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Balagula RM, Jansson M, Yukimune M, Stehr JE, Ishikawa F, Chen WM, Buyanova IA. Effects of thermal annealing on localization and strain in core/multishell GaAs/GaNAs/GaAs nanowires. Sci Rep 2020; 10:8216. [PMID: 32427905 PMCID: PMC7237432 DOI: 10.1038/s41598-020-64958-6] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/24/2020] [Accepted: 04/27/2020] [Indexed: 11/10/2022] Open
Abstract
Core/shell nanowire (NW) heterostructures based on III-V semiconductors and related alloys are attractive for optoelectronic and photonic applications owing to the ability to modify their electronic structure via bandgap and strain engineering. Post-growth thermal annealing of such NWs is often involved during device fabrication and can also be used to improve their optical and transport properties. However, effects of such annealing on alloy disorder and strain in core/shell NWs are not fully understood. In this work we investigate these effects in novel core/shell/shell GaAs/GaNAs/GaAs NWs grown by molecular beam epitaxy on (111) Si substrates. By employing polarization-resolved photoluminescence measurements, we show that annealing (i) improves overall alloy uniformity due to suppressed long-range fluctuations in the N composition; (ii) reduces local strain within N clusters acting as quantum dot emitters; and (iii) leads to partial relaxation of the global strain caused by the lattice mismatch between GaNAs and GaAs. Our results, therefore, underline applicability of such treatment for improving optical quality of NWs from highly-mismatched alloys. They also call for caution when using ex-situ annealing in strain-engineered NW heterostructures.
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Affiliation(s)
- Roman M Balagula
- Department of Physics, Chemistry and Biology, Linköping University, 581 83, Linköping, Sweden
| | - Mattias Jansson
- Department of Physics, Chemistry and Biology, Linköping University, 581 83, Linköping, Sweden.
| | - Mitsuki Yukimune
- Graduate School of Science and Engineering, Ehime University, 790-8577, Matsuyama, Japan
| | - Jan E Stehr
- Department of Physics, Chemistry and Biology, Linköping University, 581 83, Linköping, Sweden
| | - Fumitaro Ishikawa
- Graduate School of Science and Engineering, Ehime University, 790-8577, Matsuyama, Japan
| | - Weimin M Chen
- Department of Physics, Chemistry and Biology, Linköping University, 581 83, Linköping, Sweden
| | - Irina A Buyanova
- Department of Physics, Chemistry and Biology, Linköping University, 581 83, Linköping, Sweden
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Huang Q, Jia Q, Feng J, Huang H, Yang X, Grenzer J, Huang K, Zhang S, Lin J, Zhou H, You T, Yu W, Facsko S, Jonnard P, Wu M, Giglia A, Zhang Z, Liu Z, Wang Z, Wang X, Ou X. Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy. Nat Commun 2019; 10:2437. [PMID: 31164646 PMCID: PMC6547753 DOI: 10.1038/s41467-019-10095-2] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/13/2018] [Accepted: 03/27/2019] [Indexed: 11/30/2022] Open
Abstract
Gratings, one of the most important energy dispersive devices, are the fundamental building blocks for the majority of optical and optoelectronic systems. The grating period is the key parameter that limits the dispersion and resolution of the system. With the rapid development of large X-ray science facilities, gratings with periodicities below 50 nm are in urgent need for the development of ultrahigh-resolution X-ray spectroscopy. However, the wafer-scale fabrication of nanogratings through conventional patterning methods is difficult. Herein, we report a maskless and high-throughput method to generate wafer-scale, multilayer gratings with period in the sub-50 nm range. They are fabricated by a vacancy epitaxy process and coated with X-ray multilayers, which demonstrate extremely large angular dispersion at approximately 90 eV and 270 eV. The developed new method has great potential to produce ultrahigh line density multilayer gratings that can pave the way to cutting edge high-resolution spectroscopy and other X-ray applications. Fabrication of wafer-scale nanogratings for X-ray spectroscopy is difficult especially for very high line densities. The authors use vacancy epitaxy to fabricate sub-50-nm-periodicity gratings, coated with multilayers for efficient operation, for use in ultra-high resolution x-ray spectroscopy.
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Affiliation(s)
- Qiushi Huang
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Qi Jia
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Jiangtao Feng
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Hao Huang
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210, China
| | - Xiaowei Yang
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China.,School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210, China
| | - Joerg Grenzer
- Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstrasse 400, Dresden, 01328, Germany
| | - Kai Huang
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Shibing Zhang
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Jiajie Lin
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Hongyan Zhou
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Tiangui You
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China
| | - Wenjie Yu
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Stefan Facsko
- Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstrasse 400, Dresden, 01328, Germany
| | - Philippe Jonnard
- Sorbonne Université, Faculté des Sciences et Ingénierie, UMR CNRS, Laboratoire de Chimie Physique - Matière et Rayonnement, boîte courrier 1140, 4 place Jussieu F-75252, Paris cedex 05, France
| | - Meiyi Wu
- Sorbonne Université, Faculté des Sciences et Ingénierie, UMR CNRS, Laboratoire de Chimie Physique - Matière et Rayonnement, boîte courrier 1140, 4 place Jussieu F-75252, Paris cedex 05, France
| | - Angelo Giglia
- CNR Istituto Officina Materiali, Trieste, 34149, Italy
| | - Zhong Zhang
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Zhi Liu
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210, China
| | - Zhanshan Wang
- Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
| | - Xi Wang
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China.,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Xin Ou
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200092, China. .,Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.
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Chen S, Yukimune M, Fujiwara R, Ishikawa F, Chen WM, Buyanova IA. Near-Infrared Lasing at 1 μm from a Dilute-Nitride-Based Multishell Nanowire. NANO LETTERS 2019; 19:885-890. [PMID: 30608174 DOI: 10.1021/acs.nanolett.8b04103] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
A coherent photon source emitting at near-infrared (NIR) wavelengths is at the heart of a wide variety of applications ranging from telecommunications and optical gas sensing to biological imaging and metrology. NIR-emitting semiconductor nanowires (NWs), acting both as a miniaturized optical resonator and as a photonic gain medium, are among the best-suited nanomaterials to achieve such goals. In this study, we demonstrate the NIR lasing at 1 μm from GaAs/GaNAs/GaAs core/shell/cap dilute nitride nanowires with only 2.5% nitrogen. The achieved lasing is characterized by an S-shape pump-power dependence and narrowing of the emission line width. Through examining the lasing performance from a set of different single NWs, a threshold gain, gth, of 4100-4800 cm-1, was derived with a spontaneous emission coupling factor, β, up to 0.8, which demonstrates the great potential of such nanophotonic material. The lasing mode was found to arise from the fundamental HE11a mode of the Fabry-Perot cavity from a single NW, exhibiting optical polarization along the NW axis. Based on temperature dependence of the lasing emission, a high characteristic temperature, T0, of 160 (±10) K is estimated. Our results, therefore, demonstrate a promising alternative route to achieve room-temperature NIR NW lasers thanks to the excellent alloy tunability and superior optical performance of such dilute nitride materials.
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Affiliation(s)
- Shula Chen
- Department of Physics, Chemistry and Biology , Linköping University , 58183 Linköping , Sweden
| | - Mitsuki Yukimune
- Graduate School of Science and Engineering , Ehime University , Matsuyama 790-8577 , Japan
| | - Ryo Fujiwara
- Graduate School of Science and Engineering , Ehime University , Matsuyama 790-8577 , Japan
| | - Fumitaro Ishikawa
- Graduate School of Science and Engineering , Ehime University , Matsuyama 790-8577 , Japan
| | - Weimin M Chen
- Department of Physics, Chemistry and Biology , Linköping University , 58183 Linköping , Sweden
| | - Irina A Buyanova
- Department of Physics, Chemistry and Biology , Linköping University , 58183 Linköping , Sweden
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