Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

Metal Nanoparticles Assisted Ultrafast Laser Plasmonic Microwelding of Oxide-Semiconductor Interconnects

Integration of wafer-scale oxide and semiconductor materials meets the difficulties of residual stress and materials incompatibility. In this work, Ag NPs thin film is contributed as an energy confinement layer between oxide (Sapphire) and semiconductor (Si) wafers to localize the materials interaction during ultrafast laser irradiation. Due to the plasmonic effects generated within constructed dielectric-metal-dielectric structures (i.e., Sapphire-Ag-Si), thermal diffusion and chemical reaction between Ag and its neighboring materials facilitate the microwelding of Sapphire and Si wafers. Ag NPs can be totally sintered within the junction area to bridge oxide and semiconductor, while Al─O─Ag bond and Ag─Si bond are formed at Ag-Sapphire and Ag─Si interfaces, respectively. As-received heterogeneous joint exhibits a high shear strength up to 5.4 MPa, with the fracture occurring inside Si wafer. Meanwhile, insertion of metal nanolayer can greatly relieve the residual stress-induced microcracking inside the brittle materials. Such wafer-scale Sapphire and Si interconnects thus show robust strength and excellent impermeability even after thermal shocking (-40 °C to 120 °C) for 200 cycles. This metal NPs layer-assisted plasmonic microwelding technology can extend to broad materials integration, which is promising for high-performance microdevices development in MEMS, MOEMS, or microfluidics.

Pulsed laser induced plasma and thermal effects on molybdenum carbide for dry reforming of methane

Dry reforming of methane (DRM) is a highly endothermic process, with its development hindered by the harsh thermocatalytic conditions required. We propose an innovative DRM approach utilizing a 16 W pulsed laser in combination with a cost-effective Mo2C catalyst, enabling DRM under milder conditions. The pulsed laser serves a dual function by inducing localized high temperatures and generating *CH plasma on the Mo2C surface. This activates CH4 and CO2, significantly accelerating the DRM reaction. Notably, the laser directly generates *CH plasma from CH4 through thermionic emission and cascade ionization, bypassing the traditional step-by-step dehydrogenation process and eliminating the rate-limiting step of methane cracking. This method maintains a carbon-oxygen balanced environment, thus preventing the deactivation of the Mo2C catalyst due to CO2 oxidation. The laser-catalytic DRM achieves high yields of H2 (14300.8 mmol h-1 g-1) and CO (14949.9 mmol h-1 g-1) with satisfactory energy efficiency (0.98 mmol kJ-1), providing a promising alternative for high-energy-consuming catalytic systems.

Effect of varied beam diameter of picosecond laser on Foturan glass volume microprocessing

Foturan glass is a photosensitive transparent material which has attracted much interest for microfluidic applications due to possibility of volume processing by ultrafast lasers. In this work, we have investigated the effect of picosecond laser on volume processing in Foturan glass when varying the beam diameter incident on a lens. To this end, specific laser focusing configurations have been designed using raytracing models and an analysis protocol has been developed in the lens focusing region in order to describe the focal point displacement occurring at the variation of the incident laser beam diameter. The numerically simulated results were explained in association with Rayleigh length and found to be in good agreement with the experimental data obtained at well-defined conditions. Specifically, it was found that the hollow microstructures developed by thermal treatment and chemical etching after laser irradiation were significantly displaced along the propagation direction when the incident beam diameter varied in the range of 1-3.5 times. This approach aims to bring an essential contribution to the field of ultrashort pulse lasers micro- and nanoprocessing in transparent materials proving that the laser beam focus position and its size can be precisely controlled with high precision by automated optics for the variation of incident laser beam diameter in predefined conditions. This approach has the potential for laser multi-beam processing at various volume depths using the same optics setup and may even be applicable to two-photon excitation microscopy. On the other hand, the processing protocol in Foturan glass may allow understanding transparent material modification by tailoring laser beam characteristics.

Evolution mechanism of subsurface damage during laser machining process of fused silica

The machining-induced subsurface damage (SSD) on fused silica optics would incur damage when irradiated by intense lasers, which severely restricts the service life of fused silica optics. The high absorption of fused silica to 10.6 µm makes it possible to utilize pulsed CO2 laser to remove and characterize SSD by layer-by-layer ablation, which improves its laser-induced damage threshold. However, thermal stress during the laser ablation process may have an impact on SSD, leading to extension. Still, the law of SSD morphology evolution mechanism has not been clearly revealed. In this work, a multi-physics simulated model considering light field modulation is established to reveal the evolution law of radial SSD during the laser layer-by-layer ablation process. Based on the simulation of different characteristic structural parameters, two evolution mechanisms of radial SSD are revealed, and the influence of characteristic structural parameters on SSD is also elaborated. By prefabricating the SSD by femtosecond laser, the measurements of SSD during CO2 laser layer-by-layer ablation experiments are consistent with the simulated results, and three stages of SSD depth variation under two evolution processes are further proposed. The findings of this study provide theoretical guidance for effectively characterizing SSD based on laser layer-by-layer ablation strategies on fused silica optics.

Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study

Emerging applications of optical technologies are driving the development of miniaturised light sources, which in turn require the fabrication of matching micro-optical elements with sub-1 mm cross-sections and high optical quality. This is particularly challenging for spatially constrained biomedical applications where reduced dimensionality is required, such as endoscopy, optogenetics, or optical implants. Planarisation of a lens by the Fresnel lens approach was adapted for a conical lens (axicon) and was made by direct femtosecond 780 nm/100 fs laser writing in the SZ2080™ polymer with a photo-initiator. Optical characterisation of the positive and negative fraxicons is presented. Numerical modelling of fraxicon optical performance under illumination by incoherent and spatially extended light sources is compared with the ideal case of plane-wave illumination. Considering the potential for rapid replication in soft polymers and resists, this approach holds great promise for the most demanding technological applications.

Multi-color transparent display based on perovskite quantum dots fabricated by laser-induced plasma etching

Display technology is being revolutionized by cutting-edge transparent displays that can provide visual information on the screen while allowing the surrounding environment to be visible. In this report, a new method is proposed for patterning displays based on perovskite quantum dots (PQDs) on glass surfaces. A glass substrate with a polyvinylidene fluoride (PVDF) constraint layer is patterned using laser-induced plasma etching, and then a PQDs film is spin-coated on the etched sample. The PQDs pattern on the glass substrate is obtained after peeling off the PVDF constraint layer. The thickness of the film is obtained by carrying out simulations. The plasma output from different metal targets is recorded and analyzed to select the most suitable parameters and materials for improvement of the patterning accuracy. The transparent pattern display of PQDs is realized with an accuracy of 10-20 µm and a burial depth of about 1 µm. This method allows PQDs to be encapsulated under the substrate surface, which decreases the susceptibility of environmental impact. Additionally, encapsulation prevents the quantum dots from leaking out and causing environmental pollution. The proposed method has potential in the design of transparent displays and anti-counterfeiting applications.

Laser-Induced Backward Transfer of Light Reflecting Zinc Patterns on Glass for High Performance Photovoltaic Modules

Commercially available photovoltaic (PV) modules typically consist of individual silicon half-cut cells that are electrically interconnected. This interconnection method results in gaps between the cells, which do not contribute to the overall PV output power. One approach to enhance the cell-to-module power ratio is the placement of white, diffuse reflecting plastic material within these gaps. Conventionally, the process of generating reflective patterns involves several discrete steps, including film deposition, resist patterning, etching, and resist stripping. This study presents an innovative single-step procedure for the direct deposition of zinc reflective patterns onto glass substrates using laser-induced backward transfer (LIBT) and a nanosecond pulsed laser system. The process successfully produced lines and squares, demonstrating its versatility in achieving diverse geometric patterns under ambient atmospheric pressure and room temperature conditions. The evaluation of the transferred patterns included an examination of geometric dimensions and surface morphology using a 3D microscope and scanning electron microscopy (SEM) analysis at the air/Zn interface. Additionally, the thickness of the zinc film and its adhesion to the glass substrate were quantified. The angular reflectance at a wavelength of 660 nm for both the glass/Zn and air/Zn interfaces was measured.

High-Power Femtosecond Laser Processing of SiC Ceramics with Optimized Material Removal Rate

Silicon carbide (SiC) ceramics are widely used as structural materials for various applications. However, the extraordinarily high hardness, brittleness, low material removal rate, and severe tool wear of these materials significantly impact the performance of conventional mechanical processing techniques. In this study, we investigated the influence of different parameters on the material removal rate, surface quality, and surface oxidation during the laser processing of SiC ceramic samples using a high-repetition-frequency femtosecond laser at a wavelength of 1030 nm. Additionally, an experimental investigation was conducted to analyze the effects of a burst mode on the material removal rate. Our results demonstrate that the surface oxidation, which significantly affects the material removal rate, can be effectively reduced by increasing the laser scanning speed and decreasing the laser scanning pitch. The material removal rate and surface quality are mainly affected by laser fluence. The optimal material removal rate is obtained with a laser fluence of 0.4 J/cm2 at a pulse width of 470 fs.

3D free-assembly modular microfluidics inspired by movable type printing

Reconfigurable modular microfluidics presents an opportunity for flexibly constructing prototypes of advanced microfluidic systems. Nevertheless, the strategy of directly integrating modules cannot easily fulfill the requirements of common applications, e.g., the incorporation of materials with biochemical compatibility and optical transparency and the execution of small batch production of disposable chips for laboratory trials and initial tests. Here, we propose a manufacturing scheme inspired by the movable type printing technique to realize 3D free-assembly modular microfluidics. Double-layer 3D microfluidic structures can be produced by replicating the assembled molds. A library of modularized molds is presented for flow control, droplet generation and manipulation and cell trapping and coculture. In addition, a variety of modularized attachments, including valves, light sources and microscopic cameras, have been developed with the capability to be mounted onto chips on demand. Microfluidic systems, including those for concentration gradient generation, droplet-based microfluidics, cell trapping and drug screening, are demonstrated. This scheme enables rapid prototyping of microfluidic systems and construction of on-chip research platforms, with the intent of achieving high efficiency of proof-of-concept tests and small batch manufacturing.

Ultra-compact fiber tapering: plasmonics and structural bending as new combination of heat and pull

Fabrication of optical fiber tapers is realized with a combination of plasmonic microheaters and specially designed structural bending of optical fibers, which provide the necessary elements of "heat and pull". The resultant compactness and flame-free condition enable monitoring of the tapering process inside a scanning electron microscope.

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials

Femtosecond lasers enable flexible and thermal-damage-free ablation of solid materials and are expected to play a critical role in high-precision cutting, drilling, and shaping of electronic chips, display panels, and industrial parts. Although the potential applications are theoretically predicted, true 3D nano-sculpturing of solids such as glasses and crystals, has not yet been demonstrated, owing to the technical challenge of negative cumulative effects of surface changes and debris accumulation on the delivery of laser pulses and subsequent material removal during direct-write ablation. Here, a femtosecond laser-induced cavitation-assisted true 3D nano-sculpturing technique based on the ingenious combination of cavitation dynamics and backside ablation is proposed to achieve stable clear-field point-by-point material removal in real time for precise 3D subtractive fabrication on various difficult-to-process materials. As a result, 3D devices including free-form silica lenses, micro-statue with vivid facial features, and rotatable sapphire micro-mechanical turbine, all with surface roughness less than 10 nm are readily produced. The true 3D processing capability can immediately enable novel structural and functional micro-nano optics and non-silicon micro-electro-mechanical systems based on various hard solids.

Femtosecond laser regulatory focus ablation patterning of a fluorescent film up to 1/10 of the scale of the diffraction limit

Patterned quantum dots (QDs) and perovskites have attracted a great deal of attention in the fabrication of optoelectronic device arrays for transistors, image sensors and displays. However, the resolution of current patterning technologies is insufficient for nanopatterned QDs and perovskites to be integrated in advanced optoelectronic and photonic applications. Herein, we demonstrate a femtosecond laser regulatory focus ablation (FsLRFA) patterning technique of a fluorescent film involving both semiconductor core-shell QDs and perovskite up to 1/10th of the scale of the diffraction limit. Annular lines with a 200 nm-width are obtained after the irradiation of the femtosecond laser. Moreover, the combination of ablated different geometries enables the laser focal spot as brushes for FsLRFA patterning technology to fabricate delicate and programmable patterns on the fluorescent film. This technology with nanoscale resolution and patterning capability paves the road toward highly integrated applications based on QDs and perovskites.

Femtosecond laser upgrading the quality of bismuth films to enhance ultra-broadband photodetection

Topological insulator bismuth has attracted considerable attention for the fabrication of room-temperature, wide bandwidth, and high-performance photodetectors due to the gapless edge state and insulating bulk state properties. However, both the photoelectric conversion and carrier transportation of the bismuth films are extremely affected by the surface morphology and grain boundaries to limit optoelectronic properties further. Here, we demonstrate a strategy of femtosecond laser treatment for upgrading the quality of bismuth films. After the treatment with proper laser parameters, the measurement of average surface roughness can be reduced from Ra = 44 nm to 6.9 nm, especially with accompany of the evident grain boundary elimination. Consequently, the photoresponsivity of the bismuth films increases approximately 2 times within an ultra-broad spectrum range from the visible to mid-infrared. This investigation suggests that the femtosecond laser treatment can help to benefit the performance of topological insulator ultra-broadband photodetectors.

Femtosecond Laser Ablation of Quantum Dot Films toward Physical Unclonable Multilevel Fluorescent Anticounterfeiting Labels

Femtosecond laser ablation (FsLA) technology has been demonstrated to achieve programmable ablation and removal of diverse materials with high precision. Owing to the cross-scale and digital processing characteristics, the FsLA technology has attracted increasing interest. However, the moderate repeatability of FsLA limits its application in the fabrication of advanced micro-/nanostructures due to the nonidentity of each laser pulse and fluctuation of environment. Fortunately, moderate repeatability combined with programmable ablation and high precision perfectly matches with the technical requirements of a physical unclonable fluorescent anticounterfeiting label. Herein, we applied FsLA to quantum dot (QD) films to fabricate a physical unclonable multilevel fluorescent anticounterfeiting label. Visual Jilin University logos, quick response (QR) codes, microlines, and microholes have been achieved for the multilevel anticounterfeiting functions. Of particular significance, the microholes with a macroidentical and microidentifiable geometry guarantee the physical unclonable functions (PUFs). Moreover, the fluorescent anticounterfeiting label is compatible with deep learning algorithms that facilitate authentication to be convenient and accurate. This work shows a fantastic future potential to be a core anticounterfeiting technique for commercial products and drugs.

Approximately 30 nm Nanogroove Formation on Single Crystalline Silicon Surface under Pulsed Nanosecond Laser Irradiation

Nanogrooves with a minimum feature size down to 30 nm (λ/26) can be formed directly on silicon surface by irradiation from two orthogonal polarized 1064 nm/10 ns fiber laser beams. The creation of such small nanogrooves is attributed to surface thermal stress during resolidification and supercooling with the double laser beams' irradiation. By varying the pulse number and laser fluence, the feature size of narrow grooves on silicon surface can be tuned. The experimental results and numerical calculation of surface thermal behaviors indicated that the high repetition rate of the nanosecond laser leads to the incubation effect and different silicon optical and thermal properties during laser irradiation. Resolution on this scale should be attractive in nanolithography, particularly considering that this method is available in far field and in ambient air.

Glass Surface Modification Was Induced by the Combination of Coating Technology and Femtosecond Laser Assisted Chemical Etching

Due to its high hardness and high transmittance, ultra-white glass has a strong application prospect in the fields of optoelectronics industry and experimental instruments. However, because of its brittleness, it was still a difficult problem in the machining industry. Surface modification provides a basic research idea for ultra-white glass microstructure processing. An effective method to obtain surface modified area on ultra-white glass was presented. The modified zone on the surface of ultra-white glass was induced by the technique of coating and femtosecond laser-assisted chemical etching. The method combines vacuum coating with femtosecond laser irradiation. Next, the modified glass was processed with highly selective potassium hydroxide solution. In order to control the surface size more efficiently, the optimization experiment of laser parameters and chemical parameters on the machining process was carried out. The experimental results show that the method made the surface modification of ultra-white glass more easily and provides basic research for fabricating microchannels on the material.

Fabrication of Superhydrophobic Gully-Structured Surfaces by Femtosecond Laser and Imprinting for High-Efficiency Self-Cleaning Rain Collection

Freshwater is considered an essential need for humanity. Moreover, it is important to collect and make full use of rainwater. This work utilizes a femtosecond laser to fabricate micro-nanostructures on aluminum alloy substrates as molds. Then, the structures are imprinted on cheap and wildly used polypropylene (PP) materials. The just-imprinted PP surfaces with instinctive surface energy and replicated micro-nanostructures have an excellent superhydrophobic property with contact angles greater than 160° and anisotropic sliding angles smaller than 5° in parallel directions and smaller than 10° in the vertical directions. A small-scale rain collection device formed by a combination of the superhydrophobic PP surfaces is used to investigate the effects of the rain collection efficiency and total surface area relating to manufacturing cost. The rain collection device formed by the imprinted PP surfaces has high rain collection efficiency in terms of the volume of the collected water per square centimeter. For the light rain, the rain collection efficiency can reach an approximated maximum of 90%, more than 100% efficiency improvement of the device formed by flat PP surfaces in some cases. Therefore, the rain collection device is helpful in collecting water from rains in arid areas.

High-fidelity glass micro-axicons fabricated by laser-assisted wet etching

We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) and laser polishing. The employed technique, relying on a direct-writing process using a femtosecond laser, allows revealing high fidelity profiles when the exposed glass samples are etched in a heated potassium hydroxide (KOH) solution. The remaining surface roughness is then decreased by carbon dioxide (CO₂) laser polishing. Such polishing is limited to the superficial layer of the component so that the tip is only slightly rounded, with a radius of curvature of nearly 200 µm. It is then shown with 500 µm-diameter axicons that a quasi-Bessel beam is generated closely after the tip and features a 5.3 µm diameter maintained over a propagation distance of almost 3.5 mm.

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials.

Density Regulation and Localization of Cell Clusters by Self-Assembled Femtosecond-Laser-Fabricated Micropillar Arrays

Tumor cell clusters of varying sizes and densities have different metastatic potentials. Three-dimensional (3D) patterned structures with rational topographical and mechanical properties are capable of guiding the 3D clustering of tumor cells. In this study, single femtosecond laser pulses were used to fabricate individual high-aspect-ratio micropillars via two-photon polymerization (TPP). By combining this approach with capillary-force self-assembly, complex 3D microstructure patterns were constructed with a high efficiency. The microstructures were able to regulate the formation of cell clusters at different cell seeding densities and direct self-guided 3D assembly of cell clusters of various sizes and densities. Localization of cell clusters was achieved using grid-indexed samples to address individual cell clusters, which holds great promise for in situ cell cluster culture and monitoring and for applications such as RNA sequencing of cell clusters.