Biophotonic sensors with integrated Si3N4-organic hybrid (SiNOH) lasers for point-of-care diagnostics

Anneal-free ultra-low loss silicon nitride integrated photonics

Heterogeneous and monolithic integration of the versatile low-loss silicon nitride platform with low-temperature materials such as silicon electronics and photonics, III-V compound semiconductors, lithium niobate, organics, and glasses has been inhibited by the need for high-temperature annealing as well as the need for different process flows for thin and thick waveguides. New techniques are needed to maintain the state-of-the-art losses, nonlinear properties, and CMOS-compatible processes while enabling this next generation of 3D silicon nitride integration. We report a significant advance in silicon nitride integrated photonics, demonstrating the lowest losses to date for an anneal-free process at a maximum temperature 250 °C, with the same deuterated silane based fabrication flow, for nitride and oxide, for an order of magnitude range in nitride thickness without requiring stress mitigation or polishing. We report record low anneal-free losses for both nitride core and oxide cladding, enabling 1.77 dB m-1 loss and 14.9 million Q for 80 nm nitride core waveguides, more than half an order magnitude lower loss than previously reported sub 300 °C process. For 800 nm-thick nitride, we achieve as good as 8.66 dB m-1 loss and 4.03 million Q, the highest reported Q for a low temperature processed resonator with equivalent device area, with a median of loss and Q of 13.9 dB m-1 and 2.59 million each respectively. We demonstrate laser stabilization with over 4 orders of magnitude frequency noise reduction using a thin nitride reference cavity, and using a thick nitride micro-resonator we demonstrate OPO, over two octave supercontinuum generation, and four-wave mixing and parametric gain with the lowest reported optical parametric oscillation threshold per unit resonator length. These results represent a significant step towards a uniform ultra-low loss silicon nitride homogeneous and heterogeneous platform for both thin and thick waveguides capable of linear and nonlinear photonic circuits and integration with low-temperature materials and processes.

Correction of 2π Phase Jumps for Silicon Photonic Sensors Based on Mach Zehnder Interferometers with Application in Gas and Biosensing

Silicon photonic sensors based on Mach Zehnder Interferometers (MZIs) have applications spanning from biological and olfactory sensors to temperature and ultrasound sensors. Although a coherent detection scheme can solve the issues of sensitivity fading and ambiguity in phase direction, the measured phase remains 2π periodic. This implies that the acquisition frequency should ensure a phase shift lower than π between each measurement point to prevent 2π phase jumps. Here, we describe and experimentally characterize two methods based on reference MZIs with lower sensitivities to alleviate this drawback. These solutions improve the measurement robustness and allow the lowering of the acquisition frequency. The first method is based on the phase derivative sign comparison. When a discrepancy is detected, the reference MZI is used to choose whether 2π should be added or removed from the nominal MZI. It can correct 2π phase jumps regardless of the sensitivity ratio, so that a single reference MZI can be used to correct multiple nominal MZIs. This first method relaxes the acquisition frequency requirement by a factor of almost two. However, it cannot correct phase jumps of 4π, 6π or higher between two measurement points. The second method is based on the comparison between the measured phase from the nominal MZI and the phase expected from the reference MZI. It can correct multiple 2π phase jumps but requires at least one reference MZI per biofunctionalization. It will also constrain the corrected phase to lie in a limited interval of [-π, +π] around the expected value, and might fail to correct phase shifts above a few tens of radians depending on the disparity of the nominal sensors responses. Nonetheless, for phase shift lower than typically 20 radians, this method allows the lowering of the acquisition frequency almost arbitrarily.

Biohybrid Photonic Platform for Subcellular Stimulation and Readout of In Vitro Neurons

Targeted manipulation of neural activity via light has become an indispensable tool for gaining insights into the intricate processes governing single neurons and complex neural networks. To shed light onto the underlying interaction mechanisms, it is crucial to achieve precise control of individual neural activity, as well as a spatial read-out resolution on the nanoscale. Here, a versatile photonic platform with subcellular resolution for stimulation and monitoring of in-vitro neurons is demonstrated. Low-loss photonic waveguides are fabricated on glass substrates using nanoimprint lithography and featuring a loss of only -0.9 ± 0.2 dB cm-1 at 489 nm and are combined with optical fiber-based waveguide-access and backside total internal reflection fluorescence microscopy. Neurons are grown on the bio-functionalized photonic chip surface and, expressing the light-sensitive ion channel Channelrhodopsin-2, are stimulated within the evanescent field penetration depth of 57 nm of the biocompatible waveguides. The versatility and cost-efficiency of the platform, along with the possible subcellular resolution, enable tailor-made investigations of neural interaction dynamics with defined spatial control and high throughput.

Absorption and scattering limits of silicon nitride integrated photonics in the visible spectrum

Visible-light photonic integrated circuits (PICs) promise scalability for technologies such as quantum information, biosensing, and scanning displays, yet extending large-scale silicon photonics to shorter wavelengths has been challenging due to the higher losses. Silicon nitride (SiN) has stood out as the leading platform for visible photonics, but the propagation losses strongly depend on the film's deposition and fabrication processes. Current loss measurement techniques cannot accurately distinguish between absorption and surface scattering, making it difficult to identify the dominant loss source and reach the platform's fundamental limit. Here we demonstrate an ultra-low loss, high-confinement SiN platform that approaches the limits of absorption and scattering across the visible spectrum. Leveraging the sensitivity of microresonators to loss, we probe and discriminate each loss contribution with unparalleled sensitivity, and derive their fundamental limits and scaling laws as a function of wavelength, film properties and waveguide parameters. Through the design of the waveguide cross-section, we show how to approach the absorption limit of the platform, and demonstrate the lowest propagation losses in high-confinement SiN to date across the visible spectrum. We envision that our techniques for loss characterization and minimization will contribute to the development of large-scale, dense PICs that redefine the loss limits of integrated platforms across the electromagnetic spectrum.

Wavelength switching technique for phase interrogation of Mach Zehnder interferometer-based optical sensors

A method for determining the phase shift of a Mach Zehnder interferometer (MZI) is presented. It is based on switching the wavelength of continuous wave (CW) laser light illuminating the MZI and measuring the interferometer output amplitudes at DC and switching frequency. The method can measure the MZI phase shift unambiguously over the entire phase shift range of 2π. A practical proof of concept demonstration shows that the method can perform real-time measurement with high repeatability and accuracy limited by the optical frequency drift and power fluctuation of the lasers. The method does not require modifications of the sensor or accessing to the laser electronics and also uses simple detection. It is, therefore, suitable for bio and medical sensing applications.

Trapping of a Single Microparticle Using AC Dielectrophoresis Forces in a Microfluidic Chip

Precise trap and manipulation of individual cells is a prerequisite for single-cell analysis, which has a wide range of applications in biology, chemistry, medicine, and materials. Herein, a microfluidic trapping system with a 3D electrode based on AC dielectrophoresis (DEP) technology is proposed, which can achieve the precise trapping and release of specific microparticles. The 3D electrode consists of four rectangular stereoscopic electrodes with an acute angle near the trapping chamber. It is made of Ag-PDMS material, and is the same height as the channel, which ensures the uniform DEP force will be received in the whole channel space, ensuring a better trapping effect can be achieved. The numerical simulation was conducted in terms of electrode height, angle, and channel width. Based on the simulation results, an optimal chip structure was obtained. Then, the polystyrene particles with different diameters were used as the samples to verify the effectiveness of the designed trapping system. The findings of this research will contribute to the application of cell trapping and manipulation, as well as single-cell analysis.

Optical Temperature Sensor Based on Polysilicon Waveguides

Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach-Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications.

Transformation-optics modeling of 3D-printed freeform waveguides

Multi-photon lithography allows us to complement planar photonic integrated circuits (PIC) by in-situ 3D-printed freeform waveguide structures. However, design and optimization of such freeform waveguides using time-domain Maxwell's equations solvers often requires comparatively large computational volumes, within which the structure of interest only occupies a small fraction, thus leading to poor computational efficiency. In this paper, we present a solver-independent transformation-optics-(TO-) based technique that allows to greatly reduce the computational effort related to modeling of 3D freeform waveguides. The concept relies on transforming freeform waveguides with curved trajectories into equivalent waveguide structures with modified material properties but geometrically straight trajectories, that can be efficiently fit into rather small cuboid-shaped computational volumes. We demonstrate the viability of the technique and benchmark its performance using a series of different freeform waveguides, achieving a reduction of the simulation time by a factor of 3-6 with a significant potential for further improvement. We also fabricate and experimentally test the simulated waveguides by 3D-printing on a silicon photonic chip, and we find good agreement between the simulated and the measured transmission at λ = 1550 nm.

Integrated polarization mode interferometer in 220-nm silicon-on-insulator technology

A compact integrated and high-efficiency polarization mode interferometer in the 220-nm silicon-on-insulator platform is presented. Due to the operation with two polarization modes in a single waveguide, low propagation losses and high sensitivities combined with a small footprint are achieved. The designed and fabricated system with a 5-mm-long sensing region shows a measured excess loss of only 1.5 dB with an extinction ratio up to 30 dB, while its simulated homogeneous bulk sensitivity can exceed 8000 rad/RIU. The combination with a 90° hybrid readout system offers single wavelength operation with unambiguousness for phase shifts up to 2π and constant sensitivity.

Waveguide Mach-Zehnder biosensor with laser diode pumped integrated single-mode silicon nitride organic hybrid solid-state laser

Single-mode organic solid-state lasers with direct emission into an optical waveguide are attractive candidates for cost-efficient coherent light sources employed in photonic lab-on-a-chip biosensors. Here, we present a combination of a dye-doped organic solid-state distributed feedback laser with a highly sensitive optical waveguide Mach-Zehnder interferometer on a silicon nitride photonic platform. This organic-hybrid laser allows for optical pumping with a laser diode in an alignment tolerant manner, which facilitates applications in point-of-care diagnostics. The sensitivity to bulk refractive index changes and the concentration dependent binding of streptavidin on a polyethyleneimine-biotin functionalized surface was studied to demonstrate the practicability of this cost-efficient coherent light source for optical waveguide biosensors.

Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing

Recently, optical sensors interacting with evanescent fields and the external environment around waveguides have attracted extensive attention. In the process of light propagation in the waveguide, the depth of the evanescent field is closely related to the accuracy of the optical sensor, and adjusting the depth of the evanescent field to obtain higher accuracy has become the primary challenge in fabricating on-chip optical sensors. In this study, the waveguide structure of a Mach–Zehnder interferometer was written directly in Corning Eagle 2000 borosilicate glass by a femtosecond laser, and the sensing window was exposed out of the bulk material by mechanical polishing. The refractive index detection device based on the proposed on-chip Mach–Zehnder interferometer has the advantages of small volume, light weight, and good stability. Its sensitivity can reach 206 nm/RIU or 337 dB/RIU, and the theoretical maximum measurement range is 1–1.508. Therefore, it can measure the refractive index quickly and accurately in extreme or complex environments, and has excellent application prospects.

Photonic Crystal Polymeric Thin-Film Dye-Lasers for Attachable Strain Sensors

In this report, using two-dimensional photonic crystals (PhC) and a one-dimensional PhC nano-beam cavity, we realized the development of all-polymeric dye-lasers on a dye-doped, suspended poly-methylmethacrylate film with a wavelength-scale thickness. In addition to the characterization of basic lasing properties, we also evaluated its capacity to serve as an attachable strain sensor. Through experimentation, we confirmed the stable lasing performances of the dye-laser attaching on a rough surface. Moreover, we also theoretically studied the wavelength responses of the utilized PhC resonators to stretching strain and further improved them via the concept of strain shaping. The attachability and high strain sensing response of the presented thin film PhC dye-lasers demonstrate their potential as attachable strain sensors.