Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements

Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators

In this paper, a multi-material radial phononic crystal (M-RPC) structure is proposed to reduce the anchor-point loss of piezoelectric micro-electro-mechanical system (MEMS) resonators and improve their quality factor. Compared with single-material phononic crystal structures, an M-RPC structure can reduce the strength damage at the anchor point of a resonator due to the etching of the substrate. The dispersion curve and frequency transmission response of the M-RPC structure were calculated by applying the finite element method, and it was shown that the M-RPC structure was more likely to produce a band-gap range with strong attenuation compared with a single-material radial phononic crystal (S-RPC) structure. Then, the effects of different metal-silicon combinations on the band gap of the M-RPC structures were studied, and we found that the largest band-gap range was produced by a Pt and Si combination, and the range was 84.1-118.3 MHz. Finally, the M-RPC structure was applied to a piezoelectric MEMS resonator. The results showed that the anchor quality factor of the M-RPC resonator was increased by 33.5 times compared with a conventional resonator, and the insertion loss was reduced by 53.6%. In addition, the loaded and unloaded quality factors of the M-RPC resonator were improved by 75.7% and 235.0%, respectively, and at the same time, there was no effect on the electromechanical coupling coefficient.

Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation

Surface acoustic wave (SAW)-based acoustofluidic devices have shown broad applications in microfluidic actuation and particle/cell manipulation. Conventional SAW acoustofluidic device fabrication generally includes photolithography and lift-off processes and thus requires accessing cleanroom facilities and expensive lithography equipment. In this paper, we report a femtosecond laser direct writing mask method for acoustofluidic device preparation. By micromachining of steel foil to form the mask and direct evaporation of metal on the piezoelectric substrate using the mask, the interdigital transducer (IDT) electrodes of the SAW device are generated. The minimum spatial periodicity of the IDT finger is about 200 μm, and the preparation for LiNbO₃ and ZnO thin films and flexible PVDF SAW devices is verified. Meanwhile, we have demonstrated various microfluidic functions, including streaming, concentration, pumping, jumping, jetting, nebulization, and particle alignment using the fabricated acoustofluidic (ZnO/Al plate, LiNbO₃) devices. Compared to the traditional manufacturing process, the proposed method omits spin coating, drying, lithography, developing, and lift-off processes and thus has advantages of simple, convenient, low cost, and environment friendliness.

H-Shaped Radial Phononic Crystal for High-Quality Factor on Lamb Wave Resonators

In this paper, a novel H-shaped radial phononic crystal (H-RPC) structure is proposed to suppress the anchor loss of a Lamb wave resonator (LWR), which has an ultra-high frequency (UHF) and ultra-wideband gap characteristics. Compared to previous studies on phononic crystal (PC) structures aimed at suppressing anchor loss, the radial phononic crystal (RPC) structure is more suitable for suppressing the anchor loss of the LWR. By using the finite element method, through the research and analysis of the complex energy band and frequency response, it is found that the elastic wave can generate an ultra-wideband gap with a relative bandwidth of up to 80.2% in the UHF range when propagating in the H-RPC structure. Furthermore, the influence of geometric parameters on the ultra-wideband gap is analyzed. Then, the H-RPC structure is introduced into the LWR. Through the analysis of the resonant frequency, it is found that the LWR formed by the H-RPC structure can effectively reduce the vibration energy radiated by the anchor point. The anchor quality factor was increased by 505,560.4% compared with the conventional LWR. In addition, the analysis of the LWR under load shows that the LWR with the H-RPC structure can increase the load quality factor by 249.9% and reduce the insertion loss by 93.1%, while the electromechanical coupling coefficient is less affected.

Aerosol jet printing of piezoelectric surface acoustic wave thermometer

Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO₃ substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200 ^∘C. Sensitivities of the printed SAW thermometer are - 96.9 × 1 0 - 6 ∘ C^-1 and - 92.0 × 1 0 - 6 ∘ C^-1 when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.

Current development and future challenges in microplastic detection techniques: A bibliometrics-based analysis and review

Microplastics have been considered a new type of pollutant in the marine environment and have attracted widespread attention worldwide in recent years. Plastic particles with particle size less than 5 mm are usually defined as microplastics. Because of their similar size to plankton, marine organisms easily ingest microplastics and can threaten higher organisms and even human health through the food chain. Most of the current studies have focused on the investigation of the abundance of microplastics in the environment. However, due to the limitations of analytical methods and instruments, the number of microplastics in the environment can easily lead to overestimation or underestimation. Microplastics in each environment have different detection techniques. To investigate the current status, hot spots, and research trends of microplastics detection techniques, this review analyzed the papers related to microplastics detection using bibliometric software CiteSpace and COOC. A total of 696 articles were analyzed, spanning 2012 to 2021. The contributions and cooperation of different countries and institutions in this field have been analyzed in detail. This topic has formed two main important networks of cooperation. International cooperation has been a common pattern in this topic. The various analytical methods of this topic were discussed through keyword and clustering analysis. Among them, fluorescent, FTIR and micro-Raman spectroscopy are commonly used optical techniques for the detection of microplastics. The identification of microplastics can also be achieved by the combination of other techniques such as mass spectrometry/thermal cracking gas chromatography. However, these techniques still have limitations and cannot be applied to all environmental samples. We provide a detailed analysis of the detection of microplastics in different environmental samples and list the challenges that need to be addressed in the future.

Q-Factor Enhancement of Coupling Bragg and Local Resonance Band Gaps in Single-Phase Phononic Crystals for TPOS MEMS Resonator

This paper presents a type of single-phase double “I” hole phononic crystal (DIH-PnC) structure, which is formed by vertically intersecting double “I” holes. By using the finite element method, the complex energy band curve, special point mode shapes, and different delay lines were calculated. Numerical results showed that DIH-PnC yielded ultra-wide band gaps with strong attenuation. The formation mechanism is attributed to the Bragg-coupled local resonance mechanism. The effects of the pore width in DIH-PnC on the band gaps were further explored numerically. Significantly, as the pore width variable, the position of the local resonance natural frequency could be modulated, and this enabled the coupling between the local resonance and the Bragg mechanism. Subsequently, we introduced this DIH-PnC into the thin-film piezoelectric-on-silicon (TPOS) resonator. The results illustrated that the anchor loss quality factor (Qanc) of the DIH-PnC resonator was 20,425.1% higher than that of the conventional resonator and 3762.3% higher than the Qanc of the cross-like holey PnC resonator. In addition, the effect of periodic array numbers on Qanc was researched. When the Qanc reached 1.12 × 10⁶, the number of the period array in DIH-PnC only needed to be 1/6 compared with cross-like holey PnC. Adopting the PnC based on the coupling Bragg and local resonance band gaps had a good effect on improving the Qanc of the resonator.