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Ni X, Liu Y, Lou B, Zhang M, Hu EL, Fan S, Mazur E, Tang H. Three-Dimensional Reconfigurable Optical Singularities in Bilayer Photonic Crystals. PHYSICAL REVIEW LETTERS 2024; 132:073804. [PMID: 38427898 DOI: 10.1103/physrevlett.132.073804] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/06/2023] [Accepted: 01/12/2024] [Indexed: 03/03/2024]
Abstract
Metasurfaces and photonic crystals have revolutionized classical and quantum manipulation of light and opened the door to studying various optical singularities related to phases and polarization states. However, traditional nanophotonic devices lack reconfigurability, hindering the dynamic switching and optimization of optical singularities. This paper delves into the underexplored concept of tunable bilayer photonic crystals (BPhCs), which offer rich interlayer coupling effects. Utilizing silicon nitride-based BPhCs, we demonstrate tunable bidirectional and unidirectional polarization singularities, along with spatiotemporal phase singularities. Leveraging these tunable singularities, we achieve dynamic modulation of bound-state-in-continuum states, unidirectional guided resonances, and both longitudinal and transverse orbital angular momentum. Our work paves the way for multidimensional control over polarization and phase, inspiring new directions in ultrafast optics, optoelectronics, and quantum optics.
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Affiliation(s)
- Xueqi Ni
- School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA
| | - Yuan Liu
- School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA
| | - Beicheng Lou
- Department of Applied Physics and Ginzton Laboratory, Stanford University, Stanford, California 94305, USA
| | - Mingjie Zhang
- School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA
| | - Evelyn L Hu
- School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA
| | - Shanhui Fan
- Department of Applied Physics and Ginzton Laboratory, Stanford University, Stanford, California 94305, USA
| | - Eric Mazur
- School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA
| | - Haoning Tang
- School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA
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Park JS, Lim SWD, Amirzhan A, Kang H, Karrfalt K, Kim D, Leger J, Urbas A, Ossiander M, Li Z, Capasso F. All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos. ACS NANO 2024; 18:3187-3198. [PMID: 38230651 PMCID: PMC10832996 DOI: 10.1021/acsnano.3c09462] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/29/2023] [Revised: 12/10/2023] [Accepted: 12/14/2023] [Indexed: 01/18/2024]
Abstract
Metasurfaces, optics made from subwavelength-scale nanostructures, have been limited to millimeter-sizes by the scaling challenge of producing vast numbers of precisely engineered elements over a large area. In this study, we demonstrate an all-glass 100 mm diameter metasurface lens (metalens) comprising 18.7 billion nanostructures that operates in the visible spectrum with a fast f-number (f/1.5, NA = 0.32) using deep-ultraviolet (DUV) projection lithography. Our work overcomes the exposure area constraints of lithography tools and demonstrates that large metasurfaces are commercially feasible. Additionally, we investigate the impact of various fabrication errors on the imaging quality of the metalens, several of which are specific to such large area metasurfaces. We demonstrate direct astronomical imaging of the Sun, the Moon, and emission nebulae at visible wavelengths and validate the robustness of such metasurfaces under extreme environmental thermal swings for space applications.
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Affiliation(s)
- Joon-Suh Park
- John
A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States
| | - Soon Wei Daniel Lim
- John
A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States
| | - Arman Amirzhan
- John
A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States
| | - Hyukmo Kang
- Wyant
College of Optical Sciences, The University
of Arizona, Tucson, Arizona 85721, United States
| | - Karlene Karrfalt
- Wyant
College of Optical Sciences, The University
of Arizona, Tucson, Arizona 85721, United States
- Air
Force Research Laboratory, Wright-Patterson
Air Force Base, Dayton, Ohio 45433, United States
| | - Daewook Kim
- Wyant
College of Optical Sciences, The University
of Arizona, Tucson, Arizona 85721, United States
| | - Joel Leger
- Air
Force Research Laboratory, Wright-Patterson
Air Force Base, Dayton, Ohio 45433, United States
| | - Augustine Urbas
- Air
Force Research Laboratory, Wright-Patterson
Air Force Base, Dayton, Ohio 45433, United States
| | - Marcus Ossiander
- John
A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States
- Institute
of Experimental Physics, Graz University
of Technology, 8010 Graz, Austria
| | - Zhaoyi Li
- John
A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States
| | - Federico Capasso
- John
A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States
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Chang L, Liu X, Luo J, Lee CY, Zhang J, Fan X, Zhang W. Physiochemical Coupled Dynamic Nanosphere Lithography Enabling Multiple Metastructures from Single Mask. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024:e2310469. [PMID: 38193751 DOI: 10.1002/adma.202310469] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/09/2023] [Revised: 12/14/2023] [Indexed: 01/10/2024]
Abstract
Metastructures are widely used in photonic devices, energy conversion, and biomedical applications. However, to fabricate multiple patterns continuously in single etching protocol with highly tunable photonic properties is challenging. Here, a simple and robust dynamic nanosphere lithography is proposed by inserting a spacer between the nanosphere assembly and the wafer. The nanosphere diameter decrease and uneven penetration of the spacer during etching lead to a dynamic masking process. Coupled anisotropic physical ion sputtering and ricocheting with isotropic chemical radical etching achieve highly tunable structures with various 3D patterns continuously forming through a single etching process. Specifically, the nanosphere diameters define the periodicity, the etched spacer forms the upper parts, and the wafer forms the lower parts. Each part of the structure is highly tunable through changing nanosphere diameter, spacer thickness, and etch conditions. Using this protocol, numerous structures of varying sizes including nanomushrooms, nanocones, nanopencils, and nanoneedles with diverse shapes are realized as proof of concepts. The broadband antireflection ability of the nanostructures and their use in surface-enhanced Raman spectroscopy are also demonstrated for practical application. This method substantially simplifies the fabrication procedure of various metastructures, paving the way for its application in multiple disciplines especially in photonic devices.
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Affiliation(s)
- Lin Chang
- Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing, 400714, China
- College of Resources and Environment, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Xiaohong Liu
- National University of Singapore (Chongqing) Research Institute, Chongqing, 401123, China
| | - Jie Luo
- College of Advanced Interdisciplinary Studies & Hunan Provincial, Key Laboratory of Novel Nano-Optoelectronic Information Materials and Devices, National University of Defense Technology, Changsha, 410073, China
| | - Chong-Yew Lee
- School of Pharmaceutical Sciences, Universiti Sains Malaysia, Penang, 11800, Malaysia
| | - Jianfa Zhang
- College of Advanced Interdisciplinary Studies & Hunan Provincial, Key Laboratory of Novel Nano-Optoelectronic Information Materials and Devices, National University of Defense Technology, Changsha, 410073, China
| | - Xing Fan
- College of Chemistry and Chemical Engineering, Chongqing University, Chongqing, 400044, China
| | - Wei Zhang
- Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing, 400714, China
- College of Resources and Environment, University of Chinese Academy of Sciences, Beijing, 100049, China
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Lu J, Ginis V, Lim SWD, Capasso F. Helicity and Polarization Gradient Optical Trapping in Evanescent Fields. PHYSICAL REVIEW LETTERS 2023; 131:143803. [PMID: 37862648 DOI: 10.1103/physrevlett.131.143803] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/29/2023] [Accepted: 09/13/2023] [Indexed: 10/22/2023]
Abstract
Optical traps using nonconservative forces instead of conservative intensity-gradient forces expand the trap parameter space. Existing traps with nonconservative helicity-dependent forces are limited to chiral particles and fields with helicity gradients. We relax these constraints by proposing helicity and polarization gradient optical trapping of achiral particles in evanescent fields. We further propose an optical switching system in which a microsphere is trapped and optically manipulated around a microfiber using polarization gradients. Our Letter deepens the understanding of light-matter interactions in polarization gradient fields and expands the range of compatible particles and stable trapping fields.
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Affiliation(s)
- Jinsheng Lu
- Harvard John A. Paulson School of Engineering and Applied Sciences, 9 Oxford Street, Cambridge, Massachusetts 02138, USA
| | - Vincent Ginis
- Harvard John A. Paulson School of Engineering and Applied Sciences, 9 Oxford Street, Cambridge, Massachusetts 02138, USA
- Data Lab and Applied Physics, Vrije Universiteit Brussel, 1050 Brussel, Belgium
| | - Soon Wei Daniel Lim
- Harvard John A. Paulson School of Engineering and Applied Sciences, 9 Oxford Street, Cambridge, Massachusetts 02138, USA
| | - Federico Capasso
- Harvard John A. Paulson School of Engineering and Applied Sciences, 9 Oxford Street, Cambridge, Massachusetts 02138, USA
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