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Zhang ZD, Yu SY, Xu H, Lu MH, Chen YF. Monolithic Strong Coupling of Topological Surface Acoustic Wave Resonators on Lithium Niobate. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2312861. [PMID: 38340067 DOI: 10.1002/adma.202312861] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/28/2023] [Revised: 02/06/2024] [Indexed: 02/12/2024]
Abstract
Coherent phonon transfer via high-quality factor (Q) mechanical resonator strong coupling has garnered significant interest. Yet, the practical applications of these strongly coupled resonator devices are largely constrained by their vulnerability to fabrication defects. In this study, topological strong coupling of gigahertz frequency surface acoustic wave (SAW) resonators with lithium niobate is achieved. The nanoscale grooves are etched onto the lithium niobate surface to establish robust SAW topological interface states (TISs). By constructing phononic crystal (PnC) heterostructures, a strong coupling of two SAW TISs, achieving a maximum Rabi splitting of 22 MHz and frequency quality factor product fQm of ≈1.2 × 1013 Hz, is realized. This coupling can be tuned by adjusting geometric parameters and a distinct spectral anticrossing is experimentally observed. Furthermore, a dense wavelength division multiplexing device based on the coupling of multiple TISs is demonstrated. These findings open new avenues for the development of practical topological acoustic devices for on-chip sensing, filtering, phonon entanglement, and beyond.
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Affiliation(s)
- Zi-Dong Zhang
- National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing, 210093, China
| | - Si-Yuan Yu
- National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing, 210093, China
| | - Haitan Xu
- School of Materials Science and Intelligent Engineering, Shishan Laboratory, Nanjing University, Suzhou, Jiangsu, 215163, China
| | - Ming-Hui Lu
- National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing, 210093, China
| | - Yan-Feng Chen
- National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing, 210093, China
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Tian L, Zhao H, Shen Q, Chang H. A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement. MICROSYSTEMS & NANOENGINEERING 2024; 10:37. [PMID: 38495470 PMCID: PMC10940610 DOI: 10.1038/s41378-024-00658-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/20/2023] [Revised: 10/15/2023] [Accepted: 12/18/2023] [Indexed: 03/19/2024]
Abstract
A surface acoustic wave (SAW) gyroscope measures the rate of rotational angular velocity by exploiting a phenomenon known as the SAW gyroscope effect. Such a gyroscope is a great candidate for application in harsh environments because of the simplification of the suspension vibration mechanism necessary for traditional microelectromechanical system (MEMS) gyroscopes. Here, for the first time, we propose a novel toroidal standing-wave-mode SAW gyroscope using focused interdigitated transducers (FIDTs). Unlike traditional SAW gyroscopes that use linear IDTs to generate surface acoustic waves, which cause beam deflection and result in energy dissipation, this study uses FIDTs to concentrate the SAW energy based on structural features, resulting in better focusing performance and increased SAW amplitude. The experimental results reveal that the sensitivity of the structure is 1.51 µV/(°/s), and the bias instability is 0.77°/s, which are improved by an order of magnitude compared to those of a traditional SAW gyroscope. Thus, the FIDT component can enhance the performance of the SAW gyroscope, demonstrating its superiority for angular velocity measurements. This work provides new insights into improving the sensitivity and performance of SAW gyroscopes.
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Affiliation(s)
- Lu Tian
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
| | - Haitao Zhao
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
| | - Qiang Shen
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
| | - Honglong Chang
- Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072 China
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Kähler H, Arthaber H, Winkler R, West RG, Ignat I, Plank H, Schmid S. Transduction of Single Nanomechanical Pillar Resonators by Scattering of Surface Acoustic Waves. NANO LETTERS 2023; 23:4344-4350. [PMID: 37167540 DOI: 10.1021/acs.nanolett.3c00605] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/13/2023]
Abstract
One of the challenges of nanoelectromechanical systems (NEMS) is the effective transduction of the tiny resonators. Vertical structures, such as nanomechanical pillar resonators, which are exploited in optomechanics, acoustic metamaterials, and nanomechanical sensing, are particularly challenging to transduce. Existing electromechanical transduction methods are ill-suited as they put constraints on the pillars' material and do not enable a transduction of freestanding pillars. Here, we present an electromechanical transduction method for single nanomechanical pillar resonators based on surface acoustic waves (SAWs). We demonstrate the transduction of freestanding nanomechanical platinum-carbon pillars in the first-order bending and compression mode. Since the principle of the transduction method is based on resonant scattering of a SAW by a nanomechanical resonator, our transduction method is independent of the pillar's material and not limited to pillar-shaped geometries. It represents a general method to transduce vertical mechanical resonators with nanoscale lateral dimensions.
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Affiliation(s)
- Hendrik Kähler
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Holger Arthaber
- Institute of Electrodynamics, Microwave and Circuit Engineering, TU Wien, Gusshausstrasse 25, 1040 Vienna, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nanoprobes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Robert G West
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Ioan Ignat
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nanoprobes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Silvan Schmid
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
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On-chip generation and dynamic piezo-optomechanical rotation of single photons. Nat Commun 2022; 13:6998. [DOI: 10.1038/s41467-022-34372-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/18/2022] [Accepted: 10/24/2022] [Indexed: 11/17/2022] Open
Abstract
AbstractIntegrated photonic circuits are key components for photonic quantum technologies and for the implementation of chip-based quantum devices. Future applications demand flexible architectures to overcome common limitations of many current devices, for instance the lack of tuneabilty or built-in quantum light sources. Here, we report on a dynamically reconfigurable integrated photonic circuit comprising integrated quantum dots (QDs), a Mach-Zehnder interferometer (MZI) and surface acoustic wave (SAW) transducers directly fabricated on a monolithic semiconductor platform. We demonstrate on-chip single photon generation by the QD and its sub-nanosecond dynamic on-chip control. Two independently applied SAWs piezo-optomechanically rotate the single photon in the MZI or spectrally modulate the QD emission wavelength. In the MZI, SAWs imprint a time-dependent optical phase and modulate the qubit rotation to the output superposition state. This enables dynamic single photon routing with frequencies exceeding one gigahertz. Finally, the combination of the dynamic single photon control and spectral tuning of the QD realizes wavelength multiplexing of the input photon state and demultiplexing it at the output. Our approach is scalable to multi-component integrated quantum photonic circuits and is compatible with hybrid photonic architectures and other key components for instance photonic resonators or on-chip detectors.
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Pu X, Palermo A, Marzani A. A multiple scattering formulation for finite-size flexural metasurfaces. Proc Math Phys Eng Sci 2022. [DOI: 10.1098/rspa.2021.0669] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022] Open
Abstract
We provide an analytical formulation to model the propagation of elastic waves in a homogeneous half-space supporting an array of thin plates. The technique provides the displacement field obtained from the interaction between an incident wave generated by a harmonic source and the scattered fields induced by the flexural motion of the plates. The scattered field generated by each plate is calculated using an ad-hoc set of Green’s functions. The interaction between the incident field and the scattered fields is modelled through a multiple scattering formulation. Owing to the introduction of the multiple scattering formalism, the proposed technique can handle a generic set of plates arbitrarily arranged on the half-space surface. The method is validated via comparison with finite element simulations considering Rayleigh waves interacting with a single and a collection of thin plates. Our framework can be used to investigate the interaction of vertically polarized surface waves and flexural resonators in different engineering contexts, from the design of novel surface acoustic wave devices to the interpretation of urban vibration problems.
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Affiliation(s)
- Xingbo Pu
- Department of Civil, Chemical, Environmental and Materials Engineering, University of Bologna, 40136 Bologna, Italy
| | - Antonio Palermo
- Department of Civil, Chemical, Environmental and Materials Engineering, University of Bologna, 40136 Bologna, Italy
| | - Alessandro Marzani
- Department of Civil, Chemical, Environmental and Materials Engineering, University of Bologna, 40136 Bologna, Italy
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Abstract
Phononic coupled-resonator waveguide cavities are formed by a finite chain of defects in a complete bandgap phononic crystal slab. The sample is machined in a fused silica plate by femtosecond printing to form an array of cross-shape holes. The collective resonance of the phononic cavities, in the Megahertz frequency range, are excited by a piezoelectric vibrator and imaged by laser Doppler vibrometry. It is found that well-defined resonant cavity modes can be efficiently excited, even though the phononic cavities are distant by a few lattice spacings and are only weakly coupled through evanescent elastic waves. The results suggest the possibility of engineering the dynamical response of a set of coupled phononic cavities by an adequate layout of defects in a phononic crystal slab.
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