechanical ringdown of a carbon nanotube mechanical resonator. Comparing the mechanical quality factor obtained from frequency- and time-domain measurements, we find a spectral quality factor four times smaller than that measured in ringdown, demonstrating dephasing-induced decoherence of the nanomechanical motion. This decoherence is seen to arise at high driving amplitudes, pointing to a nonlinear dephasing mechanism. Our results highlight the importance of time-domain techniques for understanding dissipation in nanomechanical resonators, and the relevance of decoherence mechanisms in nanotube mechanics.
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Affiliation(s)
- Ben H Schneider
- Kavli Institute of Nanoscience, Delft University of Technology, 2628 CJ Delft, The Netherlands
| | - Vibhor Singh
- Kavli Institute of Nanoscience, Delft University of Technology, 2628 CJ Delft, The Netherlands
| | - Warner J Venstra
- Kavli Institute of Nanoscience, Delft University of Technology, 2628 CJ Delft, The Netherlands
| | - Harold B Meerwaldt
- Kavli Institute of Nanoscience, Delft University of Technology, 2628 CJ Delft, The Netherlands
| | - Gary A Steele
- Kavli Institute of Nanoscience, Delft University of Technology, 2628 CJ Delft, The Netherlands
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11
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Moser J, Eichler A, Güttinger J, Dykman MI, Bachtold A. Nanotube mechanical resonators with quality factors of up to 5 million. NATURE NANOTECHNOLOGY 2014; 9:1007-11. [PMID: 25344688 DOI: 10.1038/nnano.2014.234] [Citation(s) in RCA: 66] [Impact Index Per Article: 6.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/17/2014] [Accepted: 09/13/2014] [Indexed: 05/05/2023]
Abstract
Carbon nanotube mechanical resonators have attracted considerable interest because of their small mass, the high quality of their surfaces, and the pristine electronic states they host. However, their small dimensions result in fragile vibrational states that are difficult to measure. Here, we observe quality factors Q as high as 5 × 10(6) in ultra-clean nanotube resonators at a cryostat temperature of 30 mK, where we define Q as the ratio of the resonant frequency over the linewidth. Measuring such high quality factors requires the use of an ultra-low-noise method to rapidly detect minuscule vibrations, as well as careful reduction of the noise of the electrostatic environment. We observe that the measured quality factors fluctuate because of fluctuations of the resonant frequency. We measure record-high quality factors, which are comparable to the highest Q values reported in mechanical resonators of much larger size, a remarkable result considering that reducing the size of resonators is usually concomitant with decreasing quality factors. The combination of ultra-low mass and very large Q offers new opportunities for ultra-sensitive detection schemes and quantum optomechanical experiments.
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Affiliation(s)
- J Moser
- ICFO-Institut de Ciencies Fotoniques, Mediterranean Technology Park, 08860 Castelldefels (Barcelona), Spain
| | - A Eichler
- ICFO-Institut de Ciencies Fotoniques, Mediterranean Technology Park, 08860 Castelldefels (Barcelona), Spain
| | - J Güttinger
- ICFO-Institut de Ciencies Fotoniques, Mediterranean Technology Park, 08860 Castelldefels (Barcelona), Spain
| | - M I Dykman
- Department of Physics and Astronomy, Michigan State University, East Lansing, Michigan 48824, USA
| | - A Bachtold
- ICFO-Institut de Ciencies Fotoniques, Mediterranean Technology Park, 08860 Castelldefels (Barcelona), Spain
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12
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Villanueva LG, Schmid S. Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators. PHYSICAL REVIEW LETTERS 2014; 113:227201. [PMID: 25494083 DOI: 10.1103/physrevlett.113.227201] [Citation(s) in RCA: 23] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/26/2014] [Indexed: 06/04/2023]
Abstract
Silicon nitride (SiN) micro- and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors (Qs). Despite their popularity, the origin of the limiting loss mechanisms in these structures has remained controversial. In this Letter we propose an analytical model combining acoustic radiation loss with intrinsic loss. The model accurately predicts the resulting mode-dependent Qs of low-stress silicon-rich and high-stress stoichiometric SiN membranes. The large acoustic mismatch of the low-stress membrane to the substrate seems to minimize radiation loss and Qs of higher modes (n∧m≥3) are limited by intrinsic losses. The study of these intrinsic losses in low-stress membranes reveals a linear dependence with the membrane thickness. This finding was confirmed by comparing the intrinsic dissipation of arbitrary (membranes, strings, and cantilevers) SiN resonators extracted from literature, suggesting surface loss as ubiquitous damping mechanism in thin SiN resonators with Q_{surf}=βh and β=6×10^{10}±4×10^{10} m^{-1}. Based on the intrinsic loss the maximal achievable Qs and Qf products for SiN membranes and strings are outlined.
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Affiliation(s)
- L G Villanueva
- Advanced NEMS Group, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - S Schmid
- Department of Micro-and Nanotechnology, Technical University of Denmark, DTU Nanotech, DK-2800 Kongens Lyngby, Denmark
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